Boat of substrate processing apparatus

Description

FIG. 1 is a rear, top, and left side perspective view of a boat of substrate processing apparatus, showing our new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a rear elevational view thereof;

FIG. 4 is a right side elevational view thereof;

FIG. 5 is a left side elevational view thereof;

FIG. 6 is a top plan view thereof; and

FIG. 7 is a bottom plan view thereof.

FIG. 8 is a cross-sectional view take along line 8-8 in FIG. 2; and,

FIG. 9 is an enlarged cross-sectional view take along line 9-9 in FIG. 8.

The broken lines shown in the drawings represent portions of the boat of substrate processing apparatus that form no part of the claimed design. The dash-dot-dash lines in FIGS. 8 and 9 illustrate the boundary of the enlarged portion view of FIG. 9 and do not form part of the claimed design.

Claims

CLAIM The ornamental design for a boat of substrate processing apparatus, as shown and described.

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Inventors:	Okajima; Yusaku (Toyama, JP), Yoshida; Hidenari (Toyama, JP)
Applicant:	Name City State Country Type Hitachi Kokusai Electric Inc. Tokyo N/A JP
Assignee:	KOKUSAI ELECTRIC CORPORATION (Tokyo, JP)
Appl. No.:	D/646,355
Filed:	May 3, 2018

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Current U.S. Class:	D13/182
Current International Class:	1303
Field of Search:	;D13/182 ;D15/144,144.1,199 ;118/715,500,728,729 ;211/41.18 ;432/253,258 ;156/345.51,345.52,345.53,345.55 ;414/217,220.01,935-941

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References Cited [Referenced By]

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U.S. Patent Documents

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D747279	January 2016	Yoshida
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Foreign Patent Documents

	1480191		Sep 2013		JP
	1480192		Sep 2013		JP

Primary Examiner: Oswecki; Elizabeth J
Attorney, Agent or Firm: Fitch, Even, Tabin & Flannery, LLP

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