Wafer boat or rack
Ohsawa February 6, 1
U.S. patent number D366,868 [Application Number D/013,666] was granted by the patent office on 1996-02-06 for wafer boat or rack. This patent grant is currently assigned to Tokyo Electron Kabushiki Kaisha, Tokyo Electron Tohoku Kabushiki Kaisha. Invention is credited to Tetu Ohsawa.
| United States Patent | D366,868 |
| Ohsawa | February 6, 1996 |
Wafer boat or rack
Claims
The ornamental design for wafer boat or rack, as shown and described.
| Inventors: | Ohsawa; Tetu (Sagamihara, JP) |
|---|---|
| Assignee: | Tokyo Electron Kabushiki Kaisha
(Tokyo, JP) Tokyo Electron Tohoku Kabushiki Kaisha (Esashi, JP) |
| Appl. No.: | D/013,666 |
| Filed: | September 29, 1993 |
| Current U.S. Class: | D13/182; D6/407; D6/629 |
| Field of Search: | ;D6/396,405,407,626,629,630,462,466,467,468,477,478,479 ;D14/120,121 ;D19/8,27,75,76,91 ;206/387 ;211/40,41,42 ;D13/182 |
References Cited [Referenced By]
U.S. Patent Documents
| D291413 | August 1987 | Uehara et al. |
| 4355974 | October 1982 | Lee |
| 4515104 | May 1985 | Lee |
| 4572101 | February 1986 | Lee |
| 403295227 | Dec 1991 | JP | |||
| 404207022 | Jul 1992 | JP | |||
| 404207023 | Jul 1992 | JP | |||
Assistant Examiner: Snapp; S.
Attorney, Agent or Firm: Ladas & Parry
Description
FIG. 1 is a front elevational view of a wafer boat or rack showing my new design;
FIG. 2 is a rear elevational view thereof;
FIG. 3 is a right side elevational view thereof, the left side elevational view being a mirror image and, therefore, not being shown;
FIG. 4 is a top view thereof;
FIG. 5 is a bottom view thereof;
FIG. 6 is a longitudinal sectional view on section 6--6 in FIG. 1;
FIG. 7 is a transverse sectional view on section 7--7 in FIG. 1;
FIG. 8 is an enlarged view of a portion of FIG. 7.
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