Tokyo Electron Tohoku Kabushiki Kaisha
Patent Applications and Registrations
Patent applications and USPTO patent grants for Tokyo Electron Tohoku Kabushiki Kaisha.The latest application filed is for "processing furnace for oxidizing objects".
- Tokyo Electron Tohoku Kabushiki Kaisha - Iwate-ken JP
- Tokyo Electron Tohoku Kabushiki Kaisha - JP JP
- Tokyo Electron Tohoku Kabushiki Kaisha - Tokyo JP
- Tokyo Electron Tohoku Kabushiki Kaisha - Iwate JP
- Tokyo Electron Tohoku Kabushiki Kaisha - Esashi JP
- Tokyo Electron Tohoku Kabushiki Kaisha - both of JP
| Patent | Date |
|---|---|
| Processing furnace for oxidizing objects Grant 5,777,300 - Homma , et al. July 7, 1 | 1998-07-07 |
| Thermal processing method and apparatus therefor Grant 5,750,436 - Yamaga , et al. May 12, 1 | 1998-05-12 |
| Wafer processing apparatus Grant 5,697,749 - Iwabuchi , et al. December 16, 1 | 1997-12-16 |
| Heat treatment method using a vertical processing tube Grant 5,678,989 - Okase October 21, 1 | 1997-10-21 |
| Heat treatment method and device Grant 5,645,419 - Ohsawa , et al. July 8, 1 | 1997-07-08 |
| Heat treating apparatus Grant 5,622,639 - Kitayama , et al. April 22, 1 | 1997-04-22 |
| Apparatus for heat treating semiconductors at normal pressure and low pressure Grant 5,578,132 - Yamaga , et al. November 26, 1 | 1996-11-26 |
| Heat treatment method and apparatus Grant 5,571,010 - Okase November 5, 1 | 1996-11-05 |
| Treatment apparatus Grant 5,562,383 - Iwai , et al. October 8, 1 | 1996-10-08 |
| Heat treatment processing apparatus and cleaning method thereof Grant 5,554,226 - Okase , et al. September 10, 1 | 1996-09-10 |
| Vertical heat treatment apparatus with a circulation gas passage Grant 5,551,984 - Tanahashi September 3, 1 | 1996-09-03 |
| Heat treating apparatus having heat transmission-preventing plates Grant 5,540,782 - Miyagi , et al. July 30, 1 | 1996-07-30 |
| Treatment system including a plurality of treatment apparatus Grant 5,527,390 - Ono , et al. June 18, 1 | 1996-06-18 |
| Thermal processing apparatus with heat shielding member Grant 5,520,742 - Ohkase May 28, 1 | 1996-05-28 |
| Wafer boat or rack Grant D366,868 - Ohsawa February 6, 1 | 1996-02-06 |
| Heat treating apparatus Grant 5,464,313 - Ohsawa November 7, 1 | 1995-11-07 |
| Vertical heat treatment apparatus Grant 5,458,685 - Hasebe , et al. October 17, 1 | 1995-10-17 |
| Heat treatment boat Grant 5,458,688 - Watanabe October 17, 1 | 1995-10-17 |
| Combustion device Grant 5,445,522 - Miyagi , et al. August 29, 1 | 1995-08-29 |
| Wafer boat or rack for holding semiconductor wafers Grant D361,752 - Yamaga August 29, 1 | 1995-08-29 |
| Vertical treating apparatus having a restricting means for avoiding misalignment Grant 5,433,784 - Miyagi , et al. July 18, 1 | 1995-07-18 |
| Method for cleaning heat treatment processing apparatus Grant 5,427,625 - Okase , et al. June 27, 1 | 1995-06-27 |
| Trap device for vapor phase reaction apparatus Grant 5,422,081 - Miyagi , et al. June 6, 1 | 1995-06-06 |
| Conveyor apparatus Grant 5,404,894 - Shiraiwa April 11, 1 | 1995-04-11 |
| Vertical heat-treating apparatus and heat-treating process by using the vertical heat-treating apparatus Grant 5,388,944 - Takanabe , et al. February 14, 1 | 1995-02-14 |
| Substrate handling apparatus Grant 5,383,783 - Ishimori January 24, 1 | 1995-01-24 |
| Piping connection device Grant 5,362,229 - Yamaga November 8, 1 | 1994-11-08 |
| Heat-treating apparatus Grant 5,359,148 - Okase , et al. October 25, 1 | 1994-10-25 |
| Wafer boat rotating apparatus Grant 5,356,261 - Nishi October 18, 1 | 1994-10-18 |
| Method for controlling plasma surface-treatments with a plurality of photodetectors and optical filters Grant 5,352,902 - Aoki October 4, 1 | 1994-10-04 |
| Thermal treatment apparatus utilizing heated lid Grant 5,329,095 - Okase July 12, 1 | 1994-07-12 |
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