Boat of wafer processing apparatus

Description

FIG. 1 is a perspective view 1 of a boat of the wafer processing apparatus;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a rear elevational view thereof;

FIG. 4 is a right side elevational view thereof;

FIG. 5 is a left side elevational view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof;

FIG. 8 is an enlarged cross-sectional view thereof taken along lines 8-8 in FIG. 2;

FIG. 9 is a cross-sectional view thereof taken along lines 9-9 in FIG. 8; and,

FIG. 10 is a perspective view of the cross-section from FIG. 9.

The broken line showing of the boat of a wafer processing apparatus is for the purpose of illustrating environmental structure and forms no part of the claimed design.

Claims

CLAIM The ornamental design for a boat of a wafer processing apparatus, as shown and described.

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Inventors:	Takebayashi; Yuji (Toyama, JP), Saito; Tatsuyuki (Toyama, JP), Yamamoto; Tetsuo (Toyama, JP), Kato; Tsutomu (Toyama, JP), Okada; Satoshi (Toyama, JP)
Assignee:	Hitachi Kokusai Electric Inc. (Tokyo, JP)
Appl. No.:	D/378,011
Filed:	October 28, 2010

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Foreign Application Priority Data

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Jun 18, 2010 [JP]			2010-015045

Current U.S. Class:	D13/182
Current International Class:	1303
Field of Search:	;D13/182 ;D15/144,144.1,199 ;118/715 ;211/41.18 ;432/253,258

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References Cited [Referenced By]

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U.S. Patent Documents

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Primary Examiner: Sikder; Selina
Attorney, Agent or Firm: Volpe and Koenig, P.C.