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Substrate processing apparatus and method of manufacturing semiconductor device Grant 11,453,942 - Mimura , et al. September 27, 2 | 2022-09-27 |
Substrate Processing Apparatus, Elevator And Method Of Manufacturing Semiconductor Device App 20220199443 - TAKEBAYASHI; Yuji ;   et al. | 2022-06-23 |
Substrate Processing Apparatus, Substrate Suppport And Method Of Manufacturing Semiconductor Device App 20220157628 - OKAJIMA; Yusaku | 2022-05-19 |
Return nozzle Grant D937,385 - Takeshita , et al. November 30, 2 | 2021-11-30 |
Supporting column of insulation unit for semiconductor manufacturing apparatus Grant D928,106 - Okajima , et al. August 17, 2 | 2021-08-17 |
Substrate Processing Apparatus, Method Of Manufacturing Semiconductor Device And Non-transitory Computer-readable Recording Medium App 20210207268 - YOSHIDA; Hidenari ;   et al. | 2021-07-08 |
Cover of seal cap for reaction chamber for semiconductor Grant D916,037 - Okajima , et al. April 13, 2 | 2021-04-13 |
Substrate processing apparatus, reaction tube and method of manufacturing semiconductor device Grant 10,961,625 - Saido , et al. March 30, 2 | 2021-03-30 |
Substrate processing apparatus and method of manufacturing semiconductor device Grant 10,923,366 - Okajima , et al. February 16, 2 | 2021-02-16 |
Protective plate, substrate processing apparatus, and method of manufacturing semiconductor device Grant 10,731,254 - Saido , et al. | 2020-08-04 |
Gas nozzle for substrate processing apparatus Grant D889,596 - Okajima , et al. | 2020-07-07 |
Gas nozzle for substrate processing apparatus Grant D888,196 - Okajima , et al. | 2020-06-23 |
Protective Plate, Substrate Processing Apparatus, And Method Of Manufacturing Semiconductor Device App 20200165722 - SAIDO; Shuhei ;   et al. | 2020-05-28 |
Substrate Processing Apparatus, Quartz Reaction Tube And Method Of Manufacturing Semiconductor Device App 20200149159 - OKAJIMA; Yusaku ;   et al. | 2020-05-14 |
Substrate Processing Apparatus And Method Of Manufacturing Semiconductor Device App 20200066551 - OKAJIMA; Yusaku ;   et al. | 2020-02-27 |
Substrate processing apparatus, lid cover and method of manufacturing semiconductor device Grant 10,573,535 - Saido , et al. Feb | 2020-02-25 |
Cover of seal cap for reaction chamber for semiconductor manufacturing Grant D872,037 - Okajima , et al. J | 2020-01-07 |
Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device App 20190345605 - Mimura; Hidetoshi ;   et al. | 2019-11-14 |
Substrate Processing Apparatus, Reaction Tube and Method of Manufacturing Semiconductor Device App 20190330738 - SAIDO; Shuhei ;   et al. | 2019-10-31 |
Substrate processing apparatus, reaction tube, semiconductor device manufacturing method, and recording medium Grant 10,453,735 - Okajima , et al. Oc | 2019-10-22 |
Cover of seal cap for reaction chamber of semiconductor Grant D855,027 - Okajima , et al. | 2019-07-30 |
Reaction tube Grant D853,979 - Kagaya , et al. July 16, 2 | 2019-07-16 |
Boat of substrate processing apparatus Grant D847,105 - Okajima , et al. | 2019-04-30 |
Boat of substrate processing apparatus Grant D846,514 - Yoshida , et al. | 2019-04-23 |
Substrate Processing Apparatus, Reaction Tube, Semiconductor Device Manufacturing Method, And Recording Medium App 20190096738 - OKAJIMA; Yusaku ;   et al. | 2019-03-28 |
Reaction tube Grant D843,958 - Okajima , et al. | 2019-03-26 |
Reaction tube Grant D842,823 - Okajima , et al. | 2019-03-12 |
Substrate Processing Apparatus App 20190071777 - YOSHIDA; Hidenari ;   et al. | 2019-03-07 |
Cover of seal cap for reaction chamber of semiconductor Grant D813,181 - Okajima , et al. March 20, 2 | 2018-03-20 |
Substrate Processing Apparatus, Lid Cover And Method Of Manufacturing Semiconductor Device App 20180033645 - SAIDO; Shuhei ;   et al. | 2018-02-01 |