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Substrate processing apparatus and method of manufacturing semiconductor device Grant 11,453,942 - Mimura , et al. September 27, 2 | 2022-09-27 |
Substrate processing apparatus Grant 11,222,796 - Saido , et al. January 11, 2 | 2022-01-11 |
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Non-transitory Computer-readable Recording Medium App 20220005717 - YAMAGUCHI; Takatomo ;   et al. | 2022-01-06 |
Return nozzle Grant D937,385 - Takeshita , et al. November 30, 2 | 2021-11-30 |
Substrate processing apparatus, and method for manufacturing semiconductor device Grant 11,155,920 - Yoshida , et al. October 26, 2 | 2021-10-26 |
Supporting column of insulation unit for semiconductor manufacturing apparatus Grant D928,106 - Okajima , et al. August 17, 2 | 2021-08-17 |
Substrate Processing Apparatus, Method Of Manufacturing Semiconductor Device And Non-transitory Computer-readable Recording Medium App 20210207268 - YOSHIDA; Hidenari ;   et al. | 2021-07-08 |
Substrate Processing Device, Manufacturing Method For Semiconductor Device, And Reaction Tube App 20210159083 - YOSHIDA; Hidenari ;   et al. | 2021-05-27 |
Substrate processing apparatus, nozzle base, and manufacturing method for semiconductor device Grant 11,001,924 - Yoshida May 11, 2 | 2021-05-11 |
Cover of seal cap for reaction chamber for semiconductor Grant D916,037 - Okajima , et al. April 13, 2 | 2021-04-13 |
Substrate processing apparatus, reaction tube and method of manufacturing semiconductor device Grant 10,961,625 - Saido , et al. March 30, 2 | 2021-03-30 |
Substrate processing device, manufacturing method for semiconductor device, and reaction tube Grant 10,950,457 - Yoshida , et al. March 16, 2 | 2021-03-16 |
Substrate processing apparatus and method of manufacturing semiconductor device Grant 10,923,366 - Okajima , et al. February 16, 2 | 2021-02-16 |
Substrate processing device, manufacturing method for semiconductor device, and reaction tube Grant 10,811,271 - Yoshida , et al. October 20, 2 | 2020-10-20 |
Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium Grant 10,808,318 - Hanashima , et al. October 20, 2 | 2020-10-20 |
Protective plate, substrate processing apparatus, and method of manufacturing semiconductor device Grant 10,731,254 - Saido , et al. | 2020-08-04 |
Substrate Processing Apparatus, And Method For Manufacturing Semiconductor Device App 20200240019 - YOSHIDA; Hidenari ;   et al. | 2020-07-30 |
Substrate processing apparatus, and method for manufacturing semiconductor device Grant 10,689,758 - Yoshida , et al. | 2020-06-23 |
Protective Plate, Substrate Processing Apparatus, And Method Of Manufacturing Semiconductor Device App 20200165722 - SAIDO; Shuhei ;   et al. | 2020-05-28 |
Substrate Processing Apparatus, Quartz Reaction Tube And Method Of Manufacturing Semiconductor Device App 20200149159 - OKAJIMA; Yusaku ;   et al. | 2020-05-14 |
Substrate processing apparatus Grant 10,615,061 - Saido , et al. | 2020-04-07 |
Substrate Processing Apparatus And Method Of Manufacturing Semiconductor Device App 20200066551 - OKAJIMA; Yusaku ;   et al. | 2020-02-27 |
Cover of seal cap for reaction chamber for semiconductor manufacturing Grant D872,037 - Okajima , et al. J | 2020-01-07 |
Substrate Processing Device, Manufacturing Method For Semiconductor Device, And Reaction Tube App 20190393045 - YOSHIDA; Hidenari ;   et al. | 2019-12-26 |
Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device App 20190345605 - Mimura; Hidetoshi ;   et al. | 2019-11-14 |
Substrate Processing Apparatus, Reaction Tube and Method of Manufacturing Semiconductor Device App 20190330738 - SAIDO; Shuhei ;   et al. | 2019-10-31 |
Substrate processing apparatus, reaction tube, semiconductor device manufacturing method, and recording medium Grant 10,453,735 - Okajima , et al. Oc | 2019-10-22 |
Cover of seal cap for reaction chamber of semiconductor Grant D855,027 - Okajima , et al. | 2019-07-30 |
Return nozzle Grant D847,301 - Yoshida , et al. | 2019-04-30 |
Boat of substrate processing apparatus Grant D847,105 - Okajima , et al. | 2019-04-30 |
Boat of substrate processing apparatus Grant D846,514 - Yoshida , et al. | 2019-04-23 |
Substrate Processing Apparatus, Reaction Tube, Semiconductor Device Manufacturing Method, And Recording Medium App 20190096738 - OKAJIMA; Yusaku ;   et al. | 2019-03-28 |
Reaction tube Grant D843,958 - Okajima , et al. | 2019-03-26 |
Reaction tube Grant D842,823 - Okajima , et al. | 2019-03-12 |
Substrate Processing Apparatus App 20190071777 - YOSHIDA; Hidenari ;   et al. | 2019-03-07 |
Substrate Processing Apparatus App 20190035654 - SAIDO; Shuhei ;   et al. | 2019-01-31 |
Boat for substrate processing apparatus Grant D839,219 - Yoshida , et al. Ja | 2019-01-29 |
Substrate Processing Apparatus, Method Of Manufacturing Semiconductor Device, And Recording Medium App 20190017169 - HANASHIMA; Takeo ;   et al. | 2019-01-17 |
Substrate Processing Apparatus And Method Of Manufacturing Semiconductor Device App 20180371614 - YOSHIDA; Hidenari ;   et al. | 2018-12-27 |
Substrate Processing Apparatus App 20180218927 - SAIDO; Shuhei ;   et al. | 2018-08-02 |
Gas Supply System, Substrate Processing Apparatus, And Method Of Manufacturing Semiconductor Device App 20180202043 - SASAKI; Takafumi ;   et al. | 2018-07-19 |
Substrate Processing Apparatus, And Method For Manufacturing Semiconductor Device App 20180187307 - YOSHIDA; Hidenari ;   et al. | 2018-07-05 |
Substrate processing apparatus and heating unit Grant 9,957,616 - Murata , et al. May 1, 2 | 2018-05-01 |
Substrate Processing Apparatus, Nozzle Base, And Manufacturing Method For Semiconductor Device App 20180087152 - YOSHIDA; Hidenari | 2018-03-29 |
Substrate Processing Device, Manufacturing Method For Semiconductor Device, And Reaction Tube App 20170294318 - YOSHIDA; Hidenari ;   et al. | 2017-10-12 |
Heater for semiconductor thermal process Grant D793,975 - Murata , et al. August 8, 2 | 2017-08-08 |
Reaction tube Grant D791,090 - Yoshida , et al. July 4, 2 | 2017-07-04 |
Substrate Processing Apparatus App 20170183770 - KOMAE; Yasuaki ;   et al. | 2017-06-29 |
Substrate Processing Apparatus App 20170037512 - SAIDO; Shuhei ;   et al. | 2017-02-09 |
Reaction tube Grant D772,824 - Yoshida , et al. November 29, 2 | 2016-11-29 |
Reaction tube Grant D770,993 - Yoshida , et al. November 8, 2 | 2016-11-08 |
Substrate Processing Apparatus And Heating Unit App 20160244878 - MURATA; Hitoshi ;   et al. | 2016-08-25 |
Boat for substrate processing apparatus Grant D747,279 - Yoshida , et al. January 12, 2 | 2016-01-12 |
Substrate Processing Apparatus App 20150315702 - YAMAGUCHI; Daigo ;   et al. | 2015-11-05 |
Boat for substrate processing apparatus Grant D738,329 - Yoshida , et al. September 8, 2 | 2015-09-08 |
Boat for substrate processing apparatus Grant D737,785 - Yoshida , et al. September 1, 2 | 2015-09-01 |
Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer readable recording medium Grant 9,111,748 - Yamaguchi , et al. August 18, 2 | 2015-08-18 |
Boat of substrate processing apparatus Grant D734,730 - Yoshida , et al. July 21, 2 | 2015-07-21 |
Method of manufacturing semiconductor device, method of processing substrate and substrate processing apparatus Grant 8,791,031 - Yoshida , et al. July 29, 2 | 2014-07-29 |
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Non-Transitory Computer Readable Recording Medium App 20140087565 - Yamaguchi; Daigo ;   et al. | 2014-03-27 |
Method of Manufacturing Semiconductor Device, Method of Processing Substrate and Substrate Processing Apparatus App 20140045278 - Yoshida; Hidenari ;   et al. | 2014-02-13 |
Substrate Processing Apparatus, And Transport Device App 20120258018 - NISHITANI; Eisuke ;   et al. | 2012-10-11 |