U.S. patent application number 12/171708 was filed with the patent office on 2009-01-15 for apparatus and method for processing a substrate edge region.
This patent application is currently assigned to Applied Materials, Inc.. Invention is credited to Amir Al-Bayati, Mohamad Ayoub, Ganesh Balasubramanian, Chiu Chan, Dale R. Du Bois, Mark A. Fodor, Karthik Janakiraman, Eui Kyoon Kim, Thomas Nowak, Ashish Shah, Visweswaren Sivaramakrishnan, Joseph C. Werner, Jianhua Zhou.
Application Number | 20090017635 12/171708 |
Document ID | / |
Family ID | 40229042 |
Filed Date | 2009-01-15 |
United States Patent
Application |
20090017635 |
Kind Code |
A1 |
Shah; Ashish ; et
al. |
January 15, 2009 |
APPARATUS AND METHOD FOR PROCESSING A SUBSTRATE EDGE REGION
Abstract
The present invention comprises an apparatus and method for
etching at a substrate edge region. In one embodiment, the
apparatus comprises a chamber having a process volume, a substrate
support arranged inside the process volume and having a substrate
support surface, a plasma generator coupled to the chamber and
configured to supply an etching agent in a plasma phase to a
peripheral region of the substrate support surface, and a gas
delivery assembly coupled to a gas source for generating a radial
gas flow over the substrate support surface from an approximately
central region of the substrate support surface toward the
peripheral region of the substrate support surface.
Inventors: |
Shah; Ashish; (Santa Clara,
CA) ; Balasubramanian; Ganesh; (Sunnyvale, CA)
; Du Bois; Dale R.; (Los Gatos, CA) ; Fodor; Mark
A.; (Los Gatos, CA) ; Kim; Eui Kyoon;
(Campbell, CA) ; Chan; Chiu; (Foster City, CA)
; Janakiraman; Karthik; (San Jose, CA) ; Nowak;
Thomas; (Cupertino, CA) ; Werner; Joseph C.;
(Santa Clara, CA) ; Sivaramakrishnan; Visweswaren;
(Cupertino, CA) ; Ayoub; Mohamad; (San Jose,
CA) ; Al-Bayati; Amir; (San Jose, CA) ; Zhou;
Jianhua; (San Jose, CA) |
Correspondence
Address: |
PATTERSON & SHERIDAN, LLP - - APPM/TX
3040 POST OAK BOULEVARD, SUITE 1500
HOUSTON
TX
77056
US
|
Assignee: |
Applied Materials, Inc.
|
Family ID: |
40229042 |
Appl. No.: |
12/171708 |
Filed: |
July 11, 2008 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
|
60949397 |
Jul 12, 2007 |
|
|
|
60982961 |
Oct 26, 2007 |
|
|
|
60982993 |
Oct 26, 2007 |
|
|
|
Current U.S.
Class: |
438/729 ;
156/345.33; 257/E21.214 |
Current CPC
Class: |
H01L 21/68 20130101;
Y10S 414/136 20130101 |
Class at
Publication: |
438/729 ;
156/345.33; 257/E21.214 |
International
Class: |
H01L 21/302 20060101
H01L021/302; C23F 1/00 20060101 C23F001/00 |
Claims
1. An apparatus adapted for etching at a substrate edge region,
comprising: a chamber body defining a process volume; a substrate
support disposed inside the process volume and having a substrate
support surface; a plasma generator configured to supply an etching
agent in a plasma phase to a peripheral region of the substrate
support surface; and a gas delivery assembly coupled to a gas
source, wherein the gas delivery assembly is configured to generate
a radial gas flow over the substrate support surface, from an
approximately central region of the substrate support surface
toward the peripheral region of the substrate support surface.
2. The apparatus of claim 1, wherein the plasma generator comprises
a remote plasma source outside the chamber body.
3. The apparatus of claim 2, wherein the gas delivery assembly is
further configured to flow the etching agent from the remote plasma
source to the peripheral region of the substrate support
surface.
4. The apparatus of claim 1, wherein the plasma generator is
disposed inside the chamber body and the plasma generator
comprises: a first electrode; and a second electrode spaced apart
from the first electrode, wherein distance between the first and
second electrode various at different locations.
5. The apparatus of claim 4, wherein the gas delivery assembly is
further coupled to an etching gas source for providing an etching
gas to the plasma generator.
6. The apparatus of claim 4, wherein the first electrode is coupled
to a radio-frequency power bias, and the second electrode is
coupled to a potential bias one of a ground potential, a DC
potential or an AC potential.
7. The apparatus of claim 4, wherein at least the first electrode
comprises a slant portion.
8. The apparatus of claim 5, wherein the plasma generator is
arranged inside the gas delivery assembly.
9. The apparatus of claim 8, wherein the first electrode has a gas
hole in fluid communication with the etching gas source.
10. The apparatus of claim 5, wherein the plasma generator is
arranged outside the gas delivery assembly.
11. The apparatus of claim 10, wherein the second electrode is
disposed on the substrate support.
12. The apparatus of claim 1, wherein the gas delivery assembly
comprises a gas distribution plate configured to evenly distribute
a processing gas across the substrate support.
13. A method for processing an edge region a substrate, comprising:
placing the substrate on a substrate support inside a process
chamber, wherein the substrate has a top surface, a central region
and an edge region; providing an etching agent in a plasma phase
near the edge region of the substrate; and forming a radial gas
flow over the top surface of the substrate, wherein the radial gas
flow flows from the central region of the substrate toward the edge
region of the substrate.
14. The method of claim 13, wherein providing an etching agent in a
plasma phase at the edge region of the substrate comprises
delivering the etching agent from a remote plasma source to the
edge region of the substrate.
15. The method of claim 13, wherein the radial gas flow comprises
an inert gas.
16. The method of claim 13, wherein providing an etching agent in a
plasma phase near the edge region of the substrate comprises
generating a plasma of the etching agent inside the process
chamber.
17. The method of claim 16, wherein generating the etching agent in
the plasma phase inside the process chamber comprises applying a RF
between a first electrode and a second electrode disposed near the
edge region to strike a plamsa, wherein the distance between the
first and second electrodes various at different locations.
18. The method of claim 17, wherein the radial gas flow comprises
an etching gas.
19. The method of claim 17, wherein generating the etching agent in
a plasma phase further comprises adjusting strength of the plasma
by biasing a DC or AC potential to the second electrode.
20. The method of claim 13, further comprising adjusting strength
of the etching agent by applying a DC or AC potential to the
substrate support.
Description
CROSS-REFERENCE TO RELATED APPLICATIONS
[0001] This application claims benefit of U.S. Provisional Patent
Application Ser. No. 60/949,397 (Attorney Docket No. 011997L),
filed Jul. 12, 2007, U.S. Provisional Patent Application Ser. No.
60/982,961 (Attorney Docket No. 011997L02), filed Oct. 26, 2007,
and U.S. Provisional Patent Application Ser. No. 60/982,993
(Attorney Docket No. 011997L03), filed Oct. 26, 2007. Each of the
aforementioned patent applications is herein incorporated by
reference.
BACKGROUND OF THE INVENTION
[0002] 1. Field of the Invention
[0003] Embodiments of the invention generally relate to apparatus
and methods for processing semiconductor substrates. More
particularly, embodiments of the present invention relate to
apparatus and methods for processing a substrate near an edge
region.
[0004] 2. Description of the Related Art
[0005] During a chemical vapor deposition (CVD) or plasma enhanced
chemical vapor deposition (PECVD), it is desirable to have a
uniform thickness profile across a substrate and no deposition near
an edge area of the substrate. The area near the edge where
deposition is not desired is generally referred to as the "edge
exclusion." FIG. 1A is a partial cross-sectional view showing the
desired profile for a deposition layer 102 formed on a substrate
101. The deposition layer 102 is uniformly deposited across a top
surface of the substrate 101 and there is no deposition within an
edge exclusion area 103. Unfortunately, an actual deposition
profile generally differs from the ideal configuration illustrated
in FIG. 1A. FIG. 1B is a partial cross-sectional view showing an
actual surface profile of a deposition layer 102a on the substrate
101 after having undergone a CVD or PECVD deposition. The
deposition layer 102a typically extends to the edge exclusion area
103, and a bevel edge 104 with extra thickness may be formed near
the edge exclusion area 103.
[0006] To prevent the formation of the deposition film at the edge
of the substrate, FIG. 1C is a partial cross-sectional view showing
one conventional approach that proposes to use a shadow ring 105.
The shadow ring 105 is usually arranged at a location that overlaps
and covers at least one portion of the edge exclusion area 103 of
the substrate 101. As a result, as shown in FIG. 1C, a deposition
layer 102b gradually reduces under the shadow of the shadow ring
105.
[0007] While the use of the shadow ring 105 can currently achieve
thickness uniformity up to a 3.5 mm-wide edge exclusion area, the
requirement for thickness non-uniformity has to be reduced to a 2
mm-wide edge exclusion area owing to increasingly shrinking device
dimensions. As a result of the smaller edge exclusion area, the
conventional approach using the shadow ring 105 to prevent
deposition at the edge area may not provide satisfactory
result.
[0008] Therefore, there is a need for an apparatus and method that
can provide a desired profile of deposition film at the substrate
edge region without using a shadow ring, and at least overcome the
issues addressed above.
SUMMARY OF THE INVENTION
[0009] The present application describes apparatuses and methods
for processing a substrate edge region. In one embodiment, an
apparatus adapted for etching at a substrate edge region is
disclosed. The apparatus comprises a chamber body having a process
volume, a substrate support arranged inside the process volume and
having a substrate support surface, a plasma generator configured
to supply an etching agent in a plasma phase to a peripheral region
of the substrate support surface, and a gas delivery assembly
coupled to a gas source for generating a radial gas flow over the
substrate support surface from an approximately central region of
the substrate support surface toward the peripheral region of the
substrate support surface.
[0010] In another embodiment, a method of etching at a substrate
edge region is disclosed. The method comprises placing a substrate
on a substrate support inside a process chamber, wherein the
substrate has a top surface, a central region and an edge region,
providing an etching agent in a plasma phase at the edge region of
the substrate, and forming a radial gas flow on the top surface of
the substrate from the central region toward the edge region.
BRIEF DESCRIPTION OF THE DRAWINGS
[0011] So that the manner in which the above recited features of
the present invention can be understood in detail, a more
particular description of the invention, briefly summarized above,
may be had by reference to embodiments, some of which are
illustrated in the appended drawings. It is to be noted, however,
that the appended drawings illustrate only typical embodiments of
this invention and are therefore not to be considered limiting of
its scope, for the invention may admit to other equally effective
embodiments.
[0012] FIG. 1A illustrates a desired profile for a deposition layer
at a peripheral region of a substrate.
[0013] FIG. 1B illustrates a profile actually obtained for a
deposition layer at a peripheral region of a substrate.
[0014] FIG. 1C illustrates one conventional approach using a shadow
ring to prevent the formation of a deposition film at the
peripheral region of the substrate.
[0015] FIG. 2A is a schematic cross-sectional view showing one
embodiment of a system adapted for etching at a substrate edge
region.
[0016] FIG. 2B is a partial cross-sectional view showing a variant
embodiment of the gas delivery assembly shown in FIG. 2A.
[0017] FIG. 3A is schematic cross-sectional view showing one
embodiment of a chamber system that integrates a plasma generator
inside the process chamber.
[0018] FIGS. 3B and 3C are partial cross-sectional views showing
two variant embodiments integrating a plasma generator inside a gas
delivery assembly.
[0019] FIG. 4A is a partial cross-sectional view of a chamber
system that places a plasma generator adjacent to the peripheral
region of a substrate support.
[0020] FIGS. 4B and 4C are partial cross-sectional views
illustrating two variant embodiments of the example shown in FIG.
4A.
[0021] To facilitate understanding, identical reference numerals
have been used, where possible, to designate identical elements
that are common to the figures. It is contemplated that elements
disclosed in one embodiment may be beneficially utilized on other
embodiments without specific recitation.
DETAILED DESCRIPTION
[0022] Embodiments described herein relate to an apparatus and
method for processing a substrate edge region that are applicable
for various chamber systems configured to process a substrate.
Examples of chamber systems include, without limitations, loadlock
chambers, testing chambers, deposition chambers, etching chambers,
and thermal treatment chambers.
[0023] FIG. 2A is a schematic cross-sectional view of one
embodiment of a substrate edge processing system 200. The substrate
edge processing system 200 includes a process chamber 202 that is
respectively coupled to a plasma generation source, such as a
remote plasma source ("RPS") 204 via a first entry port 206, and a
purge gas source 208 via a second entry port 210. The process
chamber 202 has walls 212 and a bottom 214 that partially define a
process volume 216. The process volume 216 may be accessed through
an access port (not shown) formed in the walls 212 that facilitate
movement of a substrate 220 into and out of the process chamber
202. The walls 212 and bottom 214 may be fabricated from a unitary
block of aluminum or other material compatible with processing. The
walls 212 support a lid assembly 222, and also include the assembly
of a liner 224 through which the process chamber 202 may be
evacuated uniformly along the periphery of the processing volume
216 by a vacuum pump 226.
[0024] A substrate support assembly 230 may be centrally disposed
within the process chamber 202. In one embodiment, the support
assembly 230 may be temperature controlled. The support assembly
230 may support a substrate 220 during processing. In one
embodiment, the support assembly 230 comprises a support base 232
made of aluminum that may encapsulate at least one embedded heater
234 operable to controllably heat the support assembly 230 and the
substrate 220 positioned thereon to a predetermined temperature. In
one embodiment, the support assembly 230 may operate to maintain
the substrate 220 at a temperature between about 150 degrees
Celsius to about 1000 degrees Celsius, depending on the processing
parameters for the material being processed.
[0025] The support base 232 may have an upper side 236A and a lower
side 236B. The upper side 236A that supports the substrate 220 has
a surface area smaller than the substrate 220, so that a peripheral
edge region of the substrate 220 remains free of contact with the
support base 232 to facilitate its processing, such as etching, or
cleaning. The lower side 236B may have a stem 238 coupled thereto.
The stem 238 couples the support assembly 230 to a lift system 240
that moves the support assembly 230 vertically between an elevated
processing position and a lowered position that facilitates
substrate transfer to and from the process chamber 202. The stem
238 additionally provides a conduit for electrical and thermocouple
leads between the support assembly 230 and other components of the
system 200. A bellows 242 may be coupled between the stem 238 and
the bottom 214 of the process chamber 202. The bellows 242 provides
a vacuum seal between the process volume 216 and the atmosphere
outside the process chamber 202 while facilitating vertical
movement of the support assembly 230.
[0026] To facilitate the transfer of the substrate 220, the support
base 232 also includes a plurality of openings 246 through which
lift pins 248 are movably mounted. The lift pins 248 are operable
to move between a first position and a second position. The first
position, shown in FIG. 2, allows the substrate 220 to rest on the
upper side 236A of the support base 232. The second position (not
shown) lifts the substrate 220 above the support base 232 so that
the substrate 220 can be transferred to a substrate handling robot
coming through an access port (not shown). Upward/downward
movements of the lift pins 248 may be driven by a movable plate
250.
[0027] The support assembly 230 may also comprise a centering
mechanism 260 operable to center the substrate 220 relative to a
vertical reference axis Z perpendicular to the substrate support
plane of the support base 232. The centering mechanism 260
comprises three or more movable centering fingers 262 positioned at
a periphery of the support base 232, and an opposing plate 264
placed below the fingers 262. Each finger 262 is pivotally mounted
on the support base 232 via a shaft 266. The opposing plate 264 and
the support base 232 are relatively movable so that the opposing
plate 264 may contact and pivot the fingers 262 in a release
position and stay free from the fingers 262 in a centering
position.
[0028] In one embodiment, the opposing plate 264 may be stationary
and the relative movement between the support base 232 and the
opposing plate 264 is due to the vertical movement of the support
base 232. The fingers 262 engage on the peripheral edge of the
substrate 220 to center the substrate 220 when the support assembly
230 is in an elevated position as shown in FIG. 2A, and disengage
from the peripheral edge of the substrate 220 when the support
assembly 230 is in a lowered position (not shown). Detailed
description of similar centering assembly may be found in U.S.
patent application Ser. No. 12/171,594, entitled APPARATUS AND
METHOD FOR CENTERING A SUBSTRATE IN A PROCESS CHAMBER, (attorney
docket No. 11997), filed Jul. 11, 2008, which is herein
incorporated by reference.
[0029] The lid assembly 222 provides an upper boundary to the
process volume 216. The lid assembly 222 may be removed or opened
to service the process chamber 202. In one embodiment, the lid
assembly 222 may be fabricated from aluminum.
[0030] A gas delivery assembly 270 is coupled to an interior side
of the lid assembly 222. The gas delivery assembly 270 includes a
gas bowl 272 that has an outer wall 274, inner wall 276 and bottom
278. The shape of the bottom 278 may be configured to substantially
follow the profile of the substrate 220. The gas bowl 272 includes
a first gas distribution circuit coupled to the first entry port
206, and a second gas distribution circuit coupled to the second
entry port 210.
[0031] The first gas distribution circuit includes a plenum 280A
partially delimited between the outer wall 274, inner wall 276 and
bottom 278, and a plurality of slits 282 formed through a
peripheral region of the bottom 278 and connected to the plenum
280A. In one embodiment, the slits 282 may be angled outwards to
avoid gas flow toward a center portion of the substrate.
[0032] The second gas distribution circuit includes a gas conduit
280B that is delimited by the inner walls 276 and has an end opened
to a central region of the process volume 216. The gas flow
provided along the second gas distribution circuit is configured
from center to edge to protect unprocessed region.
[0033] To remove a portion of a deposition film at an edge region
of the substrate 220, the remote plasma source 204 provides an
etching agent in a plasma phase that flows into the plenum 280A via
the first entry port 206, and applied on the edge region of the
substrate 220 through the slits 282. The etching agent may be
selectively chosen according to the material of the deposition film
to etch. Examples of etching agents may include, without
limitation, ionized NF.sub.3, O.sub.2, F.sub.2, or SF.sub.6. To
prevent the diffusion of the etching agent toward a central region
of the substrate 220, the purge gas source 208 provides an inert
gas that enters the process volume 216 via the second entry port
210 and gas conduit 280B, and then flows radially on the top
surface of the substrate 220 from its central region toward its
peripheral edge region. Suitable inert gases may include, without
limitation, Ar or He. The radial flow of the inert gas acts to
limit the action area of the etching agent to the peripheral region
of the substrate 220.
[0034] A person skilled in the art will appreciate that various
embodiments may be implemented for the gas bowl 272. FIG. 2B is a
partial cross-sectional view showing a variant embodiment of the
gas bowl 272, in which the second gas distribution circuit coupled
to the second entry port 210 may include a plenum 280C that is
defined between the inner wall 276 and a central portion 277 of the
bottom 278. The inert gas provided from the purge gas source 208
enters the plenum 280C via the second entry port 210, and flows
into the process volume 216 via an aperture 279 formed through the
central portion 277 of the bottom 278.
[0035] Though the foregoing illustrates an implementation in which
a remote plasma source is externally coupled to the process
chamber, alternate embodiments may integrate a plasma generator in
the process chamber. More specifically, some variant embodiments
may define a plasma volume inside the process chamber, but away
from the substrate edge. The plasma volume receives a flow of
processing gas, which is excited as it passes between ground and RF
electrodes placed in the plasma volume. In other embodiments, the
plasma may be struck in-situ at the substrate edge region, where an
RF electrode is placed adjacent to the peripheral area of the
substrate support used as ground electrode. More details of the
embodiments integrating a plasma generator in the process chamber
are described below in conjunction with FIGS. 3A-3C and FIGS.
4A-4C.
[0036] FIG. 3A is a schematic cross-sectional view showing one
embodiment of a chamber system 300 that integrates a plasma
generator inside the process chamber. In one embodiment, the
chamber system 300 is configured to process an entire substrate and
to process an edge region by generating plasma differently. The
system 300 includes a process chamber 302 that is respectively
coupled to an etching gas source 304 via a first entry port 306,
and a purge gas source 308 via a second entry port 310. The second
entry port 310 may also be coupled to a deposition gas source 311
that introduces a process gas into the process chamber 302 for
forming various deposition films. The walls 312 and bottom 314 of
the process chamber 302 partially define a process volume 316 in
which a substrate 320 may undergo deposition or etching processes.
The walls 312 support a lid assembly 322, and also include the
assembly of a liner 324 through which the process chamber 302 may
be evacuated by a vacuum pump 326.
[0037] Like the embodiment shown in FIG. 2, the substrate 320 is
supported on a support assembly 330, which includes a support base
332 that is temperature controlled by a heater 333. The support
base 332 is coupled to a lift system 334 via a stem 336 that moves
the support assembly 330 vertically. A bellows 338 may also be
coupled between the stem 336 and the bottom 314 of the process
chamber 302 to provide a vacuum seal between the process volume 316
and the atmosphere outside the process chamber 302. To facilitate
the transfer of the substrate 320, the support base 332 also
includes a plurality of openings 339 through which lift pins 340
are movably mounted, driven by a movable plate 342. A centering
mechanism 350 may also be provided to center the substrate 320,
which includes pivotal centering fingers 352 positioned at a
periphery of the support base 332, and an opposing plate 354 placed
below the fingers 352. An example of operation of the centering
mechanism 350 has been described above in conjunction with FIG.
2A.
[0038] A gas delivery assembly 360 is coupled to an interior side
of the lid assembly 322. The gas delivery assembly 360 includes a
gas bowl 362 that is connected to a switchable power source 364
operable to selectively apply various potential biases to the gas
bowl 362, including an RF potential bias, DC potential bias, AC
potential bias, or a ground potential.
[0039] The gas bowl 362 has an outer wall 365, an inner wall 366
and a bottom 368. The shape of the bottom 368 may be configured to
substantially follow the profile of the substrate 320 that rests
between the support assembly 330 and the gas delivery assembly 360.
The gas bowl 362 includes a first gas distribution circuit coupled
to the first entry port 306, and a second gas distribution circuit
coupled to the second entry port 310.
[0040] The first gas distribution circuit includes a plasma
generation volume 370A partially delimited between the outer wall
365, inner wall 366 and a peripheral portion of the bottom 368, and
a plurality of slits 372 formed through the peripheral portion of
the bottom 368 and connected to the plasma generation volume 370A.
The plasma generation volume 370A, which is connected to the first
entry port 306, includes an electrode 373 that is coupled to a RF
power source 375. The electrode 373 is sandwiched between isolator
materials 377, and has an exposed surface 380 that is spaced apart
from a facing inner side 382 of the outer wall 365. The outer wall
356 serves as a counter electrode to the electrode 373 during
plasma generation. The distance between the counter electrode and
the electrode 373 varies at different locations which make it easy
to strike a plasma therebetween.
[0041] The second gas distribution circuit includes a plenum 370B
that is surrounded by the plasma generation volume 370A. The plenum
370B, which is connected to the second entry port 310, is partially
delimited between the inner wall 366 and a perforated portion 384
of the bottom 368. The perforated portion 384 includes a plurality
of apertures 386 through which gases received in the plenum 370B
flow into the process volume 316.
[0042] In a PECVD mode of operation, the plenum 370B receives a
process gas from the deposition gas source 311, and the substrate
320 is heated. While the support assembly 330 is grounded, the
switchable power source 364 applies an RF potential bias to the gas
bowl 362, such as the bottom 368, such that a plasma is generated
from the process gas present in the process volume 316 between the
support assembly 330 and the gas delivery assembly 360. The entire
substrate is exposed to the plasma and being processed, for example
a film may be deposited on the substrate. The RF power from the
switchable power source 364, the composition of the process gas,
and the thermal conditions applied to the substrate 320 may be set
in accordance with the type of deposition film to form on the
substrate 320.
[0043] In one embodiment, the deposition film may include an
advanced patterning film ("APF") including amorphous carbon. The
APF may be deposited at a substrate temperature between about
200.degree. C. and 1500.degree. C., while a process gas including
propylene (C.sub.3H.sub.6) as carbon source is introduced in the
process volume 316. Optionally, the process gas may include
additional chemical elements to include in the APF, such as a
nitrogen (N.sub.2) and doping elements. RF power from about 500 W
to about 1500 W may be applied in the chamber at a frequency of
about 13.56 MHz. A more detailed description of conditions for
forming the APF by PECVD and its use is described in U.S. Pat. No.
7,262,106, entitled "Absorber Layer for DSA Processing", which is
incorporated herein by reference.
[0044] Once the formation of the deposition film is completed, the
etching function may be used to remove undesirable portions of the
deposition film in the edge region of the substrate 320. In an edge
processing mode of operation, the plasma generation volume 370A
receives an etching gas from the etching gas source 304 via the
first entry port 306. In the meantime, the gas bowl 362 may be
grounded,such that RF power supplied by the RF power source 375 to
the electrode 373 excites the etching gas present in the plasma
generation volume 370A between the exposed surface 380 of the
electrode 373 and the inner side 382 of the outer wall 365. To
facilitate the ionization of the etching gas, the inner side 382
may include a slant portion 388 that is inclined relative to the
exposed surface 380 of the electrode 373. An etching agent in a
plasma phase is thereby formed from the etching gas in the plasma
generation volume 370A. The etching agent then is flowed via the
slits 372 into the process volume 316 to etch a portion of the
deposition film at the peripheral edge region of the substrate
320.
[0045] In one embodiment, a bias potential may be applied to the
counter electrode, i.e. the gas bowl 362 with a DC or AC potential
bias from the switchable power 364. By adjusting the bias
potential, the bombarding strength of the plasma may be adjusted to
a desirable level. In another embodiment, the support assembly 330
may be biased with a DC or AC potential to adjust the bombarding
strength of the plasma.
[0046] While the etching agent is delivered via the slits 372, the
plenum 370B receives a purge gas from the purge gas source 308,
which may include any inert gases such as Ar or He. The purge gas
enters the process volume 316 through the apertures 386, and then
flows radially on the top surface of the substrate 320 toward its
peripheral edge region to limit the diffusion of the etching agent
supplied via the slits 372.
[0047] FIGS. 3B and 3C are partial cross-sectional views of variant
embodiments integrating a plasma generator inside the gas delivery
assembly 360. Like the embodiment shown in FIG. 3A, the plasma
generation volume 370A shown in FIG. 3B includes an electrode 374
that is sandwiched between isolator materials 377 and is spaced
apart from the inner side 382 of the outer wall 365. However, the
exposed surface of the electrode 374 includes a slant portion 390
that faces the slant portion 388 on the inner side 382 of the outer
wall 365. The inclination angles of the slant portions 390 and 388
are designed to set a varying distance there between to promote the
formation of the plasma when the electrode 374 and the gas bowl 362
are electrically biased. In addition, the electrode 374 may include
a hole 381 through which the etching gas introduced in the plasma
generation volume 370A can reach the other side of the electrode
374.
[0048] FIG. 3C illustrates another embodiment of the plasma
generator provided in the gas delivery assembly 360. As shown, the
electrode 376 coupled to the RF power source 375 includes a
through-hole 392 that is coupled to the first entry port 306. In
the edge processing mode of operation, the processing gas is
delivered via the through-hole 392 inside the electrode 376 into
the plasma generation volume 370A. In the meantime, the gas bowl
362 may be either grounded or applied with a DC or AC potential
bias, such that RF power supplied to the electrode 376 excites the
etching gas present in the plasma generation volume 370A.
[0049] While the examples shown in FIGS. 3A-3C illustrate diverse
plasma generators that are incorporated in the gas delivery
assembly, alternate embodiments described below may also arrange
the plasma generator in a position outside the gas delivery
assembly.
[0050] FIG. 4A is a partial cross-sectional view of a chamber
system 400 that places a plasma generator adjacent to the
peripheral region of the support assembly. The chamber system 400
includes a process chamber 402 that is coupled to an etching gas
source 404 via a first entry port 406, and a purge gas source 408
via a second entry port 410. The first and second entry ports 406
and 410 are formed through a lid assembly 420 that is supported on
walls 415 of the process chamber 402. The walls 415 also include
the assembly of a liner 422 through which a process volume 416 of
the process chamber 402 may be evacuated by a vacuum pump (not
shown). A gas delivery assembly 430 is coupled to an interior side
of the lid assembly 420, above a support base 432 on which a
substrate 434 may be placed to undergo edge etching.
[0051] The gas delivery assembly 430 includes a gas bowl 442 that
has an outer wall 444, inner wall 446 and a bottom 448. The gas
bowl 442 is coupled to a switchable power source 443. The shape of
the bottom 448 may be configured to substantially follow the
profile of the substrate 434. The gas bowl 442 includes a first gas
distribution circuit coupled to the first entry port 406, and a
second gas distribution circuit coupled to the second entry port
410.
[0052] The first gas distribution circuit includes a plenum 450A
partially delimited between the outer wall 444, inner wall 446 and
the bottom 448, and a plurality of slits 452 formed through a
peripheral region of the bottom 448 and connected to the plenum
450A.
[0053] The second gas distribution circuit includes a gas conduit
450B that is surrounded by the inner wall 446 and has an end opened
approximately at a central region of the process volume 416.
[0054] The plasma generator includes an electrode 460 sandwiched
between isolator materials 462, which are arranged adjacent to the
outer wall 444 of the gas bowl 442. The electrode 460 is coupled to
a RF power source 464, and includes a slant end 466 positioned
proximate to the outer wall 444 and a peripheral portion of the
support base 432.
[0055] In an etching mode of operation, the etching gas source 404
provides an etching gas that flows through the first entry port 406
into the plenum 450A, and then passes through the slits 452 into
the peripheral region of the process volume 416 where the slant end
466 of the electrode 460 is positioned. In the meantime, the gas
bowl 442 and the support base 432 are grounded or applied with an
AC or DC potential bias, such that RF power applied to the
electrode 460 excites the etching gas present between the slant end
466, the support base 432 and the gas bowl 442. An etching agent in
a plasma phase is thereby formed in the vicinity of the edge region
of the substrate 434.
[0056] To prevent the diffusion of the etching agent toward the
central region of the substrate 434, the purge gas source 408
provides an inert gas that is delivered along the gas conduit 450B,
and flows radially on the top surface of the substrate 434 from its
central region toward its peripheral edge region. The radial flow
of the inert gas allows to limit the action area of the etching
agent to the peripheral region of the substrate 434.
[0057] FIG. 4B is a partial cross-sectional view illustrating a
variant implementation of the embodiment shown in FIG. 4A. The
embodiment of FIG. 4B is similar to that of FIG. 4A, except that no
purge gas source 408 (FIG. 4A) is provided. No slits 452 thus are
required in the gas bowl 442. Instead, the etching gas source 404
is coupled to the gas conduit 450B via the entry port 410. During
the etching process, the etching gas source 404 provides an etching
gas that enters the process volume 416 via the gas conduit 450B,
and flows radially on the top surface of the substrate 434 from its
central region toward its peripheral region. In the meantime, the
gas bowl 442 and the support base 432 are either grounded or biased
with an AC or DC potential, such that RF power applied to the
electrode 460 excites the etching gas present between the slant
portion 466 of the electrode 460, the support base 432 and the gas
bowl 442. An etching agent in a plasma phase is thereby formed at
the edge region of the substrate 434. Owing to the radial flow of
the etching gas, the plasma-phase etching agent is prevented from
diffusing from the peripheral region toward the central region of
the substrate 434.
[0058] FIG. 4C is a partial cross-sectional view illustrating
another variant implementation of the embodiment shown in FIG. 4A.
Instead of an electrode with a slant end portion, the embodiment
illustrated in FIG. 4C couples the RF power source 464 to an
electrode 470 with a straight end 472. In addition, the provided
gas delivery assembly 480 includes a plenum 482A that is delimited
between an upper plate 484 and a lower plate 486. During etching,
an etching gas from the etching gas source 404 flows into the
plenum 482A via the first entry port 406 and an opening 488 formed
through the upper plate 484, and then flows from the plenum 482A
into the peripheral region of the process volume 416 via a gap 490
provided between peripheral end portions 492 and 494 of the upper
and lower plate 484 and 486. In the meantime, the support base 432
and gas delivery assembly 480 are either grounded or applied with a
DC or AC potential bias, such that RF power provided to the
electrode 470 excites the etching gas present between the straight
end 472 of the electrode 470, the end portions 492 and 494, and the
peripheral region of the support base 432. To facilitate the plasma
formation, the end portion 494 may also form a slant portion 496
that is inclined proximate to the straight end 472 of the electrode
470. In this manner, an etching agent in a plasma phase is formed
at the peripheral region of the process volume 416 to etch the edge
region of the substrate 434.
[0059] To prevent the diffusion of the etching agent toward a
central region of the substrate 434, the purge gas source 408
provides an inert gas that enters a central region of the process
volume 416 via the second entry port 410 and aligned holes 498
formed through the upper and lower plate 484 and 486, and then
flows radially on the top surface of the substrate 434 from its
central region toward its peripheral region. The radial flow of the
inert gas allows to limit the action area of the etching agent to
the peripheral region of the substrate 434.
[0060] As has been described above, the apparatus and method
provided herein are thus able to process an edge region of a
substrate, for example etching a deposition film on a substrate
edge region in an effective manner, without using a shadow
ring.
[0061] The apparatus and method for processing an edge region may
be used in stand alone edge processing chambers, incorporated with
a processing chamber that capable of process the entire substrate,
or incorporated in other chambers, such as a load lock chamber.
[0062] While the foregoing is directed to certain embodiments of
the present invention, other and further embodiments of the
invention may be devised without departing from the basic scope
thereof, and the scope thereof is determined by the claims that
follow.
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