| Patent | Date |
|---|
Multi-encrypted message response manager
Grant 11,451,389 - Krishnamoorthy , et al. September 20, 2 | 2022-09-20 |
Systems And Methods For Improved Carbon Adhesion
App 20220293416 - Rathi; Sudha S. ; et al. | 2022-09-15 |
Wafer de-chucking detection and arcing prevention
Grant 11,437,262 - Balasubramanian , et al. September 6, 2 | 2022-09-06 |
Cfx Layer To Protect Aluminum Surface From Over-oxidation
App 20220178017 - SINGH; Anup Kumar ; et al. | 2022-06-09 |
Profile Shaping For Control Gate Recesses
App 20220123114 - Singhal; Akhil ; et al. | 2022-04-21 |
Systems And Methods Of Seasoning Electrostatic Chucks With Dielectric Seasoning Films
App 20220122872 - Singhal; Akhil ; et al. | 2022-04-21 |
Chamber Configurations And Processes For Particle Control
App 20220122823 - Wu; Fei ; et al. | 2022-04-21 |
Method Of Using Dual Frequency Rf Power In A Process Chamber
App 20220102141 - SINGH; Anup Kumar ; et al. | 2022-03-31 |
Plasma processing using multiple radio frequency power feeds for improved uniformity
Grant 11,276,562 - Ye , et al. March 15, 2 | 2022-03-15 |
Showerhead Design To Control Stray Deposition
App 20220064797 - DHANAKSHIRUR; Akshay ; et al. | 2022-03-03 |
Fluoride Coating To Improve Chamber Performance
App 20220037126 - Sun; Jennifer Y. ; et al. | 2022-02-03 |
Switchable Delivery For Semiconductor Processing System
App 20220020570 - Addepalli; Sai Susmita ; et al. | 2022-01-20 |
Isolation Valves
App 20220003074 - Balasubramanian; Ganesh ; et al. | 2022-01-06 |
Cognitive Multi-encrypted Mail Platform
App 20210409380 - Krishnamoorthy; MadhuSudhanan ; et al. | 2021-12-30 |
Multi-encrypted Message Response Manager
App 20210409198 - Krishnamoorthy; MadhuSudhanan ; et al. | 2021-12-30 |
Remote Capacitively Coupled Plasma Source with Improved Ion Blocker
App 20210351020 - Shah; Vivek B. ; et al. | 2021-11-11 |
Method of forming film stacks with reduced defects
Grant 11,145,504 - Jiang , et al. October 12, 2 | 2021-10-12 |
Shadow ring for modifying wafer edge and bevel deposition
Grant 11,136,665 - Bois , et al. October 5, 2 | 2021-10-05 |
Dual temperature heater
Grant 11,133,210 - Du Bois , et al. September 28, 2 | 2021-09-28 |
Server for handling multi-encrypted messages
Grant 11,122,021 - Krishnamoorthy , et al. September 14, 2 | 2021-09-14 |
Apparatus and methods for removing contaminant particles in a plasma process
Grant 11,120,976 - Kumar , et al. September 14, 2 | 2021-09-14 |
Remote capacitively coupled plasma source with improved ion blocker
Grant 11,069,514 - Shah , et al. July 20, 2 | 2021-07-20 |
Loadlock integrated bevel etcher system
Grant 11,031,262 - Basu , et al. June 8, 2 | 2021-06-08 |
Virtual sensor for spatially resolved wafer temperature control
Grant 11,024,522 - Mungekar , et al. June 1, 2 | 2021-06-01 |
Gas Delivery Systems And Methods
App 20210143029 - Kedlaya; Diwakar ; et al. | 2021-05-13 |
Wafer placement error detection based on measuring a current through an electrostatic chuck and solution for intervention
Grant 11,004,710 - Mungekar , et al. May 11, 2 | 2021-05-11 |
Techniques To Improve Adhesion And Defects For Tungsten Carbide Film
App 20210108309 - SHAH; Vivek Bharat ; et al. | 2021-04-15 |
Methods of minimizing wafer backside damage in semiconductor wafer processing
Grant 10,971,390 - Khaja , et al. April 6, 2 | 2021-04-06 |
Chamber Configurations For Controlled Deposition
App 20210047730 - Addepalli; Sai Susmita ; et al. | 2021-02-18 |
Bottom and side plasma tuning having closed loop control
Grant 10,910,227 - Rocha-Alvarez , et al. February 2, 2 | 2021-02-02 |
Methods Of Treatment With Pegfilgrastim And Romiplostim
App 20210015901 - BALASUBRAMANIAN; Ganesh ; et al. | 2021-01-21 |
Technique to prevent aluminum fluoride build up on the heater
Grant 10,892,143 - Shah , et al. January 12, 2 | 2021-01-12 |
Pecvd Process
App 20200399756 - RAJAGOPALAN; Nagarajan ; et al. | 2020-12-24 |
Wafer Placement Error Detection Based On Measuring A Current Through An Electrostatic Chuck And Solution For Intervention
App 20200388518 - MUNGEKAR; Hemant ; et al. | 2020-12-10 |
Plasma Density Control On Substrate Edge
App 20200381222 - KUMAR; Bhaskar ; et al. | 2020-12-03 |
Process Chamber With Reduced Plasma Arc
App 20200365370 - WU; Fei ; et al. | 2020-11-19 |
Methods Of Reducing Chamber Residues
App 20200362457 - HU; Liangfa ; et al. | 2020-11-19 |
Plasma Parameters And Skew Characterization By High Speed Imaging
App 20200357668 - BHATIA; Sidharth ; et al. | 2020-11-12 |
Apparatus And Methods For Removing Contaminant Particles In A Plasma Process
App 20200350146 - KUMAR; Bhaskar ; et al. | 2020-11-05 |
PECVD process
Grant 10,793,954 - Rajagopalan , et al. October 6, 2 | 2020-10-06 |
Plasma density control on substrate edge
Grant 10,790,121 - Kumar , et al. September 29, 2 | 2020-09-29 |
Chucking Process And System For Substrate Processing Chambers
App 20200286716 - KUMAR; Bhaskar ; et al. | 2020-09-10 |
RPS defect reduction by cyclic clean induced RPS cooling
Grant 10,755,903 - Bhatia , et al. A | 2020-08-25 |
Sensor Metrology Data Intergration
App 20200264335 - Bhatia; Sidharth ; et al. | 2020-08-20 |
Plasma parameters and skew characterization by high speed imaging
Grant 10,748,797 - Bhatia , et al. A | 2020-08-18 |
Loadlock Integrated Bevel Etcher System
App 20200234982 - BASU; Saptarshi ; et al. | 2020-07-23 |
Method Of Forming Film Stacks With Reduced Defects
App 20200227258 - JIANG; Zhijun ; et al. | 2020-07-16 |
Apparatus and methods for removing contaminant particles in a plasma process
Grant 10,714,319 - Kumar , et al. | 2020-07-14 |
Plasma Processing Using Multiple Radio Frequency Power Feeds For Improved Uniformity
App 20200203132 - YE; Zheng John ; et al. | 2020-06-25 |
Aluminum fluoride mitigation by plasma treatment
Grant 10,688,538 - Shah , et al. | 2020-06-23 |
Wafer De-chucking Detection And Arcing Prevention
App 20200194299 - BALASUBRAMANIAN; Ganesh ; et al. | 2020-06-18 |
Graded Dimple Height Pattern On Heater For Lower Backside Damage And Low Chucking Voltage
App 20200135530 - Shah; Vivek B. ; et al. | 2020-04-30 |
Loadlock integrated bevel etcher system
Grant 10,636,684 - Basu , et al. | 2020-04-28 |
Processing chamber and method with thermal control
Grant 10,636,630 - Mungekar , et al. | 2020-04-28 |
Gas Distribution Assemblies And Operation Thereof
App 20200098547 - DASH; Priyanka ; et al. | 2020-03-26 |
System and method for substrate processing chambers
Grant 10,600,624 - Ghosh , et al. | 2020-03-24 |
Plasma processing using multiple radio frequency power feeds for improved uniformity
Grant 10,580,623 - Ye , et al. | 2020-03-03 |
Coating Material For Processing Chambers
App 20200058539 - RATHI; Sudha ; et al. | 2020-02-20 |
Remote Capacitively Coupled Plasma Source With Improved Ion Blocker
App 20200035467 - Shah; Vivek B. ; et al. | 2020-01-30 |
Controlling temperature in substrate processing systems
Grant 10,544,508 - Rocha-Alvarez , et al. Ja | 2020-01-28 |
Methods Of Minimizing Wafer Backside Damage In Semiconductor Wafer Processing
App 20190393072 - KHAJA; Abdul Aziz ; et al. | 2019-12-26 |
Technique To Enable High Temperature Clean For Rapid Processing Of Wafers
App 20190382889 - PARIMI; Venkata Sharat Chandra ; et al. | 2019-12-19 |
Loadlock Integrated Bevel Etcher System
App 20190371630 - Basu; Saptarshi ; et al. | 2019-12-05 |
Virtual Sensor For Spatially Resolved Wafer Temperature Control
App 20190362991 - MUNGEKAR; Hemant ; et al. | 2019-11-28 |
High Temperature Electrostatic Chucking With Dielectric Constant Engineered In-situ Charge Trap Materials
App 20190355609 - KULSHRESHTHA; Prashant ; et al. | 2019-11-21 |
Dual Temperature Heater
App 20190304825 - Du BOIS; Dale R. ; et al. | 2019-10-03 |
Loadlock integrated bevel etcher system
Grant 10,403,515 - Basu , et al. Sep | 2019-09-03 |
Method and apparatus of processing wafers with compressive or tensile stress at elevated temperatures in a plasma enhanced chemical vapor deposition system
Grant 10,403,535 - Ye , et al. Sep | 2019-09-03 |
Apparatus And Methods For Removing Contaminant Particles In A Plasma Process
App 20190259585 - KUMAR; Bhaskar ; et al. | 2019-08-22 |
Apparatus and method for purging gaseous compounds
Grant 10,385,448 - Rocha-Alvarez , et al. A | 2019-08-20 |
Gas flow profile modulated control of overlay in plasma CVD films
Grant 10,373,822 - Kulshreshtha , et al. | 2019-08-06 |
High temperature electrostatic chucking with dielectric constant engineered in-situ charge trap materials
Grant 10,325,800 - Kulshreshtha , et al. | 2019-06-18 |
Dual temperature heater
Grant 10,325,799 - Du Bois , et al. | 2019-06-18 |
Shadow Ring For Modifying Wafer Edge And Bevel Deposition
App 20190153592 - BOIS; Dale Du ; et al. | 2019-05-23 |
Dual-channel showerhead for formation of film stacks
Grant 10,276,353 - Alayavalli , et al. | 2019-04-30 |
System And Method For Substrate Processing Chambers
App 20190122872 - GHOSH; Kalyanjit ; et al. | 2019-04-25 |
Bottom And Side Plasma Tuning Having Closed Loop Control
App 20190080916 - ROCHA-ALVAREZ; Juan Carlos ; et al. | 2019-03-14 |
Shadow ring for modifying wafer edge and bevel deposition
Grant 10,227,695 - Du Bois , et al. | 2019-03-12 |
Processing Chamber And Method With Thermal Control
App 20190066984 - MUNGEKAR; Hemant P. ; et al. | 2019-02-28 |
Apparatus and method for purging gaseous compounds
Grant 10,161,035 - Rocha-Alvarez , et al. Dec | 2018-12-25 |
Bottom and side plasma tuning having closed loop control
Grant 10,128,118 - Rocha-Alvarez , et al. November 13, 2 | 2018-11-13 |
Edge hump reduction faceplate by plasma modulation
Grant 10,100,408 - Ha , et al. October 16, 2 | 2018-10-16 |
Gas Phase Particle Reduction In Pecvd Chamber
App 20180294139 - KUMAR; Bhaskar ; et al. | 2018-10-11 |
Plasma Density Control On Substrate Edge
App 20180294146 - KUMAR; Bhaskar ; et al. | 2018-10-11 |
Method and system for supplying a cleaning gas into a process chamber
Grant 10,094,486 - Sankarakrishnan , et al. October 9, 2 | 2018-10-09 |
Pecvd Process
App 20180258535 - RAJAGOPALAN; Nagarajan ; et al. | 2018-09-13 |
PECVD process
Grant 10,060,032 - Rajagopalan , et al. August 28, 2 | 2018-08-28 |
PECVD apparatus and process
Grant 10,030,306 - Rajagopalan , et al. July 24, 2 | 2018-07-24 |
Plasma Parameters And Skew Characterization By High Speed Imaging
App 20180204750 - BHATIA; Sidharth ; et al. | 2018-07-19 |
Technique To Prevent Aluminum Fluoride Build Up On The Heater
App 20180114679 - SHAH; Vivek Bharat ; et al. | 2018-04-26 |
Gas Flow Profile Modulated Control Of Overlay In Plasma Cvd Films
App 20180096843 - Kulshreshtha; Prashant Kumar ; et al. | 2018-04-05 |
Wafer rotation in a semiconductor chamber
Grant 9,922,819 - Balasubramanian , et al. March 20, 2 | 2018-03-20 |
Pecvd Process
App 20180066364 - RAJAGOPALAN; Nagarajan ; et al. | 2018-03-08 |
Aluminum Fluoride Mitigation By Plasma Treatment
App 20180036775 - SHAH; Vivek Bharat ; et al. | 2018-02-08 |
Electrostatic Chuck Having Properties For Optimal Thin Film Deposition Or Etch Processes
App 20170352569 - KHAJA; Abdul Aziz ; et al. | 2017-12-07 |
Gas flow profile modulated control of overlay in plasma CVD films
Grant 9,837,265 - Kulshreshtha , et al. December 5, 2 | 2017-12-05 |
PECVD process
Grant 9,816,187 - Rajagopalan , et al. November 14, 2 | 2017-11-14 |
Rps Defect Reduction By Cyclic Clean Induced Rps Cooling
App 20170207069 - BHATIA; Sidharth ; et al. | 2017-07-20 |
Wafer Rotation In A Semiconductor Chamber
App 20170162385 - BALASUBRAMANIAN; Ganesh ; et al. | 2017-06-08 |
Loadlock Integrated Bevel Etcher System
App 20170092511 - BASU; Saptarshi ; et al. | 2017-03-30 |
Wafer rotation in a semiconductor chamber
Grant 9,593,419 - Balasubramanian , et al. March 14, 2 | 2017-03-14 |
Pecvd Process
App 20170016118 - RAJAGOPALAN; Nagarajan ; et al. | 2017-01-19 |
Gas lift valves
Grant 9,546,541 - Wang , et al. January 17, 2 | 2017-01-17 |
Processing systems and apparatus adapted to process substrates in electronic device manufacturing
Grant 9,524,889 - Hongkham , et al. December 20, 2 | 2016-12-20 |
Coiled tubing deployed gas injection mandrel
Grant 9,518,456 - Balasubramanian , et al. December 13, 2 | 2016-12-13 |
Method of aligning substrate-scale mask with substrate
Grant 9,490,154 - Ravid , et al. November 8, 2 | 2016-11-08 |
Dual-channel Showerhead For Formation Of Film Stacks
App 20160322200 - ALAYAVALLI; Kaushik ; et al. | 2016-11-03 |
Gas Flow Profile Modulated Control Of Overlay In Plasma Cvd Films
App 20160307752 - KULSHRESHTHA; Prashant Kumar ; et al. | 2016-10-20 |
Shape Memory Material Gas Lift Valve Actuator
App 20160290099 - Balasubramanian; Ganesh | 2016-10-06 |
PECVD process
Grant 9,458,537 - Rajagopalan , et al. October 4, 2 | 2016-10-04 |
Substrate Lift Assemblies
App 20160240410 - Reuter; Paul B. ; et al. | 2016-08-18 |
Apparatus And Method For Purging Gaseous Compounds
App 20160222507 - ROCHA-ALVAREZ; Juan Carlos ; et al. | 2016-08-04 |
Substrate-scale Mask Alignment
App 20160211185 - Ravid; Abraham ; et al. | 2016-07-21 |
Gas flow profile modulated control of overlay in plasma CVD films
Grant 9,390,910 - Kulshreshtha , et al. July 12, 2 | 2016-07-12 |
Process load lock apparatus, lift assemblies, electronic device processing systems, and methods of processing substrates in load lock locations
Grant 9,355,876 - Reuter , et al. May 31, 2 | 2016-05-31 |
Apparatus and method for substrate clamping in a plasma chamber
Grant 9,337,072 - Balasubramanian , et al. May 10, 2 | 2016-05-10 |
Gas Flow Profile Modulated Control Of Overlay In Plasma Cvd Films
App 20160099147 - KULSHRESHTHA; Prashant Kumar ; et al. | 2016-04-07 |
Dual Temperature Heater
App 20160093521 - DU BOIS; Dale R. ; et al. | 2016-03-31 |
Method And System For Supplying A Cleaning Gas Into A Process Chamber
App 20160084400 - SANKARAKRISHNAN; Ramprakash ; et al. | 2016-03-24 |
High Temperature Electrostatic Chucking With Dielectric Constant Engineered In-situ Charge Trap Materials
App 20160064264 - KULSHRESHTHA; Prashant ; et al. | 2016-03-03 |
Method And Apparatus Of Processing Wafers With Compressive Or Tensile Stress At Elevated Temperatures In A Plasma Enhanced Chemical Vapor Deposition System
App 20160049323 - YE; Zheng John ; et al. | 2016-02-18 |
Pecvd Process
App 20160017497 - RAJAGOPALAN; NAGARAJAN ; et al. | 2016-01-21 |
Method and system for supplying a cleaning gas into a process chamber
Grant 9,206,511 - Sankarakrishnan , et al. December 8, 2 | 2015-12-08 |
PECVD process
Grant 9,157,730 - Rajagopalan , et al. October 13, 2 | 2015-10-13 |
Elimination of first wafer effect for PECVD films
Grant 9,157,151 - Lakshmanan , et al. October 13, 2 | 2015-10-13 |
Wafer Rotation In A Semiconductor Chamber
App 20150262859 - BALASUBRAMANIAN; Ganesh ; et al. | 2015-09-17 |
Edge Hump Reduction Faceplate By Plasma Modulation
App 20150247237 - HA; Sungwon ; et al. | 2015-09-03 |
Pecvd Apparatus And Process
App 20150226540 - Rajagopalan; Nagarajan ; et al. | 2015-08-13 |
Plasma Processing Using Multiple Radio Frequency Power Feeds For Improved Uniformity
App 20150136325 - YE; Zheng John ; et al. | 2015-05-21 |
High Throughput Multi-layer Stack Deposition
App 20140287593 - HAN; Xinhai ; et al. | 2014-09-25 |
Processing Systems, Apparatus, And Methods Adapted To Process Substrates In Electronic Device Manufacturing
App 20140263165 - Hongkham; Steve S. ; et al. | 2014-09-18 |
Process Load Lock Apparatus, Lift Assemblies, Electronic Device Processing Systems, And Methods Of Processing Substrates In Load Lock Locations
App 20140262036 - Reuter; Paul B. ; et al. | 2014-09-18 |
Confined process volume PECVD chamber
Grant 8,778,813 - Sankarakrishnan , et al. July 15, 2 | 2014-07-15 |
Coiled Tubing Deployed Gas Injection Mandrel
App 20140116719 - Balasubramanian; Ganesh ; et al. | 2014-05-01 |
Pecvd Process
App 20140118751 - RAJAGOPALAN; Nagarajan ; et al. | 2014-05-01 |
Bottom And Side Plasma Tuning Having Closed Loop Control
App 20140087489 - ROCHA-ALVAREZ; Juan Carlos ; et al. | 2014-03-27 |
Controlling Temperature In Substrate Processing Systems
App 20140083361 - ROCHA-ALVAREZ; Juan Carlos ; et al. | 2014-03-27 |
Apparatus And Method For Purging Gaseous Compounds
App 20140083523 - ROCHA-ALVAREZ; Juan Carlos ; et al. | 2014-03-27 |
Method And System For Supplying A Cleaning Gas Into A Process Chamber
App 20140076236 - SANKARAKRISHNAN; Ramprakash ; et al. | 2014-03-20 |
Gas Lift Valves
App 20140069659 - Wang; Chao ; et al. | 2014-03-13 |
Method and system for supplying a cleaning gas into a process chamber
Grant 8,591,699 - Sankarakrishnan , et al. November 26, 2 | 2013-11-26 |
Compensating Concentration Uncertainity
App 20130284090 - BALASUBRAMANIAN; Ganesh ; et al. | 2013-10-31 |
Method And System For Supplying A Cleaning Gas Into A Process Chamber
App 20130213574 - Sankarakrishnan; Ramprakash ; et al. | 2013-08-22 |
Methods to improve the in-film defectivity of PECVD amorphous carbon films
Grant 8,282,734 - Padhi , et al. October 9, 2 | 2012-10-09 |
Systems For Plasma Enhanced Chemical Vapor Deposition And Bevel Edge Etching
App 20120211164 - Shah; Ashish ; et al. | 2012-08-23 |
Method For Depositing An Amorphous Carbon Film With Improved Density And Step Coverage
App 20120208373 - PADHI; DEENESH ; et al. | 2012-08-16 |
Methods To Improve The In-film Defectivity Of Pecvd Amorphous Carbon Films
App 20120204795 - Padhi; Deenesh ; et al. | 2012-08-16 |
Systems for plasma enhanced chemical vapor deposition and bevel edge etching
Grant 8,197,636 - Shah , et al. June 12, 2 | 2012-06-12 |
Confined Process Volume Pecvd Chamber
App 20110294303 - Sankarakrishnan; Ramprakash ; et al. | 2011-12-01 |
Shadow Ring For Modifying Wafer Edge And Bevel Deposition
App 20110159211 - Du Bois; Dale R. ; et al. | 2011-06-30 |
Method For Depositing An Amorphous Carbon Film With Improved Density And Step Coverage
App 20110104400 - Padhi; Deenesh ; et al. | 2011-05-05 |
Apparatus And Method For Substrate Clamping In A Plasma Chamber
App 20110090613 - Balasubramanian; Ganesh ; et al. | 2011-04-21 |
Apparatus and method for centering a substrate in a process chamber
Grant 7,922,440 - Du Bois , et al. April 12, 2 | 2011-04-12 |
Dual Temperature Heater
App 20110034034 - Du Bois; Dale R. ; et al. | 2011-02-10 |
Method for depositing an amorphous carbon film with improved density and step coverage
Grant 7,867,578 - Padhi , et al. January 11, 2 | 2011-01-11 |
Methods of uniformity control for low flow process and chamber to chamber matching
Grant 7,829,145 - Balasubramanian , et al. November 9, 2 | 2010-11-09 |
Method to deposit functionally graded dielectric films via chemical vapor deposition using viscous precursors
Grant 7,802,538 - Padhi , et al. September 28, 2 | 2010-09-28 |
Method and system for supplying a cleaning gas into a process chamber
Grant 7,699,935 - Sankarakrishnan , et al. April 20, 2 | 2010-04-20 |
Method and System for Supplying a Cleaning Gas Into a Process Chamber
App 20100012273 - Sankarakrishnan; Ramprakash ; et al. | 2010-01-21 |
Method And System For Supplying A Cleaning Gas Into A Process Chamber
App 20090314309 - Sankarakrishnan; Ramprakash ; et al. | 2009-12-24 |
Uniformity control for low flow process and chamber to chamber matching
Grant 7,622,005 - Balasubramanian , et al. November 24, 2 | 2009-11-24 |
Blocker plate bypass to distribute gases in a chemical vapor deposition system
Grant 7,572,337 - Rocha-Alvarez , et al. August 11, 2 | 2009-08-11 |
Methods to improve the in-film defectivity of PECVD amorphous carbon films
Grant 7,514,125 - Padhi , et al. April 7, 2 | 2009-04-07 |
Uniformity Control For Low Flow Process And Chamber To Chamber Matching
App 20090047446 - Balasubramanian; Ganesh ; et al. | 2009-02-19 |
Methods To Improve The In-film Defectivity Of Pecvd Amorphous Carbon Films
App 20090044753 - Padhi; Deenesh ; et al. | 2009-02-19 |
Systems For Plasma Enhanced Chemical Vapor Deposition And Bevel Edge Etching
App 20090014127 - Shah; Ashish ; et al. | 2009-01-15 |
Apparatus And Method For Processing A Substrate Edge Region
App 20090017635 - Shah; Ashish ; et al. | 2009-01-15 |
Apparatus And Method For Centering A Substrate In A Process Chamber
App 20090017228 - Du Bois; Dale R. ; et al. | 2009-01-15 |
Method For Depositing An Amorphous Carbon Film With Improved Density And Step Coverage
App 20080153311 - Padhi; Deenesh ; et al. | 2008-06-26 |
Apparatus And Method For Substrate Clamping In A Plasma Chamber
App 20080084650 - Balasubramanian; Ganesh ; et al. | 2008-04-10 |
Overall defect reduction for PECVD films
App 20080050932 - Lakshmanan; Annamalai ; et al. | 2008-02-28 |
Method For Depositing an Amorphous Carbon Film with Improved Density and Step Coverage
App 20080003824 - Padhi; Deenesh ; et al. | 2008-01-03 |
Methods To Improve The In-film Defectivity Of Pecvd Amorphous Carbon Films
App 20070295272 - Padhi; Deenesh ; et al. | 2007-12-27 |
Elimination Of First Wafer Effect For Pecvd Films
App 20070281083 - LAKSHMANAN; ANNAMALAI ; et al. | 2007-12-06 |
Situ oxide cap layer development
Grant 7,273,823 - Lakshmanan , et al. September 25, 2 | 2007-09-25 |
Enhancement of remote plasma source clean for dielectric films
App 20070207275 - Nowak; Thomas ; et al. | 2007-09-06 |
Interface engineering to improve adhesion between low k stacks
Grant 7,259,111 - Padhi , et al. August 21, 2 | 2007-08-21 |
Method To Deposit Functionally Graded Dielectric Films Via Chemical Vapor Deposition Using Viscous Precursors
App 20070079753 - Padhi; Deenesh ; et al. | 2007-04-12 |
Strengthening the interface between dielectric layers and barrier layers with an oxide layer of varying composition profile
Grant 7,189,658 - Lakshmanan , et al. March 13, 2 | 2007-03-13 |
Method to deposit functionally graded dielectric films via chemical vapor deposition using viscous precursors
Grant 7,166,544 - Padhi , et al. January 23, 2 | 2007-01-23 |
In situ oxide cap layer development
App 20060276054 - Lakshmanan; Annamalai ; et al. | 2006-12-07 |
Strengthening the interface between dielectric layers and barrier layers with an oxide layer of varying composition profile
App 20060252273 - Lakshmanan; Annamalai ; et al. | 2006-11-09 |
Interface engineering to improve adhesion between low k stacks
App 20060160376 - Padhi; Deenesh ; et al. | 2006-07-20 |
Method to reduce plasma damage during cleaning of semiconductor wafer processing chamber
App 20060054183 - Nowak; Thomas ; et al. | 2006-03-16 |
Method to deposit functionally graded dielectric films via chemical vapor deposition using viscous precursors
App 20060046520 - Padhi; Deenesh ; et al. | 2006-03-02 |
Blocker plate bypass to distribute gases in a chemical vapor deposition system
App 20050263248 - Rocha-Alvarez, Juan Carlos ; et al. | 2005-12-01 |
Uniformity control for low flow process and chamber to chamber matching
App 20050263072 - Balasubramanian, Ganesh ; et al. | 2005-12-01 |
Method for fixing and immobilising a catalyst on a support
App 20030176279 - Baudin, Isabelle ; et al. | 2003-09-18 |
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