Fodor; Mark A.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Fodor; Mark A..The latest application filed is for "tunable ground planes in plasma chambers".

Company Profile

1.13.14

Fodor; Mark A. - Los Gatos CA
Fodor; Mark A. - Redwood City CA
Fodor; Mark A. - Los Gators CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Tunable ground planes in plasma chambers Grant 10,774,423 - Janakiraman , et al. September 15, 2	2020-09-15
Tunable Ground Planes In Plasma Chambers App 20180073142 - Janakiraman; Karthik ; et al.	2018-03-15
Processing chamber with heated chamber liner Grant 8,444,926 - Fodor , et al. May 21, 2	2013-05-21
Systems For Plasma Enhanced Chemical Vapor Deposition And Bevel Edge Etching App 20120211164 - Shah; Ashish ; et al.	2012-08-23
Tunable Ground Planes In Plasma Chambers App 20120205046 - Janakiraman; Karthik ; et al.	2012-08-16
Systems for plasma enhanced chemical vapor deposition and bevel edge etching Grant 8,197,636 - Shah , et al. June 12, 2	2012-06-12
Apparatus and method for centering a substrate in a process chamber Grant 7,922,440 - Du Bois , et al. April 12, 2	2011-04-12
Big Foot Lift Pin App 20090314211 - Du Bois; Dale R. ; et al.	2009-12-24
Tunable Ground Planes In Plasma Chambers App 20090236214 - Janakiraman; Karthik ; et al.	2009-09-24
Systems For Plasma Enhanced Chemical Vapor Deposition And Bevel Edge Etching App 20090014127 - Shah; Ashish ; et al.	2009-01-15
Apparatus And Method For Centering A Substrate In A Process Chamber App 20090017228 - Du Bois; Dale R. ; et al.	2009-01-15
Apparatus And Method For Processing A Substrate Edge Region App 20090017635 - Shah; Ashish ; et al.	2009-01-15
Processing Chamber With Heated Chamber Liner App 20080178797 - FODOR; MARK A. ; et al.	2008-07-31
Hardware Development To Reduce Bevel Deposition App 20080152838 - SEN; SOOVO ; et al.	2008-06-26
Substrate support with clamping electrical connector Grant 7,354,288 - Maehara , et al. April 8, 2	2008-04-08
Substrate support with clamping electrical connector App 20060272774 - Maehara; Kazutoshi ; et al.	2006-12-07
Substrate heater assembly Grant 7,024,105 - Fodor , et al. April 4, 2	2006-04-04
Hardware development to reduce bevel deposition App 20050196971 - Sen, Soovo ; et al.	2005-09-08
Process kit design for deposition chamber App 20050150452 - Sen, Soovo ; et al.	2005-07-14
Substrate heater assembly App 20050078953 - Fodor, Mark A. ; et al.	2005-04-14
Ceramic protection for heated metal surfaces of plasma processing chamber exposed to chemically aggressive gaseous environment therein and method protecting such heated metal surfaces Grant 5,959,409 - Dornfest , et al. September 28, 1	1999-09-28
Ceramic susceptor with embedded metal electrode and brazing material connection Grant 5,817,406 - Cheung , et al. October 6, 1	1998-10-06
Ceramic protection for heated metal surfaces of plasma processing chamber exposed to chemically aggressive gaseous environment therein and method of protecting such heated metal surfaces Grant 5,680,013 - Dornfest , et al. October 21, 1	1997-10-21
Ceramic susceptor with embedded metal electrode and eutectic connection Grant 5,633,073 - Cheung , et al. May 27, 1	1997-05-27
Patterned susceptor to reduce electrostatic force in a CVD chamber Grant 5,531,835 - Fodor , et al. July 2, 1	1996-07-02
Slotted conical spring washer Grant 5,496,142 - Fodor , et al. March 5, 1	1996-03-05

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