| Patent | Date |
|---|
Methods for modifying photoresist profiles and tuning critical dimensions
Grant 11,456,173 - Gupta , et al. September 27, 2 | 2022-09-27 |
Film formation via pulsed RF plasma
Grant 11,443,919 - Nittala , et al. September 13, 2 | 2022-09-13 |
Controlling Concentration Profiles For Deposited Films Using Machine Learning
App 20220285232 - Baryshnikov; Anton V. ; et al. | 2022-09-08 |
Hardmasks and processes for forming hardmasks by plasma-enhanced chemical vapor deposition
Grant 11,421,324 - Hsu , et al. August 23, 2 | 2022-08-23 |
Methods, Systems, And Apparatus For Processing Substrates Using One Or More Amorphous Carbon Hardmask Layers
App 20220262643 - NITTALA; Krishna ; et al. | 2022-08-18 |
Gapfill Process Using Pulsed High-frequency Radio-frequency (hfrf) Plasma
App 20220238331 - Aydin; Aykut ; et al. | 2022-07-28 |
Plasma Enhanced Deposition Of Silicon-containing Films At Low Temperature
App 20220199404 - Aydin; Aykut ; et al. | 2022-06-23 |
Actively Cooled Foreline Trap To Reduce Throttle Valve Drift
App 20220170151 - Fu; Gaosheng ; et al. | 2022-06-02 |
Methods for conformal doping of three dimensional structures
Grant 11,335,555 - Cheng , et al. May 17, 2 | 2022-05-17 |
Multiple spacer patterning schemes
Grant 11,315,787 - Yang , et al. April 26, 2 | 2022-04-26 |
Hardmasks And Processes For Forming Hardmasks By Plasma Enhanced Chemical Vapor Deposition
App 20220119953 - HSU; Jui-Yuan ; et al. | 2022-04-21 |
Methods Of Forming Hardmasks
App 20220122835 - HSU; Jui-Yuan ; et al. | 2022-04-21 |
Bevel Backside Deposition Elimination
App 20220108872 - Huang; Zubin ; et al. | 2022-04-07 |
Boron Concentration Tunability In Boron-silicon Films
App 20220108892 - Yang; Yi ; et al. | 2022-04-07 |
Doping Semiconductor Films
App 20220093390 - Aydin; Aykut ; et al. | 2022-03-24 |
Radiation Shield For Removing Backside Deposition At Lift Pin Locations
App 20220093371 - Huang; Zubin ; et al. | 2022-03-24 |
Integration Processes Utilizing Boron-doped Silicon Materials
App 20220020599 - Koshizawa; Takehito ; et al. | 2022-01-20 |
Hydrogen Management In Plasma Deposited Films
App 20220020583 - Cheng; Rui ; et al. | 2022-01-20 |
Methods For Producing High-density, Nitrogen-doped Carbon Films For Hardmasks And Other Patterning Applications
App 20210407791 - HSU; Jui-Yuan ; et al. | 2021-12-30 |
Methods For Producing High-density Carbon Films For Hardmasks And Other Patterning Applications
App 20210407802 - HSU; Jui-Yuan ; et al. | 2021-12-30 |
Polysilicon liners
Grant 11,170,990 - Nittala , et al. November 9, 2 | 2021-11-09 |
Systems And Methods For Substrate Support Temperature Control
App 20210320027 - Huang; Zubin ; et al. | 2021-10-14 |
Deposition Radial And Edge Profile Tunability Through Independent Control Of Teos Flow
App 20210249230 - BALUJA; Sanjeev ; et al. | 2021-08-12 |
Surface Profiling And Texturing Of Chamber Components
App 20210183657 - GROECHEL; DAVID W. ; et al. | 2021-06-17 |
Methods for Conformal Doping of Three Dimensional Structures
App 20210175070 - CHENG; Rui ; et al. | 2021-06-10 |
Deposition radial and edge profile tunability through independent control of TEOS flow
Grant 11,017,986 - Baluja , et al. May 25, 2 | 2021-05-25 |
Apparatus And Methods For Improving Thermal Chemical Vapor Deposition (cvd) Uniformity
App 20210147981 - CHENG; Rui ; et al. | 2021-05-20 |
Methods To Reduce Material Surface Roughness
App 20210140045 - Yang; Yi ; et al. | 2021-05-13 |
Gas Delivery Systems And Methods
App 20210143029 - Kedlaya; Diwakar ; et al. | 2021-05-13 |
Amorphous Silicon-based Films Resistant To Crystallization
App 20210130174 - Aydin; Aykut ; et al. | 2021-05-06 |
Remote Capacitively Coupled Plasma Deposition Of Amorphous Silicon
App 20210040617 - HUANG; Zubin ; et al. | 2021-02-11 |
Rf Components With Chemically Resistant Surfaces
App 20200385866 - Srinivasan; Swaminathan ; et al. | 2020-12-10 |
Multiple Spacer Patterning Schemes
App 20200335338 - YANG; Tzu-Shun ; et al. | 2020-10-22 |
Multiple Spacer Patterning Schemes
App 20200335339 - YANG; Tzu-shun ; et al. | 2020-10-22 |
Methods For Modifying Photoresist Profiles And Tuning Critical Diimensions
App 20200321210 - GUPTA; Meenakshi ; et al. | 2020-10-08 |
Tunable ground planes in plasma chambers
Grant 10,774,423 - Janakiraman , et al. September 15, 2 | 2020-09-15 |
Polysilicon Liners
App 20200266052 - NITTALA; Krishna ; et al. | 2020-08-20 |
Method Of Processing A Substrate
App 20200266064 - NARAYANAN; Rajaram ; et al. | 2020-08-20 |
Film Formation Via Pulsed Rf Plasma
App 20200258720 - A1 | 2020-08-13 |
Semiconductor process equipment
Grant 10,734,265 - Janakiraman , et al. | 2020-08-04 |
Heated Pedestal Design For Improved Heat Transfer And Temperature Uniformity
App 20200234932 - PARIMI; Venkata Sharat Chandra ; et al. | 2020-07-23 |
Micro-volume deposition chamber
Grant 10,711,347 - DuBois , et al. | 2020-07-14 |
Methods For Forming Films Containing Silicon Boron With Low Leakage Current
App 20200211834 - YANG; Chuanxi ; et al. | 2020-07-02 |
Conformal Halogen Doping In 3D Structures Using Conformal Dopant Film Deposition
App 20200194571 - Cheng; Rui ; et al. | 2020-06-18 |
Pre-treatment approach to improve continuity of ultra-thin amorphous silicon film on silicon oxide
Grant 10,559,465 - Cheng , et al. Feb | 2020-02-11 |
Cvd Based Spacer Deposition With Zero Loading
App 20200043722 - CHENG; Rui ; et al. | 2020-02-06 |
Wafer swapper
Grant 10,518,418 - Du Bois , et al. Dec | 2019-12-31 |
Cvd Based Oxide-metal Multi Structure For 3d Nand Memory Devices
App 20190393042 - SINGHA ROY; Susmit ; et al. | 2019-12-26 |
Semiconductor process equipment
Grant 10,483,141 - Janakiraman , et al. Nov | 2019-11-19 |
Multizone Rotatable Diffuser Apparatus
App 20190309418 - GUNAJI; Akshay ; et al. | 2019-10-10 |
Dynamic wafer leveling/tilting/swiveling steps for use during a chemical vapor deposition process
Grant 10,438,860 - Bansal , et al. O | 2019-10-08 |
CVD based oxide-metal multi structure for 3D NAND memory devices
Grant 10,410,869 - Singha Roy , et al. Sept | 2019-09-10 |
Gas distribution apparatus for processing chambers
Grant 10,240,234 - Du Bois , et al. | 2019-03-26 |
Processing system containing an isolation region separating a deposition chamber from a treatment chamber
Grant 10,236,197 - Janakiraman , et al. | 2019-03-19 |
Pre-treatment Approach To Improve Continuity Of Ultra-thin Amorphous Silicon Film On Silicon Oxide
App 20190027362 - CHENG; Rui ; et al. | 2019-01-24 |
Deposition Radial And Edge Profile Tenability Through Independent Control Of Teos Flow
App 20180350562 - BALUJA; Sanjeev ; et al. | 2018-12-06 |
Semiconductor Process Equipment
App 20180308735 - JANAKIRAMAN; Karthik ; et al. | 2018-10-25 |
High Deposition Rate High Quality Silicon Nitride Enabled By Remote Nitrogen Radical Source
App 20180294144 - AUBUCHON; Joseph F. ; et al. | 2018-10-11 |
Method and system for supplying a cleaning gas into a process chamber
Grant 10,094,486 - Sankarakrishnan , et al. October 9, 2 | 2018-10-09 |
Gas Distribution Apparatus for Processing Chambers
App 20180237915 - DU BOIS; Dale R. ; et al. | 2018-08-23 |
Semiconductor process equipment
Grant 10,056,279 - Janakiraman , et al. August 21, 2 | 2018-08-21 |
Wafer Swapper
App 20180117771 - DU BOIS; Dale R. ; et al. | 2018-05-03 |
Semiconductor Process Equipment
App 20180076075 - JANAKIRAMAN; Karthik ; et al. | 2018-03-15 |
Tunable Ground Planes In Plasma Chambers
App 20180073142 - Janakiraman; Karthik ; et al. | 2018-03-15 |
Wafer swapper
Grant 9,889,567 - Du Bois , et al. February 13, 2 | 2018-02-13 |
Cvd Based Oxide-metal Multi Structure For 3d Nand Memory Devices
App 20170372953 - ROY; Susmit Singha ; et al. | 2017-12-28 |
Flowable Amorphous Silicon Films For Gapfill Applications
App 20170372919 - Manna; Pramit ; et al. | 2017-12-28 |
Dynamic Wafer Leveling/tilting/swiveling During A Chemical Vapor Deposition Process
App 20170309528 - BANSAL; Amit Kumar ; et al. | 2017-10-26 |
Micro-Volume Deposition Chamber
App 20170298509 - DuBois; Dale R. ; et al. | 2017-10-19 |
Ceramic Showerhead With Embedded Conductive Layers
App 20170211185 - DU BOIS; Dale R. ; et al. | 2017-07-27 |
Quad Chamber And Platform Having Multiple Quad Chambers
App 20170194174 - JANAKIRAMAN; Karthik ; et al. | 2017-07-06 |
Deposition Of Conformal And Gap-Fill Amorphous Silicon Thin-Films
App 20170114453 - Chen; Yihong ; et al. | 2017-04-27 |
Wafer Swapper
App 20160314995 - DU BOIS; Dale R. ; et al. | 2016-10-27 |
Semiconductor Process Equipment
App 20160218029 - JANAKIRAMAN; Karthik ; et al. | 2016-07-28 |
Tunable Ground Planes In Plasma Chambers
App 20160145742 - Janakiraman; Karthik ; et al. | 2016-05-26 |
Processing System Containing An Isolation Region separating a Deposition chamber from a treatment chamber
App 20160133489 - JANAKIRAMAN; Karthik ; et al. | 2016-05-12 |
Apparatus and method for substrate clamping in a plasma chamber
Grant 9,337,072 - Balasubramanian , et al. May 10, 2 | 2016-05-10 |
Method And System For Supplying A Cleaning Gas Into A Process Chamber
App 20160084400 - SANKARAKRISHNAN; Ramprakash ; et al. | 2016-03-24 |
Method and system for supplying a cleaning gas into a process chamber
Grant 9,206,511 - Sankarakrishnan , et al. December 8, 2 | 2015-12-08 |
Inductive/capacitive hybrid plasma source and system with such chamber
Grant 9,034,143 - Cho , et al. May 19, 2 | 2015-05-19 |
Method and apparatus for masking solar cell substrates for deposition
Grant 8,677,929 - Berger , et al. March 25, 2 | 2014-03-25 |
Method And System For Supplying A Cleaning Gas Into A Process Chamber
App 20140076236 - SANKARAKRISHNAN; Ramprakash ; et al. | 2014-03-20 |
Method and system for supplying a cleaning gas into a process chamber
Grant 8,591,699 - Sankarakrishnan , et al. November 26, 2 | 2013-11-26 |
Method And System For Supplying A Cleaning Gas Into A Process Chamber
App 20130213574 - Sankarakrishnan; Ramprakash ; et al. | 2013-08-22 |
Solar Wafer Electrostatic Chuck
App 20130105087 - Cho; Young Kyu ; et al. | 2013-05-02 |
System Architecture For Plasma Processing Solar Wafers
App 20130109189 - Cho; Young Kyu ; et al. | 2013-05-02 |
Inductive/capacitive Hybrid Plasma Source And System With Such Chamber
App 20130087531 - Cho; Young Kyu ; et al. | 2013-04-11 |
Large Area Icp Source For Plasma Application
App 20120291955 - Cho; Young Kyu ; et al. | 2012-11-22 |
Methods to improve the in-film defectivity of PECVD amorphous carbon films
Grant 8,282,734 - Padhi , et al. October 9, 2 | 2012-10-09 |
Systems For Plasma Enhanced Chemical Vapor Deposition And Bevel Edge Etching
App 20120211164 - Shah; Ashish ; et al. | 2012-08-23 |
Tunable Ground Planes In Plasma Chambers
App 20120205046 - Janakiraman; Karthik ; et al. | 2012-08-16 |
Methods To Improve The In-film Defectivity Of Pecvd Amorphous Carbon Films
App 20120204795 - Padhi; Deenesh ; et al. | 2012-08-16 |
Method For Depositing An Amorphous Carbon Film With Improved Density And Step Coverage
App 20120208373 - PADHI; DEENESH ; et al. | 2012-08-16 |
Method And Apparatus For Masking Substrates For Deposition
App 20120171807 - BERGER; Alexander J. ; et al. | 2012-07-05 |
Systems for plasma enhanced chemical vapor deposition and bevel edge etching
Grant 8,197,636 - Shah , et al. June 12, 2 | 2012-06-12 |
Systems And Methods For Moving Web Etch, Cvd, And Ion Implant
App 20120138230 - BLUCK; Terry ; et al. | 2012-06-07 |
Nonplanar faceplate for a plasma processing chamber
Grant 8,097,082 - Zhou , et al. January 17, 2 | 2012-01-17 |
Method For Depositing An Amorphous Carbon Film With Improved Density And Step Coverage
App 20110104400 - Padhi; Deenesh ; et al. | 2011-05-05 |
Apparatus And Method For Substrate Clamping In A Plasma Chamber
App 20110090613 - Balasubramanian; Ganesh ; et al. | 2011-04-21 |
Apparatus and method for centering a substrate in a process chamber
Grant 7,922,440 - Du Bois , et al. April 12, 2 | 2011-04-12 |
Method for depositing an amorphous carbon film with improved density and step coverage
Grant 7,867,578 - Padhi , et al. January 11, 2 | 2011-01-11 |
Method and system for supplying a cleaning gas into a process chamber
Grant 7,699,935 - Sankarakrishnan , et al. April 20, 2 | 2010-04-20 |
Method and System for Supplying a Cleaning Gas Into a Process Chamber
App 20100012273 - Sankarakrishnan; Ramprakash ; et al. | 2010-01-21 |
Method And System For Supplying A Cleaning Gas Into A Process Chamber
App 20090314309 - Sankarakrishnan; Ramprakash ; et al. | 2009-12-24 |
Big Foot Lift Pin
App 20090314211 - Du Bois; Dale R. ; et al. | 2009-12-24 |
Pedestal Heater For Low Temperature Pecvd Application
App 20090314208 - Zhou; Jianhua ; et al. | 2009-12-24 |
Nonplanar Faceplate For A Plasma Processing Chamber
App 20090269512 - Zhou; Jianhua ; et al. | 2009-10-29 |
Tunable Ground Planes In Plasma Chambers
App 20090236214 - Janakiraman; Karthik ; et al. | 2009-09-24 |
Gas Mixing Swirl Insert Assembly
App 20090120364 - Suarez; Edwin C. ; et al. | 2009-05-14 |
Methods to improve the in-film defectivity of PECVD amorphous carbon films
Grant 7,514,125 - Padhi , et al. April 7, 2 | 2009-04-07 |
Methods To Improve The In-film Defectivity Of Pecvd Amorphous Carbon Films
App 20090044753 - Padhi; Deenesh ; et al. | 2009-02-19 |
Apparatus And Method For Centering A Substrate In A Process Chamber
App 20090017228 - Du Bois; Dale R. ; et al. | 2009-01-15 |
Apparatus And Method For Processing A Substrate Edge Region
App 20090017635 - Shah; Ashish ; et al. | 2009-01-15 |
Systems For Plasma Enhanced Chemical Vapor Deposition And Bevel Edge Etching
App 20090014127 - Shah; Ashish ; et al. | 2009-01-15 |
Gas distribution showerhead featuring exhaust apertures
Grant 7,452,827 - Gianoulakis , et al. November 18, 2 | 2008-11-18 |
Method For Depositing An Amorphous Carbon Film With Improved Density And Step Coverage
App 20080153311 - Padhi; Deenesh ; et al. | 2008-06-26 |
Apparatus And Method For Substrate Clamping In A Plasma Chamber
App 20080084650 - Balasubramanian; Ganesh ; et al. | 2008-04-10 |
Method For Depositing an Amorphous Carbon Film with Improved Density and Step Coverage
App 20080003824 - Padhi; Deenesh ; et al. | 2008-01-03 |
Methods To Improve The In-film Defectivity Of Pecvd Amorphous Carbon Films
App 20070295272 - Padhi; Deenesh ; et al. | 2007-12-27 |
Enhancement of remote plasma source clean for dielectric films
App 20070207275 - Nowak; Thomas ; et al. | 2007-09-06 |
Gas distribution showerhead featuring exhaust apertures
App 20060234514 - Gianoulakis; Steven ; et al. | 2006-10-19 |
Backflush chamber clean
Grant 7,037,376 - Harvey , et al. May 2, 2 | 2006-05-02 |
Reduction of reactive gas attack on substrate heater
App 20060005856 - Sun; David ; et al. | 2006-01-12 |
Gas distribution showerhead featuring exhaust apertures
App 20050103265 - Gianoulakis, Steven ; et al. | 2005-05-19 |
Gas flow control in a wafer processing system having multiple chambers for performing same process
Grant 6,843,882 - Janakiraman , et al. January 18, 2 | 2005-01-18 |
Blocker plate by-pass for remote plasma clean
Grant 6,830,624 - Janakiraman , et al. December 14, 2 | 2004-12-14 |
Blocker Plate By-pass For Remote Plasma Clean
App 20040216844 - Janakiraman, Karthik ; et al. | 2004-11-04 |
Backflush chamber clean
App 20040200499 - Harvey, Keith ; et al. | 2004-10-14 |
Gas distribution showerhead
Grant 6,793,733 - Janakiraman , et al. September 21, 2 | 2004-09-21 |
Gas distribution showerhead
App 20040060514 - Janakiraman, Karthik ; et al. | 2004-04-01 |
Gas flow control in a wafer processing system having multiple chambers for performing same process
App 20040007176 - Janakiraman, Karthik ; et al. | 2004-01-15 |
Gas distribution showerhead
App 20030140851 - Janakiraman, Karthik ; et al. | 2003-07-31 |
Integration of remote plasma generator with semiconductor processing chamber
Grant 6,387,207 - Janakiraman , et al. May 14, 2 | 2002-05-14 |
| 