| Patent | Date |
|---|
Device and method for producing reaction plastics
Grant 11,298,852 - Brunner , et al. April 12, 2 | 2022-04-12 |
Device And Method For Producing Reaction Plastics
App 20210308907 - Brunner; Robert ; et al. | 2021-10-07 |
Dual temperature heater
Grant 11,133,210 - Du Bois , et al. September 28, 2 | 2021-09-28 |
Pecvd Process
App 20200399756 - RAJAGOPALAN; Nagarajan ; et al. | 2020-12-24 |
Protein Purification And Virus Inactivation With Alkyl Glycosides
App 20200317727 - BRANDT; Tobias ; et al. | 2020-10-08 |
PECVD process
Grant 10,793,954 - Rajagopalan , et al. October 6, 2 | 2020-10-06 |
Tunable ground planes in plasma chambers
Grant 10,774,423 - Janakiraman , et al. September 15, 2 | 2020-09-15 |
Method For Virus Filtration Of Von Willebrand Factor
App 20200199176 - NOWAK; Thomas ; et al. | 2020-06-25 |
Apparatus and method for UV treatment, chemical treatment, and deposition
Grant 10,570,517 - Bansal , et al. Feb | 2020-02-25 |
Nozzle unit for a reaction moulding machine and method for producing a plastic part
App 20200001501 - Berg; Alexander ; et al. | 2020-01-02 |
Monitoring system for deposition and method of operation thereof
Grant 10,522,375 - Budiarto , et al. Dec | 2019-12-31 |
Method and apparatus for surface nanoparticle measurement
Grant 10,478,868 - Nowak Nov | 2019-11-19 |
Dual Temperature Heater
App 20190304825 - Du BOIS; Dale R. ; et al. | 2019-10-03 |
System and method for processing an electromagnetic signal
Grant 10,404,372 - Nowak , et al. Sep | 2019-09-03 |
Dual temperature heater
Grant 10,325,799 - Du Bois , et al. | 2019-06-18 |
Method and system for supplying a cleaning gas into a process chamber
Grant 10,094,486 - Sankarakrishnan , et al. October 9, 2 | 2018-10-09 |
Pecvd Process
App 20180258535 - RAJAGOPALAN; Nagarajan ; et al. | 2018-09-13 |
PECVD process
Grant 10,060,032 - Rajagopalan , et al. August 28, 2 | 2018-08-28 |
PECVD apparatus and process
Grant 10,030,306 - Rajagopalan , et al. July 24, 2 | 2018-07-24 |
System And Method For Processing An Electromagnetic Signal
App 20180205462 - Nowak; Thomas ; et al. | 2018-07-19 |
Monitoring System For Deposition And Method Of Operation Thereof
App 20180114711 - Budiarto; Edward W. ; et al. | 2018-04-26 |
Tunable Ground Planes In Plasma Chambers
App 20180073142 - Janakiraman; Karthik ; et al. | 2018-03-15 |
Pecvd Process
App 20180066364 - RAJAGOPALAN; Nagarajan ; et al. | 2018-03-08 |
Monitoring system for deposition and method of operation thereof
Grant 9,870,935 - Budiarto , et al. January 16, 2 | 2018-01-16 |
PECVD process
Grant 9,816,187 - Rajagopalan , et al. November 14, 2 | 2017-11-14 |
Method And Apparatus For Surface Nanoparticle Measurement
App 20170157651 - NOWAK; Thomas | 2017-06-08 |
Pecvd Process
App 20170016118 - RAJAGOPALAN; Nagarajan ; et al. | 2017-01-19 |
Method and hardware for cleaning UV chambers
Grant 9,506,145 - Baluja , et al. November 29, 2 | 2016-11-29 |
Method And Hardware For Cleaning Uv Chambers
App 20160296981 - BALUJA; Sanjeev ; et al. | 2016-10-13 |
Apparatus And Method For Uv Treatment, Chemical Treatment, And Deposition
App 20160289838 - BANSAL; Amit ; et al. | 2016-10-06 |
PECVD process
Grant 9,458,537 - Rajagopalan , et al. October 4, 2 | 2016-10-04 |
Monitoring System For Deposition And Method Of Operation Thereof
App 20160181134 - Budiarto; Edward W. ; et al. | 2016-06-23 |
Method and hardware for cleaning UV chambers
Grant 9,364,871 - Baluja , et al. June 14, 2 | 2016-06-14 |
Tunable Ground Planes In Plasma Chambers
App 20160145742 - Janakiraman; Karthik ; et al. | 2016-05-26 |
Dual Temperature Heater
App 20160093521 - DU BOIS; Dale R. ; et al. | 2016-03-31 |
Method And System For Supplying A Cleaning Gas Into A Process Chamber
App 20160084400 - SANKARAKRISHNAN; Ramprakash ; et al. | 2016-03-24 |
Pecvd Process
App 20160017497 - RAJAGOPALAN; NAGARAJAN ; et al. | 2016-01-21 |
Method and system for supplying a cleaning gas into a process chamber
Grant 9,206,511 - Sankarakrishnan , et al. December 8, 2 | 2015-12-08 |
PECVD process
Grant 9,157,730 - Rajagopalan , et al. October 13, 2 | 2015-10-13 |
Pecvd Apparatus And Process
App 20150226540 - Rajagopalan; Nagarajan ; et al. | 2015-08-13 |
Measurement Of Film Thickness On An Arbitrary Substrate
App 20150203966 - BUDIARTO; Edward ; et al. | 2015-07-23 |
Quartz showerhead for nanocure UV chamber
Grant 8,911,553 - Baluja , et al. December 16, 2 | 2014-12-16 |
Light Irradiance And Thermal Measurement In Uv And Cvd Chambers
App 20140264059 - BALUJA; Sanjeev ; et al. | 2014-09-18 |
Confined process volume PECVD chamber
Grant 8,778,813 - Sankarakrishnan , et al. July 15, 2 | 2014-07-15 |
Pecvd Process
App 20140118751 - RAJAGOPALAN; Nagarajan ; et al. | 2014-05-01 |
Superimposition of rapid periodic and extensive post multiple substrate UV-ozone clean sequences for high throughput and stable substrate to substrate performance
Grant 8,702,870 - Yi , et al. April 22, 2 | 2014-04-22 |
Deposition of an amorphous carbon layer with high film density and high etch selectivity
Grant 8,679,987 - Reilly , et al. March 25, 2 | 2014-03-25 |
Method And System For Supplying A Cleaning Gas Into A Process Chamber
App 20140076236 - SANKARAKRISHNAN; Ramprakash ; et al. | 2014-03-20 |
Method And Hardware For Cleaning Uv Chambers
App 20140053866 - BALUJA; Sanjeev ; et al. | 2014-02-27 |
Apparatus and method for exposing a substrate to UV radiation using a reflector having both elliptical and parabolic reflective sections
Grant 8,597,011 - Kaszuba , et al. December 3, 2 | 2013-12-03 |
Method and system for supplying a cleaning gas into a process chamber
Grant 8,591,699 - Sankarakrishnan , et al. November 26, 2 | 2013-11-26 |
Deposition Of An Amorphous Carbon Layer With High Film Density And High Etch Selectivity
App 20130302996 - REILLY; Patrick ; et al. | 2013-11-14 |
Silicon nitride passivation layer for covering high aspect ratio features
Grant 8,563,095 - Rajagopalan , et al. October 22, 2 | 2013-10-22 |
Method And System For Supplying A Cleaning Gas Into A Process Chamber
App 20130213574 - Sankarakrishnan; Ramprakash ; et al. | 2013-08-22 |
UV assisted silylation for recovery and pore sealing of damaged low K films
Grant 8,492,170 - Xie , et al. July 23, 2 | 2013-07-23 |
Zero Shrinkage Smooth Interface Oxy-nitride And Oxy-amorphous-silicon Stacks For 3d Memory Vertical Gate Application
App 20130161629 - HAN; XINHAI ; et al. | 2013-06-27 |
Dual-bulb Lamphead Control Methodology
App 20130122611 - YANG; YAO-HUNG ; et al. | 2013-05-16 |
Silicon dioxide layer deposited with BDEAS
Grant 8,343,881 - Lee , et al. January 1, 2 | 2013-01-01 |
Ultraviolet reflector with coolant gas holes and method
Grant 8,338,809 - Yang , et al. December 25, 2 | 2012-12-25 |
Fabrication of through-silicon vias on silicon wafers
Grant 8,329,575 - Rajagopalan , et al. December 11, 2 | 2012-12-11 |
Dual-bulb lamphead control methodology
Grant 8,309,421 - Yang , et al. November 13, 2 | 2012-11-13 |
Adhesion Improvement Of Dielectric Barrier To Copper By The Addition Of Thin Interface Layer
App 20120276301 - Lee; Yong-Won ; et al. | 2012-11-01 |
Uv Assisted Silylation For Recovery And Pore Sealing Of Damaged Low K Films
App 20120270339 - Xie; Bo ; et al. | 2012-10-25 |
Apparatus And Method For Uv Treatment, Chemical Treatment, And Deposition
App 20120258259 - Bansal; Amit ; et al. | 2012-10-11 |
Fabrication of through-silicon vias on silicon wafers
Grant 8,283,237 - Rajagopalan , et al. October 9, 2 | 2012-10-09 |
Multifunctional heater/chiller pedestal for wide range wafer temperature control
Grant 8,274,017 - Yap , et al. September 25, 2 | 2012-09-25 |
Systems For Plasma Enhanced Chemical Vapor Deposition And Bevel Edge Etching
App 20120211164 - Shah; Ashish ; et al. | 2012-08-23 |
Tunable Ground Planes In Plasma Chambers
App 20120205046 - Janakiraman; Karthik ; et al. | 2012-08-16 |
Dielectric recovery of plasma damaged low-k films by UV-assisted photochemical deposition
Grant 8,216,861 - Yim , et al. July 10, 2 | 2012-07-10 |
Fabrication Of Through-silicon Vias On Silicon Wafers
App 20120164827 - RAJAGOPALAN; Nagarajan ; et al. | 2012-06-28 |
Fabrication Of Through-silicon Vias On Silicon Wafers
App 20120164829 - Rajagopalan; Nagarajan ; et al. | 2012-06-28 |
Apparatus and method for exposing a substrate to a rotating irradiance pattern of UV radiation
Grant 8,203,126 - Rocha-Alvarez , et al. June 19, 2 | 2012-06-19 |
Systems for plasma enhanced chemical vapor deposition and bevel edge etching
Grant 8,197,636 - Shah , et al. June 12, 2 | 2012-06-12 |
Dual-bulb Lamphead Control Methodology
App 20120129275 - Yang; Yao-Hung ; et al. | 2012-05-24 |
Dual Delivery Chamber Design
App 20120097330 - Iyengar; Prahallad ; et al. | 2012-04-26 |
Quartz Showerhead For Nanocure Uv Chamber
App 20120090691 - Baluja; Sanjeev ; et al. | 2012-04-19 |
Apparatus And Method For Exposing A Substrate To Uv Radiation Using A Reflector Having Both Elliptical And Parabolic Reflective Sections
App 20120003398 - Kaszuba; Andrzei ; et al. | 2012-01-05 |
Silicon Dioxide Layer Deposited With Bdeas
App 20110298099 - LEE; Yong-Won ; et al. | 2011-12-08 |
Confined Process Volume Pecvd Chamber
App 20110294303 - Sankarakrishnan; Ramprakash ; et al. | 2011-12-01 |
Ultraviolet Reflector With Coolant Gas Holes And Method
App 20110248183 - Yang; Yao-Hung ; et al. | 2011-10-13 |
Silicon Nitride Passivation Layer For Covering High Aspect Ratio Features
App 20110223765 - RAJAGOPALAN; Nagarajan ; et al. | 2011-09-15 |
Multifunctional Heater/chiller Pedestal For Wide Range Wafer Temperature Control
App 20110147363 - Yap; Lipyeow ; et al. | 2011-06-23 |
Ultraviolet reflector with coolant gas holes and method
Grant 7,964,858 - Yang , et al. June 21, 2 | 2011-06-21 |
Superimposition Of Rapid Periodic And Extensive Post Multiple Substrate Uv-ozone Clean Sequences For High Throughput And Stable Substrate To Substrate Performance
App 20110100394 - Yi; Sang In ; et al. | 2011-05-05 |
Apparatus and method for exposing a substrate to UV radiation using a reflector having both elliptical and parabolic reflective sections
Grant 7,909,595 - Kaszuba , et al. March 22, 2 | 2011-03-22 |
Dual Temperature Heater
App 20110034034 - Du Bois; Dale R. ; et al. | 2011-02-10 |
Apparatus And Method For Exposing A Substrate To A Rotating Irradiance Pattern Of Uv Radiation
App 20100285240 - Rocha-Alvarez; Juan Carlos ; et al. | 2010-11-11 |
Apparatus and method for exposing a substrate to a rotating irradiance pattern of UV radiation
Grant 7,777,198 - Rocha-Alvarez , et al. August 17, 2 | 2010-08-17 |
Reduction of hillocks prior to dielectric barrier deposition in Cu damascene
Grant 7,723,228 - Rajagopalan , et al. May 25, 2 | 2010-05-25 |
Ultraviolet Reflector With Coolant Gas Holes And Method
App 20100096564 - Yang; Yao-Hung ; et al. | 2010-04-22 |
Ultraviolet-transmitting Microwave Reflector Comprising A Micromesh Screen
App 20100096569 - Nguyen; Tuan Anh ; et al. | 2010-04-22 |
Method and system for supplying a cleaning gas into a process chamber
Grant 7,699,935 - Sankarakrishnan , et al. April 20, 2 | 2010-04-20 |
Apparatus and method for exposing a substrate to UV radiation using asymmetric reflectors
Grant 7,692,171 - Kaszuba , et al. April 6, 2 | 2010-04-06 |
High efficiency UV curing system
Grant 7,663,121 - Nowak , et al. February 16, 2 | 2010-02-16 |
Superimposition Of Rapid Periodic And Extensive Post Multiple Substrate Uv-ozone Clean Sequences For High Throughput And Stable Substrate To Substrate Performance
App 20100018548 - Yi; Sang In ; et al. | 2010-01-28 |
Method and System for Supplying a Cleaning Gas Into a Process Chamber
App 20100012273 - Sankarakrishnan; Ramprakash ; et al. | 2010-01-21 |
Method And System For Supplying A Cleaning Gas Into A Process Chamber
App 20090314309 - Sankarakrishnan; Ramprakash ; et al. | 2009-12-24 |
Method And Apparatus For Uv Curing With Water Vapor
App 20090305515 - Ho; Dustin ; et al. | 2009-12-10 |
Heated gas box for PECVD applications
Grant 7,628,863 - Sen , et al. December 8, 2 | 2009-12-08 |
Tunable Ground Planes In Plasma Chambers
App 20090236214 - Janakiraman; Karthik ; et al. | 2009-09-24 |
Apparatus and method for exposing a substrate to UV radiation while monitoring deterioration of the UV source and reflectors
Grant 7,589,336 - Kaszuba , et al. September 15, 2 | 2009-09-15 |
Blocker plate bypass to distribute gases in a chemical vapor deposition system
Grant 7,572,337 - Rocha-Alvarez , et al. August 11, 2 | 2009-08-11 |
Apparatus and method for treating a substrate with UV radiation using primary and secondary reflectors
Grant 7,566,891 - Rocha-Alvarez , et al. July 28, 2 | 2009-07-28 |
Increased tool utilization/reduction in MWBC for UV curing chamber
Grant 7,554,103 - Rocha-Alvarez , et al. June 30, 2 | 2009-06-30 |
High Efficiency Uv Curing System
App 20090162259 - Nowak; Thomas ; et al. | 2009-06-25 |
Adhesion Improvement Of Dielectric Barrier To Copper By The Addition Of Thin Interface Layer
App 20090107626 - Lee; Yong-Won ; et al. | 2009-04-30 |
High Productivity Plasma Processing Chamber
App 20090068356 - SILVETTI; MARIO David ; et al. | 2009-03-12 |
Systems For Plasma Enhanced Chemical Vapor Deposition And Bevel Edge Etching
App 20090014127 - Shah; Ashish ; et al. | 2009-01-15 |
Apparatus And Method For Processing A Substrate Edge Region
App 20090017635 - Shah; Ashish ; et al. | 2009-01-15 |
Reduction of hillocks prior to dielectric barrier deposition in Cu damascene
Grant 7,371,427 - Rajagopalan , et al. May 13, 2 | 2008-05-13 |
Reduction Of Hillocks Prior To Dielectric Barrier Deposition In Cu Damascene
App 20080075888 - Rajagopalan; Nagarajan ; et al. | 2008-03-27 |
Apparatus And Method For Exposing A Substrate To Uv Radiation Using Asymmetric Reflectors
App 20080067425 - Kaszuba; Andrzei ; et al. | 2008-03-20 |
Increased Tool Utilization/reduction In Mwbc For Uv Curing Chamber
App 20070298362 - Rocha-Alvarez; Juan Carlos ; et al. | 2007-12-27 |
Apparatus And Method For Exposing A Substrate To A Rotating Irradiance Pattern Of Uv Radiation
App 20070286963 - Rocha-Alvarez; Juan Carlos ; et al. | 2007-12-13 |
Apparatus And Method For Treating A Substrate With Uv Radiation Using Primary And Secondary Reflectors
App 20070257205 - Rocha-Alvarez; Juan Carlos ; et al. | 2007-11-08 |
Apparatus And Method For Exposing A Substrate To Uv Radiation While Monitoring Deterioration Of The Uv Source And Reflectors
App 20070228289 - Kaszuba; Andrzei ; et al. | 2007-10-04 |
Apparatus And Method For Exposing A Substrate To Uv Radiation Using A Reflector Having Both Elliptical And Parabolic Reflective Sections
App 20070228618 - Kaszuba; Andrzei ; et al. | 2007-10-04 |
Enhancement of remote plasma source clean for dielectric films
App 20070207275 - Nowak; Thomas ; et al. | 2007-09-06 |
Heated gas box for PECVD applications
App 20070107660 - Sen; Soovo ; et al. | 2007-05-17 |
High efficiency UV curing system
App 20060249175 - Nowak; Thomas ; et al. | 2006-11-09 |
Tandem Uv Chamber For Curing Dielectric Materials
App 20060251827 - Nowak; Thomas ; et al. | 2006-11-09 |
High Efficiency Uv Curing System
App 20060249078 - Nowak; Thomas ; et al. | 2006-11-09 |
High-power dielectric seasoning for stable wafer-to-wafer thickness uniformity of dielectric CVD films
App 20060093756 - Rajagopalan; Nagarajan ; et al. | 2006-05-04 |
Method to reduce plasma damage during cleaning of semiconductor wafer processing chamber
App 20060054183 - Nowak; Thomas ; et al. | 2006-03-16 |
Heated gas box for PECVD applications
App 20060027165 - Sen; Soovo ; et al. | 2006-02-09 |
Blocker plate bypass to distribute gases in a chemical vapor deposition system
App 20050263248 - Rocha-Alvarez, Juan Carlos ; et al. | 2005-12-01 |
High productivity plasma processing chamber
App 20050229849 - Silvetti, Mario David ; et al. | 2005-10-20 |
Process kit design for deposition chamber
App 20050150452 - Sen, Soovo ; et al. | 2005-07-14 |
Enhanced remote plasma cleaning
Grant 6,868,856 - Nowak , et al. March 22, 2 | 2005-03-22 |
Semiconductor device fabrication chamber cleaning method and apparatus with recirculation of cleaning gas
Grant 6,863,019 - Shamouilian , et al. March 8, 2 | 2005-03-08 |
Detecting chemiluminescent radiation in the cleaning of a substrate processing chamber
Grant 6,843,881 - Kim , et al. January 18, 2 | 2005-01-18 |
Reduction of hillocks prior to dielectric barrier deposition in Cu damascene
App 20040235292 - Rajagopalan, Nagarajan ; et al. | 2004-11-25 |
Reduction of hillocks prior to dielectric barrier deposition in Cu damascene
App 20040231795 - Rajagopalan, Nagarajan ; et al. | 2004-11-25 |
Process For Sterilization Of Biological Compositions Containg Protein
App 20040131497 - Lengsfeld, Thomas ; et al. | 2004-07-08 |
Detecting chemiluminescent radiation in the cleaning of a substrate processing chamber
App 20030185966 - Kim, Bok Hoen ; et al. | 2003-10-02 |
Semiconductor device fabrication chamber cleaning method and apparatus with recirculation of cleaning gas
App 20030036272 - Shamouilian, Shamouil ; et al. | 2003-02-20 |
Conveyorized vacuum injection system
App 20030010286 - Nowak, Thomas ; et al. | 2003-01-16 |
Enhanced remote plasma cleaning
App 20030010355 - Nowak, Thomas ; et al. | 2003-01-16 |
Process for the inactivation of viruses
Grant 6,468,778 - Schueler , et al. October 22, 2 | 2002-10-22 |
Conveyorized vacuum injection system
Grant 6,444,035 - Nowak , et al. September 3, 2 | 2002-09-03 |
Removal Of Viruses From Protein Solutions By Ultrafiltration
App 20020068368 - BERNHARDT, DIETER ; et al. | 2002-06-06 |
Method and apparatus for optical detection of effluent composition
Grant 6,366,346 - Nowak , et al. April 2, 2 | 2002-04-02 |
Dilute remote plasma clean
Grant 6,329,297 - Balish , et al. December 11, 2 | 2001-12-11 |
Portable batch blending system
Grant 5,634,716 - Westall , et al. June 3, 1 | 1997-06-03 |
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