Seal member for semiconductor production apparatus

Description

FIG. 1 is a perspective view of a seal member for semiconductor production apparatus, showing our new design;

FIG. 2 is a front elevation view thereof;

FIG. 3 is a rear elevation view thereof;

FIG. 4 is a left side elevation view thereof;

FIG. 5 is a right side elevation view thereof;

FIG. 6 is a top view thereof;

FIG. 7 is a bottom view thereof;

FIG. 8 is a cross-sectional view thereof taken along line 8-8 shown in FIG. 6; and,

FIG. 9 is an enlarged cross-sectional view of a portion thereof taken from area 9-9 shown in FIG. 8.

Claims

CLAIM The ornamental design for a seal member for semiconductor production apparatus, as shown and described.

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Inventors:	Yoshida; Nobuhiro (Gojo, JP), Nakagawa; Ippei (Gojo, JP)
Applicant:	Name City State Country Type Valqua, Ltd. Tokyo N/A JP
Assignee:	Valqua, Ltd. (Tokyo, JP)
Appl. No.:	D/750,937
Filed:	September 17, 2020

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Related U.S. Patent Documents

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	Application Number	Filing Date	Patent Number	Issue Date
	35507483	Apr 1, 2019	D909322

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Foreign Application Priority Data

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Oct 12, 2018 [JP]			2018-022466
Oct 12, 2018 [JP]			2018-022467
Oct 12, 2018 [JP]			2018-022468
Oct 12, 2018 [JP]			2018-022469

Current U.S. Class:	D13/182
Current International Class:	1303
Field of Search:	;D13/199 ;D4/137 ;D9/416 ;D23/269 ;D15/7

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Other References

"High Performance FKM" found by RMS on the internet at: https://valqua-america.com/products/semiconductor_b.html reference dated Mar. 24, 2021. cited by examiner.

Primary Examiner: Shields; Rhea
Attorney, Agent or Firm: The Webb Law Firm