Boat of substrate processing apparatus

Description

FIG. 1 is a front, top and right side perspective view of a boat of substrate processing apparatus showing our new design;

FIG. 2 is a rear, top and left side perspective view thereof;

FIG. 3 is a front elevational view thereof;

FIG. 4 is a rear elevational view thereof;

FIG. 5 is a left side elevational view thereof;

FIG. 6 is a right side elevational view thereof;

FIG. 7 is a top plan view thereof;

FIG. 8 is a bottom plan view thereof;

FIG. 9 is a cross sectional view taken along line 9-9 in FIG. 3; and,

FIG. 10 is a cross sectional view taken along line 10-10 in FIG. 3.

Claims

CLAIM The ornamental design for a boat of substrate processing apparatus, as shown.

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Inventors:	Yoshida; Hidenari (Toyama, JP), Taniyama; Tomoshi (Toyama, JP)
Applicant:	Name City State Country Type Hitachi Kokusai Electric Inc. Tokyo N/A JP
Assignee:	HITACHI KOKUSAI ELECTRIC INC. (Tokyo, JP)
Appl. No.:	D/459,104
Filed:	June 26, 2013

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Foreign Application Priority Data

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Dec 27, 2012 [JP]			2012-031874

Current U.S. Class:	D13/182
Current International Class:	1303
Field of Search:	;D13/182 ;D15/144,144.1,199 ;118/715,500,728,729 ;211/41.18 ;432/253,258 ;156/345.51,345.52,345.53,345.55 ;414/217,220.01,935,936-941

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References Cited [Referenced By]

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U.S. Patent Documents

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Primary Examiner: Oswecki; Elizabeth J
Attorney, Agent or Firm: Fitch, Even, Tabin and Flannery LLP