Sheet heater for electrostatic chuck

Description

FIG. 1 is a front view of a first embodiment of a sheet heater for electrostatic chuck illustrating our new design;

FIG. 2 is a rear view thereof;

FIG. 3 is a top view thereof, the bottom view thereof being a mirror image;

FIG. 4 is a right view thereof, the left view thereof being a mirror image;

FIG. 5 is an enlarged view taken along line 5-5 in FIG. 1;

FIG. 6 is an enlarged view taken along line 6-6 in FIG. 5;

FIG. 7 is an enlarged view taken along line 7-7 in FIG. 6;

FIG. 8 is an enlarged view taken along line 8-8 in FIG. 7;

FIG. 9 is a front view of a second embodiment of a sheet heater for electrostatic chuck illustrating our new design;

FIG. 10 is a rear view thereof;

FIG. 11 is a top view thereof, the bottom view thereof being a mirror image;

FIG. 12 is a right view thereof, the left view thereof being a mirror image;

FIG. 13 is an enlarged view taken along line 13-13 in FIG. 9;

FIG. 14 is an enlarged view taken along line 14-14 in FIG. 13;

FIG. 15 is an enlarged view taken along line 15-15 in FIG. 14;

FIG. 16 is an enlarged view taken along line 16-16 in FIG. 15;

FIG. 17 is a front view of a third embodiment of a sheet heater for electrostatic chuck illustrating our new design;

FIG. 18 is a rear view thereof;

FIG. 19 is a top view thereof, the bottom view thereof being a mirror image;

FIG. 20 is a right view thereof, the left view thereof being a mirror image;

FIG. 21 is an enlarged view taken along line 21-21 in FIG. 17;

FIG. 22 is an enlarged view taken along line 22-22 in FIG. 21;

FIG. 23 is an enlarged view taken along line 23-23 in FIG. 22; and,

FIG. 24 is an enlarged view taken along line 24-24 in FIG. 23.

The broken lines in the drawings depict unclaimed subject matter only and form no part of the claimed design.

Claims

CLAIM The ornamental design for a sheet heater for electrostatic chuck, as shown and described.

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Inventors:	Takebayashi; Hiroshi (Nagoya, JP), Kin; Rishun (Nagoya, JP)
Applicant:	Name City State Country Type NGK Insulators, Ltd. Nagoya-Shi N/A JP
Assignee:	NGK Insulators, Ltd. (Nagoya, JP)
Appl. No.:	D/581,749
Filed:	October 21, 2016

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Foreign Application Priority Data

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Apr 27, 2016 [JP]			2016-009254
Apr 27, 2016 [JP]			2016-009255
Apr 27, 2016 [JP]			2016-009258

Current U.S. Class:	D13/182
Current International Class:	1303
Field of Search:	;D13/182 ;219/443.1,444.1 ;118/724,725

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References Cited [Referenced By]

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U.S. Patent Documents

D266070	September 1982	Asanuma
D266074	September 1982	Asanuma
D266077	September 1982	Asanuma
D273582	April 1984	Bolt
D273860	May 1984	Bolt
D327883	July 1992	Gloton
D328599	August 1992	Gloton
D370464	June 1996	Tepper
D405427	February 1999	Ishii
6133557	October 2000	Kawanabe
D466093	November 2002	Ebihara
D471167	March 2003	Ebihara
D529031	September 2006	Huang
D540272	April 2007	Higashibata
D589471	March 2009	Komatsu
D598380	August 2009	Kuriki
D601521	October 2009	Komatsu
D613690	April 2010	Kuriki
D615927	May 2010	Kuriki
D651991	January 2012	Nishiguchi
D651992	January 2012	Nishiguchi
D655256	March 2012	Nishiguchi
D690672	October 2013	Yoshida
D699201	February 2014	Petsch
8981263	March 2015	Sasaki
D775092	December 2016	Vinciarelli
D797690	September 2017	Furutani
D798250	September 2017	Furutani

Other References

Rectangle, Webster's Dictionary, 1913, http://www.webster-dictionary.org/definition/Rectangle. cited by examiner.

Primary Examiner: Oswecki; Elizabeth J
Attorney, Agent or Firm: Burr & Brown, PLLC

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