Heater for semiconductor manufacturing apparatus
Furutani , et al. September 19, 2
U.S. patent number D797,690 [Application Number D/539,509] was granted by the patent office on 2017-09-19 for heater for semiconductor manufacturing apparatus. This patent grant is currently assigned to NuFlare Technology, Inc.. The grantee listed for this patent is NuFlare Technology, Inc.. Invention is credited to Hiroshi Furutani, Yuusuke Sato.
| United States Patent | D797,690 |
| Furutani , et al. | September 19, 2017 |
Heater for semiconductor manufacturing apparatus
Claims
CLAIM The ornamental design for a heater for semiconductor manufacturing apparatus, as illustrated and described.
| Inventors: | Furutani; Hiroshi (Kanagawa-ken, JP), Sato; Yuusuke (Tokyo, JP) | ||||||||||
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| Applicant: |
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| Assignee: | NuFlare Technology, Inc.
(Yokohama, JP) |
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| Appl. No.: | D/539,509 | ||||||||||
| Filed: | September 15, 2015 |
Foreign Application Priority Data
| Mar 16, 2015 [JP] | 2015-005626 | |||
| Current U.S. Class: | D13/182 |
| Current International Class: | 1303 |
| Field of Search: | ;D7/407,408 ;D13/102,103,110,118,123,154,156,173,184,199 ;D14/230,233 ;D15/140 ;D23/314,386,415,417-419,499 |
References Cited [Referenced By]
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Other References
|
Cast Aluminum Solutions, dated Aug. 23, 2011, [online], [site visited Apr. 27, 2017]. Available from Internet, <URL: http://www.castaluminumsolutions.com/capabilities.htm>. cited by examiner. |
Primary Examiner: Johannes; Thomas
Assistant Examiner: Gingrich; Shawn T
Attorney, Agent or Firm: Oblon, McClelland, Maier & Neustadt, L.L.P.
Description
FIG. 1 is a top plan view of a heater for semiconductor manufacturing apparatus according to our new design;
FIG. 2 is a bottom plan view thereof;
FIG. 3 is a front view thereof;
FIG. 4 is a back view thereof;
FIG. 5 is a left side view thereof; and,
FIG. 6 is a right side view thereof.
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References
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