Upper chamber liner

Description

FIG. 1 is a top perspective view of an upper chamber liner showing our new design;

FIG. 2 is another top perspective view thereof;

FIG. 3 is a bottom perspective view thereof;

FIG. 4 is another bottom perspective view thereof;

FIG. 5 is a top plan view thereof;

FIG. 6 is a bottom plan view thereof;

FIG. 7 is a side view thereof;

FIG. 8 is another side view thereof;

FIG. 9 is a cross-sectional view taken along line 9-9 in FIG. 5;

FIG. 10 is an enlarged top view of the upper portion of FIG. 9; and,

FIG. 11 is an enlarged bottom view of the lower portion of FIG. 9.

The broken lines in the figures form no part of the claimed design.

The upper chamber liner is shown broken away in FIGS. 10 and 11 to indicate that no particular length is claimed.

All surfaces not shown, form no part of the claimed design.

Claims

CLAIM The ornamental design for an upper chamber liner, as shown and described.

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Inventors:	Lau; Shu-Kwan (Sunnyvale, CA), Samir; Mehmet Tugrul (Mountain View, CA), Chang; Anzhong (San Jose, CA), Brillhart; Paul (Pleasanton, CA), Collins; Richard O. (Santa Clara, CA)
Applicant:	Name City State Country Type Applied Materials, Inc. Santa Clara CA US
Assignee:	Applied Materials, Inc. (Santa Clara, CA)
Appl. No.:	D/472,048
Filed:	November 7, 2013

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Current U.S. Class:	D13/182
Current International Class:	1303
Field of Search:	;D13/182 ;118/722,723R,728,729,504,506,715,723E,723ER,723IR,723ME,723MR,723MA,723MW ;204/298.01,298.11

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References Cited [Referenced By]

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U.S. Patent Documents

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Primary Examiner: Oswecki; Elizabeth J
Attorney, Agent or Firm: Patterson & Sheridan, LLP