Samir; Mehmet Tugrul
Patent Applications and Registrations
Patent applications and USPTO patent grants for Samir; Mehmet Tugrul.The latest application filed is for "multi-zone semiconductor substrate supports".
Company Profile
13.44.58
- Samir; Mehmet Tugrul - Mountain View CA
Patent Activity
| Patent | Date |
|---|---|
| Semiconductor processing chamber for multiple precursor flow Grant 11,361,939 - Samir , et al. June 14, 2 | 2022-06-14 |
| Multi-zone Semiconductor Substrate Supports App 20220148894 - Samir; Mehmet Tugrul ; et al. | 2022-05-12 |
| High Conductance Process Kit App 20220084845 - Subramanya; Samartha ; et al. | 2022-03-17 |
| Multi-zone semiconductor substrate supports Grant 11,276,590 - Samir , et al. March 15, 2 | 2022-03-15 |
| Semiconductor processing chamber for multiple precursor flow Grant 11,276,559 - Samir , et al. March 15, 2 | 2022-03-15 |
| Liner for epi chamber Grant 11,060,203 - Lau , et al. July 13, 2 | 2021-07-13 |
| Semiconductor processing chamber multistage mixing apparatus and methods Grant 10,964,512 - Samir , et al. March 30, 2 | 2021-03-30 |
| Processing chamber Grant 10,923,386 - Samir February 16, 2 | 2021-02-16 |
| Susceptor support Grant 10,837,121 - Collins , et al. November 17, 2 | 2020-11-17 |
| Gas distribution showerhead for semiconductor processing Grant 10,829,855 - Nguyen , et al. November 10, 2 | 2020-11-10 |
| Semiconductor Processing Chamber Multistage Mixing Apparatus App 20200328098 - Samir; Mehmet Tugrul ; et al. | 2020-10-15 |
| Batch processing chamber Grant 10,781,533 - Samir Sept | 2020-09-22 |
| Inject insert for EPI chamber Grant 10,760,161 - Lau , et al. Sep | 2020-09-01 |
| Semiconductor processing chamber multistage mixing apparatus Grant 10,699,921 - Samir , et al. | 2020-06-30 |
| Semiconductor processing chamber multistage mixing apparatus Grant 10,679,870 - Samir , et al. | 2020-06-09 |
| Gas distribution showerhead for semiconductor processing Grant 10,577,690 - Nguyen , et al. | 2020-03-03 |
| Extreme Uniformity Heated Substrate Support Assembly App 20190371577 - BENJAMINSON; David ; et al. | 2019-12-05 |
| Semiconductor Processing Chamber Multistage Mixing Apparatus App 20190333786 - Samir; Mehmet Tugrul ; et al. | 2019-10-31 |
| Substrate transfer mechanisms Grant 10,453,733 - Ishii , et al. Oc | 2019-10-22 |
| Semiconductor Processing Chamber For Multiple Precursor Flow App 20190311883 - Samir; Mehmet Tugrul ; et al. | 2019-10-10 |
| Semiconductor Processing Chamber Multistage Mixing Apparatus And Methods App 20190252154 - Samir; Mehmet Tugrul ; et al. | 2019-08-15 |
| Semiconductor Processing Chamber Multistage Mixing Apparatus App 20190252216 - Samir; Mehmet Tugrul ; et al. | 2019-08-15 |
| Lamp heating for process chamber Grant 10,356,848 - Samir , et al. July 16, 2 | 2019-07-16 |
| Flow controlled liner having spatially distributed gas passages Grant 10,170,342 - Samir , et al. J | 2019-01-01 |
| Multi-zone Semiconductor Substrate Supports App 20180337074 - Samir; Mehmet Tugrul ; et al. | 2018-11-22 |
| Semiconductor Processing Chamber For Multiple Precursor Flow App 20180337057 - Samir; Mehmet Tugrul ; et al. | 2018-11-22 |
| Heating modulators to improve epi uniformity tuning Grant 10,132,003 - Lau , et al. November 20, 2 | 2018-11-20 |
| EPI base ring Grant 10,119,192 - Aboagye , et al. November 6, 2 | 2018-11-06 |
| Multizone control of lamps in a conical lamphead using pyrometers Grant 10,077,508 - Ranish , et al. September 18, 2 | 2018-09-18 |
| Epitaxial Chamber With Customizable Flow Injection App 20180209043 - LAU; SHU-KWAN ; et al. | 2018-07-26 |
| Substrate Transfer Mechanisms App 20180182660 - ISHII; Masato ; et al. | 2018-06-28 |
| Process Chamber Having Separate Process Gas And Purge Gas Regions App 20180138031 - RANISH; Joseph M. ; et al. | 2018-05-17 |
| Substrate transfer mechanisms Grant 9,905,454 - Ishii , et al. February 27, 2 | 2018-02-27 |
| Flow Controlled Liner Having Spatially Distributed Gas Passages App 20180033652 - SAMIR; Mehmet Tugrul ; et al. | 2018-02-01 |
| Heating Modulators To Improve Epi Uniformity Tuning App 20180023214 - LAU; Shu-Kwan ; et al. | 2018-01-25 |
| Process chamber having separate process gas and purge gas regions Grant 9,870,919 - Ranish , et al. January 16, 2 | 2018-01-16 |
| Quartz Upper And Lower Domes App 20180005856 - CHANG; Anzhong ; et al. | 2018-01-04 |
| Flow controlled liner having spatially distributed gas passages Grant 9,842,748 - Samir , et al. December 12, 2 | 2017-12-12 |
| Gas Distribution Showerhead For Semiconductor Processing App 20170335457 - NGUYEN; Anh N. ; et al. | 2017-11-23 |
| Thermal Coupled Quartz Dome Heat Sink App 20170338135 - RANISH; Joseph M. ; et al. | 2017-11-23 |
| Gas Distribution Showerhead For Semiconductor Processing App 20170335456 - NGUYEN; Anh N. ; et al. | 2017-11-23 |
| Substrate support with surface feature for reduced reflection and manufacturing techniques for producing same Grant 9,814,099 - Lau , et al. November 7, 2 | 2017-11-07 |
| Susceptor Support App 20170275777 - COLLINS; Richard O. ; et al. | 2017-09-28 |
| Quartz upper and lower domes Grant 9,768,043 - Chang , et al. September 19, 2 | 2017-09-19 |
| Thermal coupled quartz dome heat sink Grant 9,748,121 - Ranish , et al. August 29, 2 | 2017-08-29 |
| Liner assembly for chemical vapor deposition chamber Grant 9,695,508 - Carlson , et al. July 4, 2 | 2017-07-04 |
| Multizone Control Of Lamps In A Conical Lamphead Using Pyrometers App 20170130359 - RANISH; Joseph M. ; et al. | 2017-05-11 |
| Flow Controlled Liner Having Spatially Distributed Gas Passages App 20170125265 - SAMIR; Mehmet Tugrul ; et al. | 2017-05-04 |
| Multizone control of lamps in a conical lamphead using pyrometers Grant 9,580,835 - Ranish , et al. February 28, 2 | 2017-02-28 |
| Batch Processing Chamber App 20170029976 - SAMIR; Mehmet Tugrul | 2017-02-02 |
| Flow controlled liner having spatially distributed gas passages Grant 9,553,002 - Samir , et al. January 24, 2 | 2017-01-24 |
| Susceptor support shaft with uniformity tuning lenses for EPI process Grant 9,532,401 - Cong , et al. December 27, 2 | 2016-12-27 |
| Process Chamber With Reflector App 20160348276 - LAU; Shu-Kwan ; et al. | 2016-12-01 |
| Methods and apparatus for the deposition of materials on a substrate Grant 9,499,905 - Samir , et al. November 22, 2 | 2016-11-22 |
| Epi Base Ring App 20160230276 - ABOAGYE; Steve ; et al. | 2016-08-11 |
| Lamp Heating For Process Chamber App 20160227606 - SAMIR; Mehmet Tugrul ; et al. | 2016-08-04 |
| Substrate Transfer Mechanisms App 20160204019 - ISHII; Masato ; et al. | 2016-07-14 |
| Processing Chamber App 20160197001 - SAMIR; Mehmet Tugrul | 2016-07-07 |
| Multizone Control Of Lamps In A Conical Lamphead Using Pyrometers App 20160138188 - RANISH; Joseph M. ; et al. | 2016-05-19 |
| EPI base ring Grant 9,322,097 - Aboagye , et al. April 26, 2 | 2016-04-26 |
| Susceptor And Pre-heat Ring For Thermal Processing Of Substrates App 20160068996 - LAU; Shu-Kwan ; et al. | 2016-03-10 |
| Inject Insert For Epi Chamber App 20160068956 - LAU; Shu-Kwan ; et al. | 2016-03-10 |
| Liner For Epi Chamber App 20160068997 - LAU; Shu-Kwan ; et al. | 2016-03-10 |
| Upper Dome For Epi Chamber App 20160071749 - LAU; Shu-Kwan ; et al. | 2016-03-10 |
| Atmospheric Epitaxial Deposition Chamber App 20160068959 - LAU; Shu-Kwan ; et al. | 2016-03-10 |
| Compact ampoule thermal management system Grant 9,279,604 - Carlson , et al. March 8, 2 | 2016-03-08 |
| Multizone control of lamps in a conical lamphead using pyrometers Grant 9,230,837 - Ranish , et al. January 5, 2 | 2016-01-05 |
| Susceptor support shaft for improved wafer temperature uniformity and process repeatability Grant 9,123,765 - Samir , et al. September 1, 2 | 2015-09-01 |
| Liner Assembly For Chemical Vapor Deposition Chamber App 20150176123 - CARLSON; DAVID K. ; et al. | 2015-06-25 |
| Carbon Fiber Ring Susceptor App 20150083046 - RANISH; Joseph M. ; et al. | 2015-03-26 |
| Liner assembly for chemical vapor deposition chamber Grant 8,980,005 - Carlson , et al. March 17, 2 | 2015-03-17 |
| Substrate Support With Surface Feature For Reduced Reflection And Manufacturing Techniques For Producing Same App 20150037017 - LAU; SHU-KWAN ; et al. | 2015-02-05 |
| Structure For Improved Gas Activation For Cross-flow Type Thermal Cvd Chamber App 20150020734 - YE; Zhiyuan ; et al. | 2015-01-22 |
| Lower chamber liner Grant D717,746 - Lau , et al. November 18, 2 | 2014-11-18 |
| Inject And Exhaust Design For Epi Chamber Flow Manipulation App 20140326185 - LAU; Shu-Kwan ; et al. | 2014-11-06 |
| Flow Controlled Liner Having Spatially Distributed Gas Passages App 20140322897 - SAMIR; Mehmet Tugrul ; et al. | 2014-10-30 |
| Lower chamber liner Grant D716,240 - Lau , et al. October 28, 2 | 2014-10-28 |
| Upper chamber liner Grant D716,239 - Lau , et al. October 28, 2 | 2014-10-28 |
| Epi Base Ring App 20140261185 - ABOAGYE; STEVE ; et al. | 2014-09-18 |
| Susceptor Support Shaft With Uniformity Tuning Lenses For Epi Process App 20140263268 - Cong; Zhepeng ; et al. | 2014-09-18 |
| Multizone Control Of Lamps In A Conical Lamphead Using Pyrometers App 20140273419 - RANISH; Joseph M. ; et al. | 2014-09-18 |
| Susceptor Support Shaft For Improved Wafer Temperature Uniformity And Process Repeatability App 20140251208 - SAMIR; MEHMET TUGRUL ; et al. | 2014-09-11 |
| Thermal Coupled Quartz Dome Heat Sink App 20140254150 - RANISH; Joseph M. ; et al. | 2014-09-11 |
| Upper chamber liner Grant D711,331 - Lau , et al. August 19, 2 | 2014-08-19 |
| Quartz Upper And Lower Domes App 20140199056 - CHANG; Anzhong ; et al. | 2014-07-17 |
| Multizone Control Of Lamps In A Conical Lamphead Using Pyrometers App 20140199785 - RANISH; Joseph M. ; et al. | 2014-07-17 |
| Multizone control of lamps in a conical lamphead using pyrometers Grant 8,772,055 - Ranish , et al. July 8, 2 | 2014-07-08 |
| Epitaxial Chamber With Customizable Flow Injection App 20140137801 - LAU; SHU-KWAN ; et al. | 2014-05-22 |
| Process Chamber Having More Uniform Gas Flow App 20140083360 - SAMIR; MEHMET TUGRUL ; et al. | 2014-03-27 |
| Multi-zone Quartz Gas Distribution Apparatus App 20140026816 - MYO; NYI OO ; et al. | 2014-01-30 |
| Gas Distribution Apparatus For Substrate Processing Systems App 20140027060 - RANISH; JOSEPH M. ; et al. | 2014-01-30 |
| Compact Ampoule Thermal Management System App 20130319015 - CARLSON; DAVID K. ; et al. | 2013-12-05 |
| Gas Distribution Module For Insertion In Lateral Flow Chambers App 20130284097 - Ranish; Joseph M. ; et al. | 2013-10-31 |
| Process Chamber Having Separate Process Gas And Purge Gas Regions App 20130288460 - RANISH; Joseph M. ; et al. | 2013-10-31 |
| Liner Assembly For Chemical Vapor Deposition Chamber App 20120240853 - Carlson; David K. ; et al. | 2012-09-27 |
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