Lower chamber liner

Description

FIG. 1 is a top perspective view of a lower chamber liner showing our new design;

FIG. 2 is another top perspective view thereof;

FIG. 3 is a bottom perspective view thereof;

FIG. 4 is another bottom perspective view thereof;

FIG. 5 is a top plan view thereof;

FIG. 6 is a bottom plan view thereof;

FIG. 7 is a side view thereof;

FIG. 8 is another side view thereof;

FIG. 9 is another side view thereof;

FIG. 10 is a cross sectional view taken along line 10-10 in FIG. 5;

FIG. 11 is an enlarged portion view taken along lines 11-11 in FIG. 10; and,

FIG. 12 is an enlarged portion view taken along lines 12-12 in FIG. 10.

The upper chamber liner is shown broken away in FIGS. 11 and 12 to indicate that no particular length is claimed.

All surfaces not shown, form no part of the claimed design.

Claims

CLAIM The ornamental design for a lower chamber liner, as shown and described.

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Inventors:	Lau; Shu-Kwan (Sunnyvale, CA), Samir; Mehmet Tugrul (Mountain View, CA)
Applicant:	Name City State Country Type Applied Materials, Inc. Santa Clara CA US
Assignee:	Applied Materials, Inc. (Santa Clara, CA)
Appl. No.:	D/471,943
Filed:	November 6, 2013

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Current U.S. Class:	D13/182
Current International Class:	1303
Field of Search:	;D13/182 ;118/50,715,728,500,501,504,428,722,505,506 ;156/345.51

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References Cited [Referenced By]

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U.S. Patent Documents

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Primary Examiner: Oswecki; Elizabeth J
Attorney, Agent or Firm: Patterson & Sheridan, LLP