Cleaning plate for inducing turbulent flow of a processing chamber cleaning glass

Description

This invention was made with Government support under DE-EE0003331 awarded by DOE. The Government has certain rights in this invention.

FIG. 1 is a cleaning plate for inducing turbulent flow of a processing chamber cleaning gas.

FIG. 2 is a top plan view of the cleaning plate of FIG. 1.

FIG. 3 is a bottom isometric view of the cleaning plate of FIG. 1.

FIG. 4 is a bottom plan view of the cleaning plate of FIG. 1.

FIG. 5 is a side perspective view of the cleaning plate of 1; and,

FIG. 6 is an enlarged partial view of FIG. 3.

The broken lines in the figures form no part of the claimed design.

Claims

CLAIM The ornamental design for a cleaning plate for inducing turbulent flow of a processing chamber cleaning glass, as shown.

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Inventors:	Chung; Hua (San Jose, CA), Dong; Xizi (Sunnyvale, CA), Maung; Kyawwin Jason (Daly City, CA), Hanawa; Hiroji (Sunnyvale, CA), Kang; Sang Won (San Jose, CA), Quach; David H. (San Jose, CA), Olgado; Donald J. K. (Palo Alto, CA), Bour; David (Cupertino, CA), Hsu; Wei-Yung (San Jose, CA), Tam; Alexander (Union City, CA), Chang; Anzhong (San Jose, CA), Acharya; Sumedh (Pune, IN)
Assignee:	Applied Materials, Inc. (Santa Clara, CA)
Appl. No.:	D/386,850
Filed:	March 4, 2011

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Current U.S. Class:	D15/144
Current International Class:	1509
Field of Search:	;D15/144

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References Cited [Referenced By]

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U.S. Patent Documents

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D528407	September 2006	Schwab
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D619152	July 2010	Evatt et al.
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2002/0020429	February 2002	Selbrede et al.
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Foreign Patent Documents

	2005-072291		Mar 2005		JP

Other References

International Search Report dated Feb. 9, 2012 for International Application No. PCT/US2011/040197. cited by other . Taiwan Office Action dated Feb. 17, 2012 for Taiwan Design Patent Application No. 100304292. cited by other . International Search Report dated Feb. 9, 2012, Application No. PCT/US2011/040197. cited by other . Japanese Office Action issued Feb. 21, 2012 for Japanese Application No. 2011-019695. cited by other.

Primary Examiner: Palasik; Patricia
Attorney, Agent or Firm: Patterson & Sheridan, LLP