Tam; Alexander
Patent Applications and Registrations
Patent applications and USPTO patent grants for Tam; Alexander.The latest application filed is for "semiconductor chamber coatings and processes".
Company Profile
3.21.33
- Tam; Alexander - Union City CA
- Tam; Alexander - Santa Clara CA
Patent Activity
| Patent | Date |
|---|---|
| Chamber apparatus for chemical etching of dielectric materials Grant 11,302,520 - Tan , et al. April 12, 2 | 2022-04-12 |
| Multi-plate faceplate for a processing chamber Grant 10,811,232 - Srikantaiah , et al. October 20, 2 | 2020-10-20 |
| Semiconductor Chamber Coatings And Processes App 20190304756 - Kalita; Laksheswar ; et al. | 2019-10-03 |
| Multi-plate Faceplate For A Processing Chamber App 20190051499 - SRIKANTAIAH; Deepak Doddabelavangala ; et al. | 2019-02-14 |
| Showerhead assembly with gas injection distribution devices Grant 10,130,958 - Tam , et al. November 20, 2 | 2018-11-20 |
| Pedestal with multi-zone temperature control and multiple purge capabilities Grant 10,062,587 - Chen , et al. August 28, 2 | 2018-08-28 |
| Multi-zone resistive heater Grant 9,892,941 - Cui , et al. February 13, 2 | 2018-02-13 |
| Multi-gas straight channel showerhead Grant 9,644,267 - Burrows , et al. May 9, 2 | 2017-05-09 |
| Pedestal With Multi-zone Temperature Control And Multiple Purge Capabilities App 20160126118 - Chen; Xinglong ; et al. | 2016-05-05 |
| Pedestal with multi-zone temperature control and multiple purge capabilities Grant 9,267,739 - Chen , et al. February 23, 2 | 2016-02-23 |
| Chamber Apparatus For Chemical Etching Of Dielectric Materials App 20150380220 - TAN; Tien Fak ; et al. | 2015-12-31 |
| Method and apparatus for inducing turbulent flow of a processing chamber cleaning gas Grant 8,910,644 - Chung , et al. December 16, 2 | 2014-12-16 |
| Multiple precursor showerhead with by-pass ports Grant 8,679,956 - Tam , et al. March 25, 2 | 2014-03-25 |
| Multi-gas Straight Channel Showerhead App 20140014745 - BURROWS; Brian H. ; et al. | 2014-01-16 |
| Multiple Precursor Showerhead With By-pass Ports App 20130298835 - TAM; Alexander ; et al. | 2013-11-14 |
| Multi-gas straight channel showerhead Grant 8,481,118 - Burrows , et al. July 9, 2 | 2013-07-09 |
| Multiple precursor showerhead with by-pass ports Grant 8,361,892 - Tam , et al. January 29, 2 | 2013-01-29 |
| Rotating Substrate Support And Methods Of Use App 20120291709 - Smith; Jacob ; et al. | 2012-11-22 |
| Cleaning plate for inducing turbulent flow of a processing chamber cleaning glass Grant D664,170 - Chung , et al. July 24, 2 | 2012-07-24 |
| Multi-gas Straight Channel Showerhead App 20120024388 - Burrows; Brian H. ; et al. | 2012-02-02 |
| Method And Apparatus For Inducing Turbulent Flow Of A Processing Chamber Cleaning Gas App 20110308551 - Chung; Hua ; et al. | 2011-12-22 |
| Showerhead Assembly With Gas Injection Distribution Devices App 20110256315 - Tam; Alexander ; et al. | 2011-10-20 |
| Showerhead Assembly With Metrology Port Purge App 20110253044 - Tam; Alexander ; et al. | 2011-10-20 |
| Multiple Precursor Showerhead With By-pass Ports App 20110256645 - Tam; Alexander ; et al. | 2011-10-20 |
| Multiple Precursor Concentric Delivery Showerhead App 20110256692 - Tam; Alexander ; et al. | 2011-10-20 |
| Lid assembly for a substrate processing chamber Grant D642,605 - Ishikawa , et al. August 2, 2 | 2011-08-02 |
| Multi-gas straight channel showerhead Grant 7,976,631 - Burrows , et al. July 12, 2 | 2011-07-12 |
| Cvd Apparatus App 20110121503 - BURROWS; BRIAN H. ; et al. | 2011-05-26 |
| Rotating Substrate Support And Methods Of Use App 20100224130 - Smith; Jacob ; et al. | 2010-09-09 |
| Hvpe Showerhead Design App 20100215854 - Burrows; Brian H. ; et al. | 2010-08-26 |
| System and method for depositing a gaseous mixture onto a substrate surface using a showerhead apparatus Grant 7,674,352 - Bour , et al. March 9, 2 | 2010-03-09 |
| Multi-Zone Resistive Heater App 20090314762 - Cui; Anqing ; et al. | 2009-12-24 |
| Processing System For Fabricating Compound Nitride Semiconductor Devices App 20090194026 - BURROWS; BRIAN H. ; et al. | 2009-08-06 |
| Cvd Apparatus App 20090194024 - Burrows; Brian H. ; et al. | 2009-08-06 |
| Multi-gas Spiral Channel Showerhead App 20090095222 - Tam; Alexander ; et al. | 2009-04-16 |
| Multi-gas Concentric Injection Showerhead App 20090095221 - TAM; Alexander ; et al. | 2009-04-16 |
| Multi-gas Straight Channel Showerhead App 20090098276 - BURROWS; Brian H. ; et al. | 2009-04-16 |
| Hvpe Showerhead Design App 20080314311 - Burrows; Brian H. ; et al. | 2008-12-25 |
| System And Method For Depositing A Gaseous Mixture Onto A Substrate Surface Using A Showerhead Apparatus App 20080124463 - Bour; David ; et al. | 2008-05-29 |
| Multi-zone resistive heater App 20070125762 - Cui; Anqing ; et al. | 2007-06-07 |
| Reaction chamber with opposing pockets for gas injection and exhaust App 20070084406 - Yudovsky; Joseph ; et al. | 2007-04-19 |
| Batch Processing Chamber With Diffuser Plate And Injector Assembly App 20070084408 - Yudovsky; Joseph ; et al. | 2007-04-19 |
| Method and apparatus for the low temperature deposition of doped silicon nitride films App 20070082507 - Iyer; R. Suryanarayanan ; et al. | 2007-04-12 |
| Rotating substrate support and methods of use App 20060281310 - Smith; Jacob ; et al. | 2006-12-14 |
| Apparatus and method for the deposition of silicon nitride films App 20060102076 - Smith; Jacob W. ; et al. | 2006-05-18 |
| Thermal chemical vapor deposition of silicon nitride using BTBAS bis(tertiary-butylamino silane) in a single wafer chamber App 20050109276 - Iyer, R. Suryanarayanan ; et al. | 2005-05-26 |
| Emissivity-change-free pumping plate kit in a single wafer chamber Grant 6,582,522 - Luo , et al. June 24, 2 | 2003-06-24 |
| Emissivity-change-free pumping plate kit in a single wafer chamber App 20020137312 - Luo, Lee ; et al. | 2002-09-26 |
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