U.S. patent application number 15/797119 was filed with the patent office on 2019-05-02 for electrostatic discharge protection using vertical fin cmos technology.
The applicant listed for this patent is International Business Machines Corporation. Invention is credited to Brent A. Anderson, Huiming Bu, Terence B. Hook, Xuefeng Liu, Junli Wang, Miaomiao Wang.
Application Number | 20190131292 15/797119 |
Document ID | / |
Family ID | 66243232 |
Filed Date | 2019-05-02 |
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United States Patent
Application |
20190131292 |
Kind Code |
A1 |
Anderson; Brent A. ; et
al. |
May 2, 2019 |
ELECTROSTATIC DISCHARGE PROTECTION USING VERTICAL FIN CMOS
TECHNOLOGY
Abstract
Embodiments include a method and resulting structures for
vertical fin CMOS technology for electrostatic discharge
protection. In a non-limiting embodiment, forming a first set of
semiconductor fins vertically extending from a substrate, and
forming a second set of semiconductor fins vertically extending
from the substrate, the distance between the first set of fins and
the second set of fins defines a length of a junction. Embodiments
also include forming a first epitaxy layer on the substrate, and
forming a second epitaxy layer atop a portion of the first epitaxy
layer, wherein a PN junction is formed between the first epitaxy
layer and the second epitaxy layer, wherein a length of the PN
junction is defined by the first set of semiconductor fins and the
second semiconductor fins. Embodiments include forming a first
metal contact atop the first epitaxy layer, and forming a second
metal contact atop the second epitaxy layer.
Inventors: |
Anderson; Brent A.;
(Jericho, VT) ; Bu; Huiming; (Glenmont, NY)
; Hook; Terence B.; (Jericho, VT) ; Liu;
Xuefeng; (Schenectady, NY) ; Wang; Junli;
(Albany, NY) ; Wang; Miaomiao; (Albany,
NY) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
International Business Machines Corporation |
Armonk |
NY |
US |
|
|
Family ID: |
66243232 |
Appl. No.: |
15/797119 |
Filed: |
October 30, 2017 |
Current U.S.
Class: |
1/1 |
Current CPC
Class: |
H01L 29/872 20130101;
H01L 29/06 20130101; H01L 29/0657 20130101; H01L 29/66143 20130101;
H01L 27/1211 20130101; H01L 29/66106 20130101; H01L 29/165
20130101; H01L 29/78642 20130101; H01L 27/0255 20130101; H01L
29/66666 20130101; H01L 29/866 20130101; H01L 29/785 20130101; H01L
27/0922 20130101; H01L 29/7827 20130101; H01L 27/0629 20130101;
H01L 29/861 20130101; H01L 29/66136 20130101; H01L 29/8083
20130101; H01L 29/868 20130101; H01L 27/0266 20130101 |
International
Class: |
H01L 27/02 20060101
H01L027/02; H01L 27/12 20060101 H01L027/12; H01L 29/808 20060101
H01L029/808; H01L 29/06 20060101 H01L029/06; H01L 29/78 20060101
H01L029/78; H01L 27/092 20060101 H01L027/092 |
Claims
1. A method of forming a semiconductor device, the method
comprising: forming a first set of semiconductor fins vertically
extending from a substrate; forming a second set of semiconductor
fins vertically extending from the substrate; forming a first layer
on the substrate; forming a second layer atop a portion of the
first layer, wherein a junction is formed between the first layer
and the second layer, wherein a length of the junction is defined
by the first set of semiconductor fins and the second set of
semiconductor fins; forming a first metal contact atop the first
layer; and forming a second metal contact atop the second layer,
wherein an i-layer is formed between the first layer and the second
layer to form a PiN diode, wherein a height of the i-layer can be
configured to set a breakdown voltage of the semiconductor
device.
2. The method of claim 1, wherein the first layer is an epitaxially
grown layer.
3. The method of claim 1, wherein the first layer is an ion
implanted layer.
4. The method of claim 1, wherein the first layer is an n-type
layer and the second layer is a p-type layer.
5. The method of claim 1, wherein doping the first layer and second
layer to a doping concentration to less than 10.sup.20
cm.sup.3.
6. The method of claim 1, wherein the first metal contact is an N+
ohmic contact and the second metal contact is a P+ ohmic contact,
wherein the first metal contact and the second metal contact are
separated by the first set of fins or the second set of fins.
7. (canceled)
8. The method of claim 1, wherein forming the first set of
semiconductor fins further comprises forming a layer atop the first
set of semiconductor fins or the second set of semiconductor
fins.
9. The method of claim 1, further comprising forming a bottom
spacer between the substrate and a bulk dielectric.
10. The method of claim 1, further comprising forming a second
spacer between the substrate and a bulk dielectric.
11. The method of claim 1, further comprising forming a silicide
layer between the first metal contact and substrate and forming
another silicide layer between the second metal contact and
substrate.
12. The method of claim 1, wherein forming the first set of
semiconductor fins or the second set of semiconductor fins further
comprises implanting dopants into the first set of semiconductor
fins or the second set of semiconductor fins.
13. A method of forming a semiconductor device, the method
comprising: forming a first set of semiconductor fins vertically
extending from a substrate; forming a second set of semiconductor
fins vertically extending from the substrate; forming a first layer
on the substrate, wherein the first layer is formed by ion
implantation; forming a silicide layer atop the first layer;
forming a first metal contact atop the first layer; and forming a
second metal contact atop the silicide layer, wherein an i-layer is
formed between the first layer and the second layer to form a PiN
diode, wherein a height of the i-layer can be configured to set a
breakdown voltage of the semiconductor device.
14. The method of claim 13, wherein the first set of fins and the
second set of fins are p-type doped.
15. The method of claim 13, wherein the silicide layer is formed
between fins of the first set of fins and fins of the second set of
fins.
16. The method of claim 13, wherein the first layer is an n-well,
wherein one or more p-type wells are formed in the n-well.
17. A semiconductor device comprising: a first set of semiconductor
fins vertically extending from a substrate; a second set of
semiconductor fins vertically extending from the substrate; a PN
junction formed by a first layer and a second layer, wherein a
length of the PN junction is defined by the first set of
semiconductor fins and the second set of semiconductor fins; a
first metal contact coupled to the first layer; and a second metal
contact atop the second layer, wherein an i-layer is disposed
between the first layer and the second layer, wherein a length of
the i-layer is defined by the first set of semiconductor fins and
the second semiconductor fins.
18. (canceled)
19. The semiconductor device of claim 17 wherein the first layer,
is an ion implantation layer that has a doping concentration of at
least to 10.sup.19 cm.sup.3.
20. The semiconductor device of claim 17, wherein the first layer
has a doping concentration of less than 10.sup.18 cm.sup.3.
Description
BACKGROUND
[0001] The present invention generally relates to electrostatic
discharge protection, and more specifically, to using vertical fin
CMOS technology for electrostatic discharge protection.
[0002] Field effect transistors (FETs) have been known for a number
of years and are now the transistor of choice for use in complex
integrated digital circuits. In general, field effect transistors
can be fabricated somewhat more simply and with larger process
windows than bipolar transistors and, additionally, allow
simplified circuit and device design. Constraints on transistor
footprint size and current-carrying capacity are continually
increasing to satisfy demands for higher digital switching
performance, increased functionality and economy of
manufacture.
[0003] In recent years, there has been significant research and
development with regard to nonplanar transistor architectures. Some
non-planar transistor architectures, such as VFETs, employ
semiconductor fins and side-gates that can be contacted outside the
active region, resulting in increased device density and some
increased performance over lateral devices. In VFETs the source to
drain current flows in a direction that is perpendicular to a major
surface of the substrate. For example, in a known VFET
configuration a major substrate surface is horizontal and a
vertical fin or nanowire extends upward from the substrate surface.
The fin or nanowire forms the channel region of the transistor. A
source region and a drain region are situated in electrical contact
with the top and bottom ends of the channel region, while the gate
is disposed on one or more of the fin or nanowire sidewalls.
[0004] Electrostatic discharge devices and circuits are
indispensable elements in integrated chip (IC) manufacturing.
Electrostatic discharge is the sudden flow of electricity between
electrically charged objects which can cause damage to the IC or
other sensitive electronic devices when the current flow exceeds
the allowable amount of electricity manageable by the device. If
the electrostatic discharge device is not triggered at an
acceptable range or if the electrostatic discharge is not
sufficient enough to remove the discharged current further damage
and failure to the electronic device can occur.
SUMMARY
[0005] Embodiments of the present invention are directed to a
computer-implemented method for using vertical fin CMOS technology
for electrostatic discharge protection. A non-limiting example of
the computer-implemented method includes forming a first set of
semiconductor fins vertically extending from a substrate, forming a
second set of semiconductor fins vertically extending from the
substrate, forming a first layer on the substrate, forming a second
layer atop a portion of the first layer, wherein a junction is
formed between the first layer and the second layer, wherein a
length of the junction is defined by the first set of semiconductor
fins and the second set of semiconductor fins, forming a first
metal contact atop the first layer, and forming a second metal
contact atop the second layer.
[0006] Embodiments of the present invention are directed to a
computer-implemented method for using vertical fin CMOS technology
for electrostatic discharge protection. A non-limiting example of
the computer-implemented method includes forming a first set of
semiconductor fins vertically extending from a substrate, forming a
second set of semiconductor fins vertically extending from the
substrate, forming a first layer on the substrate, wherein the
first layer is formed by ion implantation, forming a silicide layer
atop the first layer, forming a first metal contact atop the first
layer, and forming a second metal contact atop the silicide
layer.
[0007] Embodiments of the present invention are directed to a
device for using vertical fin CMOS technology for electrostatic
discharge protection. A non-limiting example of the device includes
a first set of semiconductor fins vertically extending from a
substrate, a second set of semiconductor fins vertically extending
from the substrate, a PN junction formed by a first epitaxy layer
and a second epitaxy layer, wherein a length of the PN junction is
defined by the first set of semiconductor fins and the second set
of semiconductor fins, a first metal contact coupled to a first
layer, and a second metal contact atop a second layer.
[0008] Additional technical features and benefits are realized
through the techniques of the present invention. Embodiments and
aspects of the invention are described in detail herein and are
considered a part of the claimed subject matter. For a better
understanding, refer to the detailed description and to the
drawings.
BRIEF DESCRIPTION OF THE DRAWINGS
[0009] The specifics of the exclusive rights described herein are
particularly pointed out and distinctly claimed in the claims at
the conclusion of the specification. The foregoing and other
features and advantages of the embodiments of the invention are
apparent from the following detailed description taken in
conjunction with the accompanying drawings in which:
[0010] FIGS. 1-14 depict a cross-sectional view of a first
embodiment of a semiconductor structure after various processing
operations according to one or more embodiments of the
inventions;
[0011] FIG. 1 depicts a cross-sectional view of a semiconductor
structure after a processing operation according to one or more
embodiments of the invention;
[0012] FIG. 2 depicts a cross-sectional view of a semiconductor
structure after a processing operation according to one or more
embodiments of the invention;
[0013] FIG. 3 depicts a cross-sectional view of a semiconductor
structure after a processing operation according to one or more
embodiments of the invention;
[0014] FIG. 4 depicts a cross-sectional view of a semiconductor
structure after a processing operation according to one or more
embodiments of the invention;
[0015] FIG. 5 depicts a cross-sectional view of a semiconductor
structure after a processing operation according to one or more
embodiments of the invention;
[0016] FIG. 6 depicts a cross-sectional view of a semiconductor
structure after a processing operation according to one or more
embodiments of the invention;
[0017] FIG. 7 depicts a cross-sectional view of a semiconductor
structure after a processing operation according to one or more
embodiments of the invention;
[0018] FIG. 8 depicts a cross-sectional view of a semiconductor
structure after a processing operation according to one or more
embodiments of the invention;
[0019] FIG. 9 depicts a cross-sectional view of a semiconductor
structure after a processing operation according to one or more
embodiments of the invention;
[0020] FIG. 10 depicts a cross-sectional view of a semiconductor
structure after a processing operation according to one or more
embodiments of the invention;
[0021] FIG. 11 depicts a cross-sectional view of a semiconductor
structure after a processing operation according to one or more
embodiments of the invention;
[0022] FIG. 12 depicts a cross-sectional view of a semiconductor
structure after a processing operation according to one or more
embodiments of the invention;
[0023] FIG. 13 depicts a cross-sectional view of a semiconductor
structure after a processing operation according to one or more
embodiments of the invention;
[0024] FIG. 14 depicts a cross-sectional view of a semiconductor
structure after a processing operation according to one or more
embodiments of the invention;
[0025] FIGS. 15-27 depict a cross-sectional view of a first
embodiment of a semiconductor structure after various processing
operations according to one or more embodiments of the
inventions;
[0026] FIG. 15 depicts a cross-sectional view of a semiconductor
structure after a processing operation according to one or more
embodiments of the invention;
[0027] FIG. 16 depicts a cross-sectional view of a semiconductor
structure after a processing operation according to one or more
embodiments of the invention;
[0028] FIG. 17 depicts a cross-sectional view of a semiconductor
structure after a processing operation according to one or more
embodiments of the invention;
[0029] FIG. 18 depicts a cross-sectional view of a semiconductor
structure after a processing operation according to one or more
embodiments of the invention;
[0030] FIG. 19 depicts a cross-sectional view of a semiconductor
structure after a processing operation according to one or more
embodiments of the invention;
[0031] FIG. 20 depicts a cross-sectional view of a semiconductor
structure after a processing operation according to one or more
embodiments of the invention;
[0032] FIG. 21 depicts a cross-sectional view of a semiconductor
structure after a processing operation according to one or more
embodiments of the invention;
[0033] FIG. 22 depicts a cross-sectional view of a semiconductor
structure after a processing operation according to one or more
embodiments of the invention;
[0034] FIG. 23 depicts a cross-sectional view of a semiconductor
structure after a processing operation according to one or more
embodiments of the invention;
[0035] FIG. 24 depicts a cross-sectional view of a semiconductor
structure after a processing operation according to one or more
embodiments of the invention;
[0036] FIG. 25 depicts a cross-sectional view of a semiconductor
structure after a processing operation according to one or more
embodiments of the invention;
[0037] FIG. 26 depicts a cross-sectional view of a semiconductor
structure after a processing operation according to one or more
embodiments of the invention;
[0038] FIG. 27 depicts a cross-sectional view of a semiconductor
structure after a processing operation according to one or more
embodiments of the invention
[0039] FIGS. 28-38 depict a cross-sectional view of a first
embodiment of a semiconductor structure after various processing
operations according to one or more embodiments of the
inventions;
[0040] FIG. 28 depicts a cross-sectional view of a semiconductor
structure after a processing operation according to one or more
embodiments of the invention;
[0041] FIG. 29 depicts a cross-sectional view of a semiconductor
structure after a processing operation according to one or more
embodiments of the invention;
[0042] FIG. 30 depicts a cross-sectional view of a semiconductor
structure after a processing operation according to one or more
embodiments of the invention;
[0043] FIG. 31 depicts a cross-sectional view of a semiconductor
structure after a processing operation according to one or more
embodiments of the invention;
[0044] FIG. 32 depicts a cross-sectional view of a semiconductor
structure after a processing operation according to one or more
embodiments of the invention;
[0045] FIG. 33 depicts a cross-sectional view of a semiconductor
structure after a processing operation according to one or more
embodiments of the invention;
[0046] FIG. 34 depicts a cross-sectional view of a semiconductor
structure after a processing operation according to one or more
embodiments of the invention;
[0047] FIG. 35 depicts a cross-sectional view of a semiconductor
structure after a processing operation according to one or more
embodiments of the invention;
[0048] FIG. 36 depicts a cross-sectional view of a semiconductor
structure after a processing operation according to one or more
embodiments of the invention;
[0049] FIG. 37 depicts a cross-sectional view of a semiconductor
structure after a processing operation according to one or more
embodiments of the invention;
[0050] FIG. 38 depicts a cross-sectional view of a semiconductor
structure after a processing operation according to one or more
embodiments of the invention;
[0051] FIG. 39 depicts a flow chart for making vertical fin CMOS
technology for electrostatic discharge protection; and
[0052] FIG. 40 depicts a flow chart for making vertical fin CMOS
technology for electrostatic discharge protection.
[0053] The diagrams depicted herein are illustrative. There can be
many variations to the diagram or the operations described therein
without departing from the spirit of the invention. For instance,
the actions can be performed in a differing order or actions can be
added, deleted or modified. Also, the term "coupled" and variations
thereof describes having a communications path between two elements
and does not imply a direct connection between the elements with no
intervening elements/connections between them. All of these
variations are considered a part of the specification.
[0054] In the accompanying figures and following detailed
description of the disclosed embodiments, the various elements
illustrated in the figures are provided with two or three digit
reference numbers. With minor exceptions, the leftmost digit(s) of
each reference number correspond to the figure in which its element
is first illustrated.
DETAILED DESCRIPTION
[0055] Various embodiments of the invention are described herein
with reference to the related drawings. Alternative embodiments of
the invention can be devised without departing from the scope of
this invention. Various connections and positional relationships
(e.g., over, below, adjacent, etc.) are set forth between elements
in the following description and in the drawings. These connections
and/or positional relationships, unless specified otherwise, can be
direct or indirect, and the present invention is not intended to be
limiting in this respect. Accordingly, a coupling of entities can
refer to either a direct or an indirect coupling, and a positional
relationship between entities can be a direct or indirect
positional relationship. Moreover, the various tasks and process
steps described herein can be incorporated into a more
comprehensive procedure or process having additional steps or
functionality not described in detail herein.
[0056] The following definitions and abbreviations are to be used
for the interpretation of the claims and the specification. As used
herein, the terms "comprises," "comprising," "includes,"
"including," "has," "having," "contains" or "containing," or any
other variation thereof, are intended to cover a non-exclusive
inclusion. For example, a composition, a mixture, process, method,
article, or apparatus that comprises a list of elements is not
necessarily limited to only those elements but can include other
elements not expressly listed or inherent to such composition,
mixture, process, method, article, or apparatus.
[0057] Additionally, the term "exemplary" is used herein to mean
"serving as an example, instance or illustration." Any embodiment
or design described herein as "exemplary" is not necessarily to be
construed as preferred or advantageous over other embodiments or
designs. The terms "at least one" and "one or more" may be
understood to include any integer number greater than or equal to
one, i.e. one, two, three, four, etc. The terms "a plurality" may
be understood to include any integer number greater than or equal
to two, i.e. two, three, four, five, etc. The term "connection" may
include both an indirect "connection" and a direct
"connection."
[0058] The terms "about," "substantially," "approximately," and
variations thereof, are intended to include the degree of error
associated with measurement of the particular quantity based upon
the equipment available at the time of filing the application. For
example, "about" can include a range of .+-.8% or 5%, or 2% of a
given value.
[0059] For the sake of brevity, conventional techniques related to
making and using aspects of the invention may or may not be
described in detail herein. In particular, various aspects of
computing systems and specific computer programs to implement the
various technical features described herein are well known.
Accordingly, in the interest of brevity, many conventional
implementation details are only mentioned briefly herein or are
omitted entirely without providing the well-known system and/or
process details.
[0060] Turning now to an overview of technologies that are more
specifically relevant to aspects of the invention, ESD devices are
designed according to a set of parameters to achieve performance
characteristics that are suitable for various applications. The
normal operating voltage, breakdown voltage, and thermal failure
temperature of the ESD are all considered in its design. These
parameters create an ESD design window.
[0061] For any ESD design, the I-V characteristics must be the
criteria defined in the window. For example, if the voltage
detected by the ESD device is below the operating voltage, the ESD
device remains off as no protection is required. If the ESD device
is not turned fast enough before reaching a threshold voltage
indicating an ESD event, then the true device that is coupled to
the ESD device will be damaged. Thermal failure can occur in the
event the voltage continues to increase. It is critical to consider
these parameters when designing an ESD device.
[0062] Traditional ESD protection diodes are implanted source/drain
to N/P type well to form PN junction diodes. These diodes generally
have high reverse breakdown voltages due to moderate well doping.
In addition, these ESD devices are large when compared to the
electronics that are protected by the ESD devices because the ESD
devices are configured remove large amounts of current in a very
short period of time. The challenge arises as the electronic
devices get smaller and approach nanometer technology range, the
ESD devices will need to provide protection over a lower range of
voltages. The breakdown voltages for ESD devices have been
configured as low as 2.5 V. Conventional diodes used for ESDs are
not triggered until they reach 5-10 volts which is typical for 90
nm technology and beyond. This configuration can cause damage to
the CMOS technology true device which is now operating at voltages
as low as 2.5 V. However, in today's vertical field-effect
transistor (VFET) technology, the normal operating voltages are
approximately 0.75 V, where the traditional diodes will not be
triggered until 2.5 V.
[0063] In advanced vertical FIN technologies, high-k and WFM form
the gates and the gate dielectric breakdown is relatively low
(approximately 2-3 V) where a narrow ESD design window exists. To
achieve the low gate breakdown voltage ESD protection, a relatively
low Zener BV diode is required. For an effective ESD protection
device, a fast turn-on device is necessary to by-pass the surge
current from the true device, Schottky diodes can be applied to
those applications. TVS diodes can also be used for circuit voltage
spike protection and voltage clamping.
[0064] In addition, the conventional diodes use ion implantation to
form the ESD devices which can lead to channeling effects that
impact the properties of the junctions that have been developed.
Using an epitaxial growth technique, an even distribution and
predictable junction can be formed in a controlled manner.
[0065] Turning now to an overview of the aspects of the invention,
one or more embodiments of the invention address the
above-described shortcomings of the prior art by providing PN
junctions of the diodes that are vertically stacked and bounded by
FINs on each edge of the PN junctions for ohmic contacts. In one or
more embodiments, the diode is formed by epitaxy, where both the N
and P layers can be highly doped for Zener applications. In another
embodiment, the Schottky diodes are FIN bounded, where the guard
ring region is in the FIN body for ohmic contact. In this example,
the semiconductor device includes a regularly doped well. The only
mask required in this particular embodiment is used for FIN doping
by ion implantation.
[0066] In one or more embodiments, an i-layer can be epitaxially
grown to for a PiN diode. PiN diodes can be used in the application
of ESD protection and radio frequency (RF) switch circuits.
[0067] One or more techniques described herein includes building an
ESD protection device. Generally diodes are used for ESD. Various
type of diodes can be used for ESD protection. These diodes include
Zenner diodes, Schottky diodes, and transient voltage suppression
(TVS) diodes are used to provide ESD protection. It is to be
understood that other types of diodes can be used for ESD
protection.
[0068] The N and P regions are stacked and epitaxially grown to
form abrupt junctions. Implanting causes channeling where the
surfaces can be overlapped, non-homogeneous. If the implant angle
is straight, channeling will occur and the forming of the PN
junction is difficult to control. In addition, the FINs are used as
boundaries to create a very accurate distance for the PN junction
to determine its properties.
[0069] Turning now to a more detailed description of aspects of the
present invention, FIG. 1 depicts a cross-sectional view of the
structure 100 and a method of fabricating a semiconductor device
according to one or more embodiments of the invention. FIGS. 1-12
depict a cross-sectional view of the structure 100. The PN junction
diodes are vertically stacked with FIN bounded edges to separate N+
and P+ ohmic contacts. This configuration provides for no parasitic
conducting paths in the structure for any shunt leakage vertically
and laterally. The diode is made by epitaxial deposition, where
both the N and P regions can be doped as high as to 10.sup.20 for
Zener application.
[0070] As depicted in FIG. 1, a partially fabricated semiconductor
device 100 can include one or more vertical FINs 102 and 106 formed
on a silicon substrate 104. As shown in FIG. 1, a hard mask 108 is
formed over a first set of vertical FINs 102 and a hard mask 110 is
formed over a second set of vertical FINs 106.
[0071] Each of the FINs 102 and 106 can have a height ranging from
1 nm to 150 nm, for example, from 10 nm to 50 nm. Each of the FINs
102 and 106 can have a width ranging from 5 nm to 40 nm, for
example, from 10 nm to 20 nm. Adjacent FINs can be separated by a
pitch ranging from 20 nm to 100 nm, for example, from 30 nm to 50
nm.
[0072] The substrate can be any suitable substrate material, such
as, for example, monocrystalline Si, SiGe, SiC, III-V compound
semiconductor, II-VI compound semiconductor, or
semiconductor-on-insulator (SOI). In some embodiments of the
invention, the substrate includes a buried oxide layer (not
depicted). The FINs 102 and 106 can be electrically isolated from
other regions of the substrate by a shallow trench isolation (STI).
The STI (not depicted) can be of any suitable dielectric material,
such as, for example, a silicon oxide.
[0073] In some embodiments of the present invention, the FINs 102
and 106 are patterned using a hard mask. The hard mask includes any
suitable hard mask material, such as, for example, a silicon
nitride. The hard mask can be formed utilizing a deposition process
such as, for example, CVD, plasma enhanced chemical vapor
deposition (PECVD), chemical solution deposition, or evaporation.
In some embodiments of the invention, the hard mask is formed by a
thermal process such as, for example, oxidation or nitridation. The
hard mask can have a thickness of about 5 nm to 150 nm, for
example, from 30 nm to 60 nm.
[0074] FIG. 2 depicts a cross-sectional view of the structure 100
after forming a bottom spacer 202 over the FINs 102 and 106 and
substrate 104. In one or more embodiments, the bottom spacer 202 is
a conforming spacer liner which adheres to the surface of the
substrate 104.
[0075] The bottom spacer 202 can be formed over a high-k gate
dielectric film, the WFMs, and the metal oxide layer, as well as on
sidewalls of the FINs 102 and 106. The bottom spacer 202 can
include a dielectric material, such as silicon oxide, silicon
nitride, silicon oxynitride, or a combination thereof, and can be
formed using known deposition processes.
[0076] FIG. 3 depicts a cross-sectional view of the structure 100
after patterning a block mask 302 over selected regions of the
structure 100. In one or more embodiments, the block mask 302 is
selectively patterned on the bottom spacer 202. In one or more
embodiments, the block mask 302 can be selectively patterned over
one or more sets of FINs 102 and 106. In other embodiments, the
block mask 302 can be selectively patterned over the other portions
of the structure 100 for patterning an N+ opening and providing a
mask 302 for patterning other logic devices.
[0077] FIG. 4 depicts a cross-sectional view of the structure 100
after selectively removing the bottom spacer 202 and recessing one
or more portions of the structure 100 for epitaxially growing an
epi-layer. In one or more embodiments, one or more portions of the
bottom spacer 202 are removed from the substrate 104 to expose one
or more regions for growing the epi-layer. In one or more
embodiments, portions of the bottom spacer 202 are removed from a
top portion of a set of FINs 106 to expose a portion of the FINs
106 as shown in FIG. 4. In one or more embodiments, a channel 400
is exposed as the block mask 302 and bottom spacer 202 are removed.
In some embodiments, the removal and recess are performed for the
30-60 nm for epitaxial growth.
[0078] FIG. 5 depicts a cross-sectional view of the structure 100
after epitaxially growing a layer 502 and annealing the layer 502
in the exposed regions of the structure 100. In one or more
embodiments, the epi-layer 502 is an N+ doped region.
[0079] In some embodiments of the invention, epitaxial regions are
epitaxially grown over the substrate. Epitaxial semiconductor
materials can be grown using vapor-phase epitaxy (VPE), MBE,
liquid-phase epitaxy (LPE), or other suitable processes. Epitaxial
silicon, SiGe, and/or carbon doped silicon (Si:C) can be doped
during deposition (in-situ doped) by adding dopants, n-type dopants
(e.g., phosphorus or arsenic) or p-type dopants (e.g., Ga, B,
BF.sub.2, or Al). The dopant concentration in the doped regions can
range from 1.times.10.sup.18 cm.sup.-3 to 2.times.10.sup.21
cm.sup.-3, or between 1.times.10.sup.19 cm.sup.-3 and
1.times.10.sup.21 cm.sup.-3. The first layer doping concentration
is set to 1 or 2 orders of magnitude lower than the second layer so
that the depletion layer mostly exists in the first layer when the
diode is reverse biased.
[0080] The terms "epitaxial growth and/or deposition" and
"epitaxially formed and/or grown" mean the growth of a
semiconductor material (crystalline material) on a deposition
surface of another semiconductor material (crystalline material),
in which the semiconductor material being grown (crystalline
overlayer) has substantially the same crystalline characteristics
as the semiconductor material of the deposition surface (seed
material). In an epitaxial deposition process, the chemical
reactants provided by the source gases are controlled and the
system parameters are set so that the depositing atoms arrive at
the deposition surface of the semiconductor substrate with
sufficient energy to move about on the surface such that the
depositing atoms orient themselves to the crystal arrangement of
the atoms of the deposition surface. Therefore, an epitaxially
grown semiconductor material has substantially the same crystalline
characteristics as the deposition surface on which the epitaxially
grown material is formed. For example, an epitaxially grown
semiconductor material deposited on a {100} orientated crystalline
surface will take on a {100} orientation. In some embodiments of
the invention, epitaxial growth and/or deposition processes are
selective to forming on semiconductor surface, and generally do not
deposit material on exposed surfaces, such as silicon dioxide or
silicon nitride surfaces.
[0081] In some embodiments of the invention, the gas source for the
deposition of epitaxial semiconductor material includes a silicon
containing gas source, a germanium containing gas source, or a
combination thereof. For example, an epitaxial Si layer can be
deposited from a silicon gas source that is selected from the group
consisting of silane, disilane, trisilane, tetrasilane,
hexachlorodisilane, tetrachlorosilane, dichlorosilane,
trichlorosilane, methylsilane, dimethylsilane, ethylsilane,
methyldisilane, dimethyldisilane, hexamethyldisilane and
combinations thereof. An epitaxial germanium layer can be deposited
from a germanium gas source that is selected from the group
consisting of germane, digermane, halogermane, dichlorogermane,
trichlorogermane, tetrachlorogermane and combinations thereof. An
epitaxial silicon germanium alloy layer can be formed utilizing a
combination of such gas sources. Carrier gases like hydrogen,
nitrogen, helium and argon can be used. In some embodiments of the
invention, the doped regions include silicon. In some embodiments
of the invention, the doped regions include carbon doped silicon
(Si:C). This Si:C layer can be grown in the same chamber used for
other epitaxy steps or in a dedicated Si:C epitaxy chamber. The
Si:C can include carbon in the range of about 0.2 percent to about
3.0 percent
[0082] FIG. 6 depicts a cross-sectional view of the structure 100
depositing a dielectric film 602 on the structure 100. In one or
more embodiments, the dielectric film 602 is a conformally
deposited SiN dielectric film 602. The conforming dielectric film
602 can be grown over the first set of FINs 102, second set of FINs
106, and in the channel between the first set of FINs 102 and the
second set of FINs 106. In some embodiments, the dielectric film
602 is formed by atomic layer deposition (ALD), and in some
embodiments, the dielectric film 602 is formed by chemical vapor
deposition (CVD).
[0083] FIG. 7 depicts a cross-sectional view of the structure 100
after selectively adding a block mask 702 over one or more portions
of the dielectric film 602.
[0084] FIG. 8 depicts a cross-sectional view of the structure 100
after removing one or more portions of the dielectric film 602 to
expose one or more regions of the structure 100. In one or more
embodiments, the dielectric film 602 is removed from the channel
region between the first set of FINs 102 and the second set of FINs
106 as shown in FIG. 8.
[0085] FIG. 9 depicts a cross-sectional view of the structure 100
after removing the patterned block mask 702. In one or more
embodiments, the dielectric film 602 over the first set of FINs 102
and the second set of FINs 106 is exposed as shown in FIG. 8.
[0086] FIG. 10 depicts a cross-sectional view of the structure 100
after epitaxially growing an epi-layer 1002 in the exposed regions
of the substrate 104. In one or more embodiments, the epi-layer
1002 is a P+ layer. The layer 1002 and the layer 502 form the PN
junction between the layer 1002 and the layer 502.
[0087] FIG. 11 depicts a cross-sectional view of the structure 100
after forming a silicidation layer 1102. In one or more
embodiments, the silicidation layer 1102 is formed over the
epi-layer 1002 between the first set of FINs 102 and the second set
of FINs 106. In one or more embodiments, the silicidation layer
1102 can be composed of NiSi, PiPtSi, TiSi, Wsi, etc.
[0088] In one or more embodiments, an ILD is formed between the
layer 502 and the layer 1002 described below. An interlayer
dielectric (ILD) is formed over the structure 100. The ILD can be
any suitable dielectric material, such as, for example, a silicon
oxide, and can be formed using any suitable process. In some
embodiments of the invention, the ILD is planarized to a surface of
the WFMs and/or the metal oxide layer using, for example, CMP. In
some embodiments of the invention, the CMP can be utilized to
remove excess portions of the ILD selective to the WFMs, the metal
oxide layer, and/or the FINs 102 and 106. In some embodiments, the
interlayer is optional in between N+ and P+ layer to make P-i-N
diodes, which provide a knob of P+ to N+ spacing for breakdown
adjustment. The diode area can be larger too in um.sup.2 size for
large ESD current purging.
[0089] FIG. 12 depicts a cross-sectional view of the structure 100
after filling in the structure 100 with a dielectric 1202. FIG. 13
depicts a cross-sectional view of the structure 100 after creating
one or more trenches in the dielectric layer 1002 and forming metal
contacts 1302 and 1304. In one or more embodiments, FIG. 13 depicts
a cross-sectional view of the structure 100 after forming a metal
liner, NFET top S/D contact, and PFET top S/D contact during an
intermediate operation of the exemplary method of fabricating a
semiconductor device according to one or more embodiments of the
invention. The top contacts can be formed using known metallization
techniques. In some embodiments of the invention the thickness of
the ILD is increased by depositing additional dielectric material
prior to forming the top contacts. The ILD can then be patterned
into open trenches (not depicted) using known processes, such as a
wet or dry etch. In some embodiments of the invention, the top
contacts are overfilled into the trenches, forming overburdens
above a surface of the ILD. The overburden can then be planarized
using, for example, CMP.
[0090] The metal contacts can be made of any suitable conducting
material, such as, for example, metal (e.g., tungsten, titanium,
tantalum, ruthenium, zirconium, cobalt, copper, aluminum, lead,
platinum, tin, silver, gold), conducting metallic compound material
(e.g., tantalum nitride, titanium nitride, tantalum carbide,
titanium carbide, titanium aluminum carbide, tungsten silicide,
tungsten nitride, ruthenium oxide, cobalt silicide, nickel
silicide), carbon nanotube, conductive carbon, graphene, or any
suitable combination of these materials. The conductive material
can further include dopants that are incorporated during or after
deposition. In some embodiments of the invention, the top contacts
include tungsten and the metal liner is a Ti/TiN liner. The metal
liner is a barrier that prevents metal in the top contacts from
diffusing into, or doping, the surrounding materials, which can
degrade their properties. Silicon, for example, forms deep-level
traps when doped with copper. An ideal barrier metal liner must
limit metal diffusivity sufficiently to chemically isolate the
conductor from the surrounding materials and should have a high
electrical conductivity, for example, tantalum nitride and tantalum
(TaN/Ta), titanium, titanium nitride, cobalt, ruthenium, and
manganese.
[0091] FIG. 14 depicts a cross-sectional view of a different
embodiment of the structure 100 after selectively forming a
silicide layer 1402 between one or more metal contacts 1302 and
1304 and the substrate 104.
[0092] FIGS. 15-27 depict a cross-sectional view of a semiconductor
device in accordance with one or more embodiments. The PN junction
diodes are vertically stacked with FIN bounded edges to separate N+
and P+ ohmic contacts. The configuration provides that no parasitic
conducting path in such structure for any shunt leakage vertically
and laterally. The diode with top layer is made by epitaxial
deposition, but the bottom is made by ion implantation. The ion
implantation layer after thermal activation needs to be maintained
the surface doping concentration high to above 10.sup.19 to
maintain the Zener diode application requirement. As depicted in
FIG. 15, a structure 200 is initially formed in a similar manner as
the structure 100 depicted in FIG. 1.
[0093] As depicted in FIG. 15, a partially fabricated semiconductor
device 200 can include one or more vertical FINs 1502 and 1506
formed on a silicon substrate 1504. As shown in FIG. 15, a hard
mask 1508 and 1510 is formed over a first set of vertical FINs 1502
and a hard mask 1510 is formed over a second set of vertical FINs
1506.
[0094] FIG. 16 depicts a cross-sectional view of the structure 200
after adding a bottom spacer 1602 over the substrate 1504. In one
or more embodiments, the bottom spacer 1602 is a conforming liner
and is formed in a similar manner as the bottom spacer 202 shown in
FIG. 2.
[0095] FIG. 17 depicts a cross-sectional view of the structure 200
after selectively patterning a block mask 1702 over one or more
portions of the bottom spacer 1602.
[0096] FIG. 18 depicts a cross-sectional view of the structure 200
after selectively removing the bottom spacer 1602 and the block
mask 1702 from the substrate 1504. In one or more embodiments, the
bottom spacer 1602 and the block mask 1702 are removed by spacer
reactive ion etching (RIE).
[0097] FIG. 19 depicts a cross-sectional view of the structure 200
after performing an ion implantation and anneal process producing
layer 1902. In one or more embodiments, the layer 1902 is a heavily
doped N+ implant region.
[0098] FIG. 20 depicts a cross-sectional view of the structure 200
after adding a dielectric layer 2002. In one or more embodiments,
the dielectric film 2002 is a conformally deposited in a similar
manner as the dielectric layer 602 shown in FIG. 6. The conforming
dielectric film 2002 can be grown over the first set of FINs 1502,
second set of FINs 1506, and in the channel between the first set
of FINs 1502 and the second set of FINs 1506. In some embodiments,
the dielectric film 2002 is formed by atomic layer deposition
(ALD), and in some embodiments, the dielectric film 2002 is formed
by chemical vapor deposition (CVD).
[0099] FIG. 21 depicts a cross-sectional view of the structure 200
after patterning a block mask 2102 over one or more portions of the
substrate 1504. In one or more embodiments, the channel between the
first set of FINs 1502 and the second set of FINs 1506 is left
exposed for growing an epitaxial layer.
[0100] FIG. 22 depicts a cross-sectional view of the structure 200
after removing one or more portions of the dielectric film 2002
from the structure 200. In one or more embodiments, the dielectric
film 2002 is removed in the channel formed between the first set of
FINs 1502 and the second set of FINs 1506.
[0101] FIG. 23 depicts a cross-sectional view of the structure 200
after removing one or more portions of the block mask 2102.
[0102] FIG. 24 depicts a cross-sectional view of the structure 200
after epitaxially growing a layer 2402 on the exposed regions of
the substrate 1504. A PN junction is formed between the layer 1902
and the layer 2402. In one or more embodiments, an i-layer can be
disposed between the layer 1902 and the layer 2402.
[0103] FIG. 25 depicts a cross-sectional view of the structure 200
after forming a silicide layer 2502 atop the layer 2402. In other
embodiments, the silicide layer 2502 is only formed between the
metal contacts described in FIG. 27 and the structure 1504. FIG. 26
depicts a cross-sectional view of the structure 200 after filling
in the substrate 1504 with a dielectric 2602.
[0104] FIG. 27 depicts a cross-sectional view of the structure 200
after forming one or more trenches in the dielectric 2602 and
forming one or more metal contacts 2702 and 2704 in the one or more
trenches. In some embodiments, the metal contacts can serve as
source, gate, or drain contacts. In other embodiments, a different
number of metal contacts can be formed.
[0105] FIGS. 28-38 depict a cross-sectional view of forming a
Schottky diode or transient voltage suppression (TVS) diode
according to one or more embodiments. The TVS diode is formed as
back to back Schottky diodes. In one or more embodiments, a
Schottky diode which is FIN bounded edge formed, wherein the FINs
are doped and used as guard rings. There is no parasitic conducting
path in such structure for any shunt leakage vertically and/or
laterally. As depicted in FIG. 28, a structure 300 is initially
formed in a similar manner as the structure 100 depicted in FIG. 28
depicts a partially fabricated semiconductor device 300 can include
one or more set of vertical FINs 2802 and 2806 formed on a silicon
substrate 2804. Also depicted in FIG. 28 is a hard mask 2808 and
2810 atop the first set of FINs 2802 and the second set of FINs
2806.
[0106] FIG. 29 depicts a cross-sectional view of the structure 300
after forming a bottom spacer 2902 over the structure 300. In one
or more embodiments, the bottom spacer can be formed in a similar
manner as the bottom spacer 202 of FIG. 2.
[0107] FIG. 30 depicts a cross-sectional view of the structure 300
after selectively patterning a block mask 3002 over one or more
portions of the bottom spacer 2902 of the structure 300.
[0108] FIG. 31 depicts a cross-sectional view of the structure 300
after selectively removing the block mask 3002 and one or more
portions of the bottom spacer 2902 to expose one or more portions
of the structure 300. In an embodiment, the one or more exposed
portions include a channel between the first set of FINs 2802 and
the second set of FINs 2806. In addition, the one or more exposed
portions can include a portion of the set of FINs 2802 and
2806.
[0109] FIG. 32 depicts a cross-sectional view of the structure 300
after performing a doping process to produce a first doping layer
3202. In some embodiments, the layer 3202 is ion implanted and
annealed layer. In one or more embodiments, the doping layer 3202
is an N+ doping layer. In some embodiments, the Schottky diode well
doping is shared with the FET well, such as an N-type well. The
doping concentration is lower than 10.sup.18 cm.sup.-3 to avoid
ohmic contact formation. In other embodiments, the doping layer
3202 is a P+ doping layer.
[0110] FIG. 33 depicts a cross-sectional view of the structure 300
after patterning a second block mask 3302 over one or more portions
of the structure 300. In some embodiments, the second block mask
3302 leaves portions of the first set of FINs 2802 and second set
of FINs 2806 exposed. It is to be understood that different block
mask patterns can be used.
[0111] FIG. 34 depicts a cross-sectional view of the structure 300
after performing a doping process. In one or more embodiments, the
set of FINs 2802 and 2806 are doped as depicted by a set of arrows
depicted in FIG. 30. In some embodiments, the set of FINs 2802 and
2806 are p-type doped, for the guard ring formation.
[0112] FIG. 35 depicts a cross-sectional view of the structure 300
after removing one or more portions of the second block mask 3302
to expose one or more portions of the substrate 2804.
[0113] FIG. 36 depicts a cross-sectional view of the structure 300
after forming a silicidation layer 3602 over one or more portions
of the substrate 2404. In one or more embodiments, the silicidation
layer 3602 is formed over the channel between the set of FINs 2802
and 2806. The silicide formation that is formed on top of the well,
which is between the set of FINs 2802 and 2806, which act as a
guard ring. The diode area can be configured for large ESD current
purging.
[0114] FIG. 37 depicts a cross-sectional view of the structure 300
after filling the structure 300 with a dielectric material 3702.
FIG. 38 depicts a cross-sectional view of the structure 300 after
forming trenches and forming one or more contacts 3802 and
3804.
[0115] Now referring to FIG. 39, a flowchart 3900 for forming a
semiconductor device in accordance with one or more embodiments is
shown. Block 3902 provides forming a first set of semiconductor
FINs vertically extending a substrate. Block 3904 provides forming
a second set of semiconductor FINs vertically extending from the
substrate.
[0116] Block 3906 provides forming a first layer on the substrate.
Block 3908 provides forming a second layer atop a portion of the
first layer, wherein a junction is formed between the first layer
and the second layer, wherein a length of the junction is defined
by the first set of semiconductor FINs and the second set of
semiconductor FINs.
[0117] Block 3910 provides forming a first metal contact atop the
first layer. Block 3912 provides forming a second metal contact
atop the second layer.
[0118] Now referring to FIG. 40, a flowchart 4000 for forming a
semiconductor device in accordance with one or more embodiments is
shown. Block 4002 provides forming a first set of semiconductor
FINs vertically extending from a substrate. Block 4004 provides
forming a second set of semiconductor FINs vertically extending
from the substrate.
[0119] Block 4006 provides forming a first layer on the substrate.
Block 4008 provides forming a silicide layer atop the first layer.
Block 4010 provides forming a first metal contact atop the first
layer. Block 4012 provides forming a second metal contact atop the
second layer.
[0120] One or more embodiments improves over the prior art by using
FINs to bound the PN junction to create an accurately defined PN
junction length and epitaxial growth to accurately create the PN
junction of the diode for ESD protection. The configuration allows
for a threshold breakdown voltage to be configured that is
sufficient enough to trigger the electrostatic device and the PN
junction which has been precisely formed can efficiently respond to
the ESD event. The techniques described herein overcome the
challenges of PN junctions being formed using ion implantation,
where the ion implantation can lead to channeling effects in the PN
junctions leading to performance issues. These performance issues
can lead to slow response times to the ESD event and cause damage.
The ESD devices generated by the techniques described herein
provide for reliable protection of the coupled devices. In
addition, the integrity of the operation of the coupled devices and
electronics is increased.
[0121] The present invention may be a system, a method, and/or a
computer program product at any possible technical detail level of
integration. The computer program product may include a computer
readable storage medium (or media) having computer readable program
instructions thereon for causing a processor to carry out aspects
of the present invention.
[0122] The computer readable storage medium can be a tangible
device that can retain and store instructions for use by an
instruction execution device. The computer readable storage medium
may be, for example, but is not limited to, an electronic storage
device, a magnetic storage device, an optical storage device, an
electromagnetic storage device, a semiconductor storage device, or
any suitable combination of the foregoing. A non-exhaustive list of
more specific examples of the computer readable storage medium
includes the following: a portable computer diskette, a hard disk,
a random access memory (RAM), a read-only memory (ROM), an erasable
programmable read-only memory (EPROM or Flash memory), a static
random access memory (SRAM), a portable compact disc read-only
memory (CD-ROM), a digital versatile disk (DVD), a memory stick, a
floppy disk, a mechanically encoded device such as punch-cards or
raised structures in a groove having instructions recorded thereon,
and any suitable combination of the foregoing. A computer readable
storage medium, as used herein, is not to be construed as being
transitory signals per se, such as radio waves or other freely
propagating electromagnetic waves, electromagnetic waves
propagating through a waveguide or other transmission media (e.g.,
light pulses passing through a fiber-optic cable), or electrical
signals transmitted through a wire.
[0123] Computer readable program instructions described herein can
be downloaded to respective computing/processing devices from a
computer readable storage medium or to an external computer or
external storage device via a network, for example, the Internet, a
local area network, a wide area network and/or a wireless network.
The network may comprise copper transmission cables, optical
transmission fibers, wireless transmission, routers, firewalls,
switches, gateway computers and/or edge servers. A network adapter
card or network interface in each computing/processing device
receives computer readable program instructions from the network
and forwards the computer readable program instructions for storage
in a computer readable storage medium within the respective
computing/processing device.
[0124] Computer readable program instructions for carrying out
operations of the present invention may be assembler instructions,
instruction-set-architecture (ISA) instructions, machine
instructions, machine dependent instructions, microcode, firmware
instructions, state-setting data, configuration data for integrated
circuitry, or either source code or object code written in any
combination of one or more programming languages, including an
object oriented programming language such as Smalltalk, C++, or the
like, and procedural programming languages, such as the "C"
programming language or similar programming languages. The computer
readable program instructions may execute entirely on the user's
computer, partly on the user's computer, as a stand-alone software
package, partly on the user's computer and partly on a remote
computer or entirely on the remote computer or server. In the
latter scenario, the remote computer may be connected to the user's
computer through any type of network, including a local area
network (LAN) or a wide area network (WAN), or the connection may
be made to an external computer (for example, through the Internet
using an Internet Service Provider). In some embodiments,
electronic circuitry including, for example, programmable logic
circuitry, field-programmable gate arrays (FPGA), or programmable
logic arrays (PLA) may execute the computer readable program
instruction by utilizing state information of the computer readable
program instructions to personalize the electronic circuitry, in
order to perform aspects of the present invention.
[0125] Aspects of the present invention are described herein with
reference to flowchart illustrations and/or block diagrams of
methods, apparatus (systems), and computer program products
according to embodiments of the invention. It will be understood
that each block of the flowchart illustrations and/or block
diagrams, and combinations of blocks in the flowchart illustrations
and/or block diagrams, can be implemented by computer readable
program instructions.
[0126] These computer readable program instructions may be provided
to a processor of a general purpose computer, special purpose
computer, or other programmable data processing apparatus to
produce a machine, such that the instructions, which execute via
the processor of the computer or other programmable data processing
apparatus, create means for implementing the functions/acts
specified in the flowchart and/or block diagram block or blocks.
These computer readable program instructions may also be stored in
a computer readable storage medium that can direct a computer, a
programmable data processing apparatus, and/or other devices to
function in a particular manner, such that the computer readable
storage medium having instructions stored therein comprises an
article of manufacture including instructions which implement
aspects of the function/act specified in the flowchart and/or block
diagram block or blocks.
[0127] The computer readable program instructions may also be
loaded onto a computer, other programmable data processing
apparatus, or other device to cause a series of operational steps
to be performed on the computer, other programmable apparatus or
other device to produce a computer implemented process, such that
the instructions which execute on the computer, other programmable
apparatus, or other device implement the functions/acts specified
in the flowchart and/or block diagram block or blocks.
[0128] The flowchart and block diagrams in the Figures illustrate
the architecture, functionality, and operation of possible
implementations of systems, methods, and computer program products
according to various embodiments of the present invention. In this
regard, each block in the flowchart or block diagrams may represent
a module, segment, or portion of instructions, which comprises one
or more executable instructions for implementing the specified
logical function(s). In some alternative implementations, the
functions noted in the blocks may occur out of the order noted in
the Figures. For example, two blocks shown in succession may, in
fact, be executed substantially concurrently, or the blocks may
sometimes be executed in the reverse order, depending upon the
functionality involved. It will also be noted that each block of
the block diagrams and/or flowchart illustration, and combinations
of blocks in the block diagrams and/or flowchart illustration, can
be implemented by special purpose hardware-based systems that
perform the specified functions or acts or carry out combinations
of special purpose hardware and computer instructions.
[0129] The descriptions of the various embodiments of the present
invention have been presented for purposes of illustration, but are
not intended to be exhaustive or limited to the embodiments
disclosed. Many modifications and variations will be apparent to
those of ordinary skill in the art without departing from the scope
and spirit of the described embodiments. The terminology used
herein was chosen to best explain the principles of the
embodiments, the practical application or technical improvement
over technologies found in the marketplace, or to enable others of
ordinary skill in the art to understand the embodiments described
herein.
* * * * *