U.S. patent application number 10/650479 was filed with the patent office on 2004-04-29 for method and apparatus for supplying substrates to a processing tool.
This patent application is currently assigned to APPLIED MATERIALS, INC.. Invention is credited to Elliott, Martin R., Englhardt, Eric A., Hudgens, Jeffrey C., Lowrance, Robert B., Rice, Michael R..
Application Number | 20040081546 10/650479 |
Document ID | / |
Family ID | 39676318 |
Filed Date | 2004-04-29 |
United States Patent
Application |
20040081546 |
Kind Code |
A1 |
Elliott, Martin R. ; et
al. |
April 29, 2004 |
Method and apparatus for supplying substrates to a processing
tool
Abstract
In one aspect, a substrate loading station for a processing tool
includes plural load ports. Each load port is operatively coupled
to the processing tool and has a mechanism for opening a substrate
carrier. A carrier handler transports substrate carriers from a
factory exchange location to the load ports without placing the
carriers on any carrier support location other than the load ports.
Numerous other aspects are provided.
Inventors: |
Elliott, Martin R.; (Round
Rock, TX) ; Rice, Michael R.; (Pleasanton, CA)
; Lowrance, Robert B.; (Los Gatos, CA) ; Hudgens,
Jeffrey C.; (San Francisco, CA) ; Englhardt, Eric
A.; (Palo Alto, CA) |
Correspondence
Address: |
APPLIED MATERIALS, INC.
PATENT COUNSEL
Legal Affairs Department
P.O. BOX 450A
Santa Clara
CA
95052
US
|
Assignee: |
APPLIED MATERIALS, INC.
|
Family ID: |
39676318 |
Appl. No.: |
10/650479 |
Filed: |
August 28, 2003 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
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60407336 |
Aug 31, 2002 |
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60407451 |
Aug 31, 2002 |
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60407339 |
Aug 31, 2002 |
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60407474 |
Aug 31, 2002 |
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60407452 |
Aug 31, 2002 |
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60407337 |
Aug 31, 2002 |
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60407340 |
Aug 31, 2002 |
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60443087 |
Jan 27, 2003 |
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60407463 |
Aug 31, 2002 |
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60443004 |
Jan 27, 2003 |
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60443153 |
Jan 27, 2003 |
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60443001 |
Jan 27, 2003 |
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60443115 |
Jan 27, 2003 |
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Current U.S.
Class: |
414/805 |
Current CPC
Class: |
H01L 21/67775 20130101;
Y10S 414/14 20130101 |
Class at
Publication: |
414/805 |
International
Class: |
B65H 001/00 |
Claims
The invention claimed is:
1. A method of supplying substrates to a processing tool,
comprising: providing a plurality of load ports each having a
mechanism adapted to open a substrate carrier; providing a factory
exchange location at which substrate carriers are exchanged with a
substrate carrier transport device while the substrate carriers are
in motion and being transported by the substrate carrier transport
device; providing a carrier handler having an end effector adapted
to contact a substrate carrier, the carrier handler being adapted
to transport substrate carriers between the factory exchange
location and the plurality of load ports; receiving a first
plurality of substrate carriers at the factory exchange location
from the substrate carrier transport device; and for each of the
first plurality of substrate carriers: transporting the substrate
carrier from the factory exchange location directly to a respective
one of the plurality of load ports; docking and opening the
substrate carrier at the respective load port; undocking and
closing the substrate carrier at the respective load port;
transporting the substrate carrier from the respective load port
directly to the factory exchange location; and returning the
substrate carrier to the substrate carrier transport device.
2. The method of claim 1, wherein the substrate carriers are single
substrate carriers.
3. The method of claim 1, wherein the step of providing a plurality
of load ports comprises providing two stacks of load ports.
4. The method of claim 3, wherein the carrier handler moves the
substrate carriers only within an envelope defined by footprints of
the two stacks of load ports.
5. The method of claim 1, wherein the docking of each substrate
carrier occurs simultaneously with opening of the respective
substrate carrier.
6. The method of claim 1, wherein the factory exchange location and
the load ports have substantially the same footprint.
7. The method of claim 1, wherein the factory exchange location is
at a height greater than respective heights of all of the load
ports.
8. A substrate loading station for a processing tool, comprising: a
first plurality of load ports operatively coupled to the processing
tool and each having a mechanism adapted to open a substrate
carrier; a factory exchange location at which substrate carriers
are exchanged with a substrate carrier transport device while the
substrate carriers are in motion and being transported by the
substrate carrier transport device; and a carrier handler having an
end effector adapted to contact a substrate carrier, the carrier
handler being adapted to transport substrate carriers between the
factory exchange location and the first plurality of load ports;
wherein the carrier handler has a controller programmed to perform
the steps of: for each of the first plurality of substrate
carriers: transporting the substrate carrier from the factory
exchange location directly to a respective one of the plurality of
load ports; docking and opening the substrate carrier at the
respective load port; undocking and closing the substrate carrier
at the respective load port; transporting the substrate carrier
from the respective load port directly to the factory exchange
location; and returning the substrate carrier to the substrate
carrier transport device.
9. The substrate loading station of claim 8, wherein the substrate
carriers transported by the carrier handler are single substrate
carriers.
10. The substrate loading station of claim 8, further comprising: a
second plurality of load ports, the second plurality of load ports
being spaced apart from and to a side of the first plurality of
load ports.
11. The substrate loading station of claim 10, wherein the carrier
handler is adapted to move vertically in a space between the first
and second pluralities of load ports.
12. The substrate loading station of claim 11, wherein the carrier
handler is adapted to move the substrate carriers only within an
envelope defined by footprints of the first and second pluralities
of load ports.
13. The substrate loading station of claim 8, wherein each of the
load ports is adapted to open a substrate carrier simultaneously
with the substrate carrier docking with the load port.
14. The substrate loading station of claim 8, wherein the factory
exchange location and the load ports have substantially the same
footprint.
15. The substrate loading station of claim 8, wherein the substrate
carrier transport device is a conveyor.
16. The substrate loading station of claim 8, wherein the factory
exchange location is at a height greater than respective heights of
all of the load ports.
17. An apparatus adapted to supply substrates to a processing tool,
comprising: a substrate carrier handler adapted to transport a
substrate carrier to a first load port of the processing tool, the
substrate carrier handler including an end effector adapted to
support the substrate carrier; and a controller coupled to the
substrate carrier handler and operative to control the substrate
carrier handler such that the end effector of the substrate carrier
handler disengages the substrate carrier from a substrate carrier
conveyor while the substrate carrier is in motion and being
transported by the substrate carrier conveyor, the controller
further operative to perform the steps of: transporting the
substrate carrier from the substrate carrier conveyor directly to
the first load port; docking and opening the substrate carrier at
the first load port; undocking and closing the substrate carrier at
the first load port; and returning the substrate carrier directly
to the substrate carrier conveyor.
18. An apparatus adapted to supply substrates to a processing tool,
comprising: a substrate carrier handler adapted to transport a
substrate carrier to a first load port of the processing tool, the
substrate carrier handler including: a vertical guide; a horizontal
guide coupled to the vetical guide; and an end effector adapted to
support the substrate carrier and to move vertically relative to
the vertical guide and horizontally relative to the horizontal
guide; and a controller coupled to the substrate carrier handler
and operative to control the substrate carrier handler such that
the end effector of the substrate carrier handler disengages the
substrate carrier from a substrate carrier conveyor positioned
adjacent the substrate carrier handler, the controller further
operative to perform the steps of: transporting the substrate
carrier from the substrate carrier conveyor directly to the first
load port; docking and opening the substrate carrier at the first
load port; undocking and closing the substrate carrier at the first
load port; and returning the substrate carrier directly to the
substrate carrier conveyor.
19. A method of transferring a substrate carrier, comprising:
conveying the substrate carrier on a substrate carrier conveyor
positioned adjacent a substrate loading station that includes a
substrate carrier handler adapted to transport the substrate
carrier to a load port of a processing tool; employing an end
effector of the substrate carrier handler of the substrate loading
station to disengage the substrate carrier from the substrate
carrier conveyor while the substrate carrier is in motion and being
transported by the substrate carrier conveyor; transporting the
substrate carrier from the substrate carrier conveyor directly to
the load port; docking and opening the substrate carrier at the
load port; undocking and closing the substrate carrier at the load
port; and returning the substrate carrier directly to the substrate
carrier conveyor.
20. A method of transferring a substrate carrier to a substrate
loading station, comprising: conveying the substrate carrier on a
substrate carrier conveyor positioned adjacent the substrate
loading station, the substrate loading station having: a substrate
carrier handler adapted to transport the substrate carrier to a
first load port of a processing tool, the substrate carrier handler
including: a vertical guide; a horizontal guide coupled to the
vertical guide; and an end effector adapted to support the
substrate carrier and to move vertically relative to the vertical
guide and horizontally relative to the horizontal guide; employing
the end effector of the substrate carrier handler of the substrate
loading station to disengage the substrate carrier from the
substrate carrier conveyor; transporting the substrate carrier from
the substrate carrier conveyor directly to the first load port;
docking and opening the substrate carrier at the first load port;
undocking and closing the substrate carrier at the first load port;
and returning the substrate carrier directly to the substrate
carrier conveyor.
Description
[0001] This application claims priority from U.S. provisional
application Serial No. 60/407,336, filed Aug. 31, 2002, the content
of which is hereby incorporated by reference herein in its
entirety.
CROSS REFERENCE TO RELATED APPLICATIONS
[0002] The present application is related to the following
commonly-assigned, co-pending U.S. Patent Applications, each of
which is hereby incorporated by reference herein in its
entirety:
[0003] U.S. Provisional Patent Application Serial No. 60/407,451,
filed Aug. 31, 2002 and titled "System For Transporting Wafer
Carriers" (Attorney Docket No. 6900/L);
[0004] U.S. Provisional Patent Application Serial No. 60/407,339,
filed Aug. 31, 2002 and titled "Method and Apparatus for Using
Wafer Carrier Movement to Actuate Wafer Carrier Door
Opening/Closing" (Attorney Docket No. 6976/L);
[0005] U.S. Provisional Patent Application Serial No. 60/407,474,
filed Aug. 31, 2002 and titled "Method and Apparatus for Unloading
Wafer Carriers from Wafer Carrier Transport System" (Attorney
Docket No. 7024/L);
[0006] U.S. Provisional Patent Application Serial No. 60/407,452,
filed Aug. 31, 2002 and titled "End Effector Having Mechanism For
Reorienting A Wafer Carrier Between Vertical And Horizontal
Orientations" (Attorney Docket No. 7097/L);
[0007] U.S. Provisional Patent Application Serial No. 60/407,337,
filed Aug. 31, 2002, and titled "Wafer Loading Station with Docking
Grippers at Docking Stations" (Attorney Docket No. 7099/L);
[0008] U.S. Provisional Patent Application Serial No. 60/407,340,
filed Aug. 31, 2002 and titled "Wafer Carrier having Door Latching
and Wafer Clamping Mechanism" (Attorney Docket No. 7156/L);
[0009] U.S. Provisional Patent Application Serial No. 60/443,087,
filed Jan. 27, 2003 and titled "Methods and Apparatus for
Transporting Wafer Carriers" (Attorney Docket No. 7163/L);
[0010] U.S. patent application Ser. No. 60/407,463, filed Aug. 31,
2002 and titled "Wafer Carrier Handler That Unloads Wafer Carriers
Directly From a Moving Conveyor" (Attorney Docket No. 7676/L);
[0011] U.S. patent application Ser. No. 60/443,004, filed Jan. 27,
2003 and titled "Wafer Carrier Handler That Unloads Wafer Carriers
Directly From a Moving Conveyor" (Attorney Docket No. 7676/L2);
[0012] U.S. Provisional Patent Application Serial No. 60/443,153,
filed Jan. 27, 2003 and titled "Overhead Transfer Flange and
Support for Suspending Wafer Carrier" (Attorney Docket No.
8092/L);
[0013] U.S. Provisional Patent Application Serial No. 60/443,001,
filed Jan. 27, 2003 and titled "Systems and Methods for
Transferring Wafer Carriers Between Processing Tools" (Attorney
Docket No. 8201/L); and
[0014] U.S. Provisional Patent Application Serial No. 60/443,115,
filed Jan. 27, 2003 and titled "Apparatus and Method for Storing
and Loading Wafer Carriers" (Attorney Docket No. 8202/L).
FIELD OF THE INVENTION
[0015] The present invention related generally to substrate
processing, and more particularly to an apparatus and method for
supplying substrates to a processing tool.
BACKGROUND
[0016] Semiconductor devices are made on substrates, such as
silicon substrates, glass plates or the like, often termed wafers,
for use in computers, monitors, and the like. These devices are
made by a sequence of fabrication steps, such as thin film
deposition, oxidation, etching, polishing, and thermal and
lithographic processing. Although multiple fabrication steps may be
performed in a single processing apparatus, substrates typically
must be transported between different processing tools for at least
some of the fabrication steps.
[0017] Substrates are often stored in carriers for transfer between
processing tools and other locations. In order to ensure that a
processing tool does not idle, a nearly continuous supply of
unprocessed substrates should be available to the tool. Thus,
loading and storage apparatuses are conventionally located adjacent
each processing tool. Such loading and storage apparatuses
generally include one or more docking stations where substrate
carriers are opened and individual substrates are extracted from
the carriers and transported to a processing tool, as well as
including a plurality of storage shelves positioned above the
docking stations, a factory load location for receiving carriers at
the loading and storage apparatus, and a robot adapted to transfer
carriers among the factory load location, the docking stations and
the plurality of storage shelves. The robot may include an end
effector coupled to a support structure. Typically the support
structure comprises a vertical guide and a horizontal guide
configured so that the end effector may move horizontally and
vertically among the docking stations, the plurality of storage
shelves and the factory load location.
[0018] The loading and storage apparatuses may be modularly
designed (e.g. having components that are mounted to a frame
typically extending in front of a single processing tool) or may be
nonmodular in design (e.g., having components that may be mounted
independently and typically having horizontal and/or vertical
guides that extend in front of a plurality of processing
tools).
[0019] After a carrier is received at the factory load location, it
may be moved by the robot from the factory load location to one of
the storage shelves. Thereafter, the carrier may be moved from the
storage shelf to a docking station. After the substrates have been
extracted from the carrier, processed, and returned to the carrier,
the carrier may be moved by the robot from the docking station to
one of the storage shelves. Thereafter, the carrier may be moved by
the robot from the storage shelf to the factory load location.
Shuffling of the substrate carriers among the storage shelves, the
factory load location and the docking station may place a
significant burden on the robot, and may extend the period of time
during which the substrates in the carrier are present in the
factory without being processed. It accordingly would be desirable
to streamline the handling of substrate carriers.
SUMMARY OF THE INVENTION
[0020] In a first aspect of the invention, a first method is
provided for supplying substrates to a processing tool. The first
method includes the steps of (1) providing a plurality of load
ports each having a mechanism adapted to open a substrate carrier;
(2) providing a factory exchange location at which substrate
carriers are exchanged with a substrate carrier transport device
while the substrate carriers are in motion and being transported by
the substrate carrier transport device; (3) providing a carrier
handler having an end effector adapted to contact a substrate
carrier, the carrier handler being adapted to transport substrate
carriers between the factory exchange location and the plurality of
load ports; and (4) receiving a first plurality of substrate
carriers at the factory exchange location from the substrate
carrier transport device. For each of the first plurality of
substrate carriers, the method further includes the steps of (1)
transporting the substrate carrier from the factory exchange
location directly to a respective one of the plurality of load
ports; (2) docking and opening the substrate carrier at the
respective load port; (3) undocking and closing the substrate
carrier at the respective load port; (4) transporting the substrate
carrier from the respective load port directly to the factory
exchange location; and (5) returning the substrate carrier to the
substrate carrier transport device.
[0021] In a second aspect of the invention, a second method is
provided for transferring a substrate carrier. The second method
includes the steps of (1) conveying the substrate carrier on a
substrate carrier conveyor positioned adjacent a substrate loading
station that includes a substrate carrier handler adapted to
transport the substrate carrier to a load port of a processing
tool; (2) employing an end effector of the substrate carrier
handler of the substrate loading station to disengage the substrate
carrier from the substrate carrier conveyor while the substrate
carrier is in motion and being transported by the substrate carrier
conveyor; (3) transporting the substrate carrier from the substrate
carrier conveyor directly to the load port; (4) docking and opening
the substrate carrier at the load port; (5) undocking and closing
the substrate carrier at the load port; and (6) returning the
substrate carrier directly to the substrate carrier conveyor.
[0022] In a third aspect of the invention, a third method is
provided for transferring a substrate carrier to a substrate
loading station. The third method includes conveying the substrate
carrier on a substrate carrier conveyor positioned adjacent the
substrate loading station. The substrate loading station comprises
a substrate carrier handler adapted to transport the substrate
carrier to a first load port of a processing tool, the substrate
carrier handler including (1) a vertical guide; (2) a horizontal
guide coupled to the vertical guide; and (3) an end effector
adapted to support the substrate carrier and to move vertically
relative to the vertical guide and horizontally relative to the
horizontal guide.
[0023] The third method further includes (1) employing the end
effector of the substrate carrier handler of the substrate loading
station to disengage the substrate carrier from the substrate
carrier conveyor; (2) transporting the substrate carrier from the
substrate carrier conveyor directly to the first load port; (3)
docking and opening the substrate carrier at the first load port;
(4) undocking and closing the substrate carrier at the first load
port; and (5) returning the substrate carrier directly to the
substrate carrier conveyor. Numerous other aspects are provided, as
are systems and apparatus in accordance with these and other
aspects of the invention. The inventive methods may similarly
provide for exchange, transport and placement of individual
substrates (i.e., those not in or on a substrate carrier), with use
of a substrate handler having an end effector adapted to contact
and transport an individual substrate.
[0024] In accordance with the inventive methods and apparatus, a
substrate/substrate carrier that is supplied to a processing tool
is transferred directly from the factory exchange location to a
load port. The substrate/substrate carrier is transferred
"directly" from the factory exchange location to a load port in the
sense that it is transferred without the handler placing the
substrate/substrate carrier on any support location other than a
load port.
[0025] The inventive methods and apparatus provide for streamlined
and highly efficient transfer of substrates and/or substrate
carriers to and from processing tool load ports. Consequently, the
total time required to transport and process substrates may be
reduced, the costs and capital investment entailed in substrate
work-in-process may be reduced, and burdens on substrate carrier
handling robots may be diminished.
[0026] Further features and advantages of the present invention
will become more fully apparent from the following detailed
description of exemplary embodiments, the appended claims and the
accompanying drawings.
BRIEF DESCRIPTION OF THE DRAWINGS
[0027] FIG. 1 is a top plan view of a conventional arrangement of a
processing tool and associated substrate carrier loading and
storage apparatus;
[0028] FIG. 2 is a front elevational view showing the conventional
loading and storage apparatus of FIG. 1;
[0029] FIGS. 3A and 3B are front elevational views showing two
exemplary embodiments of a substrate carrier loading apparatus
provided in accordance with the invention;
[0030] FIG. 4 is a schematic plan view illustrating footprints of
stacks of load ports shown in FIGS. 3A or 3B;
[0031] FIG. 5 is a schematic side view showing a substrate handler
accessing load ports shown in FIGS. 3A or 3B; and
[0032] FIG. 6 is a flow chart that illustrates a manner of
operating the inventive substrate carrier loading apparatus of
FIGS. 3A or 3B and an associated processing tool.
DETAILED DESCRIPTION
Relevant Terminology
[0033] As used herein, the term "docking" refers to the inward
motion of a substrate or substrate carrier toward a port through
which a substrate is exchanged, such as a port in a clean room
wall. Similarly, "undocking" refers to the outward motion of the
substrate or substrate carrier away from a port through which
substrates are exchanged, such as a port in a clean room wall.
[0034] A "factory exchange location" includes all points in space
at which a substrate or substrate carrier is handled by a device
during removal of the substrate or substrate carrier from or
placement of the substrate carrier on a substrate or substrate
carrier transport device.
[0035] A "substrate or substrate carrier transport device" includes
a conveyor, an automatic guided vehicle (AGV) or any other device
that transfers substrates or substrate carriers to or from
processing tool loading locations.
[0036] A "processing tool" comprises one or more processing
chambers and one or more substrate handlers for loading and
unloading the processing chamber. The substrate handlers may or may
not be enclosed in chambers of their own such as factory interface
chambers or transfer chambers. The processing chamber may perform a
vacuum, atmospheric or other process on the substrate, including
for example physical vapor deposition (PVD), chemical vapor
deposition (CVD), etching, metrology, cleaning, polishing, etc.
[0037] A "load port" comprises a location where substrates or
substrate carriers are placed for substrate transfer to and/or from
a processing tool.
System Description
[0038] FIG. 1 is a top plan view showing a conventional modular
loading and storing apparatus 111 in position for storing carriers
adjacent a conventional processing tool 113. FIG. 2 is a front
elevational view showing the modular loading and storing apparatus
111. Referring initially to FIG. 1, a front end robot chamber 115
(or factory interface) is shown positioned between the loading and
storage apparatus 111 and the processing tool 113. As shown in FIG.
1 the loading and storage apparatus 111 is positioned adjacent a
first side of a clean room wall 117 and the front end robot chamber
115 is positioned adjacent a second side of the clean room wall
117. The front end robot chamber 115 contains a robot 119 that may
move horizontally along a track (not shown) so as to extract
substrates from the loading and storage apparatus 111 and transport
them to a loadlock chamber 121 of the processing tool 113. The
loading and storage apparatus 111 comprises a pair of loading
stations 123 where substrate carriers are placed for substrate
extraction (in this example the loading stations are equipped with
docking movement and are therefore referred to as docking
stations), and a plurality of storage shelves 201 (best shown in
FIG. 2) positioned above (e.g., at a higher elevation than) the
docking stations 123. The storage shelves 201 are mounted on a
support frame 203. Also mounted on the support frame 203 is a
substrate carrier handling robot 205. The robot 205 includes a
vertical guide 207 on which an end effector 209 is mounted for
vertical motion. The vertical guide 207 is mounted for horizontal
motion along a horizontal guide 211. A factory load location 213
for receiving substrate carriers is positioned between the docking
stations 123.
[0039] By virtue of the vertical guide 207 and the horizontal guide
211, the end effector 209 of the substrate carrier handling robot
205 is able to move substrate carriers among the factory load
location 213, the storage shelves 201 and the docking stations 123.
However, as noted before, shuffling of substrate carriers from the
factory load location 213 to the storage shelves 201, then to the
docking stations 123, and back to the factory load location 213
(possibly via the storage shelves 201) may result in a significant
amount of time being consumed in supplying substrates to the
processing tool 113, thereby increasing the quantity of
work-in-process.
[0040] FIG. 3A is a schematic front elevational view of an
exemplary substrate loading station provided in accordance with the
present invention. Reference numeral 301 generally indicates the
inventive substrate loading station. The loading station 301
includes a plurality of load ports 303. Preferably each load port
303 has a docking mechanism (not shown) such as a motorized gripper
or platform adapted to support a substrate carrier and adapted to
move the substrate carrier toward and away from the opening through
which a substrate is to be transferred. In the particular
embodiment illustrated in FIG. 3A, the load ports 303 are arranged
in two stacks 305, 307 of three load ports each. Thus a total of
six load ports 303 are present in the embodiment of FIG. 3A. Other
numbers and/or arrangements of load ports may be employed. The
stack 307 is positioned spaced apart from and to a side of the
stack 305. Each load port 303 may include a mechanism, generally
represented by reference number 309, for opening substrate carriers
docked at the load ports 303. In one embodiment of the invention,
the load ports 303 are adapted to receive single substrate
carriers. The term "single substrate carrier" refers to a substrate
carrier shaped and sized to contain only one substrate at a time.
In general, the load ports 303 may accommodate any type of
substrate carrier (e.g., a single substrate carrier, a
multi-substrate carrier, a front opening substrate carrier, a front
opening unified pod, a combination thereof, etc.). FIG. 3A shows
substrate carriers 311 docked at two of the load ports 303.
[0041] In one embodiment, each load port 303 is adapted to open a
substrate carrier 311 simultaneously with substrate carrier docking
(e.g., the movement of the carrier toward the port in the clean
room wall). Such opening may be achieved for example via a cam and
follower arrangement. A load port of this type is disclosed in
previously incorporated, co-pending U.S. patent application Ser.
No. 60/407,339, filed Aug. 31, 2002 and titled "Method and
Apparatus for Using Wafer Carrier Movement to Actuate Wafer Carrier
Door Opening/Closing" (Attorney Docket No. 6976/L). Alternatively,
conventional door opening devices (e.g., that open a carrier after
it has been docked) may be employed. Such devices conventionally
employ a door receiver that unlocks the carrier door and removes it
from the carrier to allow substrate extraction.
[0042] A substrate carrier transport device, such as a conveyor
(schematically illustrated at 313) is configured to deliver
substrate carriers to, and to remove substrate carriers from, the
inventive substrate loading station 301. Associated with the
inventive loading station 301 and positioned adjacent to the
conveyor 313 is a substrate carrier exchange device 315 which is
adapted to receive substrate carriers from the conveyor 313 and to
deliver substrate carriers to the conveyor 313. Accordingly, it
will be recognized that the substrate carrier exchange device 315
defines a factory exchange location 317 at which substrate carriers
are exchanged with the conveyor 313. The substrate carrier exchange
device 315 may be, for example, of the type shown in previously
incorporated U.S. patent application Ser. No. 60/407,451, filed
Aug. 31, 2002 and titled "System For Transporting Wafer Carriers"
(Attorney Docket No. 6900/L) which discloses a rotating platform
that rotates so as to contact and couple/decouple a substrate
carrier to or from the overhead factory transport system.
[0043] As another alternative, the substrate carrier exchange
device 315 may be of the type disclosed in co-pending U.S. patent
application Ser. No. 09/755,394 (Attorney Docket No. 5092) which
discloses an elevating member that extends linearly upward so as to
contact and couple/decouple a substrate carrier to or from the
overhead factory transport system (and which is hereby incorporated
by reference herein in its entirety). As still another alternative,
the substrate carrier exchange device 315 may be of the type
disclosed in previously incorporated U.S. patent application Ser.
No. 60/407,474, filed Aug. 31, 2002 and titled "Method and
Apparatus for Unloading Wafer Carriers from Wafer Carrier Transport
Systems" (Attorney Docket No. 7024/L which discloses a rotary arm
that rotates so as to contact and couple/decouple a substrate
carrier to or from the overhead factory transport system. In yet a
further alternative, the substrate carrier exchange device may be
omitted, and the carrier handler may exchange substrate carriers
with the carrier transport device 313 at the factory exchange
location (e.g., any location where carriers are exchanged between
the inventive loading station and the carrier transport device).
Such a method is described in detail in co-pending U.S. patent
application Ser. Nos. 60/407,463, filed Aug. 31, 2002 (Attorney
Docket No. 7676/L) and 60/443,004, filed Jan. 27, 2003 (Attorney
Docket No. 7676/L2).
[0044] The substrate carrier exchange device 315 may be configured,
for example, to remove substrate carriers from the conveyor 313
while the conveyor (or a carrier transported thereon) is in motion,
and to deliver substrate carriers to the conveyor 313 while the
conveyor (or a substrate carrier transporter traveling therealong)
is in motion. Thus it may be practical to maintain the conveyor 313
in continuous motion while the semiconductor fabrication facility
is in operation, thereby improving transportation of substrates
through the fabrication facility, reducing the amount of time
required for each particular substrate to traverse the fabrication
facility, and thereby reducing the total number of substrates
present as work-in-process, at any given time.
[0045] The inventive loading station 301 further includes a carrier
handler 319. The carrier handler 319 includes an end effector 321
that is adapted to contact the substrate carriers 311. For example,
the end effector 321 may be adapted to support the substrate
carriers 311 from the bottom, or to grip the substrate carriers 311
from the top, etc.
[0046] The end effector 321 is adapted to move vertically along a
vertical guide 323. The vertical guide 323, in turn, is adapted to
move horizontally along a horizontal guide 325. Consequently, the
end effector 321 is movable among the factory exchange location 317
and all of the load ports 303. It will also be appreciated that the
end effector 321 is movable vertically in a space 327 that is
between the stacks 305, 307 of load ports 303. In one alternative
the vertical and horizontal guides may be repositioned as shown in
FIG. 3B, such that the end effector 321 may be adapted to move
horizontally along the horizontal guide 325 and such that the
horizontal guide 325 moves vertically along the vertical guide 323.
Though not shown in FIGS. 3A or 3B, the inventive load station may
include one or more storage shelves for storing substrates and/or
substrate carriers.
[0047] FIG. 4 is a schematic top plan view illustrating features of
the layout of the inventive loading station 301. In FIG. 4,
reference numeral 117 indicates the clean room wall. Reference
numeral 401 indicates the footprint of the stack 305 of load ports
303. Reference numeral 403 indicates the footprint of the stack 307
of load ports 303. It is to be understood that the "footprint" of
an item is the projection of the item on the floor of the facility.
Reference numeral 405 indicates an area between the footprints 401
and 403. A tool "envelope" of the inventive loading station should
be understood to mean the footprints 401 and 403 plus the area 405
between the footprints 401 and 403. Reference numeral 407 indicates
the tool envelope defined by the stacks 401 and 403.
[0048] The carrier handler 319 may operate such that it moves
substrate carriers 311 only within the envelope defined by the
footprints 401, 403 of the load port stacks 305, 307. A controller
C controls the operation of the carrier handler 319 and is
programmed such that the carrier handler operates in accordance
with the invention as described in detail with reference to the
flow chart of FIG. 6.
[0049] Referring again to FIGS. 3A or 3B, it will be observed that
the factory exchange location 317 is at a height that is greater
than respective heights of the load ports 303. It will also be
observed that the factory exchange location 317 and the stack 305
of load ports 303 have substantially the same footprint. However,
other arrangements of the inventive loading station 301 are
contemplated. For example, the factory exchange location 317 may be
at or below the height of the load ports 303. Also, the footprint
of the factory exchange location 317 may coincide with the
footprint 403 (FIG. 4) of the stack 307 of load ports 303. As
another alternative, the footprint of the factory exchange location
317 may not coincide with either one of the footprints 401, 403 of
the stacks 305, 307 of load ports 303.
[0050] FIG. 5 is a schematic side view showing a substrate handler
in relation to a conventional processing tool 113 and stacked load
ports 303 of the inventive loading station 301 (FIGS. 3A OR 3B).
Referring to FIG. 5, reference numeral 501 indicates a substrate
handler provided in accordance with the invention. The inventive
substrate handler 501 may be selectively positioned at a lower
position (indicated by reference numeral 503), at which the
inventive substrate handler 501 can be moved horizontally to access
a lowest one of the stacked load ports 303. The inventive substrate
handler 501 can also be selectively positioned at an upper position
(indicated in phantom and represented by reference numeral 505) at
which the inventive substrate handler 501 can be moved horizontally
to access the uppermost of the stacked load ports 303. It will be
appreciated that the inventive substrate handler 501 may also be
selectively positioned at any intermediate position (not
specifically indicated in the drawing) that is between the
indicated positions 503 and 505, for example, at a position at
which the inventive substrate handler 501 can be moved horizontally
to access a middle one of the stacked load ports 303.
[0051] As used herein, a substrate handler is said to "access" a
load port when the substrate handler extends into the load port
area (e.g., to transport a substrate).
[0052] It will be appreciated that, after the inventive substrate
handler 501 removes a substrate (not shown) from a substrate
carrier 311 (FIGS. 3A OR 3B, not shown in FIG. 5) docked to one of
the stacked load ports 303, the inventive substrate handler 501 may
supply the substrate to the processing tool 113, or, more
specifically, to a load lock chamber 121 (FIG. 1, not separately
shown in FIG. 5) of the processing tool 113.
[0053] FIG. 6 is a flow chart that illustrates operation of a
substrate loading station configured in accordance with the present
invention, such as the inventive substrate loading station 301 of
FIGS. 3A or 3B. A controller C may be coupled to the substrate
loading station and operative to perform one or more steps of the
process of FIG. 6.
[0054] According to a first step 601 in FIG. 6, a substrate carrier
311 is received at the factory exchange location 317. In the
exemplary substrate loading station 301 of FIGS. 3A or 3B, for
example, the carrier exchange device 315 removes a substrate
carrier 311 from the conveyor 313 (e.g., via the end effector 321).
This may occur, for example, while the conveyor 313 is in
motion.
[0055] Following step 601 in FIG. 6 is step 603. At step 603 the
carrier handler 319 transports the substrate carrier 311 from the
factory exchange location 317 to one of the load ports 303. In
accordance with the invention the substrate carrier 311 is
transported directly from the factory exchange location 317 to one
of the load ports 303. That is, the carrier handler 319 does not
place the substrate carrier 311 at any carrier support location
other than one of the load ports 303 after removing the substrate
carrier 311 from the factory exchange location 317 and before
placing the substrate carrier 311 at one of the load ports 303.
[0056] Following step 603 in FIG. 6 is step 605. At step 605, the
substrate carrier 311 is docked and opened at one of the load ports
303 at which it was placed by the carrier handler 319. As noted
above, the load port 303 may be adapted such that docking and
opening of the substrate carrier 311 occurs simultaneously.
[0057] Step 607 follows step 605 in FIG. 6. At step 607, the
substrate handler 501 extracts a substrate from the substrate
carrier 311 that has been docked at and opened by one of the load
ports 303. The extracted substrate is then supplied to the
processing tool 113 by the substrate handler 501, and processing of
the substrate (step 609) occurs within the processing tool 113.
[0058] After processing of the substrate in the processing tool 113
is complete, the substrate handler 501 returns the substrate to the
substrate carrier 311 that was docked and opened at one of the load
ports 303 (step 611). Then the substrate carrier 311 in which the
processed substrate was inserted is closed and undocked from the
load port 303 (step 613). The undocking and closing of the
substrate carrier 303 may occur simultaneously. Following step 613
in FIG. 6 is step 615. At step 615 the carrier handler 319
transports the substrate carrier 311 from the load port 303 to the
factory exchange location 317. According to an aspect of the
invention, the substrate carrier 311 may be transported directly
from the load port 303 to the factory exchange location 317. That
is, the substrate carrier 311 may be transported from the load port
303 to the factory exchange location 317 without being placed on
any carrier support location after being removed from the load port
303 and before being delivered to the factory exchange location
317.
[0059] Following step 615 in FIG. 6 is step 617. At step 617, the
carrier exchange device 315 returns the substrate carrier 311 to
the conveyor 313. In one embodiment of the invention, this may be
done while the conveyor 313 is in motion. It should be noted that
the steps of docking and/or opening the substrate carrier may be
omitted in systems that transport individual substrates, or that do
not require substrates to be docked. Accordingly steps 605 and 613
are optional. It will be understood that the inventive method may
be performed with individual substrates rather than substrate
carriers. Additional figures directed to the transportation of
individual substrates rather than substrate carriers between the
carrier transport device and the processing tool are not included
so as to avoid repetition.
[0060] The methods and apparatuses of the present invention are
advantageous in that transportation of the substrate carriers to
and from the load ports is streamlined, so that the total time of
transit of substrates through the semiconductor fabrication
facility may be reduced. This, in turn, may translate into reduced
work-in-process, lower capital costs, and a reduced manufacturing
cost per substrate.
[0061] The foregoing description discloses only exemplary
embodiments of the invention; modifications of the above disclosed
methods and apparatuses which fall within the scope of the
invention will be readily apparent to those of ordinary skill in
the art. For example, the carrier handler described above in
connection with FIGS. 3A or 3B includes a vertical guide that is
movable horizontally along a single horizontal guide. It is,
however, also contemplated to employ a carrier handler of the type
in which a vertical guide is slidably mounted between two parallel
horizontal guides. As still another alternative, there may be
employed a carrier handler of the type in which a horizontal guide
is slidably mounted on one or more vertical guides. Of course,
other types of carrier handlers including those that do not use
linear guides may be employed.
[0062] It is also contemplated to employ other configurations of
load ports besides the two stacks of three load ports each shown in
FIGS. 3A or 3B. For example, there may be only two load ports in
each stack of load ports, or, there may be four or more load ports
in each stack of load ports. It is also not required that the same
number of load ports be provided in each stack of load ports. As
still another alternative, only one stack of load ports may be
provided, or three or more stacks of load ports may be provided.
Note also, that although each stacked loadport is shown as
occupying the same footprint, other arrangements with partially
overlapping footprints or non-overlapping footprints may be
employed. There may be embodiments where a single load port is
employed, or where two or more horizontally adjacent load ports are
employed.
[0063] It is noted that FIG. 5 shows a single substrate handler
that is configured to service all of the load ports in a stack of
load ports. As possible alternatives, a respective substrate
handler may be provided to service each load port. It is also
contemplated that a single substrate handler may be employed to
service all of the load ports of more than one stack of load ports.
It is further contemplated that a respective substrate handler be
provided for each stack of load ports.
[0064] Substrate carrier transport devices other than the conveyor
313 may be employed to bring substrate carriers to, and transport
substrate carriers away from, the factory exchange location. If a
conveyor is employed as the substrate carrier transport device, it
may optionally be kept continuously in motion while the
semiconductor fabrication facility is operating.
[0065] Although only one factory exchange location is shown in
association with the inventive substrate loading station, it is
contemplated to provide two or more factory exchange locations in
association with the inventive substrate loading station. For
example, a first factory exchange location may be employed for
incoming substrate carriers, and a second factory exchange location
may be employed for outbound substrate carriers. It is also
contemplated that an inventive substrate loading station may be
served by more than one substrate carrier transport device.
[0066] Preferably, the invention is employed in a substrate loading
station that comprises a frame to which the vertical and horizontal
guides are coupled. In this manner, the preferred substrate loading
station is modular and may be quickly installed and calibrated. In
the event the substrate loading station includes one or more
storage shelves, each storage shelf also may be mounted on the
frame. By mounting both the substrate carrier handler and the
storage shelf or shelves to the frame, the substrate carrier
handler and storage shelves have a predetermined position relative
to each other. This further facilitates installation and
calibration, and is another advantage of employing a modular
substrate loading station. Similarly, other mechanisms such as
dedicated mechanisms for loading and/or unloading substrate
carriers from an overhead factory transport system may be
advantageously mounted to the frame. Exemplary dedicated mechanisms
may comprise rotating platforms or rotating arms, etc., as
described in previously incorporated U.S. patent application Ser.
Nos. 60/407,451, filed Aug. 31, 2002 and 60/407,474, filed Aug. 31,
2002 (Attorney Docket Nos. 6900 and 7024).
[0067] In one aspect, the frame may be mounted to predetermined
mounting locations (e.g., predrilled bolt holes, etc.) on the clean
room wall, or on the front wall of a chamber (e.g., a factory
interface chamber). Preferably, the wall also has predetermined
mounting locations to which the docking grippers or docking
platforms are mounted. Additionally, the wall may have
predetermined mounting locations to which a substrate carrier
opening mechanism may be mounted. When the frame, the docking
mechanisms, and the substrate carrier opening mechanism are each
mounted to predetermined locations on the same surface, the
relative positions of each are predetermined, and installation and
calibration of the substrate loading station is facilitated.
[0068] The present invention has been illustrated in connection
with single substrate carriers. However, it is also contemplated to
apply the present invention in connection with substrate carriers
that hold more than one substrate, or to apply the invention in
connection with transport of individual substrates (not transported
via carriers). As will be apparent, the inventive apparatus may
differ considerably from the exemplary embodiments shown and
described herein. Any apparatus that operates in accordance with
the method of FIG. 6 (whether or not docking and opening are
performed, and whether or not substrate carriers are employed
(e.g., individual substrate systems)) may fall within the scope of
the present invention.
[0069] Accordingly, while the present invention has been disclosed
in connection with a preferred embodiment thereof, it should be
understood that other embodiments may fall within the spirit and
scope of the invention, as defined by the following claims.
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