Patent | Date |
---|
Modular structure for an automated storage and retrieval system Grant 11,363,883 - Lert, Jr. , et al. June 21, 2 | 2022-06-21 |
Climbing Robot With Compliant Pinion Drive App 20210229271 - Fosnight; William J. ;   et al. | 2021-07-29 |
Load Lock Fast Pump Vent App 20210175096 - HOFMEISTER; Christopher ;   et al. | 2021-06-10 |
Modular Structure For An Automated Storage And Retrieval System App 20210169219 - Lert, JR.; John G. ;   et al. | 2021-06-10 |
Modular structure for an automated storage and retrieval system Grant 10,952,533 - Lert, Jr. , et al. March 23, 2 | 2021-03-23 |
Universal Gripper For Tote And Sub-tote Transport App 20210039882 - Fosnight; William J. ;   et al. | 2021-02-11 |
Load lock fast pump vent Grant 10,854,478 - Hofmeister , et al. December 1, 2 | 2020-12-01 |
Universal gripper for tote and sub-tote transport Grant 10,815,057 - Fosnight , et al. October 27, 2 | 2020-10-27 |
Load Lock Fast Pump Vent App 20200126820 - HOFMEISTER; Christopher ;   et al. | 2020-04-23 |
Climbing Robot With Compliant Pinion Drive App 20200087067 - Fosnight; William J. ;   et al. | 2020-03-19 |
Load lock fast pump vent Grant 10,541,157 - Hofmeister , et al. Ja | 2020-01-21 |
Modular Structure For An Automated Storage And Retrieval System App 20190239640 - Lert, JR.; John G. ;   et al. | 2019-08-08 |
Universal Gripper For Tote And Sub-tote Transport App 20190047787 - Fosnight; William J. ;   et al. | 2019-02-14 |
Load Lock Fast Pump Vent App 20180226280 - HOFMEISTER; Christopher ;   et al. | 2018-08-09 |
Load Lock Fast Pump Vent App 20180114708 - HOFMEISTER; Christopher ;   et al. | 2018-04-26 |
Dual arm robot Grant 9,623,555 - Krupyshev , et al. April 18, 2 | 2017-04-18 |
Methods and loadport for purging a substrate carrier Grant 8,689,812 - Shah , et al. April 8, 2 | 2014-04-08 |
Methods and loadport apparatus for purging a substrate carrier Grant 8,601,975 - Shah , et al. December 10, 2 | 2013-12-10 |
Methods And Loadport Apparatus For Purging A Substrate Carrier App 20120060971 - Shah; Vinay K. ;   et al. | 2012-03-15 |
Methods for moving a substrate carrier Grant 7,984,543 - Elliott , et al. July 26, 2 | 2011-07-26 |
Methods and apparatus for repositioning support for a substrate carrier Grant 7,914,248 - Elliott , et al. March 29, 2 | 2011-03-29 |
Calibration of high speed loader to substrate transport system Grant 7,912,576 - Rice , et al. March 22, 2 | 2011-03-22 |
Method and apparatus for supplying substrates to a processing tool Grant 7,857,570 - Elliott , et al. December 28, 2 | 2010-12-28 |
Stabilizing substrate carriers during overhead transport Grant 7,798,309 - Rice , et al. September 21, 2 | 2010-09-21 |
Substrate carrier handler that unloads substrate carriers directly from a moving conveyor Grant 7,792,608 - Rice , et al. September 7, 2 | 2010-09-07 |
Methods and apparatus for mapping carrier contents Grant 7,720,558 - Elliott , et al. May 18, 2 | 2010-05-18 |
Systems and methods for transferring small lot size substrate carriers between processing tools Grant 7,711,445 - Rice , et al. May 4, 2 | 2010-05-04 |
Wafer loading station that automatically retracts from a moving conveyor in response to an unscheduled event Grant 7,684,895 - Rice , et al. March 23, 2 | 2010-03-23 |
System for transporting substrate carriers Grant 7,673,735 - Rice , et al. March 9, 2 | 2010-03-09 |
Load Port Configurations For Small Lot Size Substrate Carriers App 20090308030 - Elliott; Martin R. ;   et al. | 2009-12-17 |
Methods and apparatus for identifying small lot size substrate carriers Grant 7,611,319 - Shah , et al. November 3, 2 | 2009-11-03 |
Overhead transfer flange and support for suspending a substrate carrier Grant 7,611,318 - Rice , et al. November 3, 2 | 2009-11-03 |
Kinematic pin with shear member and substrate carrier for use therewith Grant 7,597,183 - Rice , et al. October 6, 2 | 2009-10-06 |
Overhead transfer flange and support for suspending a substrate carrier Grant 7,594,789 - Rice , et al. September 29, 2 | 2009-09-29 |
Load port configurations for small lot size substrate carriers Grant 7,578,647 - Elliott , et al. August 25, 2 | 2009-08-25 |
Methods And Apparatus For Moving A Substrate Carrier App 20090188103 - Elliott; Martin R. ;   et al. | 2009-07-30 |
Break-away positioning conveyor mount for accommodating conveyor belt bends Grant 7,552,816 - Rice , et al. June 30, 2 | 2009-06-30 |
Break-away positioning conveyor mount for accommodating conveyor belt bends Grant 7,540,371 - Rice , et al. June 2, 2 | 2009-06-02 |
Methods and apparatus for transporting substrate carriers Grant 7,537,108 - Rice , et al. May 26, 2 | 2009-05-26 |
System for transporting substrate carriers Grant 7,527,141 - Rice , et al. May 5, 2 | 2009-05-05 |
Methods and apparatus for transporting substrate carriers Grant 7,506,752 - Rice , et al. March 24, 2 | 2009-03-24 |
System for transporting substrate carriers Grant 7,506,746 - Rice , et al. March 24, 2 | 2009-03-24 |
Break-away positioning conveyor mount for accommodating conveyor belt bends Grant 7,506,747 - Rice , et al. March 24, 2 | 2009-03-24 |
Break-away positioning conveyor mount for accommodating conveyor belt bends Grant 7,503,448 - Rice , et al. March 17, 2 | 2009-03-17 |
Calibration Of High Speed Loader To Substrate Transport System App 20090030547 - Rice; Michael R. ;   et al. | 2009-01-29 |
System For Transporting Substrate Carriers App 20080289932 - Rice; Michael Robert ;   et al. | 2008-11-27 |
Break-away positioning conveyor mount for accommodating conveyor belt bends Grant 7,455,172 - Rice , et al. November 25, 2 | 2008-11-25 |
Methods And Apparatus For Repositioning Support For A Substrate Carrier App 20080286076 - Elliott; Martin R. ;   et al. | 2008-11-20 |
Calibration of high speed loader to substrate transport system Grant 7,433,756 - Rice , et al. October 7, 2 | 2008-10-07 |
Calibration Of High Speed Loader To Substrate Transport System App 20080187419 - Rice; Michael R. ;   et al. | 2008-08-07 |
Method And Apparatus For Supplying Substrates To A Processing Tool App 20080187414 - Elliott; Martin R. ;   et al. | 2008-08-07 |
Methods and apparatus for repositioning support for a substrate carrier Grant 7,409,263 - Elliott , et al. August 5, 2 | 2008-08-05 |
Methods and apparatus for transporting substrate carriers Grant 7,367,446 - Rice , et al. May 6, 2 | 2008-05-06 |
Substrate carrier handler that unloads substrate carriers directly from a moving conveyor Grant 7,359,767 - Rice , et al. April 15, 2 | 2008-04-15 |
Substrate carrier handler that unloads substrate carriers directly from a moving conveyer Grant 7,346,431 - Rice , et al. March 18, 2 | 2008-03-18 |
Kinematic Pin With Shear Member And Substrate Carrier For Use Therewith App 20080051925 - RICE; MICHAEL R. ;   et al. | 2008-02-28 |
Kinematic Pin With Shear Member And Substrate Carrier For Use Therewith App 20080050217 - RICE; MICHAEL R. ;   et al. | 2008-02-28 |
Overhead Transfer Flange And Support For Suspending A Substrate Carrier App 20080019810 - Rice; Michael R. ;   et al. | 2008-01-24 |
Methods And Apparatus For Transporting Substrate Carriers App 20070278067 - Rice; Michael R. ;   et al. | 2007-12-06 |
Substrate Carrier Handler That Unloads Substrate Carriers Directly From A Moving Conveyor App 20070274813 - Rice; Michael Robert ;   et al. | 2007-11-29 |
Substrate carrier having door latching and substrate clamping mechanisms Grant 7,299,831 - Elliott , et al. November 27, 2 | 2007-11-27 |
Methods and apparatus for transporting substrate carriers Grant 7,293,642 - Rice , et al. November 13, 2 | 2007-11-13 |
System For Transporting Substrate Carriers App 20070235287 - Rice; Michael Robert ;   et al. | 2007-10-11 |
Methods and apparatus for using substrate carrier movement to actuate substrate carrier door opening/closing Grant 7,258,520 - Elliott , et al. August 21, 2 | 2007-08-21 |
Substrate carrier handler that unloads substrate carriers directly from a moving conveyor Grant 7,243,003 - Rice , et al. July 10, 2 | 2007-07-10 |
System for transporting substrate carriers Grant 7,234,584 - Rice , et al. June 26, 2 | 2007-06-26 |
Methods And Apparatus For Opening And Closing Substrate Carriers App 20070140822 - Elliott; Martin R. ;   et al. | 2007-06-21 |
Monitoring of smart pin transition timing Grant 7,230,702 - Rice , et al. June 12, 2 | 2007-06-12 |
Apparatus And Methods For A Substrate Carrier Having An Inflatable Seal App 20070116545 - Rice; Michael R. ;   et al. | 2007-05-24 |
Systems and methods for transferring small lot size substrate carriers between processing tools Grant 7,221,993 - Rice , et al. May 22, 2 | 2007-05-22 |
Break-away Positioning Conveyor Mount For Accommodating Conveyor Belt Bends App 20070108020 - Rice; Michael R. ;   et al. | 2007-05-17 |
Methods And Apparatus For Transporting Substrate Carriers App 20070056834 - Rice; Michael R. ;   et al. | 2007-03-15 |
Substrate Carrier Handler That Unloads Substrate Carriers Directly From A Moving Conveyor App 20070061042 - Rice; Michael Robert ;   et al. | 2007-03-15 |
Systems And Methods For Transferring Small Lot Size Substrate Carriers Between Processing Tools App 20070059861 - Rice; Michael R. ;   et al. | 2007-03-15 |
System For Transporting Substrate Carriers App 20070059145 - Rice; Michael Robert ;   et al. | 2007-03-15 |
Substrate Carrier Having Reduced Height App 20070057322 - Elliott; Martin R. ;   et al. | 2007-03-15 |
Break-away Positioning Conveyor Mount For Accommodating Conveyor Belt Bends App 20070056829 - Rice; Michael R. ;   et al. | 2007-03-15 |
Dynamically balanced substrate carrier handler Grant 7,168,553 - Rice , et al. January 30, 2 | 2007-01-30 |
Break-away positioning conveyor mount for accommodating conveyor belt bends Grant 7,156,221 - Rice , et al. January 2, 2 | 2007-01-02 |
Method and apparatus for unloading substrate carriers from substrate carrier transport system App 20060263187 - Lowrance; Robert B. ;   et al. | 2006-11-23 |
Break-away positioning conveyor mount for accommodating conveyor belt bends App 20060260910 - Rice; Michael R. ;   et al. | 2006-11-23 |
Break-away positioning conveyor mount for accommodating conveyor belt bends App 20060260909 - Rice; Michael R. ;   et al. | 2006-11-23 |
Methods and apparatus for transporting substrate carriers App 20060260916 - Rice; Michael R. ;   et al. | 2006-11-23 |
Substrate carrier handler that unloads substrate carriers directly from a moving conveyor App 20060259196 - Rice; Michael Robert ;   et al. | 2006-11-16 |
Methods and apparatus for transporting substrate carriers App 20060243565 - Rice; Michael R. ;   et al. | 2006-11-02 |
Methods and apparatus for identifying small lot size substrate carriers App 20060182531 - Shah; Vinay ;   et al. | 2006-08-17 |
Methods and apparatus for transporting substrate carriers Grant 7,077,264 - Rice , et al. July 18, 2 | 2006-07-18 |
Substrate carrier having door latching and substrate clamping mechanisms App 20060072992 - Elliott; Martin R. ;   et al. | 2006-04-06 |
Substrate carrier having reduced height App 20060061979 - Elliott; Martin R. ;   et al. | 2006-03-23 |
Methods and apparatus for mapping carrier contents App 20060051184 - Elliott; Martin R. ;   et al. | 2006-03-09 |
Methods and apparatus for repositioning support for a substrate carrier App 20060013674 - Elliott; Martin R. ;   et al. | 2006-01-19 |
Small lot size substrate carriers App 20050232734 - Elliott, Martin R. ;   et al. | 2005-10-20 |
Substrate carrier having door latching and substrate clamping mechanisms Grant 6,955,197 - Elliott , et al. October 18, 2 | 2005-10-18 |
Dynamically balanced substrate carrier handler App 20050224315 - Rice, Michael R. ;   et al. | 2005-10-13 |
Calibration of high speed loader to substrate transport system App 20050186063 - Rice, Michael R. ;   et al. | 2005-08-25 |
Kinematic pin with shear member and substrate carrier for use therewith App 20050167554 - Rice, Michael R. ;   et al. | 2005-08-04 |
Stabilizing substrate carriers during overhead transport App 20050145464 - Rice, Michael R. ;   et al. | 2005-07-07 |
Wafer loading station that automatically retracts from a moving conveyor in response to an unscheduled event App 20050135903 - Rice, Michael R. ;   et al. | 2005-06-23 |
Break-away positioning conveyor mount for accommodating conveyor belt bends App 20050121293 - Rice, Michael R. ;   et al. | 2005-06-09 |
Monitoring of smart pin transition timing App 20050122504 - Rice, Michael R. ;   et al. | 2005-06-09 |
Method and apparatus for unloading substrate carriers from substrate carrier transport system App 20050095110 - Lowrance, Robert B. ;   et al. | 2005-05-05 |
Overhead transfer flange and support for suspending a substrate carrier App 20050040662 - Rice, Michael R. ;   et al. | 2005-02-24 |
Systems and methods for transferring small lot size substrate carriers between processing tools App 20040193300 - Rice, Michael R. ;   et al. | 2004-09-30 |
Methods and apparatus for transporting substrate carriers App 20040191030 - Rice, Michael R. ;   et al. | 2004-09-30 |
Shelf module adapted to store substrate carriers Grant 6,745,908 - Elliott June 8, 2 | 2004-06-08 |
Substrate carrier having door latching and substrate clamping mechanisms App 20040081545 - Elliott, Martin R. ;   et al. | 2004-04-29 |
Method and apparatus for supplying substrates to a processing tool App 20040081546 - Elliott, Martin R. ;   et al. | 2004-04-29 |
Substrate carrier handler that unloads substrate carriers directly from a moving conveyor App 20040081538 - Rice, Michael Robert ;   et al. | 2004-04-29 |
Methods and apparatus for using substrate carrier movement to actuate substrate carrier door opening/closing App 20040076496 - Elliott, Martin R. ;   et al. | 2004-04-22 |
System for transporting substrate carriers App 20040062633 - Rice, Michael Robert ;   et al. | 2004-04-01 |
Robot for handling semiconductor wafers Grant 6,582,175 - Cox , et al. June 24, 2 | 2003-06-24 |
Automatic calibration method for substrate carrier handling robot and jig for performing the method App 20030110649 - Hudgens, Jeffrey C. ;   et al. | 2003-06-19 |
Identification code reader integrated with substrate carrier robot App 20030077153 - Elliott, Martin R. ;   et al. | 2003-04-24 |
Robot for handling semiconductor wafers App 20030035709 - Cox, Damon ;   et al. | 2003-02-20 |
Shelf module adapted to store substrate carriers App 20030000898 - Elliott, Martin R. | 2003-01-02 |
Locator pin integrated with sensor for detecting semiconductor substrate carrier App 20030001116 - Elliott, Martin R. ;   et al. | 2003-01-02 |
End effector for lifting semiconductor wafer carrier App 20030002970 - Elliott, Martin R. ;   et al. | 2003-01-02 |
Robot for handling semiconductor wafers Grant 6,379,095 - Elliott , et al. April 30, 2 | 2002-04-30 |