Patent | Date |
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Printing System Assemblies And Methods App 20210086535 - Lowrance; Robert B. ;   et al. | 2021-03-25 |
Printing system assemblies and methods Grant 10,875,329 - Lowrance , et al. December 29, 2 | 2020-12-29 |
Substrate processing system, valve assembly, and processing method Grant 10,665,476 - Quiles , et al. | 2020-05-26 |
Printing System Assemblies and Techniques App 20190389224 - Todd; Christopher E. ;   et al. | 2019-12-26 |
Printing system assemblies and techniques Grant 10,457,059 - Todd , et al. Oc | 2019-10-29 |
Transport Path Correction Techniques and Related Systems, Methods and Devices App 20190297733 - Darrow; David C. ;   et al. | 2019-09-26 |
Printing system assemblies and methods Grant 10,414,181 - Lowrance , et al. Sept | 2019-09-17 |
Transport path correction techniques and related systems, methods and devices Grant 10,420,225 - Darrow , et al. Sept | 2019-09-17 |
Printing System Assemblies and Methods App 20190270325 - Lowrance; Robert B. ;   et al. | 2019-09-05 |
Apparatus and Method for Control of Print Gap App 20180326767 - Lowrance; Robert B. ;   et al. | 2018-11-15 |
Printing System Assemblies and Methods App 20180264862 - Lowrance; Robert B. ;   et al. | 2018-09-20 |
Precision Position Alignment, Calibration And Measurement In Printing And Manufacturing Systems App 20180229497 - Darrow; David C. ;   et al. | 2018-08-16 |
Face-Down Printing Apparatus and Method App 20180222187 - Lowrance; Robert B. ;   et al. | 2018-08-09 |
Transport Path Correction Techniques and Related Systems, Methods and Devices App 20180228034 - Darrow; David C. ;   et al. | 2018-08-09 |
Apparatus and method for control of print gap Grant 10,029,497 - Lowrance , et al. July 24, 2 | 2018-07-24 |
Transport path correction techniques and related systems, methods and devices Grant 9,961,782 - Pun , et al. May 1, 2 | 2018-05-01 |
Printing system assemblies and methods Grant 9,884,501 - Lowrance , et al. February 6, 2 | 2018-02-06 |
Printing System Assemblies and Techniques App 20180029376 - Todd; Christopher E. ;   et al. | 2018-02-01 |
Transport Path Correction Techniques and Related Systems, Methods and Devices App 20180014410 - Darrow; David C. ;   et al. | 2018-01-11 |
Apparatus and method for control of print gap Grant 9,789,715 - Lowrance , et al. October 17, 2 | 2017-10-17 |
Apparatus and Method for Control of Print Gap App 20170246892 - Lowrance; Robert B. ;   et al. | 2017-08-31 |
Apparatus and Method for Control of Print Gap App 20170144462 - Lowrance; Robert B. ;   et al. | 2017-05-25 |
Apparatus and method for control of print gap Grant 9,656,491 - Lowrance , et al. May 23, 2 | 2017-05-23 |
Apparatus and Method for Control of Print Gap App 20170136793 - Lowrance; Robert B. ;   et al. | 2017-05-18 |
Printing System Assemblies and Methods App 20170129265 - Lowrance; Robert B. ;   et al. | 2017-05-11 |
Apparatus and method for control of print gap Grant 9,550,383 - Lowrance , et al. January 24, 2 | 2017-01-24 |
Printing system assemblies and methods Grant 9,505,245 - Lowrance , et al. November 29, 2 | 2016-11-29 |
Apparatus and Method for Control of Print Gap App 20160303877 - Lowrance; Robert B. ;   et al. | 2016-10-20 |
Apparatus and method for control of print gap Grant 9,302,513 - Lowrance , et al. April 5, 2 | 2016-04-05 |
Printing System Assemblies and Methods App 20150360462 - Lowrance; Robert B. ;   et al. | 2015-12-17 |
Apparatus and Method for Control of Print Gap App 20150328910 - Lowrance; Robert B. ;   et al. | 2015-11-19 |
Apparatus and method for control of print gap Grant 9,120,344 - Lowrance , et al. September 1, 2 | 2015-09-01 |
Substrate Processing System, Valve Assembly, And Processing Method App 20150013771 - Quiles; Efrain ;   et al. | 2015-01-15 |
Processing system with the dual end-effector handling Grant 8,796,589 - Quiles , et al. August 5, 2 | 2014-08-05 |
Method and apparatus for printing using a facetted drum Grant 8,632,145 - Madigan , et al. January 21, 2 | 2014-01-21 |
Apparatus And Method For Control Of Print Gap App 20130038649 - LOWRANCE; Robert B. ;   et al. | 2013-02-14 |
Method and Apparatus for Printing Using A Facetted Drum App 20120001967 - Madigan; Conor Francis ;   et al. | 2012-01-05 |
Break-away positioning conveyor mount for accommodating conveyor belt bends Grant 8,020,689 - Rice , et al. September 20, 2 | 2011-09-20 |
Calibration of high speed loader to substrate transport system Grant 7,912,576 - Rice , et al. March 22, 2 | 2011-03-22 |
Method and apparatus for supplying substrates to a processing tool Grant 7,857,570 - Elliott , et al. December 28, 2 | 2010-12-28 |
Stabilizing substrate carriers during overhead transport Grant 7,798,309 - Rice , et al. September 21, 2 | 2010-09-21 |
Substrate carrier handler that unloads substrate carriers directly from a moving conveyor Grant 7,792,608 - Rice , et al. September 7, 2 | 2010-09-07 |
Systems and methods for transferring small lot size substrate carriers between processing tools Grant 7,711,445 - Rice , et al. May 4, 2 | 2010-05-04 |
Wafer loading station that automatically retracts from a moving conveyor in response to an unscheduled event Grant 7,684,895 - Rice , et al. March 23, 2 | 2010-03-23 |
System for transporting substrate carriers Grant 7,673,735 - Rice , et al. March 9, 2 | 2010-03-09 |
Mechanism for varying the spacing between sputter magnetron and target Grant 7,674,360 - Hong , et al. March 9, 2 | 2010-03-09 |
Overhead transfer flange and support for suspending a substrate carrier Grant 7,611,318 - Rice , et al. November 3, 2 | 2009-11-03 |
Kinematic pin with shear member and substrate carrier for use therewith Grant 7,597,183 - Rice , et al. October 6, 2 | 2009-10-06 |
Overhead transfer flange and support for suspending a substrate carrier Grant 7,594,789 - Rice , et al. September 29, 2 | 2009-09-29 |
Break-away Positioning Conveyor Mount For Accommodating Conveyor Belt Bends App 20090205930 - Rice; Michael R. ;   et al. | 2009-08-20 |
Methods and apparatus for a band to band transfer module Grant 7,577,487 - Lowrance , et al. August 18, 2 | 2009-08-18 |
Break-away positioning conveyor mount for accommodating conveyor belt bends Grant 7,552,816 - Rice , et al. June 30, 2 | 2009-06-30 |
Break-away positioning conveyor mount for accommodating conveyor belt bends Grant 7,540,371 - Rice , et al. June 2, 2 | 2009-06-02 |
Methods and apparatus for transporting substrate carriers Grant 7,537,108 - Rice , et al. May 26, 2 | 2009-05-26 |
System for transporting substrate carriers Grant 7,527,141 - Rice , et al. May 5, 2 | 2009-05-05 |
System for transporting substrate carriers Grant 7,506,746 - Rice , et al. March 24, 2 | 2009-03-24 |
Break-away positioning conveyor mount for accommodating conveyor belt bends Grant 7,506,747 - Rice , et al. March 24, 2 | 2009-03-24 |
Methods and apparatus for transporting substrate carriers Grant 7,506,752 - Rice , et al. March 24, 2 | 2009-03-24 |
Break-away positioning conveyor mount for accommodating conveyor belt bends Grant 7,503,448 - Rice , et al. March 17, 2 | 2009-03-17 |
Calibration Of High Speed Loader To Substrate Transport System App 20090030547 - Rice; Michael R. ;   et al. | 2009-01-29 |
System For Transporting Substrate Carriers App 20080289932 - Rice; Michael Robert ;   et al. | 2008-11-27 |
Break-away positioning conveyor mount for accommodating conveyor belt bends Grant 7,455,172 - Rice , et al. November 25, 2 | 2008-11-25 |
Calibration of high speed loader to substrate transport system Grant 7,433,756 - Rice , et al. October 7, 2 | 2008-10-07 |
Calibration Of High Speed Loader To Substrate Transport System App 20080187419 - Rice; Michael R. ;   et al. | 2008-08-07 |
Method And Apparatus For Supplying Substrates To A Processing Tool App 20080187414 - Elliott; Martin R. ;   et al. | 2008-08-07 |
Methods and apparatus for transporting substrate carriers Grant 7,367,446 - Rice , et al. May 6, 2 | 2008-05-06 |
Substrate carrier handler that unloads substrate carriers directly from a moving conveyor Grant 7,359,767 - Rice , et al. April 15, 2 | 2008-04-15 |
Substrate carrier handler that unloads substrate carriers directly from a moving conveyer Grant 7,346,431 - Rice , et al. March 18, 2 | 2008-03-18 |
Kinematic Pin With Shear Member And Substrate Carrier For Use Therewith App 20080050217 - RICE; MICHAEL R. ;   et al. | 2008-02-28 |
Kinematic Pin With Shear Member And Substrate Carrier For Use Therewith App 20080051925 - RICE; MICHAEL R. ;   et al. | 2008-02-28 |
Overhead Transfer Flange And Support For Suspending A Substrate Carrier App 20080019810 - Rice; Michael R. ;   et al. | 2008-01-24 |
Methods And Apparatus For Transporting Substrate Carriers App 20070278067 - Rice; Michael R. ;   et al. | 2007-12-06 |
Substrate carrier having door latching and substrate clamping mechanisms Grant 7,299,831 - Elliott , et al. November 27, 2 | 2007-11-27 |
Methods and apparatus for transporting substrate carriers Grant 7,293,642 - Rice , et al. November 13, 2 | 2007-11-13 |
System For Transporting Substrate Carriers App 20070235287 - Rice; Michael Robert ;   et al. | 2007-10-11 |
Methods and apparatus for using substrate carrier movement to actuate substrate carrier door opening/closing Grant 7,258,520 - Elliott , et al. August 21, 2 | 2007-08-21 |
Substrate carrier handler that unloads substrate carriers directly from a moving conveyor Grant 7,243,003 - Rice , et al. July 10, 2 | 2007-07-10 |
System for transporting substrate carriers Grant 7,234,584 - Rice , et al. June 26, 2 | 2007-06-26 |
Monitoring of smart pin transition timing Grant 7,230,702 - Rice , et al. June 12, 2 | 2007-06-12 |
Systems and methods for transferring small lot size substrate carriers between processing tools Grant 7,221,993 - Rice , et al. May 22, 2 | 2007-05-22 |
Break-away Positioning Conveyor Mount For Accommodating Conveyor Belt Bends App 20070108019 - Rice; Michael R. ;   et al. | 2007-05-17 |
Break-away Positioning Conveyor Mount For Accommodating Conveyor Belt Bends App 20070108020 - Rice; Michael R. ;   et al. | 2007-05-17 |
Methods and apparatus for a transport lift assembly App 20070059153 - Lowrance; Robert B. ;   et al. | 2007-03-15 |
Methods and apparatus for a band to band transfer module App 20070061031 - Lowrance; Robert B. ;   et al. | 2007-03-15 |
Substrate Carrier Handler That Unloads Substrate Carriers Directly From A Moving Conveyor App 20070061042 - Rice; Michael Robert ;   et al. | 2007-03-15 |
Methods and apparatus for a transfer station App 20070059144 - Lowrance; Robert B. ;   et al. | 2007-03-15 |
Systems And Methods For Transferring Small Lot Size Substrate Carriers Between Processing Tools App 20070059861 - Rice; Michael R. ;   et al. | 2007-03-15 |
System For Transporting Substrate Carriers App 20070059145 - Rice; Michael Robert ;   et al. | 2007-03-15 |
Break-away Positioning Conveyor Mount For Accommodating Conveyor Belt Bends App 20070056829 - Rice; Michael R. ;   et al. | 2007-03-15 |
Methods And Apparatus For Transporting Substrate Carriers App 20070056834 - Rice; Michael R. ;   et al. | 2007-03-15 |
Dynamically balanced substrate carrier handler Grant 7,168,553 - Rice , et al. January 30, 2 | 2007-01-30 |
Break-away positioning conveyor mount for accommodating conveyor belt bends Grant 7,156,221 - Rice , et al. January 2, 2 | 2007-01-02 |
Methods and apparatus for transporting substrate carriers App 20060260916 - Rice; Michael R. ;   et al. | 2006-11-23 |
Method and apparatus for unloading substrate carriers from substrate carrier transport system App 20060263187 - Lowrance; Robert B. ;   et al. | 2006-11-23 |
Break-away positioning conveyor mount for accommodating conveyor belt bends App 20060260909 - Rice; Michael R. ;   et al. | 2006-11-23 |
Break-away positioning conveyor mount for accommodating conveyor belt bends App 20060260910 - Rice; Michael R. ;   et al. | 2006-11-23 |
Substrate carrier handler that unloads substrate carriers directly from a moving conveyor App 20060259196 - Rice; Michael Robert ;   et al. | 2006-11-16 |
Methods and apparatus for transporting substrate carriers App 20060243565 - Rice; Michael R. ;   et al. | 2006-11-02 |
Methods and apparatus for transporting substrate carriers Grant 7,077,264 - Rice , et al. July 18, 2 | 2006-07-18 |
Substrate carrier having door latching and substrate clamping mechanisms App 20060072992 - Elliott; Martin R. ;   et al. | 2006-04-06 |
Substrate carrier having door latching and substrate clamping mechanisms Grant 6,955,197 - Elliott , et al. October 18, 2 | 2005-10-18 |
Dynamically balanced substrate carrier handler App 20050224315 - Rice, Michael R. ;   et al. | 2005-10-13 |
Calibration of high speed loader to substrate transport system App 20050186063 - Rice, Michael R. ;   et al. | 2005-08-25 |
Kinematic pin with shear member and substrate carrier for use therewith App 20050167554 - Rice, Michael R. ;   et al. | 2005-08-04 |
Stabilizing substrate carriers during overhead transport App 20050145464 - Rice, Michael R. ;   et al. | 2005-07-07 |
Mechanism for varying the spacing between sputter magnetron and target App 20050133365 - Hong, Ilyoung Richard ;   et al. | 2005-06-23 |
Wafer loading station that automatically retracts from a moving conveyor in response to an unscheduled event App 20050135903 - Rice, Michael R. ;   et al. | 2005-06-23 |
Break-away positioning conveyor mount for accommodating conveyor belt bends App 20050121293 - Rice, Michael R. ;   et al. | 2005-06-09 |
Monitoring of smart pin transition timing App 20050122504 - Rice, Michael R. ;   et al. | 2005-06-09 |
Method and apparatus for unloading substrate carriers from substrate carrier transport system App 20050095110 - Lowrance, Robert B. ;   et al. | 2005-05-05 |
Processing system App 20050072716 - Quiles, Efrain ;   et al. | 2005-04-07 |
Overhead transfer flange and support for suspending a substrate carrier App 20050040662 - Rice, Michael R. ;   et al. | 2005-02-24 |
Multiple independent robot assembly and apparatus for processing and transferring semiconductor wafers Grant 6,799,939 - Lowrance , et al. October 5, 2 | 2004-10-05 |
Methods and apparatus for transporting substrate carriers App 20040191030 - Rice, Michael R. ;   et al. | 2004-09-30 |
Systems and methods for transferring small lot size substrate carriers between processing tools App 20040193300 - Rice, Michael R. ;   et al. | 2004-09-30 |
Method and apparatus for supplying substrates to a processing tool App 20040081546 - Elliott, Martin R. ;   et al. | 2004-04-29 |
Substrate carrier handler that unloads substrate carriers directly from a moving conveyor App 20040081538 - Rice, Michael Robert ;   et al. | 2004-04-29 |
Substrate carrier having door latching and substrate clamping mechanisms App 20040081545 - Elliott, Martin R. ;   et al. | 2004-04-29 |
Methods and apparatus for using substrate carrier movement to actuate substrate carrier door opening/closing App 20040076496 - Elliott, Martin R. ;   et al. | 2004-04-22 |
System for transporting substrate carriers App 20040062633 - Rice, Michael Robert ;   et al. | 2004-04-01 |
Electro-chemical deposition cell for face-up processing of single semiconductor substrates App 20040020781 - Dordi, Yezdi ;   et al. | 2004-02-05 |
Multiple independent robot assembly and apparatus and control system for processing and transferring semiconductor wafers App 20040005211 - Lowrance, Robert B. ;   et al. | 2004-01-08 |
Substrate transfer apparatus App 20030202865 - Ponnekanti, Hari ;   et al. | 2003-10-30 |
Multiple independent robot assembly and apparatus for processing and transferring semiconductor wafers App 20030180139 - McClintock, William ;   et al. | 2003-09-25 |
Semiconductor wafer handling robot for linear transfer chamber App 20020182036 - Lowrance, Robert B. | 2002-12-05 |
Electro-chemical deposition cell for face-up processing of single semiconductor substrates App 20020157960 - Dordi, Yezdi ;   et al. | 2002-10-31 |
Triple chamber load lock App 20020159864 - Lowrance, Robert B. | 2002-10-31 |
Multiple independent robot assembly and apparatus for processing and transferring semiconductor wafers App 20020127091 - Lowrance, Robert B. ;   et al. | 2002-09-12 |
Multiple independent robot assembly and apparatus for processing and transferring semiconductor wafers App 20020029936 - McClintock, William ;   et al. | 2002-03-14 |
Controlled environment enclosure and mechanical interface Grant 6,352,403 - Fishkin , et al. March 5, 2 | 2002-03-05 |
Controlled environment enclosure and mechanical interface Grant 6,082,948 - Fishkin , et al. July 4, 2 | 2000-07-04 |
Two-piece slit valve insert for vacuum processing system Grant 6,045,620 - Tepman , et al. April 4, 2 | 2000-04-04 |
Method of drying a substrate by lowering a fluid surface level Grant 6,027,574 - Fishkin , et al. February 22, 2 | 2000-02-22 |
Method and apparatus for drying substrates Grant 5,884,640 - Fishkin , et al. March 23, 1 | 1999-03-23 |
Robot assembly Grant 5,879,127 - Grunes , et al. March 9, 1 | 1999-03-09 |
Slotted RF coil shield for plasma deposition system Grant 5,763,851 - Forster , et al. June 9, 1 | 1998-06-09 |
Controlled environment enclosure and mechanical interface Grant 5,697,750 - Fishkin , et al. December 16, 1 | 1997-12-16 |
Two-axis magnetically coupled robot Grant 5,656,902 - Lowrance August 12, 1 | 1997-08-12 |
Two-axis magnetically coupled robot Grant 5,583,408 - Lowrance December 10, 1 | 1996-12-10 |
Two-axis magnetically coupled robot Grant 5,469,035 - Lowrance November 21, 1 | 1995-11-21 |
Two-axis magnetically coupled robot Grant 5,355,066 - Lowrance October 11, 1 | 1994-10-11 |
Semiconductor processing system with robotic autoloader and load lock Grant 5,280,983 - Maydan , et al. January 25, 1 | 1994-01-25 |
Two-axis magnetically coupled robot Grant 5,227,708 - Lowrance July 13, 1 | 1993-07-13 |
Semiconductor processing system with robotic autoloader and load lock Grant 5,224,809 - Maydan , et al. July 6, 1 | 1993-07-06 |
Semiconductor processing system with robotic autoloader and load lock Grant 4,911,597 - Maydan , et al. March 27, 1 | 1990-03-27 |