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Systems and methods for providing maintenance access to electronic device manufacturing tools
Grant 11,456,197 - Rice , et al. September 27, 2 | 2022-09-27 |
Vacuum Robot Apparatus For Variable Pitch Access
App 20220274788 - Thanu; Rajkumar ; et al. | 2022-09-01 |
Vacuum robot apparatus for variable pitch access
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Portable disc to measure chemical gas contaminants within semiconductor equipment and clean room
Grant 11,353,381 - Holeyannavar , et al. June 7, 2 | 2022-06-07 |
Transport System
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Generating Electric Power For A Robotic End Effector
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Multi-blade robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing
Grant 11,244,846 - Hudgens , et al. February 8, 2 | 2022-02-08 |
Transport system
Grant 11,232,965 - Newman , et al. January 25, 2 | 2022-01-25 |
Robot Apparatus, Systems, And Methods For Transporting Substrates In Electronic Device Manufacturing
App 20220005726 - Hudgens; Jeffrey C. ; et al. | 2022-01-06 |
Robot Apparatus And Systems, And Methods For Transporting Substrates In Electronic Device Manufacturing
App 20210407837 - Hudgens; Jeffrey C. | 2021-12-30 |
Organic Contamination Free Surface Machining
App 20210339354 - Guo; Yuanhong ; et al. | 2021-11-04 |
Substrate Transfer Devices, Systems And Methods Of Use Thereof
App 20210276179 - Berger; Alexander ; et al. | 2021-09-09 |
Systems And Methods For Providing Maintenance Access To Electronic Device Manufacturing Tools
App 20210183676 - Rice; Michael R. ; et al. | 2021-06-17 |
Carrier adapter insert apparatus and carrier adapter insert detection methods
Grant 11,018,036 - Mazzocco , et al. May 25, 2 | 2021-05-25 |
Multi-finger Robot Apparatus, Electronic Device Manufacturing Apparatus, And Methods Adapted To Transport Multiple Substrates In Electronic Device Manufacturing
App 20210146554 - Hudgens; Jeffrey C. ; et al. | 2021-05-20 |
Multi-blade robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing
Grant 10,943,805 - Hudgens , et al. March 9, 2 | 2021-03-09 |
Dual Robot Including Splayed End Effectors And Systems And Methods Including Same
App 20200384635 - Muthukamatchi; Karuppasamy ; et al. | 2020-12-10 |
Dual Pitch End Effector Robot Apparatus, Dual Pitch Load Locks, Systems, And Methods
App 20200384636 - Muthukamatchy; Karuppasamy ; et al. | 2020-12-10 |
Robot Apparatus Including Dual End Effectors With Variable Pitch And Methods
App 20200384634 - Muthukamatchy; Karuppasamy ; et al. | 2020-12-10 |
Dual robot including spaced upper arms and interleaved wrists and systems and methods including same
Grant 10,850,390 - Muthukamatchi , et al. December 1, 2 | 2020-12-01 |
Semiconductor device manufacturing platform with single and twinned processing chambers
Grant 10,847,391 - Merry , et al. November 24, 2 | 2020-11-24 |
Dual robot including spaced upper arms and interleaved wrists and systems and methods including same
Grant 10,814,475 - Muthukamatchi , et al. October 27, 2 | 2020-10-27 |
Load lock door assemblies, load lock apparatus, electronic device processing systems, and methods
Grant 10,758,045 - Weiss , et al. Sep | 2020-09-01 |
Replaceable End Effector Contact Pads, End Effectors, And Maintenance Methods
App 20200273826 - Kroetz; Whitney ; et al. | 2020-08-27 |
Electronic Device Manufacturing System
App 20200170117 - Rice; Michael Robert ; et al. | 2020-05-28 |
Sealed Substrate Carriers And Systems And Methods For Transporting Substrates
App 20200126832 - Rice; Michael Robert ; et al. | 2020-04-23 |
Transport System
App 20200111692 - NEWMAN; Jacob ; et al. | 2020-04-09 |
Electronic device manufacturing system
Grant 10,595,415 - Rice , et al. | 2020-03-17 |
Dual Robot Including Spaced Upper Arms And Interleaved Wrists And Systems And Methods Including Same
App 20200061805 - Muthukamatchi; Karuppasamy ; et al. | 2020-02-27 |
Sealed substrate carriers and systems and methods for transporting substrates
Grant 10,553,469 - Rice , et al. Fe | 2020-02-04 |
Substrate Deposition Systems, Robot Transfer Apparatus, And Methods For Electronic Device Manufacturing
App 20190375105 - Weaver; William T. ; et al. | 2019-12-12 |
Dual robot including spaced upper arms and interleaved wrists and systems and methods including same
Grant 10,500,719 - Muthukamatchi , et al. Dec | 2019-12-10 |
Multi-blade Robot Apparatus, Electronic Device Manufacturing Apparatus, And Methods Adapted To Transport Multiple Substrates In
App 20190355605 - Hudgens; Jeffrey C. ; et al. | 2019-11-21 |
Multi-blade Robot Apparatus, Electronic Device Manufacturing Apparatus, And Methods Adapted To Transport Multiple Substrates In
App 20190355603 - Hudgens; Jeffrey C. ; et al. | 2019-11-21 |
Substrate deposition systems, robot transfer apparatus, and methods for electronic device manufacturing
Grant 10,427,303 - Weaver , et al. October 1, 2 | 2019-10-01 |
Dual Robot Including Spaced Upper Arms And Interleaved Wrists And Systems And Methods Including Same
App 20190270196 - Muthukamatchi; Karuppasamy ; et al. | 2019-09-05 |
Load Lock Door Assemblies, Load Lock Apparatus, Electronic Device Processing Systems, And Methods
App 20190208907 - Weiss; Eran ; et al. | 2019-07-11 |
Load lock door assembly, load lock apparatus, electronic device processing systems, and methods
Grant 10,278,501 - Weiss , et al. | 2019-05-07 |
Fast and continuous eddy-current metrology of a conductive film
Grant 10,234,261 - Budiarto , et al. | 2019-03-19 |
Methods and systems for improved mask processing
Grant 10,199,256 - Ng , et al. Fe | 2019-02-05 |
Semiconductor Device Manufacturing Platform With Single And Twinned Processing Chambers
App 20190013216 - Merry; Nir ; et al. | 2019-01-10 |
Carrier Adapter Insert Apparatus And Carrier Adapter Insert Detection Methods
App 20180350637 - Mazzocco; John J. ; et al. | 2018-12-06 |
Carrier adapter insert apparatus and carrier adapter insert detection methods
Grant 10,115,616 - Mazzocco , et al. October 30, 2 | 2018-10-30 |
Universal component lift apparatus, assemblies, and methods for electronic device manufacturing
Grant 10,071,887 - Hudgens , et al. September 11, 2 | 2018-09-11 |
Sealed Substrate Carriers And Systems And Methods For Transporting Substrates
App 20180138068 - Rice; Michael Robert ; et al. | 2018-05-17 |
Sealed substrate carriers and systems and methods for transporting substrates
Grant 9,905,447 - Rice , et al. February 27, 2 | 2018-02-27 |
Dual Robot Including Spaced Upper Arms And Interleaved Wrists And Systems And Methods Including Same
App 20170368680 - Muthukamatchi; Karuppasamy ; et al. | 2017-12-28 |
Apparatus And Methods For A Mask Inverter
App 20170316967 - Ng; Edward ; et al. | 2017-11-02 |
Mixed-platform Apparatus, Systems, And Methods For Substrate Processing
App 20170290166 - Rice; Michael Robert ; et al. | 2017-10-05 |
Electronic device manufacturing system
Grant 9,717,147 - Rice , et al. July 25, 2 | 2017-07-25 |
Process chamber apparatus, systems, and methods for controlling a gas flow pattern
Grant 9,530,623 - Merry , et al. December 27, 2 | 2016-12-27 |
Substrate processing systems and robot apparatus for transporting substrates in electronic device manufacturing
Grant 9,457,464 - Kremerman , et al. October 4, 2 | 2016-10-04 |
Process chamber gas flow apparatus, systems, and methods
Grant 9,429,248 - Merry , et al. August 30, 2 | 2016-08-30 |
Systems, apparatus and methods for transporting substrates in electronic device manufacturing
Grant 9,334,127 - Kremerman , et al. May 10, 2 | 2016-05-10 |
Multi-axis robot apparatus with unequal length forearms, electronic device manufacturing systems, and methods for transporting substrates in electronic device manufacturing
Grant 9,325,228 - Hudgens , et al. April 26, 2 | 2016-04-26 |
Vibration-controlled substrate handling robots, systems, and methods
Grant 9,296,105 - Merry , et al. March 29, 2 | 2016-03-29 |
Wafer handling systems and methods
Grant 9,281,222 - Weaver , et al. March 8, 2 | 2016-03-08 |
Degassing apparatus adapted to process substrates in multiple tiers with second actuator
Grant 9,177,842 - Englhardt , et al. November 3, 2 | 2015-11-03 |
Load Lock Door Assembly, Load Lock Apparatus, Electronic Device Processing Systems, And Methods
App 20150311102 - Weiss; Eran ; et al. | 2015-10-29 |
Linked vacuum processing tools and methods of using the same
Grant 9,147,592 - Englhardt , et al. September 29, 2 | 2015-09-29 |
Robot systems, apparatus, and methods having independently rotatable waists
Grant 9,117,865 - Hudgens , et al. August 25, 2 | 2015-08-25 |
Robot systems and apparatus adapted to transport dual substrates in electronic device manufacturing with wrist drive motors mounted to upper arm
Grant 9,076,830 - Kremerman , et al. July 7, 2 | 2015-07-07 |
Robot systems, apparatus, and methods adapted to transport substrates in electronic device manufacturing
Grant 9,076,829 - Brodine , et al. July 7, 2 | 2015-07-07 |
Process Chamber Apparatus, Systems, And Methods For Controlling A Gas Flow Pattern
App 20150145413 - Merry; Nir ; et al. | 2015-05-28 |
Boom drive apparatus, multi-arm robot apparatus, electronic device processing systems, and methods for transporting substrates in electronic device manufacturing systems with web extending from hub
Grant 9,033,644 - Hudgens , et al. May 19, 2 | 2015-05-19 |
Universal Component Lift Apparatus, Assemblies, And Methods For Electronic Device Manufacturing
App 20150110586 - Hudgens; Jeffrey C. ; et al. | 2015-04-23 |
Methods And Systems For Improved Mask Processing
App 20150090294 - Ng; Edward ; et al. | 2015-04-02 |
Apparatus And Methods For A Mask Inverter
App 20150090295 - Ng; Edward ; et al. | 2015-04-02 |
Mixed-platform Apparatus, Systems, And Methods For Substrate Processing
App 20150082625 - Rice; Michael Robert ; et al. | 2015-03-26 |
Carrier Adapter Insert Apparatus And Carrier Adapter Insert Detection Methods
App 20150022821 - Mazzocco; John J. ; et al. | 2015-01-22 |
Sealed Substrate Carriers And Systems And Methods For Transporting Substrates
App 20150016941 - Rice; Michael Robert ; et al. | 2015-01-15 |
Fast And Continuous Eddy-current Metrology Of A Conductive Film
App 20140367266 - Budiarto; Edward J. ; et al. | 2014-12-18 |
Sealed substrate carriers and systems and methods for transporting substrates
Grant 8,870,512 - Rice , et al. October 28, 2 | 2014-10-28 |
Systems, Apparatus And Methods For Transporting Substrates In Electronic Device Manufacturing
App 20140286736 - Kremerman; Izya ; et al. | 2014-09-25 |
Substrate Processing Systems And Robot Apparatus For Transporting Substrates In Electronic Device Manufacturing
App 20140286741 - Kremerman; Izya ; et al. | 2014-09-25 |
Wafer Handling Systems And Methods
App 20140271050 - Weaver; William Tyler ; et al. | 2014-09-18 |
Semiconductor Device Manufacturing Platform With Single And Twinned Processing Chambers
App 20140262035 - Merry; Nir ; et al. | 2014-09-18 |
Substrate Deposition Systems, Robot Transfer Apparatus, And Methods For Electronic Device Manufacturing
App 20140271055 - Weaver; William T. ; et al. | 2014-09-18 |
Robot systems, apparatus and methods for transporting substrates
Grant 8,784,033 - Kremerman , et al. July 22, 2 | 2014-07-22 |
Systems, apparatus and methods for transporting substrates
Grant 8,777,547 - Kremerman , et al. July 15, 2 | 2014-07-15 |
Process Chamber Gas Flow Apparatus, Systems, And Methods
App 20140150878 - Merry; Nir ; et al. | 2014-06-05 |
Multi-axis Robot Apparatus With Unequal Length Forearms, Electronic Device Manufacturing Systems, And Methods For Transporting Substrates In Electronic Device Manufacturing
App 20140154038 - Hudgens; Jeffrey C. ; et al. | 2014-06-05 |
Vibration-controlled Substrate Handling Robots, Systems, And Methods
App 20140156070 - Merry; Nir ; et al. | 2014-06-05 |
Methods and loadport for purging a substrate carrier
Grant 8,689,812 - Shah , et al. April 8, 2 | 2014-04-08 |
Methods and apparatus for transporting substrate carriers
Grant 8,672,121 - Shah , et al. March 18, 2 | 2014-03-18 |
Linked Vacuum Processing Tools And Methods Of Using The Same
App 20140044503 - Englhardt; Eric A. ; et al. | 2014-02-13 |
Boom Drive Apparatus, Multi-arm Robot Apparatus, Electronic Device Processing Systems, And Methods For Transporting Substrates In Electronic Device Manufacturing Systems
App 20140010625 - Hudgens; Jeffrey C. ; et al. | 2014-01-09 |
Methods and loadport apparatus for purging a substrate carrier
Grant 8,601,975 - Shah , et al. December 10, 2 | 2013-12-10 |
Electrostatic end effector apparatus, systems and methods
Grant 8,599,531 - Sundar , et al. December 3, 2 | 2013-12-03 |
Robot Systems, Apparatus, And Methods Having Independently Rotatable Waists
App 20130272823 - Hudgens; Jeffrey C. ; et al. | 2013-10-17 |
Robot Systems, Apparatus, And Methods Adapted To Transport Dual Substrates In Electronic Device Manufacturing
App 20130115028 - Kremerman; Izya ; et al. | 2013-05-09 |
Robot Systems, Apparatus, And Methods Adapted To Process Substrates In Multiple Tiers
App 20130039734 - Englhardt; Eric A. ; et al. | 2013-02-14 |
Robot Systems, Apparatus, And Methods Adapted To Transport Substrates In Electronic Device Manufacturing
App 20130039726 - Brodine; Jeffrey A. ; et al. | 2013-02-14 |
Methods And Loadport For Purging A Substrate Carrier
App 20120325328 - Shah; Vinay K. ; et al. | 2012-12-27 |
End effector for a cluster tool
Grant 8,322,963 - Hudgens , et al. December 4, 2 | 2012-12-04 |
Methods And Loadport Apparatus For Purging A Substrate Carrier
App 20120060971 - Shah; Vinay K. ; et al. | 2012-03-15 |
Die-to-robot alignment for die-to-substrate bonding
Grant 8,123,881 - Cox , et al. February 28, 2 | 2012-02-28 |
Methods and apparatus for purging a substrate carrier
Grant 8,074,597 - Shah , et al. December 13, 2 | 2011-12-13 |
Dual-mode robot systems and methods for electronic device manufacturing
Grant 8,078,304 - Rice , et al. December 13, 2 | 2011-12-13 |
Break-away positioning conveyor mount for accommodating conveyor belt bends
Grant 8,020,689 - Rice , et al. September 20, 2 | 2011-09-20 |
Methods and apparatus for extending the reach of a dual scara robot linkage
Grant 8,016,542 - Cox , et al. September 13, 2 | 2011-09-13 |
Methods for moving a substrate carrier
Grant 7,984,543 - Elliott , et al. July 26, 2 | 2011-07-26 |
Methods and apparatus for loading and unloading substrate carriers on moving conveyors using feedback
Grant 7,930,061 - Rice , et al. April 19, 2 | 2011-04-19 |
Calibration of high speed loader to substrate transport system
Grant 7,912,576 - Rice , et al. March 22, 2 | 2011-03-22 |
Method and apparatus for supplying substrates to a processing tool
Grant 7,857,570 - Elliott , et al. December 28, 2 | 2010-12-28 |
Cartesian cluster tool configuration for lithography type processes
Grant 7,819,079 - Englhardt , et al. October 26, 2 | 2010-10-26 |
Stabilizing substrate carriers during overhead transport
Grant 7,798,309 - Rice , et al. September 21, 2 | 2010-09-21 |
Substrate carrier handler that unloads substrate carriers directly from a moving conveyor
Grant 7,792,608 - Rice , et al. September 7, 2 | 2010-09-07 |
Systems, Apparatus And Methods For Transporting Substrates
App 20100178146 - Kremerman; Izya ; et al. | 2010-07-15 |
Electrostatic End Effector Apparatus, Systems And Methods
App 20100178139 - Sundar; Satish ; et al. | 2010-07-15 |
Robot Systems, Apparatus And Methods For Transporting Substrates
App 20100178147 - Kremerman; Izya ; et al. | 2010-07-15 |
Systems and methods for transferring small lot size substrate carriers between processing tools
Grant 7,711,445 - Rice , et al. May 4, 2 | 2010-05-04 |
Multi-axis vacuum motor assembly
Grant 7,688,017 - Hudgens March 30, 2 | 2010-03-30 |
Wafer loading station that automatically retracts from a moving conveyor in response to an unscheduled event
Grant 7,684,895 - Rice , et al. March 23, 2 | 2010-03-23 |
System for transporting substrate carriers
Grant 7,673,735 - Rice , et al. March 9, 2 | 2010-03-09 |
Load Port Configurations For Small Lot Size Substrate Carriers
App 20090308030 - Elliott; Martin R. ; et al. | 2009-12-17 |
Overhead transfer flange and support for suspending a substrate carrier
Grant 7,611,318 - Rice , et al. November 3, 2 | 2009-11-03 |
Methods and apparatus for identifying small lot size substrate carriers
Grant 7,611,319 - Shah , et al. November 3, 2 | 2009-11-03 |
End Effector For A Cluster Tool
App 20090263215 - HUDGENS; JEFFREY C. ; et al. | 2009-10-22 |
Kinematic pin with shear member and substrate carrier for use therewith
Grant 7,597,183 - Rice , et al. October 6, 2 | 2009-10-06 |
Overhead transfer flange and support for suspending a substrate carrier
Grant 7,594,789 - Rice , et al. September 29, 2 | 2009-09-29 |
Load port configurations for small lot size substrate carriers
Grant 7,578,647 - Elliott , et al. August 25, 2 | 2009-08-25 |
Break-away Positioning Conveyor Mount For Accommodating Conveyor Belt Bends
App 20090205930 - Rice; Michael R. ; et al. | 2009-08-20 |
Methods and apparatus for a band to band transfer module
Grant 7,577,487 - Lowrance , et al. August 18, 2 | 2009-08-18 |
Methods And Apparatus For Moving A Substrate Carrier
App 20090188103 - Elliott; Martin R. ; et al. | 2009-07-30 |
Break-away positioning conveyor mount for accommodating conveyor belt bends
Grant 7,552,816 - Rice , et al. June 30, 2 | 2009-06-30 |
Break-away positioning conveyor mount for accommodating conveyor belt bends
Grant 7,540,371 - Rice , et al. June 2, 2 | 2009-06-02 |
Methods and apparatus for transporting substrate carriers
Grant 7,537,108 - Rice , et al. May 26, 2 | 2009-05-26 |
Three Dimensional Packaging With Wafer-level Bonding And Chip-level Repair
App 20090130821 - Cox; Damon K. ; et al. | 2009-05-21 |
Die-to-robot Alignment For Die-to-substrate Bonding
App 20090126851 - Cox; Damon K. ; et al. | 2009-05-21 |
System for transporting substrate carriers
Grant 7,527,141 - Rice , et al. May 5, 2 | 2009-05-05 |
Sealed Substrate Carriers And Systems And Methods For Transporting
App 20090110518 - Rice; Michael Robert ; et al. | 2009-04-30 |
Methods And Apparatus For Transporting Substrate Carriers
App 20090101483 - Shah; Vinay K. ; et al. | 2009-04-23 |
Break-away positioning conveyor mount for accommodating conveyor belt bends
Grant 7,506,747 - Rice , et al. March 24, 2 | 2009-03-24 |
System for transporting substrate carriers
Grant 7,506,746 - Rice , et al. March 24, 2 | 2009-03-24 |
Methods and apparatus for transporting substrate carriers
Grant 7,506,752 - Rice , et al. March 24, 2 | 2009-03-24 |
Break-away positioning conveyor mount for accommodating conveyor belt bends
Grant 7,503,448 - Rice , et al. March 17, 2 | 2009-03-17 |
Calibration Of High Speed Loader To Substrate Transport System
App 20090030547 - Rice; Michael R. ; et al. | 2009-01-29 |
Dual-mode Robot Systems And Methods For Electronic Device Manufacturing
App 20090024241 - Rice; Michael R. ; et al. | 2009-01-22 |
Methods And Apparatus For Extending The Reach Of A Dual Scara Robot Linkage
App 20080298945 - Cox; Damon Keith ; et al. | 2008-12-04 |
System For Transporting Substrate Carriers
App 20080289932 - Rice; Michael Robert ; et al. | 2008-11-27 |
Break-away positioning conveyor mount for accommodating conveyor belt bends
Grant 7,455,172 - Rice , et al. November 25, 2 | 2008-11-25 |
Calibration of high speed loader to substrate transport system
Grant 7,433,756 - Rice , et al. October 7, 2 | 2008-10-07 |
Small Lot Loadport Configurations
App 20080219816 - Rice; Michael R. ; et al. | 2008-09-11 |
Method And Apparatus For Supplying Substrates To A Processing Tool
App 20080187414 - Elliott; Martin R. ; et al. | 2008-08-07 |
Calibration Of High Speed Loader To Substrate Transport System
App 20080187419 - Rice; Michael R. ; et al. | 2008-08-07 |
Methods and apparatus for transporting substrate carriers
Grant 7,367,446 - Rice , et al. May 6, 2 | 2008-05-06 |
Deposition Analysis For Robot Motion Correction
App 20080101912 - Martin; Todd W. ; et al. | 2008-05-01 |
Substrate carrier handler that unloads substrate carriers directly from a moving conveyor
Grant 7,359,767 - Rice , et al. April 15, 2 | 2008-04-15 |
Methods And Apparatus For Loading And Unloading Substrate Carriers On Moving Conveyors Using Feedback
App 20080071417 - RICE; MICHAEL R. ; et al. | 2008-03-20 |
Substrate carrier handler that unloads substrate carriers directly from a moving conveyer
Grant 7,346,431 - Rice , et al. March 18, 2 | 2008-03-18 |
Kinematic Pin With Shear Member And Substrate Carrier For Use Therewith
App 20080050217 - RICE; MICHAEL R. ; et al. | 2008-02-28 |
Kinematic Pin With Shear Member And Substrate Carrier For Use Therewith
App 20080051925 - RICE; MICHAEL R. ; et al. | 2008-02-28 |
Overhead Transfer Flange And Support For Suspending A Substrate Carrier
App 20080019810 - Rice; Michael R. ; et al. | 2008-01-24 |
Methods And Apparatus For Electronic Device Manufacturing System Monitoring And Control
App 20070288115 - Brill; Todd J. ; et al. | 2007-12-13 |
Methods And Apparatus For Transporting Substrate Carriers
App 20070278067 - Rice; Michael R. ; et al. | 2007-12-06 |
Substrate Carrier Handler That Unloads Substrate Carriers Directly From A Moving Conveyor
App 20070274813 - Rice; Michael Robert ; et al. | 2007-11-29 |
Substrate carrier having door latching and substrate clamping mechanisms
Grant 7,299,831 - Elliott , et al. November 27, 2 | 2007-11-27 |
Methods and apparatus for transporting substrate carriers
Grant 7,293,642 - Rice , et al. November 13, 2 | 2007-11-13 |
System For Transporting Substrate Carriers
App 20070235287 - Rice; Michael Robert ; et al. | 2007-10-11 |
Methods and apparatus for electronic device manufacturing system monitoring and control
Grant 7,274,971 - Brill , et al. September 25, 2 | 2007-09-25 |
Methods and apparatus for using substrate carrier movement to actuate substrate carrier door opening/closing
Grant 7,258,520 - Elliott , et al. August 21, 2 | 2007-08-21 |
Methods And Apparatus For Purging A Substrate Carrier
App 20070158183 - Shah; Vinay K. ; et al. | 2007-07-12 |
Substrate carrier handler that unloads substrate carriers directly from a moving conveyor
Grant 7,243,003 - Rice , et al. July 10, 2 | 2007-07-10 |
Cartesian Cluster Tool Configuration For Lithography Type Processes
App 20070144439 - Englhardt; Eric A. ; et al. | 2007-06-28 |
System for transporting substrate carriers
Grant 7,234,584 - Rice , et al. June 26, 2 | 2007-06-26 |
Methods And Apparatus For Opening And Closing Substrate Carriers
App 20070140822 - Elliott; Martin R. ; et al. | 2007-06-21 |
Monitoring of smart pin transition timing
Grant 7,230,702 - Rice , et al. June 12, 2 | 2007-06-12 |
Systems and methods for transferring small lot size substrate carriers between processing tools
Grant 7,221,993 - Rice , et al. May 22, 2 | 2007-05-22 |
Break-away Positioning Conveyor Mount For Accommodating Conveyor Belt Bends
App 20070108020 - Rice; Michael R. ; et al. | 2007-05-17 |
Break-away Positioning Conveyor Mount For Accommodating Conveyor Belt Bends
App 20070108019 - Rice; Michael R. ; et al. | 2007-05-17 |
Break-away Positioning Conveyor Mount For Accommodating Conveyor Belt Bends
App 20070056829 - Rice; Michael R. ; et al. | 2007-03-15 |
Methods and apparatus for a transport lift assembly
App 20070059153 - Lowrance; Robert B. ; et al. | 2007-03-15 |
Methods and apparatus for a band to band transfer module
App 20070061031 - Lowrance; Robert B. ; et al. | 2007-03-15 |
Methods And Apparatus For Transporting Substrate Carriers
App 20070056834 - Rice; Michael R. ; et al. | 2007-03-15 |
Substrate Carrier Handler That Unloads Substrate Carriers Directly From A Moving Conveyor
App 20070061042 - Rice; Michael Robert ; et al. | 2007-03-15 |
System For Transporting Substrate Carriers
App 20070059145 - Rice; Michael Robert ; et al. | 2007-03-15 |
Systems And Methods For Transferring Small Lot Size Substrate Carriers Between Processing Tools
App 20070059861 - Rice; Michael R. ; et al. | 2007-03-15 |
Methods and apparatus for a transfer station
App 20070059144 - Lowrance; Robert B. ; et al. | 2007-03-15 |
Dynamically balanced substrate carrier handler
Grant 7,168,553 - Rice , et al. January 30, 2 | 2007-01-30 |
Break-away positioning conveyor mount for accommodating conveyor belt bends
Grant 7,156,221 - Rice , et al. January 2, 2 | 2007-01-02 |
Break-away positioning conveyor mount for accommodating conveyor belt bends
App 20060260910 - Rice; Michael R. ; et al. | 2006-11-23 |
Method and apparatus for unloading substrate carriers from substrate carrier transport system
App 20060263187 - Lowrance; Robert B. ; et al. | 2006-11-23 |
Break-away positioning conveyor mount for accommodating conveyor belt bends
App 20060260909 - Rice; Michael R. ; et al. | 2006-11-23 |
Methods and apparatus for transporting substrate carriers
App 20060260916 - Rice; Michael R. ; et al. | 2006-11-23 |
Substrate carrier handler that unloads substrate carriers directly from a moving conveyor
App 20060259196 - Rice; Michael Robert ; et al. | 2006-11-16 |
Methods and apparatus for transporting substrate carriers
App 20060243565 - Rice; Michael R. ; et al. | 2006-11-02 |
Multi-axis vacuum motor assembly
App 20060245905 - Hudgens; Jeffrey C. | 2006-11-02 |
Methods and apparatus for identifying small lot size substrate carriers
App 20060182531 - Shah; Vinay ; et al. | 2006-08-17 |
Methods and apparatus for transporting substrate carriers
Grant 7,077,264 - Rice , et al. July 18, 2 | 2006-07-18 |
Suspension track belt
Grant 7,051,870 - Schoendienst , et al. May 30, 2 | 2006-05-30 |
Method for determining a position of a robot
Grant 7,039,501 - Freeman , et al. May 2, 2 | 2006-05-02 |
Substrate carrier having door latching and substrate clamping mechanisms
App 20060072992 - Elliott; Martin R. ; et al. | 2006-04-06 |
Small lot size substrate carriers
App 20050232734 - Elliott, Martin R. ; et al. | 2005-10-20 |
Substrate carrier having door latching and substrate clamping mechanisms
Grant 6,955,197 - Elliott , et al. October 18, 2 | 2005-10-18 |
Dynamically balanced substrate carrier handler
App 20050224315 - Rice, Michael R. ; et al. | 2005-10-13 |
Methods and apparatus for electronic device manufacturing system monitoring and control
App 20050228525 - Brill, Todd J. ; et al. | 2005-10-13 |
Calibration of high speed loader to substrate transport system
App 20050186063 - Rice, Michael R. ; et al. | 2005-08-25 |
Kinematic pin with shear member and substrate carrier for use therewith
App 20050167554 - Rice, Michael R. ; et al. | 2005-08-04 |
Stabilizing substrate carriers during overhead transport
App 20050145464 - Rice, Michael R. ; et al. | 2005-07-07 |
Wafer loading station that automatically retracts from a moving conveyor in response to an unscheduled event
App 20050135903 - Rice, Michael R. ; et al. | 2005-06-23 |
Monitoring of smart pin transition timing
App 20050122504 - Rice, Michael R. ; et al. | 2005-06-09 |
Break-away positioning conveyor mount for accommodating conveyor belt bends
App 20050121293 - Rice, Michael R. ; et al. | 2005-06-09 |
Method and apparatus for unloading substrate carriers from substrate carrier transport system
App 20050095110 - Lowrance, Robert B. ; et al. | 2005-05-05 |
Overhead transfer flange and support for suspending a substrate carrier
App 20050040662 - Rice, Michael R. ; et al. | 2005-02-24 |
Method for determining a position of a robot
App 20040199291 - Freeman, Marvin L. ; et al. | 2004-10-07 |
Systems and methods for transferring small lot size substrate carriers between processing tools
App 20040193300 - Rice, Michael R. ; et al. | 2004-09-30 |
Methods and apparatus for transporting substrate carriers
App 20040191030 - Rice, Michael R. ; et al. | 2004-09-30 |
Substrate carrier handler that unloads substrate carriers directly from a moving conveyor
App 20040081538 - Rice, Michael Robert ; et al. | 2004-04-29 |
Method and apparatus for supplying substrates to a processing tool
App 20040081546 - Elliott, Martin R. ; et al. | 2004-04-29 |
Substrate carrier having door latching and substrate clamping mechanisms
App 20040081545 - Elliott, Martin R. ; et al. | 2004-04-29 |
Methods and apparatus for using substrate carrier movement to actuate substrate carrier door opening/closing
App 20040076496 - Elliott, Martin R. ; et al. | 2004-04-22 |
System for transporting substrate carriers
App 20040062633 - Rice, Michael Robert ; et al. | 2004-04-01 |
Robot blade for semiconductor processing equipment
Grant 6,709,218 - Freerks , et al. March 23, 2 | 2004-03-23 |
Substrate transfer apparatus
App 20030202865 - Ponnekanti, Hari ; et al. | 2003-10-30 |
Robot for handling semiconductor wafers
Grant 6,582,175 - Cox , et al. June 24, 2 | 2003-06-24 |
Automatic calibration method for substrate carrier handling robot and jig for performing the method
App 20030110649 - Hudgens, Jeffrey C. ; et al. | 2003-06-19 |
Method for determining a position of a robot
Grant 6,556,887 - Freeman , et al. April 29, 2 | 2003-04-29 |
Identification code reader integrated with substrate carrier robot
App 20030077153 - Elliott, Martin R. ; et al. | 2003-04-24 |
Robot for handling semiconductor wafers
App 20030035709 - Cox, Damon ; et al. | 2003-02-20 |
Method for determining a position of a robot
App 20030014157 - Freeman, Marvin L. ; et al. | 2003-01-16 |
High temperature substrate transfer robot
App 20030012631 - Pencis, Christopher H. ; et al. | 2003-01-16 |
High temperature substrate transfer robot
App 20030014155 - Pencis, Chris Holt ; et al. | 2003-01-16 |
End effector for lifting semiconductor wafer carrier
App 20030002970 - Elliott, Martin R. ; et al. | 2003-01-02 |
Locator pin integrated with sensor for detecting semiconductor substrate carrier
App 20030001116 - Elliott, Martin R. ; et al. | 2003-01-02 |
Robot for handling semiconductor wafers
Grant 6,379,095 - Elliott , et al. April 30, 2 | 2002-04-30 |
Mechanically clamping robot wrist
Grant 6,222,337 - Kroeker , et al. April 24, 2 | 2001-04-24 |
Mechanically clamping robot wrist
Grant 5,955,858 - Kroeker , et al. September 21, 1 | 1999-09-21 |
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