Englhardt; Eric A.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Englhardt; Eric A..The latest application filed is for "transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methods".

Company Profile

1.53.64

Englhardt; Eric A. - Palo Alto CA
Englhardt; Eric A. - Palo Altos CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methods Grant 11,087,998 - Rice , et al. August 10, 2	2021-08-10
Transfer Chambers With An Increased Number Of Sides, Semiconductor Device Manufacturing Processing Tools, And Processing Methods App 20210143034 - Rice; Michael Robert ; et al.	2021-05-13
Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methods Grant 10,971,381 - Rice , et al. April 6, 2	2021-04-06
Transfer Chambers With An Increased Number Of Sides, Semiconductor Device Manufacturing Processing Tools, And Processing Methods App 20190214284 - Rice; Michael Robert ; et al.	2019-07-11
Seal rings in electrochemical processors Grant 10,087,543 - Zimmerman , et al. October 2, 2	2018-10-02
Particle reduction via throttle gate valve purge Grant 10,010,912 - Lee , et al. July 3, 2	2018-07-03
Seal Rings In Electrochemical Processors App 20170145582 - Zimmerman; Nolan L. ; et al.	2017-05-25
Processing systems and apparatus adapted to process substrates in electronic device manufacturing Grant 9,524,889 - Hongkham , et al. December 20, 2	2016-12-20
Transfer chamber gas purge apparatus, electronic device processing systems, and purge methods Grant 9,441,792 - Ng , et al. September 13, 2	2016-09-13
Transfer Chambers With An Increased Number Of Sides, Semiconductor Device Manufacturing Processing Tools, And Processing Methods App 20160225646 - RICE; Michael Robert ; et al.	2016-08-04
Degassing apparatus adapted to process substrates in multiple tiers with second actuator Grant 9,177,842 - Englhardt , et al. November 3, 2	2015-11-03
Linked vacuum processing tools and methods of using the same Grant 9,147,592 - Englhardt , et al. September 29, 2	2015-09-29
Transfer Chamber Gas Purge Apparatus, Electronic Device Processing Systems, And Purge Methods App 20150090341 - Ng; Edward ; et al.	2015-04-02
Particle Reduction Via Throttle Gate Valve Purge App 20140366953 - LEE; JARED AHMAD ; et al.	2014-12-18
Processing Systems, Apparatus, And Methods Adapted To Process Substrates In Electronic Device Manufacturing App 20140263165 - Hongkham; Steve S. ; et al.	2014-09-18
Linked Vacuum Processing Tools And Methods Of Using The Same App 20140044503 - Englhardt; Eric A. ; et al.	2014-02-13
Seal Rings In Electrochemical Processors App 20130306465 - Zimmerman; Nolan L. ; et al.	2013-11-21
System, methods and apparatus for substrate carrier content verification using a material handling system Grant 8,379,082 - Shah , et al. February 19, 2	2013-02-19
Robot Systems, Apparatus, And Methods Adapted To Process Substrates In Multiple Tiers App 20130039734 - Englhardt; Eric A. ; et al.	2013-02-14
Automated integrated solar cell production line composed of a plurality of automated modules and tools including an autoclave for curing solar devices that have been laminated Grant 8,225,496 - Bachrach , et al. July 24, 2	2012-07-24
Break-away positioning conveyor mount for accommodating conveyor belt bends Grant 8,020,689 - Rice , et al. September 20, 2	2011-09-20
Scheduling method for processing equipment Grant 8,019,467 - Hongkham , et al. September 13, 2	2011-09-13
Methods for moving a substrate carrier Grant 7,984,543 - Elliott , et al. July 26, 2	2011-07-26
Methods and apparatus for loading and unloading substrate carriers on moving conveyors using feedback Grant 7,930,061 - Rice , et al. April 19, 2	2011-04-19
Calibration of high speed loader to substrate transport system Grant 7,912,576 - Rice , et al. March 22, 2	2011-03-22
Methods and apparatus for sensing substrates in carriers Grant 7,894,923 - Koshti , et al. February 22, 2	2011-02-22
Method and apparatus for supplying substrates to a processing tool Grant 7,857,570 - Elliott , et al. December 28, 2	2010-12-28
Cartesian cluster tool configuration for lithography type processes Grant 7,819,079 - Englhardt , et al. October 26, 2	2010-10-26
Stabilizing substrate carriers during overhead transport Grant 7,798,309 - Rice , et al. September 21, 2	2010-09-21
Systems and methods for transferring small lot size substrate carriers between processing tools Grant 7,711,445 - Rice , et al. May 4, 2	2010-05-04
Wafer loading station that automatically retracts from a moving conveyor in response to an unscheduled event Grant 7,684,895 - Rice , et al. March 23, 2	2010-03-23
System for transporting substrate carriers Grant 7,673,735 - Rice , et al. March 9, 2	2010-03-09
Load Port Configurations For Small Lot Size Substrate Carriers App 20090308030 - Elliott; Martin R. ; et al.	2009-12-17
Overhead transfer flange and support for suspending a substrate carrier Grant 7,611,318 - Rice , et al. November 3, 2	2009-11-03
Methods and apparatus for integrating large and small lot electronic device fabrication facilities Grant 7,603,195 - Puri , et al. October 13, 2	2009-10-13
Kinematic pin with shear member and substrate carrier for use therewith Grant 7,597,183 - Rice , et al. October 6, 2	2009-10-06
Overhead transfer flange and support for suspending a substrate carrier Grant 7,594,789 - Rice , et al. September 29, 2	2009-09-29
System, Methods And Apparatus For Substrate Carrier Content Verification Using A Material Handling System App 20090225160 - Shah; Vinay K. ; et al.	2009-09-10
Load port configurations for small lot size substrate carriers Grant 7,578,647 - Elliott , et al. August 25, 2	2009-08-25
Break-away Positioning Conveyor Mount For Accommodating Conveyor Belt Bends App 20090205930 - Rice; Michael R. ; et al.	2009-08-20
Methods And Apparatus For Moving A Substrate Carrier App 20090188103 - Elliott; Martin R. ; et al.	2009-07-30
Break-away positioning conveyor mount for accommodating conveyor belt bends Grant 7,552,816 - Rice , et al. June 30, 2	2009-06-30
Break-away positioning conveyor mount for accommodating conveyor belt bends Grant 7,540,371 - Rice , et al. June 2, 2	2009-06-02
Methods and apparatus for transporting substrate carriers Grant 7,537,108 - Rice , et al. May 26, 2	2009-05-26
System for transporting substrate carriers Grant 7,527,141 - Rice , et al. May 5, 2	2009-05-05
Scheduling method for processing equipment Grant 7,522,968 - Hongkham , et al. April 21, 2	2009-04-21
Photovoltaic Production Line App 20090077805 - BACHRACH; Robert Z. ; et al.	2009-03-26
Production Line Module For Forming Multiple Sized Photovoltaic Devices App 20090077804 - Bachrach; Robert Z. ; et al.	2009-03-26
Methods and apparatus for transporting substrate carriers Grant 7,506,752 - Rice , et al. March 24, 2	2009-03-24
Break-away positioning conveyor mount for accommodating conveyor belt bends Grant 7,506,747 - Rice , et al. March 24, 2	2009-03-24
System for transporting substrate carriers Grant 7,506,746 - Rice , et al. March 24, 2	2009-03-24
Break-away positioning conveyor mount for accommodating conveyor belt bends Grant 7,503,448 - Rice , et al. March 17, 2	2009-03-17
Calibration Of High Speed Loader To Substrate Transport System App 20090030547 - Rice; Michael R. ; et al.	2009-01-29
Use Of Logical Lots In Semiconductor Substrate Processing App 20080294282 - Koshti; Sushant S. ; et al.	2008-11-27
System For Transporting Substrate Carriers App 20080289932 - Rice; Michael Robert ; et al.	2008-11-27
Break-away positioning conveyor mount for accommodating conveyor belt bends Grant 7,455,172 - Rice , et al. November 25, 2	2008-11-25
Calibration of high speed loader to substrate transport system Grant 7,433,756 - Rice , et al. October 7, 2	2008-10-07
Calibration Of High Speed Loader To Substrate Transport System App 20080187419 - Rice; Michael R. ; et al.	2008-08-07
Method And Apparatus For Supplying Substrates To A Processing Tool App 20080187414 - Elliott; Martin R. ; et al.	2008-08-07
Methods And Apparatus For Sensing Substrates In Carriers App 20080156689 - Koshti; Sushant S. ; et al.	2008-07-03
Methods and apparatus for transporting substrate carriers Grant 7,367,446 - Rice , et al. May 6, 2	2008-05-06
Methods And Apparatus For Loading And Unloading Substrate Carriers On Moving Conveyors Using Feedback App 20080071417 - RICE; MICHAEL R. ; et al.	2008-03-20
Kinematic Pin With Shear Member And Substrate Carrier For Use Therewith App 20080050217 - RICE; MICHAEL R. ; et al.	2008-02-28
Kinematic Pin With Shear Member And Substrate Carrier For Use Therewith App 20080051925 - RICE; MICHAEL R. ; et al.	2008-02-28
Scheduling Method For Processing Equipment App 20080051930 - OH; Hilario L. ; et al.	2008-02-28
Scheduling Method For Processing Equipment App 20080051929 - Hongkham; Steve S. ; et al.	2008-02-28
Overhead Transfer Flange And Support For Suspending A Substrate Carrier App 20080019810 - Rice; Michael R. ; et al.	2008-01-24
Scheduling Method For Processing Equipment App 20080014058 - HONGKHAM; STEVE S. ; et al.	2008-01-17
Methods And Apparatus For Transporting Substrate Carriers App 20070278067 - Rice; Michael R. ; et al.	2007-12-06
Substrate carrier having door latching and substrate clamping mechanisms Grant 7,299,831 - Elliott , et al. November 27, 2	2007-11-27
Methods and apparatus for transporting substrate carriers Grant 7,293,642 - Rice , et al. November 13, 2	2007-11-13
System For Transporting Substrate Carriers App 20070235287 - Rice; Michael Robert ; et al.	2007-10-11
Cartesian Cluster Tool Configuration For Lithography Type Processes App 20070144439 - Englhardt; Eric A. ; et al.	2007-06-28
System for transporting substrate carriers Grant 7,234,584 - Rice , et al. June 26, 2	2007-06-26
Monitoring of smart pin transition timing Grant 7,230,702 - Rice , et al. June 12, 2	2007-06-12
Systems and methods for transferring small lot size substrate carriers between processing tools Grant 7,221,993 - Rice , et al. May 22, 2	2007-05-22
Break-away Positioning Conveyor Mount For Accommodating Conveyor Belt Bends App 20070108020 - Rice; Michael R. ; et al.	2007-05-17
Break-away Positioning Conveyor Mount For Accommodating Conveyor Belt Bends App 20070108019 - Rice; Michael R. ; et al.	2007-05-17
Method and apparatus for integrating large and small lot electronic device fabrication facilities Grant 7,218,983 - Puri , et al. May 15, 2	2007-05-15
Methods And Apparatus For Transporting Substrate Carriers App 20070056834 - Rice; Michael R. ; et al.	2007-03-15
System For Transporting Substrate Carriers App 20070059145 - Rice; Michael Robert ; et al.	2007-03-15
Systems And Methods For Transferring Small Lot Size Substrate Carriers Between Processing Tools App 20070059861 - Rice; Michael R. ; et al.	2007-03-15
Methods And Apparatus For Integrating Large And Small Lot Electronic Device Fabrication Facilities App 20070061034 - Puri; Amitabh ; et al.	2007-03-15
Break-away Positioning Conveyor Mount For Accommodating Conveyor Belt Bends App 20070056829 - Rice; Michael R. ; et al.	2007-03-15
Dynamically balanced substrate carrier handler Grant 7,168,553 - Rice , et al. January 30, 2	2007-01-30
Break-away positioning conveyor mount for accommodating conveyor belt bends Grant 7,156,221 - Rice , et al. January 2, 2	2007-01-02
Break-away positioning conveyor mount for accommodating conveyor belt bends App 20060260909 - Rice; Michael R. ; et al.	2006-11-23
Break-away positioning conveyor mount for accommodating conveyor belt bends App 20060260910 - Rice; Michael R. ; et al.	2006-11-23
Methods and apparatus for transporting substrate carriers App 20060260916 - Rice; Michael R. ; et al.	2006-11-23
Method and apparatus for unloading substrate carriers from substrate carrier transport system App 20060263187 - Lowrance; Robert B. ; et al.	2006-11-23
Methods and apparatus for transporting substrate carriers App 20060243565 - Rice; Michael R. ; et al.	2006-11-02
Methods and apparatus for transporting substrate carriers Grant 7,077,264 - Rice , et al. July 18, 2	2006-07-18
Method and apparatus for undocking substrate pod with door status check Grant 7,074,000 - Englhardt July 11, 2	2006-07-11
Substrate carrier having door latching and substrate clamping mechanisms App 20060072992 - Elliott; Martin R. ; et al.	2006-04-06
Small lot size substrate carriers App 20050232734 - Elliott, Martin R. ; et al.	2005-10-20
Substrate carrier having door latching and substrate clamping mechanisms Grant 6,955,197 - Elliott , et al. October 18, 2	2005-10-18
Dynamically balanced substrate carrier handler App 20050224315 - Rice, Michael R. ; et al.	2005-10-13
Calibration of high speed loader to substrate transport system App 20050186063 - Rice, Michael R. ; et al.	2005-08-25
Kinematic pin with shear member and substrate carrier for use therewith App 20050167554 - Rice, Michael R. ; et al.	2005-08-04
Stabilizing substrate carriers during overhead transport App 20050145464 - Rice, Michael R. ; et al.	2005-07-07
Wafer loading station that automatically retracts from a moving conveyor in response to an unscheduled event App 20050135903 - Rice, Michael R. ; et al.	2005-06-23
Monitoring of smart pin transition timing App 20050122504 - Rice, Michael R. ; et al.	2005-06-09
Method and apparatus for integrating large and small lot electronic device fabrication facilities App 20050125089 - Puri, Amitabh ; et al.	2005-06-09
Break-away positioning conveyor mount for accommodating conveyor belt bends App 20050121293 - Rice, Michael R. ; et al.	2005-06-09
Methods and apparatus for carriers suitable for use in high-speed/high-acceleration transport systems App 20050105997 - Englhardt, Eric A. ; et al.	2005-05-19
Method and apparatus for unloading substrate carriers from substrate carrier transport system App 20050095110 - Lowrance, Robert B. ; et al.	2005-05-05
Overhead transfer flange and support for suspending a substrate carrier App 20050040662 - Rice, Michael R. ; et al.	2005-02-24
Methods and apparatus for transporting substrate carriers App 20040191030 - Rice, Michael R. ; et al.	2004-09-30
Systems and methods for transferring small lot size substrate carriers between processing tools App 20040193300 - Rice, Michael R. ; et al.	2004-09-30
Substrate carrier having door latching and substrate clamping mechanisms App 20040081545 - Elliott, Martin R. ; et al.	2004-04-29
Method and apparatus for supplying substrates to a processing tool App 20040081546 - Elliott, Martin R. ; et al.	2004-04-29
System for transporting substrate carriers App 20040062633 - Rice, Michael Robert ; et al.	2004-04-01
Reducing backside deposition in a substrate processing apparatus through the use of a shadow ring Grant 5,476,548 - Lei , et al. December 19, 1	1995-12-19

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