Saido; Shuhei

Patent Applications and Registrations

Patent applications and USPTO patent grants for Saido; Shuhei.The latest application filed is for "substrate processing apparatus and method of manufacturing semiconductor device".

Company Profile

21.44.43

Saido; Shuhei - Toyama JP
Saido; Shuhei - Tokyo JP
SAIDO; Shuhei - Toyama-shi JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Substrate processing apparatus and heater device Grant 11,384,434 - Saido July 12, 2	2022-07-12
Substrate processing apparatus, heater and method of manufacturing semiconductor device Grant 11,359,285 - Murata , et al. June 14, 2	2022-06-14
Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device App 20220145464 - HIRAMATSU; Hiroaki ; et al.	2022-05-12
Substrate Processing Apparatus, Substrate Retainer And Method Of Manufacturing Semiconductor Device App 20220093435 - SHINOZAKI; Kenji ; et al.	2022-03-24
Substrate processing apparatus and method of manufacturing semiconductor device Grant 11,261,528 - Hiramatsu , et al. March 1, 2	2022-03-01
Substrate processing apparatus Grant 11,222,796 - Saido , et al. January 11, 2	2022-01-11
Substrate processing apparatus and furnace opening assembly thereof Grant 11,219,096 - Saido January 4, 2	2022-01-04
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Non-transitory Computer-readable Recording Medium App 20210407865 - SHINOZAKI; Kenji ; et al.	2021-12-30
Boat for wafer processing apparatus Grant D939,459 - Shimada , et al. December 28, 2	2021-12-28
Return nozzle Grant D937,385 - Takeshita , et al. November 30, 2	2021-11-30
Supporting column of insulation unit for semiconductor manufacturing apparatus Grant D928,106 - Okajima , et al. August 17, 2	2021-08-17
Cover of seal cap for reaction chamber for semiconductor Grant D916,037 - Okajima , et al. April 13, 2	2021-04-13
Substrate processing apparatus, reaction tube and method of manufacturing semiconductor device Grant 10,961,625 - Saido , et al. March 30, 2	2021-03-30
Substrate processing apparatus and method of manufacturing semiconductor device Grant 10,923,366 - Okajima , et al. February 16, 2	2021-02-16
Substrate Processing Apparatus And Substrate Holder App 20210043485 - Saido; Shuhei ; et al.	2021-02-11
Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device App 20200407851 - HIRAMATSU; Hiroaki ; et al.	2020-12-31
Protective plate, substrate processing apparatus, and method of manufacturing semiconductor device Grant 10,731,254 - Saido , et al.	2020-08-04
Substrate processing apparatus and method of manufacturing semiconductor device Grant 10,714,362 - Saido	2020-07-14
Substrate Treatment Apparatus, Heater Apparatus, And Semiconductor Device Manufacturing Process App 20200216958 - SAIDO; Shuhei	2020-07-09
Substrate Processing Apparatus and Furnace Opening Assembly Thereof App 20200187305 - SAIDO; Shuhei	2020-06-11
Substrate Processing Apparatus, Heater and Method of Manufacturing Semiconductor Device App 20200173024 - MURATA; Hitoshi ; et al.	2020-06-04
Substrate Processing Apparatus App 20200173025 - SAIDO; Shuhei	2020-06-04
Protective Plate, Substrate Processing Apparatus, And Method Of Manufacturing Semiconductor Device App 20200165722 - SAIDO; Shuhei ; et al.	2020-05-28
Substrate Processing Apparatus, Quartz Reaction Tube And Method Of Manufacturing Semiconductor Device App 20200149159 - OKAJIMA; Yusaku ; et al.	2020-05-14
Substrate processing apparatus Grant 10,615,061 - Saido , et al.	2020-04-07
Substrate processing apparatus, heater and method of manufacturing semiconductor device Grant 10,597,780 - Murata , et al.	2020-03-24
Substrate processing apparatus and method of manufacturing semiconductor device Grant 10,593,572 - Saido	2020-03-17
Substrate Processing Apparatus And Method Of Manufacturing Semiconductor Device App 20200066551 - OKAJIMA; Yusaku ; et al.	2020-02-27
Substrate processing apparatus, lid cover and method of manufacturing semiconductor device Grant 10,573,535 - Saido , et al. Feb	2020-02-25
Cover of seal cap for reaction chamber for semiconductor manufacturing Grant D872,037 - Okajima , et al. J	2020-01-07
Substrate Processing Apparatus, Reaction Tube and Method of Manufacturing Semiconductor Device App 20190330738 - SAIDO; Shuhei ; et al.	2019-10-31
Substrate processing apparatus, reaction tube, semiconductor device manufacturing method, and recording medium Grant 10,453,735 - Okajima , et al. Oc	2019-10-22
Substrate Processing Apparatus And Method Of Manufacturing Semiconductor Device App 20190287830 - SAIDO; Shuhei	2019-09-19
Substrate Processing Apparatus And Ceiling Heater App 20190284696 - KOSUGI; Tetsuya ; et al.	2019-09-19
Substrate Processing Apparatus And Method Of Manufacturing Semiconductor Device App 20190287829 - SAIDO; Shuhei	2019-09-19
Method Of Cleaning Member In Process Container, Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, An App 20190255576 - KURIBAYASHI; Koei ; et al.	2019-08-22
Cover of seal cap for reaction chamber of semiconductor Grant D855,027 - Okajima , et al.	2019-07-30
Return nozzle Grant D847,301 - Yoshida , et al.	2019-04-30
Substrate Processing Apparatus, Reaction Tube, Semiconductor Device Manufacturing Method, And Recording Medium App 20190096738 - OKAJIMA; Yusaku ; et al.	2019-03-28
Reaction tube Grant D843,958 - Okajima , et al.	2019-03-26
Reaction tube Grant D842,823 - Okajima , et al.	2019-03-12
Substrate Processing Apparatus App 20190035654 - SAIDO; Shuhei ; et al.	2019-01-31
Ceiling heater for substrate processing apparatus Grant D826,185 - Kosugi , et al. August 21, 2	2018-08-21
Heater for substrate processing apparatus Grant D825,502 - Kosugi , et al. August 14, 2	2018-08-14
Air flow controller for heater of substrate processing apparatus Grant D825,501 - Yamaguchi , et al. August 14, 2	2018-08-14
Substrate Processing Apparatus App 20180218927 - SAIDO; Shuhei ; et al.	2018-08-02
Substrate processing apparatus and heating unit Grant 9,957,616 - Murata , et al. May 1, 2	2018-05-01
Cover of seal cap for reaction chamber of semiconductor Grant D813,181 - Okajima , et al. March 20, 2	2018-03-20
Substrate Processing Apparatus, Lid Cover And Method Of Manufacturing Semiconductor Device App 20180033645 - SAIDO; Shuhei ; et al.	2018-02-01
Substrate Processing Apparatus, Heater and Method of Manufacturing Semiconductor Device App 20170335458 - MURATA; Hitoshi ; et al.	2017-11-23
Heater for semiconductor thermal process Grant D795,209 - Murata , et al. August 22, 2	2017-08-22
Heater for semiconductor thermal process Grant D793,975 - Murata , et al. August 8, 2	2017-08-08
Substrate Processing Apparatus App 20170037512 - SAIDO; Shuhei ; et al.	2017-02-09
Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium Grant 9,502,237 - Yamaguchi , et al. November 22, 2	2016-11-22
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Non-Transitory Computer-Readable Recording Medium App 20160284517 - SAIDO; Shuhei	2016-09-29
Substrate Processing Apparatus And Heating Unit App 20160244878 - MURATA; Hitoshi ; et al.	2016-08-25
Substrate Processing Apparatus, Gas Dispersion Unit, Method of Manufacturing Semiconductor Device and Non-Transitory Computer-Readable Recording Medium App 20160201193 - SAIDO; Shuhei	2016-07-14
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Non-Transitory Computer-Readable Recording Medium App 20160177446 - SAIDO; Shuhei	2016-06-23
Substrate processing apparatus, method for manufacturing semiconductor device and computer-readable recording medium Grant 9,365,928 - Saido , et al. June 14, 2	2016-06-14
Substrate processing apparatus and method of manufacturing semiconductor device Grant 9,222,732 - Shirako , et al. December 29, 2	2015-12-29
Substrate Processing Apparatus, Method For Manufacturing Semiconductor Device And Computer-readable Recording Medium App 20150307988 - SAIDO; Shuhei ; et al.	2015-10-29
Substrate processing apparatus, method for manufacturing substrate, and method for manufacturing semiconductor device Grant 9,082,694 - Saido , et al. July 14, 2	2015-07-14
Substrate Processing Apparatus And Method Of Manufacturing Semiconductor Device App 20150184301 - SAIDO; Shuhei	2015-07-02
Substrate Processing Apparatus, Method Of Manufacturing Semiconductor Device, And Non-transitory Computer-readable Recording Medium App 20150187610 - SAIDO; Shuhei	2015-07-02
Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer readable recording medium Grant 9,062,376 - Saido June 23, 2	2015-06-23
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Non-Transitory Computer-Readable Recording Medium App 20150152551 - YAMAGUCHI; Takatomo ; et al.	2015-06-04
Substrate Processing Apparatus, Method Of Manufacturing Semiconductor Device And Non-transitory Computer Readable Recording Medium App 20150152554 - SAIDO; Shuhei	2015-06-04
Substrate processing apparatus Grant 9,028,614 - Hara , et al. May 12, 2	2015-05-12
Substrate processing apparatus and method of manufacturing semiconductor device Grant 8,882,923 - Saido , et al. November 11, 2	2014-11-11
Substrate processing apparatus and method of manufacturing semiconductor device Grant 8,851,886 - Morita , et al. October 7, 2	2014-10-07
Substrate processing apparatus with an insulator disposed in the reaction chamber Grant 8,771,416 - Saido , et al. July 8, 2	2014-07-08
Substrate Processing Apparatus, Method For Manufacturing Substrate, And Method For Manufacturing Semiconductor Device App 20130330930 - Saido; Shuhei ; et al.	2013-12-12
Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device App 20130042803 - Saido; Shuhei ; et al.	2013-02-21
Substrate Processing Apparatus, And Method Of Manufacturing Substrate App 20120220108 - Hara; Daisuke ; et al.	2012-08-30
Substrate Processing Apparatus And Method, And Semiconductor Device Manufacturing Method App 20120214317 - Murobayashi; Masaki ; et al.	2012-08-23
Substrate Processing Apparatus, Method Of Manufacturing Substrate, And Method Of Manufacturing Semiconductor Device App 20120156886 - Shirako; Kenji ; et al.	2012-06-21
Substrate Processing Apparatus And Method Of Manufacturing Semiconductor Device App 20120067869 - SHIRAKO; Kenji ; et al.	2012-03-22
Heat Treatment Apparatus App 20110204036 - MUROBAYASHI; Masaki ; et al.	2011-08-25
Heat Treatment Apparatus App 20110056434 - YAMAGUCHI; Takatomo ; et al.	2011-03-10
Method Of Manufacturing Semiconductor Device, Method Of Manufacturing Substrate, And Substrate Processing Apparatus App 20110000425 - Saido; Shuhei ; et al.	2011-01-06
Substrate Processing Apparatus And Method Of Manufacturing Semiconductor Device App 20090197409 - MORITA; Shinya ; et al.	2009-08-06

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