Ceiling heater for substrate processing apparatus
Kosugi , et al. August 21, 2
U.S. patent number D826,185 [Application Number D/596,974] was granted by the patent office on 2018-08-21 for ceiling heater for substrate processing apparatus. This patent grant is currently assigned to HITACHI KOKUSAI ELECTRIC INC.. The grantee listed for this patent is Hitachi Kokusai Electric Inc.. Invention is credited to Tetsuya Kosugi, Shuhei Saido, Takatomo Yamaguchi.
| United States Patent | D826,185 |
| Kosugi , et al. | August 21, 2018 |
Ceiling heater for substrate processing apparatus
Claims
CLAIM We claim the ornamental design for a ceiling heater for substrate processing apparatus, as shown and described.
| Inventors: | Kosugi; Tetsuya (Toyama, JP), Yamaguchi; Takatomo (Toyama, JP), Saido; Shuhei (Toyama, JP) | ||||||||||
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| Applicant: |
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| Assignee: | HITACHI KOKUSAI ELECTRIC INC.
(Tokyo, JP) |
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| Appl. No.: | D/596,974 | ||||||||||
| Filed: | March 13, 2017 |
Foreign Application Priority Data
| Oct 14, 2016 [JP] | 022413/2016 | |||
| Current U.S. Class: | D13/182 |
| Current International Class: | 1303 |
| Field of Search: | ;D13/123-132,154,184,199 ;D15/138,140,144.1 |
References Cited [Referenced By]
U.S. Patent Documents
| D176456 | December 1955 | Glynn |
| 6653603 | November 2003 | Yamaguchi |
| D601521 | October 2009 | Komatsu |
| D649126 | November 2011 | Takahashi |
| 9719629 | August 2017 | Boguslavskiy |
| D797690 | September 2017 | Furutani |
| D798250 | September 2017 | Furutani |
| 2003/0183614 | October 2003 | Yamaguchi |
| 2004/0149719 | August 2004 | Nakamura |
| 2005/0072716 | April 2005 | Quiles |
| 2006/0130763 | June 2006 | Emerson |
| 2007/0095289 | May 2007 | Arami |
| 2014/0021673 | January 2014 | Chen |
| 2013004891 | Jan 2013 | JP | |||
Other References
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EC21 Inc. <URL: https://diamondhrichard.en.ec21.com/Duplex_Winding_Infrared_Coil_Ceramic-- -5521314_8834245.html.> Visited Feb. 28, 2018. Duplex Winding Infrared Coil/ Ceramic Cooker/ Heating Plate/Radiant Element/Hob. cited by examiner . Modello designs. <URL: https://www.modellocustomstencils.com/collections/medallion-stencils.> Visited Feb. 28, 2018. Medallion Stencils. cited by examiner. |
Primary Examiner: Johannes; Thomas
Assistant Examiner: McVey; Lauren
Attorney, Agent or Firm: Fitch, Even, Tabin & Flannery, LLP
Description
FIG. 1 is a front, bottom and right side perspective view of a ceiling heater for substrate processing apparartus showing our new design;
FIG. 2 is a front elevational view thereof;
FIG. 3 is a left side elevational view thereof;
FIG. 4 is a right side elevational view thereof;
FIG. 5 is a top plan view thereof;
FIG. 6 is a bottom plan view thereof; and,
FIG. 7 is a rear elevational view thereof.
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References
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