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Retainer plate of top heater for wafer processing furnace Grant D962,183 - Sugiura , et al. August 30, 2 | 2022-08-30 |
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Substrate processing apparatus, heater and method of manufacturing semiconductor device Grant 11,359,285 - Murata , et al. June 14, 2 | 2022-06-14 |
Substrate processing apparatus Grant 11,222,796 - Saido , et al. January 11, 2 | 2022-01-11 |
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Non-transitory Computer-readable Recording Medium App 20220005717 - YAMAGUCHI; Takatomo ;   et al. | 2022-01-06 |
Retainer of ceiling heater for semiconductor fabrication apparatus Grant D918,848 - Sugiura , et al. May 11, 2 | 2021-05-11 |
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Substrate processing apparatus Grant 10,615,061 - Saido , et al. | 2020-04-07 |
Substrate processing apparatus, heater and method of manufacturing semiconductor device Grant 10,597,780 - Murata , et al. | 2020-03-24 |
Method Of Cleaning Member In Process Container, Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, An App 20190255576 - KURIBAYASHI; Koei ;   et al. | 2019-08-22 |
Substrate Processing Apparatus App 20190035654 - SAIDO; Shuhei ;   et al. | 2019-01-31 |
Ceiling heater for substrate processing apparatus Grant D826,185 - Kosugi , et al. August 21, 2 | 2018-08-21 |
Heater for substrate processing apparatus Grant D825,502 - Kosugi , et al. August 14, 2 | 2018-08-14 |
Air flow controller for heater of substrate processing apparatus Grant D825,501 - Yamaguchi , et al. August 14, 2 | 2018-08-14 |
Substrate Processing Apparatus App 20180218927 - SAIDO; Shuhei ;   et al. | 2018-08-02 |
Rotary tool for boat of semiconductor manufacturing apparatus Grant D822,081 - Yamaguchi , et al. July 3, 2 | 2018-07-03 |
Cleaning method, method of manufacturing semiconductor device and substrate processing apparatus Grant 9,982,347 - Yamaguchi , et al. May 29, 2 | 2018-05-29 |
Insulation unit cover of semiconductor manufacturing apparatus Grant D818,961 - Yamaguchi May 29, 2 | 2018-05-29 |
Insulation unit of semiconductor manufacturing apparatus Grant D818,960 - Yamaguchi May 29, 2 | 2018-05-29 |
Cleaning Method, Method Of Manufacturing Semiconductor Device And Substrate Processing Apparatus App 20180044794 - YAMAGUCHI; Takatomo ;   et al. | 2018-02-15 |
Rotary tool for boat of semiconductor manufacturing apparatus Grant D803,908 - Yamaguchi , et al. November 28, 2 | 2017-11-28 |
Substrate Processing Apparatus, Heater and Method of Manufacturing Semiconductor Device App 20170335458 - MURATA; Hitoshi ;   et al. | 2017-11-23 |
Heater for semiconductor thermal process Grant D795,209 - Murata , et al. August 22, 2 | 2017-08-22 |
Heater for semiconductor thermal process Grant D793,974 - Murata , et al. August 8, 2 | 2017-08-08 |
Substrate Processing Apparatus App 20170037512 - SAIDO; Shuhei ;   et al. | 2017-02-09 |
Substrate Processing Apparatus, And Storage Medium App 20160376699 - SASAKI; Takafumi ;   et al. | 2016-12-29 |
Substrate processing apparatus and semiconductor device manufacturing method Grant 9,530,677 - Yamaguchi , et al. December 27, 2 | 2016-12-27 |
Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium Grant 9,502,237 - Yamaguchi , et al. November 22, 2 | 2016-11-22 |
Substrate processing apparatus and method of manufacturing semiconductor device Grant 9,222,732 - Shirako , et al. December 29, 2 | 2015-12-29 |
Reaction tube Grant D739,832 - Yamazaki , et al. September 29, 2 | 2015-09-29 |
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Non-Transitory Computer-Readable Recording Medium App 20150152551 - YAMAGUCHI; Takatomo ;   et al. | 2015-06-04 |
Substrate processing apparatus Grant 9,028,614 - Hara , et al. May 12, 2 | 2015-05-12 |
Substrate processing apparatus and method of manufacturing semiconductor device Grant 8,882,923 - Saido , et al. November 11, 2 | 2014-11-11 |
Substrate processing apparatus with an insulator disposed in the reaction chamber Grant 8,771,416 - Saido , et al. July 8, 2 | 2014-07-08 |
Substrate Processing Apparatus And Semiconductor Device Manufacturing Method App 20130109193 - YAMAGUCHI; Takatomo ;   et al. | 2013-05-02 |
Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device App 20130042803 - Saido; Shuhei ;   et al. | 2013-02-21 |
Substrate Processing Apparatus, Wafer Holder, And Method Of Manufacturing Semiconductor Device App 20120220107 - Fukuda; Masanao ;   et al. | 2012-08-30 |
Substrate Processing Apparatus, And Method Of Manufacturing Substrate App 20120220108 - Hara; Daisuke ;   et al. | 2012-08-30 |
Substrate Processing Apparatus And Method, And Semiconductor Device Manufacturing Method App 20120214317 - Murobayashi; Masaki ;   et al. | 2012-08-23 |
Substrate Processing Apparatus And Method Of Manufacturing Semiconductor Device App 20120067869 - SHIRAKO; Kenji ;   et al. | 2012-03-22 |
Heat Treatment Apparatus App 20110204036 - MUROBAYASHI; Masaki ;   et al. | 2011-08-25 |
Heat Treatment Apparatus App 20110056434 - YAMAGUCHI; Takatomo ;   et al. | 2011-03-10 |
Method Of Manufacturing Semiconductor Device, Method Of Manufacturing Substrate, And Substrate Processing Apparatus App 20110000425 - Saido; Shuhei ;   et al. | 2011-01-06 |
Semiconductor Manufacturing Apparatus App 20100224128 - YAMAGUCHI; Takatomo ;   et al. | 2010-09-09 |
Substrate Processing Apparatus and Semiconductor Device Manufacturing Method App 20090269933 - Yamaguchi; Takatomo ;   et al. | 2009-10-29 |
Substrate processing apparatus, substrate holder, and manufacturing method of semiconductor device Grant 7,455,734 - Yamaguchi , et al. November 25, 2 | 2008-11-25 |
Substrate treatment apparatus, substrate holding device, and semiconductor device manufacturing method App 20070007646 - Yamaguchi; Takatomo ;   et al. | 2007-01-11 |
Heat treatment apparatus and method for processing substrates Grant 6,737,613 - Yamaguchi , et al. May 18, 2 | 2004-05-18 |
Apparatus and method for fabricating a semiconductor device and a heat treatment apparatus App 20030231698 - Yamaguchi, Takatomo ;   et al. | 2003-12-18 |
Heat treatment apparatus and method for processing substrates App 20030183614 - Yamaguchi, Takatomo ;   et al. | 2003-10-02 |