Kosugi; Tetsuya

Patent Applications and Registrations

Patent applications and USPTO patent grants for Kosugi; Tetsuya.The latest application filed is for "temperature sensor, heater unit, and substrate processing apparatus".

Company Profile

17.38.28

Kosugi; Tetsuya - Toyama JP
KOSUGI; Tetsuya - Toyama-shi JP
Kosugi; Tetsuya - Toyami JP
Kosugi; Tetsuya - Toyoma-shi JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Retainer plate of top heater for wafer processing furnace Grant D962,184 - Sugiura , et al. August 30, 2	2022-08-30
Retainer plate of top heater for wafer processing furnace Grant D962,183 - Sugiura , et al. August 30, 2	2022-08-30
Ceiling heater for substrate processing apparatus Grant D959,393 - Sugiura , et al. August 2, 2	2022-08-02
Temperature Sensor, Heater Unit, And Substrate Processing Apparatus App 20220139737 - AKAO; Tokunobu ; et al.	2022-05-05
Substrate processing apparatus, and thermocouple Grant 11,300,456 - Osaka , et al. April 12, 2	2022-04-12
Substrate Processing Apparatus, And Thermocouple App 20220082447 - OSAKA; Akihiro ; et al.	2022-03-17
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Heater App 20210313205 - SUGIURA; Shinobu ; et al.	2021-10-07
Substrate processing apparatus, method of manufacturing semiconductor device, and thermocouple support Grant 11,049,742 - Yamaguchi , et al. June 29, 2	2021-06-29
Cooling unit, heat insulating structure, and substrate processing apparatus Grant 11,043,402 - Kosugi , et al. June 22, 2	2021-06-22
Retainer of ceiling heater for semiconductor fabrication apparatus Grant D918,848 - Sugiura , et al. May 11, 2	2021-05-11
Heater, Temperature Control System, And Processing Apparatus App 20200393197 - KOSUGI; Tetsuya ; et al.	2020-12-17
Substrate Processing Apparatus, Substrate Processing Method, Semiconductor Device Manufacturing Method, And Control Program App 20200333766 - SUGISHITA; Masashi ; et al.	2020-10-22
Substrate processing apparatus, and thermocouple Grant 10,684,174 - Osaka , et al.	2020-06-16
Substrate Processing Apparatus, And Thermocouple App 20200166413 - OSAKA; Akihiro ; et al.	2020-05-28
Substrate Processing Apparatus, Method Of Manufacturing Semiconductor Device, And Thermocouple Support App 20190355630 - YAMAGUCHI; Hideto ; et al.	2019-11-21
Substrate Processing Apparatus And Ceiling Heater App 20190284696 - KOSUGI; Tetsuya ; et al.	2019-09-19
Substrate processing apparatus including heating and cooling device, and ceiling part included in the same Grant 10,415,136 - Takewaki , et al. Sept	2019-09-17
Electric furnace for substrate processing apparatus Grant D860,419 - Kosugi , et al. Sept	2019-09-17
Electric furnace for substrate processing apparatus Grant D860,420 - Kosugi , et al. Sept	2019-09-17
Substrate processing apparatus, method of manufacturing semiconductor device, and thermocouple support Grant 10,418,293 - Yamaguchi , et al. Sept	2019-09-17
Substrate processing apparatus, heating apparatus, ceiling heat insulator, and method of manufacturing semiconductor device Grant 10,340,151 - Kosugi , et al.	2019-07-02
Cooling Unit, Heat Insulating Structure, And Substrate Processing Apparatus App 20190080941 - KOSUGI; Tetsuya ; et al.	2019-03-14
Substrate processing apparatus, and thermocouple Grant 10,228,291 - Osaka , et al.	2019-03-12
Substrate Processing Apparatus And Substrate Retainer App 20190024232 - KOSUGI; Tetsuya ; et al.	2019-01-24
Substrate Processing Apparatus, And Thermocouple App 20180328790 - OSAKA; Akihiro ; et al.	2018-11-15
Ceiling heater for substrate processing apparatus Grant D826,185 - Kosugi , et al. August 21, 2	2018-08-21
Air flow controller for heater of substrate processing apparatus Grant D825,501 - Yamaguchi , et al. August 14, 2	2018-08-14
Heater for substrate processing apparatus Grant D825,502 - Kosugi , et al. August 14, 2	2018-08-14
Heater of substrate processing apparatus Grant D824,440 - Takewaki , et al. July 31, 2	2018-07-31
Heater of substrate processing apparatus Grant D823,363 - Takewaki , et al. July 17, 2	2018-07-17
Protector tube for thermocouple Grant D819,463 - Akao , et al. June 5, 2	2018-06-05
Protector tube for thermocouple Grant D818,850 - Akao , et al. May 29, 2	2018-05-29
Substrate Processing Apparatus, Method Of Manufacturing Semiconductor Device, And Thermocouple Support App 20180040520 - YAMAGUCHI; Hideto ; et al.	2018-02-08
Thermometry tool for substrate processing apparatus Grant D803,075 - Akao , et al. November 21, 2	2017-11-21
Heater supporting device Grant 9,779,970 - Kosugi , et al. October 3, 2	2017-10-03
Substrate processing apparatus, method of manufacturing semiconductor device and method of processing substrate Grant 9,695,511 - Murata , et al. July 4, 2	2017-07-04
Insulation structure and method of manufacturing semiconductor device Grant 9,587,884 - Kosugi , et al. March 7, 2	2017-03-07
Substrate Processing Apparatus And Ceiling Part App 20160376701 - TAKEWAKI; Motoya ; et al.	2016-12-29
Substrate processing apparatus and heating equipment Grant 9,460,946 - Murata , et al. October 4, 2	2016-10-04
Method of manufacturing semiconductor device using meander-shaped heating element Grant 9,449,849 - Murata , et al. September 20, 2	2016-09-20
Substrate Processing Apparatus, And Thermocouple App 20160245704 - OSAKA; Akihiro ; et al.	2016-08-25
Temperature detecting apparatus, substrate processing apparatus and method of manufacturing semiconductor device Grant 9,269,638 - Kosugi , et al. February 23, 2	2016-02-23
Substrate Processing Apparatus, Substrate Processing Method, Semiconductor Device Manufacturing Method, And Control Program App 20150370245 - SUGISHITA; Masashi ; et al.	2015-12-24
Substrate Processing Apparatus, Heating Apparatus, Ceiling Heat Insulator, And Method Of Manufacturing Semiconductor Device App 20150221532 - KOSUGI; Tetsuya ; et al.	2015-08-06
Heating device, substrate processing apparatus, and method of manufacturing semiconductor device Grant 9,064,912 - Murata , et al. June 23, 2	2015-06-23
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Method of Processing Substrate App 20150093909 - MURATA; Hitoshi ; et al.	2015-04-02
Temperature Detecting Apparatus, Substrate Processing Apparatus And Method Of Manufacturing Semiconductor Device App 20140342474 - KOSUGI; Tetsuya ; et al.	2014-11-20
Method Of Manufacturing Semiconductor Device App 20140322926 - Murata; Hitoshi ; et al.	2014-10-30
Heating device having a meander-shaped heating element with an insulating body accomodating the same, and the substrate processing apparatus including the same Grant 8,847,124 - Murata , et al. September 30, 2	2014-09-30
Insulation Structure And Method Of Manufacturing Semiconductor Device App 20140287375 - KOSUGI; Tetsuya ; et al.	2014-09-25
Temperature detecting apparatus, substrate processing apparatus and method of manufacturing semiconductor device Grant 8,822,240 - Kosugi , et al. September 2, 2	2014-09-02
Substrate Processing Apparatus, Method Of Manufacturing Semiconductor Device, And Thermocouple Support App 20140120636 - YAMAGUCHI; Hideto ; et al.	2014-05-01
Substrate processing apparatus, method of manufacturing semiconductor device, and ceiling insulating part Grant 8,535,444 - Murata , et al. September 17, 2	2013-09-17
Temperature Detecting Apparatus, Substrate Processing Apparatus And Method Of Manufacturing Semiconductor Device App 20130017628 - KOSUGI; Tetsuya ; et al.	2013-01-17
Substrate Processing Apparatus And Heating Equipment App 20120006506 - MURATA; Hitoshi ; et al.	2012-01-12
Heater Supporting Device App 20110281226 - KOSUGI; Tetsuya ; et al.	2011-11-17
Heating Device, Substrate Processing Apparatus, And Method Of Manufacturing Semiconductor Device App 20110021039 - MURATA; Hitoshi ; et al.	2011-01-27
Heating Device, Substrate Processing Apparatus, And Method Of Manufacturing Semiconductor Device App 20110021038 - MURATA; Hitoshi ; et al.	2011-01-27
Substrate Processing Apparatus, Method Of Manufacturing Semiconductor Device, And Ceiling Insulating Part App 20090209113 - MURATA; Hitoshi ; et al.	2009-08-20

uspto.report is an independent third-party trademark research tool that is not affiliated, endorsed, or sponsored by the United States Patent and Trademark Office (USPTO) or any other governmental organization. The information provided by uspto.report is based on publicly available data at the time of writing and is intended for informational purposes only.

While we strive to provide accurate and up-to-date information, we do not guarantee the accuracy, completeness, reliability, or suitability of the information displayed on this site. The use of this site is at your own risk. Any reliance you place on such information is therefore strictly at your own risk.

All official trademark data, including owner information, should be verified by visiting the official USPTO website at www.uspto.gov. This site is not intended to replace professional legal advice and should not be used as a substitute for consulting with a legal professional who is knowledgeable about trademark law.