Patent | Date |
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Perpendicular spin transfer torque memory (pSTTM) devices with enhanced stability and method to form same Grant 11,404,630 - Rahman , et al. August 2, 2 | 2022-08-02 |
Perpendicular STTM multi-layer insert free layer Grant 11,295,884 - Oguz , et al. April 5, 2 | 2022-04-05 |
Perpendicular Sttm Multi-layer Insert Free Layer App 20210296040 - OGUZ; KAAN ;   et al. | 2021-09-23 |
Gate Electrode Having A Capping Layer App 20210265482 - DEWEY; Gilbert ;   et al. | 2021-08-26 |
Gate Electrode Having A Capping Layer App 20210242325 - DEWEY; Gilbert ;   et al. | 2021-08-05 |
High stability free layer for perpendicular spin torque transfer memory Grant 11,031,545 - Oguz , et al. June 8, 2 | 2021-06-08 |
Gate electrode having a capping layer Grant 11,031,482 - Dewey , et al. June 8, 2 | 2021-06-08 |
Method For Fabricating Transistor With Thinned Channel App 20210135007 - Brask; Justin K. ;   et al. | 2021-05-06 |
Perpendicular STTM free layer including protective cap Grant 10,950,660 - Oguz , et al. March 16, 2 | 2021-03-16 |
Method for fabricating transistor with thinned channel Grant 10,937,907 - Brask , et al. March 2, 2 | 2021-03-02 |
Approaches for strain engineering of perpendicular magnetic tunnel junctions (pMTJs) and the resulting structures Grant 10,868,233 - Ouellette , et al. December 15, 2 | 2020-12-15 |
PSTTM device with multi-layered filter stack Grant 10,847,714 - Oguz , et al. November 24, 2 | 2020-11-24 |
Perpendicular magnetic memory with symmetric fixed layers Grant 10,832,749 - Kuo , et al. November 10, 2 | 2020-11-10 |
Low stray field magnetic memory Grant 10,832,847 - Doyle , et al. November 10, 2 | 2020-11-10 |
Device, system and method for improved magnetic anisotropy of a magnetic tunnel junction Grant 10,804,460 - Rahman , et al. October 13, 2 | 2020-10-13 |
Gate Electrode Having A Capping Layer App 20200295153 - DEWEY; Gilbert ;   et al. | 2020-09-17 |
Perpendicular spin transfer torque memory (PSTTM) devices with enhanced perpendicular anisotropy and methods to form same Grant 10,770,651 - Rahman , et al. Sep | 2020-09-08 |
Ferromagnetic resonance testing of buried magnetic layers of whole wafer Grant 10,732,217 - O'Brien , et al. | 2020-08-04 |
Gate electrode having a capping layer Grant 10,707,319 - Dewey , et al. | 2020-07-07 |
Techniques for forming spin-transfer torque memory having a dot-contacted free magnetic layer Grant 10,707,409 - Kuo , et al. | 2020-07-07 |
Strained perpendicular magnetic tunnel junction devices Grant 10,636,960 - Madras , et al. | 2020-04-28 |
Spin-transfer torque memory (STTM) devices having magnetic contacts Grant 10,580,973 - Doyle , et al. | 2020-03-03 |
Spin transfer torque memory (STTM), methods of forming the same using volatile compound forming elements, and devices including the same Grant 10,580,975 - Doczy , et al. | 2020-03-03 |
PSTTM device with free magnetic layers coupled through a metal layer having high temperature stability Grant 10,580,970 - Oguz , et al. | 2020-03-03 |
Low Stray Field Magnetic Memory App 20200051724 - Doyle; Brian S. ;   et al. | 2020-02-13 |
Texture breaking layer to decouple bottom electrode from PMTJ device Grant 10,559,744 - Maertz , et al. Feb | 2020-02-11 |
Perpendicular Magnetic Memory With Symmetric Fixed Layers App 20200043536 - Kuo; Charles C. ;   et al. | 2020-02-06 |
Memory cells with enhanced tunneling magnetoresistance ratio, memory devices and systems including the same Grant 10,541,014 - Doyle , et al. Ja | 2020-01-21 |
Perpendicular Spin Transfer Torque Memory (psttm) Devices With Enhanced Perpendicular Anisotropy And Methods To Form Same App 20190378972 - RAHMAN; MD Tofizur ;   et al. | 2019-12-12 |
Unipolar current switching in perpendicular magnetic tunnel junction (pMTJ) devices through reduced bipolar coercivity Grant 10,504,962 - Kuo , et al. Dec | 2019-12-10 |
Method For Fabricating Transistor With Thinned Channel App 20190371940 - Brask; Justin K. ;   et al. | 2019-12-05 |
Perpendicular Spin Transfer Torque Memory (psttm) Devices With Enhanced Stability And Method To Form Same App 20190334079 - RAHMAN; MD Tofizur ;   et al. | 2019-10-31 |
Psttm Device With Multi-layered Filter Stack App 20190288190 - Oguz; Kaan ;   et al. | 2019-09-19 |
Interconnect capping process for integration of MRAM devices and the resulting structures Grant 10,418,415 - Wiegand , et al. Sept | 2019-09-17 |
Electrical contacts for magnetoresistive random access memory devices Grant 10,411,068 - Wiegand , et al. Sept | 2019-09-10 |
Magnetic diffusion barriers and filter in PSTTM MTJ construction Grant 10,403,811 - O'Brien , et al. Sep | 2019-09-03 |
Amorphous seed layer for improved stability in perpendicular STTM stack Grant 10,395,707 - Doczy , et al. A | 2019-08-27 |
Spin transfer torque memory (STTM), methods of forming the same using a non-conformal insulator, and devices including the same Grant 10,381,556 - Doczy , et al. A | 2019-08-13 |
Random number generator Grant 10,365,894 - Kuo , et al. July 30, 2 | 2019-07-30 |
Method for fabricating transistor with thinned channel Grant 10,367,093 - Brask , et al. July 30, 2 | 2019-07-30 |
High Stability Free Layer For Perpendicular Spin Torque Transfer Memory App 20190221734 - Oguz; Kaan ;   et al. | 2019-07-18 |
PSTTM device with bottom electrode interface material Grant 10,340,445 - Oguz , et al. | 2019-07-02 |
Perpendicular magnetic memory with filament conduction path Grant 10,340,443 - Doyle , et al. | 2019-07-02 |
Perpendicular Sttm Free Layer Including Protective Cap App 20190198567 - Oguz; Kaan ;   et al. | 2019-06-27 |
PSTTM device with multi-layered filter stack Grant 10,326,075 - Oguz , et al. | 2019-06-18 |
Device, System And Method For Improved Magnetic Anisotropy Of A Magnetic Tunnel Junction App 20190140166 - RAHMAN; MD Tofizur ;   et al. | 2019-05-09 |
Layer Transferred Ferroelectric Memory Devices App 20190115353 - O'Brien; Kevin P. ;   et al. | 2019-04-18 |
Spin-transfer Torque Memory (sttm) Devices Having Magnetic Contacts App 20190109281 - DOYLE; BRIAN S. ;   et al. | 2019-04-11 |
Ferromagnetic Resonance Testing Of Buried Magnetic Layers Of Whole Wafer App 20190049514 - O'BRIEN; KEVIN P. ;   et al. | 2019-02-14 |
Texture Breaking Layer To Decouple Bottom Electrode From Pmtj Device App 20190036010 - MAERTZ; Brian ;   et al. | 2019-01-31 |
Interconnect Capping Process For Integration Of Mram Devices And The Resulting Structures App 20190027537 - WIEGAND; Christopher J. ;   et al. | 2019-01-24 |
Electrical Contacts For Magnetoresistive Random Access Memory Devices App 20190027536 - Wiegand; Christopher J. ;   et al. | 2019-01-24 |
Approaches For Strain Engineering Of Perpendicular Magnetic Tunnel Junctions (pmtjs) And The Resulting Structures App 20190027679 - OUELLETTE; Daniel G. ;   et al. | 2019-01-24 |
Unipolar Current Switching In Perpendicular Magnetic Tunnel Junction (pmtj) Devices Through Reduced Bipolar Coercivity App 20190006417 - KUO; Charles C. ;   et al. | 2019-01-03 |
Spin-transfer torque memory (STTM) devices having magnetic contacts Grant 10,158,065 - Doyle , et al. Dec | 2018-12-18 |
Memory Cells With Enhanced Tunneling Magnetoresistance Ratio, Memory Devices And Systems Including The Same App 20180350418 - Doyle; Brian S. ;   et al. | 2018-12-06 |
Extreme high mobility CMOS logic Grant 10,141,437 - Datta , et al. Nov | 2018-11-27 |
Perpendicular Magnetic Memory With Filament Conduction Path App 20180323367 - Doyle; Brian S. ;   et al. | 2018-11-08 |
Field effect transistor with narrow bandgap source and drain regions and method of fabrication Grant 10,121,897 - Chau , et al. November 6, 2 | 2018-11-06 |
Strained Perpendicular Magnetic Tunnel Junction Devices App 20180287050 - Madras; Prashanth P. ;   et al. | 2018-10-04 |
Spin Transfer Torque Memory (sttm), Methods Of Forming The Same Using Volatile Compound Forming Elements, And Devices Including The Same App 20180248116 - DOCZY; Mark L. ;   et al. | 2018-08-30 |
Psttm Device With Free Magnetic Layers Coupled Through A Metal Layer Having High Temperature Stability App 20180248114 - Oguz; Kaan ;   et al. | 2018-08-30 |
Psttm Device With Bottom Electrode Interface Material App 20180248115 - Oguz; Kaan ;   et al. | 2018-08-30 |
Spin Transfer Torque Memory (sttm), Methods Of Forming The Same Using A Non-conformal Insulator, And Devices Including The Same App 20180240969 - DOCZY; MARK L. ;   et al. | 2018-08-23 |
Psttm Device With Multi-layered Filter Stack App 20180240970 - Oguz; Kaan ;   et al. | 2018-08-23 |
Techniques For Forming Spin-transfer Torque Memory Having A Dot-contacted Free Magnetic Layer App 20180166625 - Kuo; Charles C. ;   et al. | 2018-06-14 |
Random Number Generator App 20180165065 - KUO; Charles C. ;   et al. | 2018-06-14 |
Method For Fabricating Transistor With Thinned Channel App 20180047846 - Brask; Justin K. ;   et al. | 2018-02-15 |
Perpendicular spin transfer torque memory (STTM) device with enhanced stability and method to form same Grant 9,882,123 - Doyle , et al. January 30, 2 | 2018-01-30 |
Techniques for forming spin-transfer torque memory having a dot-contacted free magnetic layer Grant 9,882,121 - Kuo , et al. January 30, 2 | 2018-01-30 |
Amorhpous Seed Layer For Improved Stability In Perpendicular Sttm Stack App 20170345476 - DOCZY; Mark L. ;   et al. | 2017-11-30 |
Field Effect Transistor With Narrow Bandgap Source And Drain Regions And Method Of Fabrication App 20170323972 - CHAU; Robert S. ;   et al. | 2017-11-09 |
Method for fabricating transistor with thinned channel Grant 9,806,195 - Brask , et al. October 31, 2 | 2017-10-31 |
Extreme High Mobility Cmos Logic App 20170309734 - DATTA; Suman ;   et al. | 2017-10-26 |
Techniques for forming spin-transfer torque memory (STTM) elements having annular contacts Grant 9,779,794 - Doyle , et al. October 3, 2 | 2017-10-03 |
Magnetic Diffusion Barriers And Filter In Psttm Mtj Construction App 20170271576 - O'BRIEN; Kevin P. ;   et al. | 2017-09-21 |
Field effect transistor with narrow bandgap source and drain regions and method of fabrication Grant 9,748,391 - Chau , et al. August 29, 2 | 2017-08-29 |
Configurations And Techniques To Increase Interfacial Anisotropy Of Magnetic Tunnel Junctions App 20170200884 - OGUZ; Kaan ;   et al. | 2017-07-13 |
Extreme high mobility CMOS logic Grant 9,691,856 - Datta , et al. June 27, 2 | 2017-06-27 |
Field Effect Transistor With Narrow Bandgap Source And Drain Regions And Method Of Fabrication App 20170170318 - Chau; Robert S. ;   et al. | 2017-06-15 |
Field effect transistor with narrow bandgap source and drain regions and method of fabrication Grant 9,614,083 - Chau , et al. April 4, 2 | 2017-04-04 |
Spin-transfer Torque Memory (sttm) Devices Having Magnetic Contacts App 20170092846 - DOYLE; BRIAN S. ;   et al. | 2017-03-30 |
Perpendicular Spin Transfer Torque Memory (sttm) Device With Enhanced Stability And Method To Form Same App 20170040530 - Doyle; Brian S. ;   et al. | 2017-02-09 |
Extreme high mobility CMOS logic Grant 9,548,363 - Datta , et al. January 17, 2 | 2017-01-17 |
Perpendicular MTJ stacks with magnetic anisotrophy enhancing layer and crystallization barrier layer Grant 9,548,441 - Oguz , et al. January 17, 2 | 2017-01-17 |
Techniques For Forming Spin-transfer Torque Memory Having A Dot-contacted Free Magnetic Layer App 20160359101 - KUO; CHARLES C. ;   et al. | 2016-12-08 |
Techniques For Forming Spin-transfer Torque Memory (sttm) Elements Having Annular Contacts App 20160351238 - DOYLE; BRIAN S. ;   et al. | 2016-12-01 |
Perpendicular spin transfer torque memory (STTM) device having offset cells and method to form same Grant 9,496,486 - Doyle , et al. November 15, 2 | 2016-11-15 |
Perpendicular spin transfer torque memory (STTM) device with enhanced stability and method to form same Grant 9,478,734 - Doyle , et al. October 25, 2 | 2016-10-25 |
Field Effect Transistor With Narrow Bandgap Source And Drain Regions And Method Of Fabrication App 20160284847 - Chau; Robert S. ;   et al. | 2016-09-29 |
Method For Fabricating Transistor With Thinned Channel App 20160197185 - Brask; Justin K. ;   et al. | 2016-07-07 |
Gate Electrode Having A Capping Layer App 20160197159 - Dewey; Gilbert ;   et al. | 2016-07-07 |
Field effect transistor with narrow bandgap source and drain regions and method of fabrication Grant 9,368,583 - Chau , et al. June 14, 2 | 2016-06-14 |
Method for fabricating transistor with thinned channel Grant 9,337,307 - Brask , et al. May 10, 2 | 2016-05-10 |
Extreme High Mobility Cmos Logic App 20160111423 - Datta; Suman ;   et al. | 2016-04-21 |
Gate electrode having a capping layer Grant 9,287,380 - Dewey , et al. March 15, 2 | 2016-03-15 |
Decreased switching current in spin-transfer torque memory Grant 9,214,215 - Karpov , et al. December 15, 2 | 2015-12-15 |
Perpendicular Spin Transfer Torque Memory (sttm) Device Having Offset Cells And Method To Form Same App 20150333252 - Doyle; Brian S. ;   et al. | 2015-11-19 |
Perpendicular Spin Transfer Torque Memory (sttm) Device With Enhanced Stability And Method To Form Same App 20150255711 - Doyle; Brian S. ;   et al. | 2015-09-10 |
Decreased Switching Current in Spin-Transfer Torque Memory App 20150243336 - Karpov; Elijah V. ;   et al. | 2015-08-27 |
Field Effect Transistor With Narrow Bandgap Source And Drain Regions And Method Of Fabrication App 20150236100 - Chau; Robert S. ;   et al. | 2015-08-20 |
Perpendicular spin transfer torque memory (STTM) device having offset cells and method to form same Grant 9,105,839 - Doyle , et al. August 11, 2 | 2015-08-11 |
Perpendicular Mtj Stacks With Magnetic Anisotrophy Enhancing Layer And Crystallization Barrier Layer App 20150194596 - OGUZ; Kaan ;   et al. | 2015-07-09 |
Perpendicular spin transfer torque memory (STTM) device with enhanced stability and method to form same Grant 9,054,302 - Doyle , et al. June 9, 2 | 2015-06-09 |
Field effect transistor with narrow bandgap source and drain regions and method of fabrication Grant 9,048,314 - Chau , et al. June 2, 2 | 2015-06-02 |
Perpendicular Spin Transfer Torque Memory (STTM) Device with Coupled Free Magnetic Layers App 20150091110 - Kuo; Charles C. ;   et al. | 2015-04-02 |
Perpendicular MTJ stacks with magnetic anisotropy enhancing layer and crystallization barrier layer Grant 8,980,650 - Oguz , et al. March 17, 2 | 2015-03-17 |
Decreased switching current in spin-transfer torque memory Grant 8,913,422 - Karpov , et al. December 16, 2 | 2014-12-16 |
Field Effect Transistor With Narrow Bandgap Source And Drain Regions And Method Of Fabrication App 20140361363 - Chau; Robert S. ;   et al. | 2014-12-11 |
Perpendicular Mtj Stacks With Magnetic Anisotropy Enhancing Layer And Crystallization Barrier Layer App 20140349415 - Oguz; Kaan ;   et al. | 2014-11-27 |
Perpendicular Spin Transfer Torque Memory (sttm) Device Having Offset Cells And Method To Form Same App 20140329337 - Doyle; Brian S. ;   et al. | 2014-11-06 |
Perpendicular Spin Transfer Torque Memory (sttm) Device With Enhanced Stability And Method To Form Same App 20140308760 - Doyle; Brian S. ;   et al. | 2014-10-16 |
Extreme High Mobility Cmos Logic App 20140291615 - Datta; Suman ;   et al. | 2014-10-02 |
Perpendicular MTJ stacks with magnetic anisotropy enhancing layer and crystallization barrier layer Grant 8,836,056 - Oguz , et al. September 16, 2 | 2014-09-16 |
Field effect transistor with narrow bandgap source and drain regions and method of fabrication Grant 8,816,394 - Chau , et al. August 26, 2 | 2014-08-26 |
Gate electrode having a capping layer Grant 8,803,255 - Dewey , et al. August 12, 2 | 2014-08-12 |
Extreme high mobility CMOS logic Grant 8,802,517 - Datta , et al. August 12, 2 | 2014-08-12 |
Perpendicular spin transfer torque memory (STTM) device with enhanced stability and method to form same Grant 8,796,797 - Doyle , et al. August 5, 2 | 2014-08-05 |
Perpendicular spin transfer torque memory (STTM) device having offset cells and method to form same Grant 8,786,040 - Doyle , et al. July 22, 2 | 2014-07-22 |
Perpendicular Spin Transfer Torque Memory (sttm) Device Having Offset Cells And Method To Form Same App 20140175583 - Doyle; Brian S. ;   et al. | 2014-06-26 |
Perpendicular Spin Transfer Torque Memory (sttm) Device With Enhanced Stability And Method To Form Same App 20140175575 - Doyle; Brian S. ;   et al. | 2014-06-26 |
Gate Electrode Having A Capping Layer App 20140103458 - Dewey; Gilbert ;   et al. | 2014-04-17 |
Field Effect Transistor With Narrow Bandgap Source And Drain Regions And Method Of Fabrication App 20140103456 - Chau; Robert S. ;   et al. | 2014-04-17 |
Decreased Switching Current In Spin-transfer Torque Memory App 20140092677 - Karpov; Elijah V. ;   et al. | 2014-04-03 |
Spin Transfer Torque Memory (sttm) Device With Topographically Smooth Electrode And Method To Form Same App 20140084399 - Doczy; Mark L. ;   et al. | 2014-03-27 |
Perpendicular Mtj Stacks With Magnetic Anisotropy Enhancing Layer And Crystallization Barrier Layer App 20140084398 - OGUZ; Kaan ;   et al. | 2014-03-27 |
Field effect transistor with narrow bandgap source and drain regions and method of fabrication Grant 8,664,694 - Chau , et al. March 4, 2 | 2014-03-04 |
Extreme High Mobility Cmos Logic App 20130328015 - Datta; Suman ;   et al. | 2013-12-12 |
Extreme high mobility CMOS logic Grant 8,518,768 - Datta , et al. August 27, 2 | 2013-08-27 |
Gate Electrode Having A Capping Layer App 20130161766 - Dewey; Gilbert ;   et al. | 2013-06-27 |
Field Effect Transistor With Narrow Bandgap Source And Drain Regions And Method Of Fabrication App 20130146945 - Chau; Robert S. ;   et al. | 2013-06-13 |
Gate electrode having a capping layer Grant 8,390,082 - Dewey , et al. March 5, 2 | 2013-03-05 |
Field effect transistor with narrow bandgap source and drain regions and method of fabrication Grant 8,368,135 - Chau , et al. February 5, 2 | 2013-02-05 |
Field Effect Transistor With Narrow Bandgap Source And Drain Regions And Method Of Fabrication App 20120205729 - Chau; Robert S. ;   et al. | 2012-08-16 |
Extreme High Mobility Cmos Logic App 20120199813 - Datta; Suman ;   et al. | 2012-08-09 |
Process for integrating planar and non-planar CMOS transistors on a bulk substrate and article made thereby Grant 8,193,567 - Kavalieros , et al. June 5, 2 | 2012-06-05 |
Extreme high mobility CMOS logic Grant 8,183,556 - May 22, 2 | 2012-05-22 |
Field effect transistor with narrow bandgap source and drain regions and method of fabrication Grant 8,183,646 - Chau , et al. May 22, 2 | 2012-05-22 |
Complementary metal oxide semiconductor integrated circuit using raised source drain and replacement metal gate Grant 8,148,786 - Kavalieros , et al. April 3, 2 | 2012-04-03 |
Inducing strain in the channels of metal gate transistors Grant 8,129,795 - Datta , et al. March 6, 2 | 2012-03-06 |
Forming integrated circuits with replacement metal gate electrodes Grant 8,119,508 - Kavalieros , et al. February 21, 2 | 2012-02-21 |
Methods for fabricating PMOS metal gate structures Grant 8,021,940 - Metz , et al. September 20, 2 | 2011-09-20 |
Dielectric interface for group III-V semiconductor device Grant 7,989,280 - Brask , et al. August 2, 2 | 2011-08-02 |
Gate Electrode Having A Capping Layer App 20110156174 - Dewey; Gilbert ;   et al. | 2011-06-30 |
Forming abrupt source drain metal gate transistors Grant 7,951,673 - Lindert , et al. May 31, 2 | 2011-05-31 |
Field Effect Transistor With Narrow Bandgap Source And Drain Regions And Method Of Fabrication App 20110121393 - Chau; Robert S. ;   et al. | 2011-05-26 |
Inducing Strain in the Channels of Metal Gate Transistors App 20110115028 - Datta; Suman ;   et al. | 2011-05-19 |
Gate electrode having a capping layer Grant 7,915,694 - Dewey , et al. March 29, 2 | 2011-03-29 |
Method For Fabricating Transistor With Thinned Channel App 20110062520 - Brask; Justin K. ;   et al. | 2011-03-17 |
Inducing strain in the channels of metal gate transistors Grant 7,902,058 - Datta , et al. March 8, 2 | 2011-03-08 |
Block contact architectures for nanoscale channel transistors Grant 7,898,041 - Radosavljevic , et al. March 1, 2 | 2011-03-01 |
Field effect transistor with narrow bandgap source and drain regions and method of fabrication Grant 7,893,506 - Chau , et al. February 22, 2 | 2011-02-22 |
CMOS device with metal and silicide gate electrodes and a method for making it Grant 7,883,951 - Brask , et al. February 8, 2 | 2011-02-08 |
Field effect transistor with metal source/drain regions Grant 7,879,675 - Radosavljevic , et al. February 1, 2 | 2011-02-01 |
Semiconductor device with a high-k gate dielectric and a metal gate electrode Grant 7,875,937 - Metz , et al. January 25, 2 | 2011-01-25 |
Method for fabricating transistor with thinned channel Grant 7,858,481 - Brask , et al. December 28, 2 | 2010-12-28 |
Field Effect Transistor With Narrow Bandgap Source And Drain Regions And Method Of Fabrication App 20100295129 - Chau; Robert S. ;   et al. | 2010-11-25 |
Field effect transistor with narrow bandgap source and drain regions and method of fabrication Grant 7,825,481 - Chau , et al. November 2, 2 | 2010-11-02 |
Forming Integrated Circuits With Replacement Metal Gate Electrodes App 20100219456 - Kavalieros; Jack ;   et al. | 2010-09-02 |
Method for making a semiconductor device having a high-k gate dielectric layer and a metal gate electrode Grant 7,785,958 - Doczy , et al. August 31, 2 | 2010-08-31 |
Highly-selective metal etchants Grant 7,741,230 - Rachmady , et al. June 22, 2 | 2010-06-22 |
Forming Abrupt Source Drain Metal Gate Transistors App 20100151669 - Lindert; Nick ;   et al. | 2010-06-17 |
Lateral undercut of metal gate in SOI device Grant 7,736,956 - Datta , et al. June 15, 2 | 2010-06-15 |
Forming integrated circuits with replacement metal gate electrodes Grant 7,718,479 - Kavalieros , et al. May 18, 2 | 2010-05-18 |
Method for making a semiconductor device having a high-k gate dielectric Grant 7,709,909 - Doczy , et al. May 4, 2 | 2010-05-04 |
Method of forming abrupt source drain metal gate transistors Grant 7,704,833 - Lindert , et al. April 27, 2 | 2010-04-27 |
Method for making a semiconductor device having a high-k dielectric layer and a metal gate electrode Grant 7,671,471 - Brask , et al. March 2, 2 | 2010-03-02 |
Field Effect Transistor With Metal Source/drain Regions App 20090325350 - Radosavljevic; Marko ;   et al. | 2009-12-31 |
Cmos Device With Metal And Silicide Gate Electrodes And A Method For Making It App 20090280608 - Brask; Justin K. ;   et al. | 2009-11-12 |
Forming high-k dielectric layers on smooth substrates Grant 7,615,441 - Brask , et al. November 10, 2 | 2009-11-10 |
Complementary Metal Oxide Semiconductor Integrated Circuit Using Raised Source Drain and Replacement Metal Gate App 20090261391 - KAVALIEROS; Jack ;   et al. | 2009-10-22 |
Removing a high-k gate dielectric Grant 7,575,991 - Doczy , et al. August 18, 2 | 2009-08-18 |
Complementary metal oxide semiconductor integrated circuit using raised source drain and replacement metal gate Grant 7,569,443 - Kavalieros , et al. August 4, 2 | 2009-08-04 |
Metal Gate Device With Reduced Oxidation Of A High-k Gate Dielectric App 20090179282 - Doyle; Brian S. ;   et al. | 2009-07-16 |
Methods For Fabricating Pmos Metal Gate Structures App 20090166769 - Metz; Matthew V. ;   et al. | 2009-07-02 |
Reducing Ambipolar Conduction in Carbon Nanotube Transistors App 20090159872 - Datta; Suman ;   et al. | 2009-06-25 |
Field Effect Transistor With Narrow Bandgap Source And Drain Regions And Method Of Fabrication App 20090142897 - Chau; Robert S. ;   et al. | 2009-06-04 |
Gate Electrode Having A Capping Layer App 20090121297 - Dewey; Gilbert ;   et al. | 2009-05-14 |
Gate electrode having a capping layer Grant 7,524,727 - Dewey , et al. April 28, 2 | 2009-04-28 |
Dielectric Interface For Group Iii-v Semiconductor Device App 20090095984 - Brask; Justin K. ;   et al. | 2009-04-16 |
Field effect transistor with narrow bandgap source and drain regions and method of fabrication Grant 7,518,196 - Chau , et al. April 14, 2 | 2009-04-14 |
Process For Integrating Planar And Non-planar Cmos Transistors On A Bulk Substrate And Article Made Thereby App 20090090976 - Kavalieros; Jack T. ;   et al. | 2009-04-09 |
Complementary metal oxide semiconductor integrated circuit using uniaxial compressive stress and biaxial compressive stress App 20090075445 - Kavalieros; Jack ;   et al. | 2009-03-19 |
Metal gate device with reduced oxidation of a high-k gate dielectric Grant 7,501,336 - Doyle , et al. March 10, 2 | 2009-03-10 |
Method for making a semiconductor device having a high-k gate dielectric layer and a metal gate electrode App 20090042405 - Doczy; Mark L. ;   et al. | 2009-02-12 |
Semiconductor device with a high-k gate dielectric and a metal gate electrode App 20090039446 - Metz; Matthew V. ;   et al. | 2009-02-12 |
Dielectric interface for group III-V semiconductor device Grant 7,485,503 - Brask , et al. February 3, 2 | 2009-02-03 |
Method For Making A Semiconductor Device Having A High-k Gate Dielectric App 20090020836 - Doczy; Mark L. ;   et al. | 2009-01-22 |
Process for integrating planar and non-planar CMOS transistors on a bulk substrate and article made thereby Grant 7,479,421 - Kavalieros , et al. January 20, 2 | 2009-01-20 |
Complementary metal oxide semiconductor integrated circuit using uniaxial compressive stress and biaxial compressive stress Grant 7,470,972 - Kavalieros , et al. December 30, 2 | 2008-12-30 |
Semiconductor device with a high-k gate dielectric and a metal gate electrode Grant 7,449,756 - Metz , et al. November 11, 2 | 2008-11-11 |
Method for making a semiconductor device having a high-k gate dielectric Grant 7,442,983 - Doczy , et al. October 28, 2 | 2008-10-28 |
Block Contact Architectures for Nanoscale Channel Transistors App 20080258207 - Radosavljevic; Marko ;   et al. | 2008-10-23 |
Method for fabricating metal gate structures Grant 7,439,571 - Doczy , et al. October 21, 2 | 2008-10-21 |
Sb-based CMOS devices Grant 7,429,747 - Hudait , et al. September 30, 2 | 2008-09-30 |
Reducing reactions between polysilicon gate electrodes and high dielectric constant gate dielectrics Grant 7,425,490 - Kavalieros , et al. September 16, 2 | 2008-09-16 |
Uniform silicide metal on epitaxially grown source and drain regions of three-dimensional transistors Grant 7,425,500 - Metz , et al. September 16, 2 | 2008-09-16 |
Facilitating removal of sacrificial layers via implantation to form replacement metal gates Grant 7,422,936 - Barns , et al. September 9, 2 | 2008-09-09 |
Reducing oxidation under a high K gate dielectric App 20080211033 - Turkot; Robert B. ;   et al. | 2008-09-04 |
Lateral undercut of metal gate in SOI device App 20080188041 - Datta; Suman ;   et al. | 2008-08-07 |
Lateral undercut of metal gate in SOI device Grant 7,402,875 - Datta , et al. July 22, 2 | 2008-07-22 |
Forming field effect transistors from conductors Grant 7,390,947 - Majumdar , et al. June 24, 2 | 2008-06-24 |
Method for making a semiconductor device having a high-k gate dielectric layer and a metal gate electrode Grant 7,390,709 - Doczy , et al. June 24, 2 | 2008-06-24 |
Reducing oxidation under a high K gate dielectric Grant 7,387,927 - Turkot, Jr. , et al. June 17, 2 | 2008-06-17 |
Method For Making A Semiconductor Device Having A High-k Dielectric Layer And A Metal Gate Electrode App 20080135952 - Brask; Justin K. ;   et al. | 2008-06-12 |
Method for making a semiconductor device having a high-k gate dielectric Grant 7,384,880 - Brask , et al. June 10, 2 | 2008-06-10 |
Method for making a semiconductor device with a high-k gate dielectric and a metal gate electrode Grant 7,381,608 - Brask , et al. June 3, 2 | 2008-06-03 |
Cmos Device With Metal And Silicide Gate Electrodes And A Method For Making It App 20080124857 - Brask; Justin K. ;   et al. | 2008-05-29 |
Sb-based Cmos Devices App 20080116485 - Hudait; Mantu K. ;   et al. | 2008-05-22 |
Forming high-K dielectric layers on smooth substrates App 20080087985 - Brask; Justin K. ;   et al. | 2008-04-17 |
Pinning layer for low resistivity N-type source drain ohmic contacts Grant 7,355,254 - Datta , et al. April 8, 2 | 2008-04-08 |
Method for making semiconductor device having a high-k gate dielectric layer and a metal gate electrode Grant 7,355,281 - Brask , et al. April 8, 2 | 2008-04-08 |
Highly-selective metal etchants App 20080038924 - Rachmady; Willy ;   et al. | 2008-02-14 |
Nonplanar transistors with metal gate electrodes Grant 7,329,913 - Brask , et al. February 12, 2 | 2008-02-12 |
Forming high-k dielectric layers on smooth substrates Grant 7,323,423 - Brask , et al. January 29, 2 | 2008-01-29 |
Pinning Layer For Low Resistivity N-type Source Drain Ohmic Contacts App 20080017891 - Datta; Suman ;   et al. | 2008-01-24 |
Method for making a semiconductor device having a high-K gate dielectric and a titanium carbide gate electrode Grant 7,317,231 - Metz , et al. January 8, 2 | 2008-01-08 |
Gate dielectric materials for group III-V enhancement mode transistors App 20080003752 - Metz; Matthew V. ;   et al. | 2008-01-03 |
Block contact architectures for nanoscale channel transistors Grant 7,279,375 - Radosavljevic , et al. October 9, 2 | 2007-10-09 |
Uniform silicide metal on epitaxially grown source and drain regions of three-dimensional transistors App 20070231984 - Metz; Matthew V. ;   et al. | 2007-10-04 |
In situ processing for ultra-thin gate oxide scaling App 20070232078 - Metz; Matthew V. ;   et al. | 2007-10-04 |
Transistor including flatband voltage control through interface dipole engineering App 20070158702 - Doczy; Mark L. ;   et al. | 2007-07-12 |
Gate electrode having a capping layer App 20070152271 - Dewey; Gilbert ;   et al. | 2007-07-05 |
Quantum dot nonvolatile transistor App 20070145468 - Majumdar; Amlan ;   et al. | 2007-06-28 |
Device With Scavenging Spacer Layer App 20070145498 - Metz; Matthew V. ;   et al. | 2007-06-28 |
Semiconductor channel on insulator structure Grant 7,235,809 - Jin , et al. June 26, 2 | 2007-06-26 |
Extreme high mobility CMOS logic App 20070138565 - Datta; Suman ;   et al. | 2007-06-21 |
Device with scavenging spacer layer Grant 7,226,831 - Metz , et al. June 5, 2 | 2007-06-05 |
Dielectric interface for group III-V semiconductor device App 20070123003 - Brask; Justin K. ;   et al. | 2007-05-31 |
Method for making a semiconductor device with a metal gate electrode that is formed on an annealed high-k gate dielectric layer Grant 7,220,635 - Brask , et al. May 22, 2 | 2007-05-22 |
Methods for integrating replacement metal gate structures Grant 7,217,611 - Kavalieros , et al. May 15, 2 | 2007-05-15 |
Replacement gate process for making a semiconductor device that includes a metal gate electrode Grant 7,208,361 - Shah , et al. April 24, 2 | 2007-04-24 |
Method of fabricating CMOS devices having a single work function gate electrode by band gap engineering and article made thereby App 20070069302 - Jin; Been-Yih ;   et al. | 2007-03-29 |
Process for integrating planar and non-planar CMOS transistors on a bulk substrate and article made thereby App 20070069293 - Kavalieros; Jack T. ;   et al. | 2007-03-29 |
Method for making a semiconductor device that includes a metal gate electrode Grant 7,183,184 - Doczy , et al. February 27, 2 | 2007-02-27 |
Lateral undercut of metal gate in SOI device App 20070040223 - Datta; Suman ;   et al. | 2007-02-22 |
Reducing gate dielectric material to form a metal gate electrode extension App 20070040227 - Datta; Suman ;   et al. | 2007-02-22 |
Planarizing a semiconductor structure to form replacement metal gates App 20070037372 - Kavalieros; Jack ;   et al. | 2007-02-15 |
Method for making a semiconductor device that includes a metal gate electrode Grant 7,176,090 - Brask , et al. February 13, 2 | 2007-02-13 |
Reducing the dielectric constant of a portion of a gate dielectric App 20070029627 - Datta; Suman ;   et al. | 2007-02-08 |
Method for making a semiconductor device having a high-k gate dielectric Grant 7,160,779 - Doczy , et al. January 9, 2 | 2007-01-09 |
Method for making a semiconductor device that includes a metal gate electrode Grant 7,160,767 - Brask , et al. January 9, 2 | 2007-01-09 |
Block contact architectures for nanoscale channel transistors App 20070001219 - Radosavljevic; Marko ;   et al. | 2007-01-04 |
Method for making a semiconductor device having a high-k gate dielectric layer and a metal gate electrode Grant 7,157,378 - Brask , et al. January 2, 2 | 2007-01-02 |
Strained field effect transistors App 20060292776 - Jin; Been-Yih ;   et al. | 2006-12-28 |
CMOS device with metal and silicide gate electrodes and a method for making it Grant 7,153,734 - Brask , et al. December 26, 2 | 2006-12-26 |
Method for making a semiconductor device having a high-k gate dielectric layer and a metal gate electrode Grant 7,153,784 - Brask , et al. December 26, 2 | 2006-12-26 |
Metal gate device with reduced oxidation of a high-k gate dielectric App 20060284271 - Doyle; Brian S. ;   et al. | 2006-12-21 |
Complementary metal oxide semiconductor integrated circuit using raised source drain and replacement metal gate App 20060286729 - Kavalieros; Jack ;   et al. | 2006-12-21 |
Method for fabricating transistor with thinned channel App 20060286755 - Brask; Justin K. ;   et al. | 2006-12-21 |
Semiconductor device with a high-k gate dielectric and a metal gate electrode App 20060278941 - Metz; Matthew V. ;   et al. | 2006-12-14 |
Semiconductor device with a high-k gate dielectric and a metal gate electrode Grant 7,148,548 - Doczy , et al. December 12, 2 | 2006-12-12 |
Reducing the dielectric constant of a portion of a gate dielectric Grant 7,148,099 - Datta , et al. December 12, 2 | 2006-12-12 |
Reducing gate dielectric material to form a metal gate electrode extension Grant 7,144,783 - Datta , et al. December 5, 2 | 2006-12-05 |
Semiconductor channel on insulator structure Grant 7,138,316 - Jin , et al. November 21, 2 | 2006-11-21 |
Planarizing a semiconductor structure to form replacement metal gates Grant 7,138,323 - Kavalieros , et al. November 21, 2 | 2006-11-21 |
Method for etching a thin metal layer Grant 7,129,182 - Brask , et al. October 31, 2 | 2006-10-31 |
Compensating for induced strain in the channels of metal gate transistors App 20060237801 - Kavalieros; Jack ;   et al. | 2006-10-26 |
Multilayer metal gate electrode Grant 7,126,199 - Doczy , et al. October 24, 2 | 2006-10-24 |
Compensating the workfunction of a metal gate transistor for abstraction by the gate dielectric layer Grant 7,125,762 - Brask , et al. October 24, 2 | 2006-10-24 |
Semiconductor device with a high-k gate dielectric and a metal gate electrode App 20060220090 - Metz; Matthew V. ;   et al. | 2006-10-05 |
Using different gate dielectrics with NMOS and PMOS transistors of a complementary metal oxide semiconductor integrated circuit App 20060214237 - Metz; Matthew V. ;   et al. | 2006-09-28 |
Field effect transistor with metal source/drain regions App 20060202266 - Radosavljevic; Marko ;   et al. | 2006-09-14 |
Complementary metal oxide semiconductor integrated circuit using uniaxial compressive stress and biaxial compressive stress App 20060205167 - Kavalieros; Jack ;   et al. | 2006-09-14 |
Nonplanar transistors with metal gate electrodes Grant 7,105,390 - Brask , et al. September 12, 2 | 2006-09-12 |
Method for making a semiconductor device having a high-k gate dielectric App 20060189156 - Doczy; Mark L. ;   et al. | 2006-08-24 |
Field effect transistor with narrow bandgap source and drain regions and method of fabrication App 20060186484 - Chau; Robert S. ;   et al. | 2006-08-24 |
Method for making a semiconductor device having a high-k gate dielectric layer and a metal gate electrode App 20060180878 - Brask; Justin K. ;   et al. | 2006-08-17 |
Method for making a semiconductor device with a metal gate electrode that is formed on an annealed high-k gate dielectric layer App 20060183277 - Brask; Justin K. ;   et al. | 2006-08-17 |
Using different gate dielectrics with NMOS and PMOS transistors of a complementary metal oxide semiconductor integrated circuit Grant 7,087,476 - Metz , et al. August 8, 2 | 2006-08-08 |
Method for making a semiconductor device having a high-k gate dielectric Grant 7,084,038 - Doczy , et al. August 1, 2 | 2006-08-01 |
Method for making a semiconductor device having a high-k gate dielectric App 20060166447 - Doczy; Mark L. ;   et al. | 2006-07-27 |
Inhibiting growth under high dielectric constant films App 20060160371 - Metz; Matthew V. ;   et al. | 2006-07-20 |
Forming field effect transistors from conductors App 20060157747 - Majumdar; Amlan ;   et al. | 2006-07-20 |
Method of fabricating a robust gate dielectric using a replacement gate flow Grant 7,078,750 - Hareland , et al. July 18, 2 | 2006-07-18 |
Method for making a semiconductor device having a high-k gate dielectric Grant 7,074,680 - Doczy , et al. July 11, 2 | 2006-07-11 |
Tailoring channel dopant profiles App 20060148150 - Kavalieros; Jack T. ;   et al. | 2006-07-06 |
Quantum well transistor using high dielectric constant dielectric layer App 20060148182 - Datta; Suman ;   et al. | 2006-07-06 |
Method for making a semiconductor device having a high-k gate dielectric and a titanium carbide gate electrode Grant 7,064,066 - Metz , et al. June 20, 2 | 2006-06-20 |
Using different gate dielectrics with NMOS and PMOS transistors of a complementary metal oxide semiconductor integrated circuit Grant 7,060,568 - Metz , et al. June 13, 2 | 2006-06-13 |
Method for making a semiconductor device having a high-K gate dielectric and a titanium carbide gate electrode App 20060121668 - Metz; Matthew V. ;   et al. | 2006-06-08 |
Method For Making A Semiconductor Device Having A High-k Gate Dielectric And A Titanium Carbide Gate Electrode App 20060121727 - Metz; Matthew V. ;   et al. | 2006-06-08 |
Method for making a semiconductor device having a high-k gate dielectric App 20060121742 - Metz; Matthew V. ;   et al. | 2006-06-08 |
Method for making a semiconductor device with a high-k gate dielectric and a metal gate electrode App 20060121678 - Brask; Justin K. ;   et al. | 2006-06-08 |
Method for making a semiconductor device with a high-k gate dielectric and a conductor that facilitates current flow across a P/N junction Grant 7,045,428 - Brask , et al. May 16, 2 | 2006-05-16 |
Method for making a semiconductor device with a high-k gate dielectric layer and a silicide gate electrode App 20060094180 - Doczy; Mark L. ;   et al. | 2006-05-04 |
Method for making a semiconductor device with a high-k gate dielectric layer and a silicide gate electrode App 20060091483 - Doczy; Mark L. ;   et al. | 2006-05-04 |
Selective etch process for making a semiconductor device having a high-k gate dielectric Grant 7,037,845 - Brask , et al. May 2, 2 | 2006-05-02 |
Semiconductor channel on insulator structure App 20060081932 - Jin; Been-Yih ;   et al. | 2006-04-20 |
Method for making a semiconductor device having a high-k gate dielectric App 20060079005 - Brask; Justin K. ;   et al. | 2006-04-13 |
Inducing strain in the channels of metal gate transistors App 20060071285 - Datta; Suman ;   et al. | 2006-04-06 |
Metal gate electrode semiconductor device App 20060065939 - Doczy; Mark L. ;   et al. | 2006-03-30 |
Atomic layer deposition of high dielectric constant gate dielectrics App 20060060930 - Metz; Matthew V. ;   et al. | 2006-03-23 |
Reducing ambipolar conduction in carbon nanotube transistors App 20060063318 - Datta; Suman ;   et al. | 2006-03-23 |
Reducing oxidation under a high K gate dielectric App 20060057808 - Turkot; Robert B. JR. ;   et al. | 2006-03-16 |
Method for making a semiconductor device having a high-k gate dielectric App 20060051882 - Doczy; Mark L. ;   et al. | 2006-03-09 |
Method for making a semiconductor device having a high-k gate dielectric layer and a metal gate electrode App 20060051924 - Doczy; Mark L. ;   et al. | 2006-03-09 |
Method for making a semiconductor device that includes a metal gate electrode App 20060051957 - Brask; Justin K. ;   et al. | 2006-03-09 |
Method for making a semiconductor device having a high-k gate dielectric App 20060051880 - Doczy; Mark L. ;   et al. | 2006-03-09 |
Forming integrated circuits with replacement metal gate electrodes App 20060046401 - Kavalieros; Jack ;   et al. | 2006-03-02 |
Facilitating removal of sacrificial layers via implantation to form replacement metal gates App 20060046448 - Barns; Chris E. ;   et al. | 2006-03-02 |
Atomic layer deposition of high quality high-k transition metal and rare earth oxides App 20060045968 - Metz; Matthew V. ;   et al. | 2006-03-02 |
Facilitating removal of sacrificial layers to form replacement metal gates App 20060046523 - Kavalieros; Jack ;   et al. | 2006-03-02 |
Forming abrupt source drain metal gate transistors App 20060046399 - Lindert; Nick ;   et al. | 2006-03-02 |
Compensating the workfunction of a metal gate transistor for abstraction by the gate dielectric layer App 20060024892 - Brask; Justin K. ;   et al. | 2006-02-02 |
Using different gate dielectrics with NMOS and PMOS transistors of a complementary metal oxide semiconductor integrated circuit App 20060022271 - Metz; Matthew V. ;   et al. | 2006-02-02 |
Planarizing a semiconductor structure to form replacement metal gates App 20060022277 - Kavalieros; Jack ;   et al. | 2006-02-02 |
Semiconductor device with a high-k gate dielectric and a metal gate electrode App 20060017098 - Doczy; Mark L. ;   et al. | 2006-01-26 |
Method for making a semiconductor device having a high-k gate dielectric layer and a metal gate electrode App 20060008968 - Brask; Justin K. ;   et al. | 2006-01-12 |
Methods for integrating replacement metal gate structures App 20060008954 - Kavalieros; Jack ;   et al. | 2006-01-12 |
Using different gate dielectrics with NMOS and PMOS transistors of a complementary metal oxide semiconductor integrated circuit App 20060001106 - Metz; Matthew V. ;   et al. | 2006-01-05 |
Forming high-k dielectric layers on smooth substrates App 20060001071 - Brask; Justin K. ;   et al. | 2006-01-05 |
Removing a high-k gate dielectric App 20060003499 - Doczy; Mark L. ;   et al. | 2006-01-05 |
Reducing the dielectric constant of a portion of a gate dielectric App 20050285213 - Datta, Suman ;   et al. | 2005-12-29 |
Reducing reactions between polysilicon gate electrodes and high dielectric constant gate dielectrics App 20050287748 - Kavalieros, Jack ;   et al. | 2005-12-29 |
Facilitating removal of sacrificial layers to form replacement metal gates App 20050287746 - Metz, Matthew V. ;   et al. | 2005-12-29 |
Method for making a semiconductor device having a metal gate electrode Grant 6,974,764 - Brask , et al. December 13, 2 | 2005-12-13 |
Method for making a semiconductor device with a high-k gate dielectric and metal layers that meet at a P/N junction App 20050272270 - Metz, Matthew V. ;   et al. | 2005-12-08 |
Replacement gate process for making a semiconductor device that includes a metal gate electrode App 20050272191 - Shah, Uday ;   et al. | 2005-12-08 |
Forming integrated circuits with replacement metal gate electrodes App 20050269644 - Brask, Justin K. ;   et al. | 2005-12-08 |
Controlling bubble formation during etching App 20050266694 - Brask, Justin K. ;   et al. | 2005-12-01 |
Method for making a semiconductor device with a high-k gate dielectric and a conductor that facilitates current flow across a P/N junction App 20050266619 - Brask, Justin K. ;   et al. | 2005-12-01 |
Modifying the viscosity of etchants App 20050263483 - Brask, Justin K. ;   et al. | 2005-12-01 |
Method for making a semiconductor device having a high-k gate dielectric layer and a metal gate electrode App 20050250258 - Metz, Matthew V. ;   et al. | 2005-11-10 |
Reducing gate dielectric material to form a metal gate electrode extension App 20050245036 - Datta, Suman ;   et al. | 2005-11-03 |
Method for making a semiconductor device having a high-k gate dielectric layer and a metal gate electrode App 20050233527 - Brask, Justin K. ;   et al. | 2005-10-20 |
Method for making a semiconductor device having a high-k gate dielectric Grant 6,939,815 - Brask , et al. September 6, 2 | 2005-09-06 |
Acoustic streaming of condensate during sputtered metal vapor deposition Grant 6,896,774 - Brask , et al. May 24, 2 | 2005-05-24 |
Method for making a semiconductor device having a high-k gate dielectric Grant 6,897,134 - Brask , et al. May 24, 2 | 2005-05-24 |
Method for making a semiconductor device with a metal gate electrode Grant 6,893,927 - Shah , et al. May 17, 2 | 2005-05-17 |
Method for making a semiconductor device with a high-k gate dielectric and metal layers that meet at a P/N junction Grant 6,887,800 - Metz , et al. May 3, 2 | 2005-05-03 |
Etching metal carbide films Grant 6,869,889 - Brask , et al. March 22, 2 | 2005-03-22 |
Method for making a semiconductor device having a high-k gate dielectric Grant 6,867,102 - Brask , et al. March 15, 2 | 2005-03-15 |
Method of fabricating a robust gate dielectric using a replacement gate flow Grant 6,864,145 - Hareland , et al. March 8, 2 | 2005-03-08 |
Precise patterning of high-K films Grant 6,855,639 - Brask , et al. February 15, 2 | 2005-02-15 |
Method for making a semiconductor device having a high-k gate dielectric Grant 6,806,146 - Brask , et al. October 19, 2 | 2004-10-19 |
Selective etching of polysilicon Grant 6,797,622 - Brask , et al. September 28, 2 | 2004-09-28 |
Method for making a semiconductor device having a high-k gate dielectric Grant 6,716,707 - Brask , et al. April 6, 2 | 2004-04-06 |
Method for making a semiconductor device having a high-k gate dielectric Grant 6,709,911 - Doczy , et al. March 23, 2 | 2004-03-23 |
Method for making a semiconductor device having a high-k gate dielectric Grant 6,696,327 - Brask , et al. February 24, 2 | 2004-02-24 |