| Patent | Date |
|---|
Semiconductor Processing Tool And Methods Of Operation
App 20220310404 - CUI; Ji ; et al. | 2022-09-29 |
Ion implant process for defect elimination in metal layer planarization
Grant 11,450,565 - Chen , et al. September 20, 2 | 2022-09-20 |
FinFET structure and method for manufacturing thereof
Grant 11,450,742 - Tsai , et al. September 20, 2 | 2022-09-20 |
Methods to clean chemical mechanical polishing systems
Grant 11,446,785 - Chang , et al. September 20, 2 | 2022-09-20 |
Hotspot avoidance method for manufacturing integrated circuits
Grant 11,443,095 - Liu , et al. September 13, 2 | 2022-09-13 |
Semiconductor device and method
Grant 11,437,497 - Tsai , et al. September 6, 2 | 2022-09-06 |
Semiconductor Structure and Methods of Forming Same
App 20220262951 - Tsai; Chun-Hsiung ; et al. | 2022-08-18 |
Semiconductor device structure with interconnect structure and method for forming the same
Grant 11,417,566 - Kung , et al. August 16, 2 | 2022-08-16 |
Thin film metrology
Grant 11,397,078 - Chen , et al. July 26, 2 | 2022-07-26 |
Manufacturing Method Of Fin-type Field Effect Transistor Structure
App 20220216202 - Tsai; Chun-Hsiung ; et al. | 2022-07-07 |
Chemical mechanical polishing method
Grant 11,373,879 - Chen , et al. June 28, 2 | 2022-06-28 |
Semiconductor method and device
Grant 11,367,660 - Yen , et al. June 21, 2 | 2022-06-21 |
Semiconductor structure and methods of forming same
Grant 11,355,635 - Tsai , et al. June 7, 2 | 2022-06-07 |
Metal Loss Prevention Using Implantation
App 20220122884 - Wu; Li-Chieh ; et al. | 2022-04-21 |
Fin-type field effect transistor structure and manufacturing method thereof
Grant 11,289,479 - Tsai , et al. March 29, 2 | 2022-03-29 |
Semiconductor Device and Method of Manufacture
App 20220059655 - Ting; Heng-Wen ; et al. | 2022-02-24 |
Composition And Method For Polishing And Integrated Circuit
App 20220017780 - CUI; JI ; et al. | 2022-01-20 |
Method of forming semiconductor device
Grant 11,227,951 - Tsai , et al. January 18, 2 | 2022-01-18 |
Hotspot Avoidance Method for Manufacturing Integrated Circuits
App 20220012400 - Liu; I-Shuo ; et al. | 2022-01-13 |
Multiple metallization scheme
Grant 11,217,479 - Ho , et al. January 4, 2 | 2022-01-04 |
Metal loss prevention using implantation
Grant 11,211,289 - Wu , et al. December 28, 2 | 2021-12-28 |
Method of Forming a FinFET Device
App 20210399221 - Liu; Chang-Miao ; et al. | 2021-12-23 |
Chemical Mechanical Polishing Slurry Composition, Method For Chemical Mechanical Polishing And Method For Forming Connecting Structure
App 20210391208 - Cui; Ji ; et al. | 2021-12-16 |
Methods For Chemical Mechanical Polishing And Forming Interconnect Structure
App 20210391186 - Cui; Ji ; et al. | 2021-12-16 |
Gate structure, semiconductor device and the method of forming semiconductor device
Grant 11,195,931 - Tsai , et al. December 7, 2 | 2021-12-07 |
Post-cmp Cleaning Composition For Germanium- Containing Substrate
App 20210371774 - CUI; Ji ; et al. | 2021-12-02 |
Slurry Composition And Method For Polishing And Integratged Circuit
App 20210371702 - CUI; JI ; et al. | 2021-12-02 |
Semiconductor Device and Method
App 20210366715 - Ma; Ta-Chun ; et al. | 2021-11-25 |
Thin Film Metrology
App 20210364275 - CHEN; Chih Hung ; et al. | 2021-11-25 |
Magnetic Polishing Slurry And Method For Polishing A Workpiece
App 20210348027 - CUI; JI ; et al. | 2021-11-11 |
Semiconductor device and method of manufacture
Grant 11,171,209 - Ting , et al. November 9, 2 | 2021-11-09 |
CMP System and Method of Use
App 20210343538 - Hou; Te-Chien ; et al. | 2021-11-04 |
Magnetic Slurry for Highly Efficiency CMP
App 20210327720 - Chen; Yen-Ting ; et al. | 2021-10-21 |
Semiconductor structure with doped contact plug and method for forming the same
Grant 11,145,751 - Chen , et al. October 12, 2 | 2021-10-12 |
Chemical Mechanical Polish Slurry and Method of Manufacture
App 20210313190 - Kung; Chun-Hao ; et al. | 2021-10-07 |
Methods Of Forming A Finfet Device
App 20210313514 - Liu; Chang-Miao ; et al. | 2021-10-07 |
Methods of forming a FinFET device
Grant 11,139,432 - Liu , et al. October 5, 2 | 2021-10-05 |
Ion Implant Process For Defect Elimination In Metal Layer Planarization
App 20210305092 - CHEN; Chia-Cheng ; et al. | 2021-09-30 |
Vias with metal caps for underlying conductive lines
Grant 11,133,247 - Ho , et al. September 28, 2 | 2021-09-28 |
Fin Field-Effect Transistor Device and Method of Forming the Same
App 20210296173 - Suen; Shich-Chang ; et al. | 2021-09-23 |
Finfet Structure And Method For Manufacturing Thereof
App 20210288146 - TSAI; CHUN HSIUNG ; et al. | 2021-09-16 |
Chemical mechanical polishing composition and method
Grant 11,117,239 - Suen , et al. September 14, 2 | 2021-09-14 |
Chemical Mechanical Polishing Cleaning System With Temperature Control For Defect Reduction
App 20210272798 - Chen; Ssutzu ; et al. | 2021-09-02 |
Metal Heterojunction Structure With Capping Metal Layer
App 20210272818 - LIN; Yi-Sheng ; et al. | 2021-09-02 |
Semiconductor Device Including Fin Structures And Manufacturing Method Thereof
App 20210257493 - TSAI; Chun Hsiung ; et al. | 2021-08-19 |
CMP slurry and CMP method
Grant 11,094,555 - Hsu , et al. August 17, 2 | 2021-08-17 |
Semiconductor structure having a source/drain stressor including a plurality of silicon-containing layers
Grant 11,094,797 - Tsai , et al. August 17, 2 | 2021-08-17 |
Semiconductor device and method
Grant 11,087,987 - Ma , et al. August 10, 2 | 2021-08-10 |
Chemical Mechanical Polishing Apparatus Including a Multi-Zone Platen
App 20210220964 - Chang; Ting-Hsun ; et al. | 2021-07-22 |
Chemical Mechanical Polishing Apparatus and Method
App 20210220962 - Suen; Shich-Chang ; et al. | 2021-07-22 |
CMP system and method of use
Grant 11,069,533 - Hou , et al. July 20, 2 | 2021-07-20 |
Structure and Formation Method of Semiconductor Device with Conductive Feature
App 20210210383 - Wu; Li-Chieh ; et al. | 2021-07-08 |
Chemical Mechanical Polishing Apparatus And Method
App 20210205950 - Wang; Shang-Yu ; et al. | 2021-07-08 |
Magnetic slurry for highly efficient CMP
Grant 11,056,352 - Chen , et al. July 6, 2 | 2021-07-06 |
Bevel Edge Removal Methods, Tools, And Systems
App 20210202239 - Huang; Hui-Chi ; et al. | 2021-07-01 |
Fin-type Field Effect Transistor
App 20210202718 - Tsai; Chun Hsiung ; et al. | 2021-07-01 |
Chemical mechanical polish slurry and method of manufacture
Grant 11,043,396 - Kung , et al. June 22, 2 | 2021-06-22 |
Methods of Forming an Abrasive Slurry and Methods for Chemical-Mechanical Polishing
App 20210183688 - Lee; Chia Hsuan ; et al. | 2021-06-17 |
Metal heterojunction structure with capping metal layer
Grant 11,037,799 - Lin , et al. June 15, 2 | 2021-06-15 |
Forming Gate Line-end Of Semiconductor Structures
App 20210166972 - CHUNG; Che-Liang ; et al. | 2021-06-03 |
Fin field-effect transistor device and method of forming the same
Grant 11,024,540 - Suen , et al. June 1, 2 | 2021-06-01 |
Thickness Sensor For Conductive Features
App 20210125881 - CHEN; CHIH HUNG ; et al. | 2021-04-29 |
Chemical mechanical polishing apparatus and method
Grant 10,967,478 - Suen , et al. April 6, 2 | 2021-04-06 |
Semiconductor Method and Device
App 20210098308 - Yen; Cheng-Hsiung ; et al. | 2021-04-01 |
Structure and formation method of semiconductor device with conductive feature
Grant 10,957,587 - Wu , et al. March 23, 2 | 2021-03-23 |
Chemical mechanical polishing apparatus and method
Grant 10,953,514 - Wang , et al. March 23, 2 | 2021-03-23 |
External Heating System For Use In Chemical Mechanical Polishing System
App 20210078129 - LIN; Yi-Sheng ; et al. | 2021-03-18 |
Chemical Mechanical Polishing Apparatus And Method
App 20210078130 - Wang; Shang-Yu ; et al. | 2021-03-18 |
Compositions for use in chemical mechanical polishing
Grant 10,947,414 - Chih , et al. March 16, 2 | 2021-03-16 |
Fin-type field effect transistor
Grant 10,950,710 - Tsai , et al. March 16, 2 | 2021-03-16 |
Forming gate line-end of semiconductor structures
Grant 10,943,822 - Chung , et al. March 9, 2 | 2021-03-09 |
Semiconductor device including fin structures and manufacturing method thereof
Grant 10,937,906 - Tsai , et al. March 2, 2 | 2021-03-02 |
Methods of forming an abrasive slurry and methods for chemical-mechanical polishing
Grant 10,937,691 - Lee , et al. March 2, 2 | 2021-03-02 |
Chemical Mechanical Planarization Tool
App 20210053184 - Chen; Tung-Kai ; et al. | 2021-02-25 |
Novel CMP Pad Design and Method of Using the Same
App 20210053179 - Su; Pin-Chuan ; et al. | 2021-02-25 |
Chemical Mechanical Planarization Tool
App 20210053180 - Yen; Michael ; et al. | 2021-02-25 |
Methods and systems for dopant activation using microwave radiation
Grant 10,923,355 - Tsai , et al. February 16, 2 | 2021-02-16 |
Thickness sensor for conductive features
Grant 10,916,481 - Chen , et al. February 9, 2 | 2021-02-09 |
Semiconductor Device, Method, and Tool of Manufacture
App 20210036129 - Chen; Chih Hung ; et al. | 2021-02-04 |
System and Method of Chemical Mechanical Polishing
App 20210023678 - Liu; Chih-Wen ; et al. | 2021-01-28 |
Mega-sonic Vibration Assisted Chemical Mechanical Planarization
App 20210016415 - Kung; Chun-Hao ; et al. | 2021-01-21 |
CMP System and Method of Use
App 20210020449 - Hou; Te-Chien ; et al. | 2021-01-21 |
Chemical Mechanical Polishing Method
App 20200411329 - CHEN; TUNG-KAI ; et al. | 2020-12-31 |
Apparatus and method for timed dispensing various slurry components
Grant 10,875,149 - Chen , et al. December 29, 2 | 2020-12-29 |
Semiconductor method and device
Grant 10,867,862 - Yen , et al. December 15, 2 | 2020-12-15 |
Gate Structure, Semiconductor Device and the Method of Forming Semiconductor Device
App 20200381529 - Tsai; Chun-Hsiung ; et al. | 2020-12-03 |
Block layer in the metal gate of MOS devices
Grant 10,840,330 - Tsao , et al. November 17, 2 | 2020-11-17 |
Semiconductor Device With Dielectric Spacer Liner On Source/drain Contact
App 20200343349 - HUNG; Chi-Cheng ; et al. | 2020-10-29 |
System and method of chemical mechanical polishing
Grant 10,800,004 - Liu , et al. October 13, 2 | 2020-10-13 |
Semiconductor device, method, and tool of manufacture
Grant 10,804,370 - Chen , et al. October 13, 2 | 2020-10-13 |
Chemical mechanical polishing method
Grant 10,777,423 - Chen , et al. Sept | 2020-09-15 |
Fin-type Field Effect Transistor Structure And Manufacturing Method Thereof
App 20200279846 - Tsai; Chun-Hsiung ; et al. | 2020-09-03 |
Cmp Slurry And Cmp Method
App 20200279751 - Hsu; Chun-Wei ; et al. | 2020-09-03 |
Method Of Forming Device
App 20200279949 - Tsai; Chun-Hsiung ; et al. | 2020-09-03 |
Gate structure, semiconductor device and the method of forming semiconductor device
Grant 10,749,008 - Tsai , et al. A | 2020-08-18 |
Wafer Thinning Apparatus Having Feedback Control
App 20200258756 - A1 | 2020-08-13 |
Semiconductor device and method for manufacturing the same
Grant 10,714,576 - Hung , et al. | 2020-07-14 |
CMP slurry and CMP method
Grant 10,692,732 - Hsu , et al. | 2020-06-23 |
Semiconductor structure and manufacturing method thereof
Grant 10,665,693 - Tsai , et al. | 2020-05-26 |
Semiconductor device and FinFET device
Grant 10,665,717 - Tsai , et al. | 2020-05-26 |
Semiconductor Structure and Methods of Forming Same
App 20200152792 - Tsai; Chun-Hsiung ; et al. | 2020-05-14 |
Metal loss prevention using implantation
Grant 10,643,892 - Wu , et al. | 2020-05-05 |
Wafer thinning apparatus having feedback control and method of using
Grant 10,643,853 - Chen , et al. | 2020-05-05 |
Semiconductor Device and Method
App 20200135467 - Ma; Ta-Chun ; et al. | 2020-04-30 |
Methods To Clean Chemical Mechanical Polishing Systems
App 20200130138 - CHANG; Chih-Chieh ; et al. | 2020-04-30 |
Methods and Systems for Dopant Activation Using Microwave Radiation
App 20200135468 - Tsai; Chun-Hsiung ; et al. | 2020-04-30 |
Fin-type field effect transistor structure and manufacturing method thereof
Grant 10,629,596 - Tsai , et al. | 2020-04-21 |
Fin Field-Effect Transistor Device and Method of Forming the Same
App 20200105599 - Suen; Shich-Chang ; et al. | 2020-04-02 |
System And Method Of Chemical Mechanical Polishing
App 20200101582 - Liu; Chih-Wen ; et al. | 2020-04-02 |
Methods Of Forming An Abrasive Slurry And Methods For Chemical-mechanical Polishing
App 20200105580 - Lee; Chia Hsuan ; et al. | 2020-04-02 |
Semiconductor Device and Method of Manufacture
App 20200105876 - Ting; Heng-Wen ; et al. | 2020-04-02 |
Vias With Metal Caps For Underlying Conductive Lines
App 20200105668 - Ho; Chia-Wei ; et al. | 2020-04-02 |
Cmp Slurry And Cmp Method
App 20200098590 - Hsu; Chun-Wei ; et al. | 2020-03-26 |
Metal Heterojunction Structure With Capping Metal Layer
App 20200098591 - Lin; Yi-Sheng ; et al. | 2020-03-26 |
Zone-based Cmp Target Control
App 20200094369 - Chung; Che-Liang ; et al. | 2020-03-26 |
Semiconductor Method and Device
App 20200075729 - Yen; Cheng-Hsiung ; et al. | 2020-03-05 |
Fin-type field effect transistor structure and manufacturing method thereof
Grant 10,573,749 - Tsai , et al. Feb | 2020-02-25 |
Semiconductor Device Structure with Interconnect Structure and Method for Forming the Same
App 20200043777 - Kung; Chun-Hao ; et al. | 2020-02-06 |
Magnetic Slurry for Highly Efficient CMP
App 20200043747 - Chen; Yen-Ting ; et al. | 2020-02-06 |
Multiple Metallization Scheme
App 20200043784 - Ho; Hsin-Ying ; et al. | 2020-02-06 |
Structure and Formation Method of Semiconductor Device with Conductive Feature
App 20200043786 - Wu; Li-Chieh ; et al. | 2020-02-06 |
Compositions For Use In Chemical Mechanical Polishing
App 20200040221 - CHIH; Fang-I ; et al. | 2020-02-06 |
Self-healing Polishing Pad
App 20200039022 - Kung; Chun-Hao ; et al. | 2020-02-06 |
Chemical Mechanical Polish Slurry and Method of Manufacture
App 20200043745 - Kung; Chun-Hao ; et al. | 2020-02-06 |
Semiconductor structure
Grant 10,535,768 - Tsai , et al. Ja | 2020-01-14 |
Semiconductor Device and Method
App 20200006533 - Tsai; Ji-Yin ; et al. | 2020-01-02 |
Methods and systems for dopant activation using microwave radiation
Grant 10,522,356 - Tsai , et al. Dec | 2019-12-31 |
Thickness Sensor For Conductive Features
App 20190393107 - CHEN; CHIH HUNG ; et al. | 2019-12-26 |
Metal Loss Prevention Using Implantation
App 20190385909 - Wu; Li-Chieh ; et al. | 2019-12-19 |
Fin Field-Effect Transistor device and method of forming the same
Grant 10,504,782 - Suen , et al. Dec | 2019-12-10 |
Metal Loss Prevention Using Implantation
App 20190371664 - Wu; Li-Chieh ; et al. | 2019-12-05 |
Temperature Control in Chemical Mechanical Polish
App 20190337115 - Chen; Kei-Wei ; et al. | 2019-11-07 |
Semiconductor Structure With Doped Contact Plug And Method For Forming The Same
App 20190305107 - CHEN; Kuo-Ju ; et al. | 2019-10-03 |
Forming Gate Line-end Of Semiconductor Structures
App 20190287852 - Chung; Che-Liang ; et al. | 2019-09-19 |
Polishing Pad For Chemical Mechanical Planarization
App 20190224810 - Chen; Chih Hung ; et al. | 2019-07-25 |
Temperature control in chemical mechanical polish
Grant 10,350,724 - Chen , et al. July 16, 2 | 2019-07-16 |
Chemical Mechanical Polishing Method
App 20190157103 - CHEN; TUNG-KAI ; et al. | 2019-05-23 |
Fin field effect transistor and method for fabricating the same
Grant 10,276,715 - Tsai , et al. | 2019-04-30 |
Semiconductor Structure
App 20190109213 - TSAI; Chun-Hsiung ; et al. | 2019-04-11 |
Fin Field-effect Transistor Device And Method Of Forming The Same
App 20190103312 - Suen; Shich-Chang ; et al. | 2019-04-04 |
Chemical Mechanical Polishing Apparatus And Method
App 20190099854 - Suen; Shich-Chang ; et al. | 2019-04-04 |
Chemical Mechanical Polishing Composition and Method
App 20190099853 - Suen; Shich-Chang ; et al. | 2019-04-04 |
Polishing pad having grooves on bottom surface of top layer
Grant 10,201,887 - Chen , et al. Feb | 2019-02-12 |
Temperature Control in Chemical Mechanical Polish
App 20190030675 - Chen; Kei-Wei ; et al. | 2019-01-31 |
Fin-type Field Effect Transistor
App 20190027579 - Tsai; Chun-Hsiung ; et al. | 2019-01-24 |
Gate Structure, Semiconductor Device and the Method of Forming Semiconductor Device
App 20190006483 - Tsai; Chun-Hsiung ; et al. | 2019-01-03 |
Semiconductor device and method
Grant 10,164,053 - Chung , et al. Dec | 2018-12-25 |
Semiconductor Device And Finfet Device
App 20180366585 - Tsai; Chun Hsiung ; et al. | 2018-12-20 |
Semiconductor device and fabrication method therefor
Grant 10,153,199 - Tsai , et al. Dec | 2018-12-11 |
Gate structure, semiconductor device and the method of forming semiconductor device
Grant 10,141,417 - Tsai , et al. Nov | 2018-11-27 |
Semiconductor Device with Multi Level Interconnects and Method of Forming the Same
App 20180337113 - Liang; Jeng Min ; et al. | 2018-11-22 |
Fin-type Field Effect Transistor Structure And Manufacturing Method Thereof
App 20180301453 - Tsai; Chun Hsiung ; et al. | 2018-10-18 |
Apparatus And Method For Timed Dispensing Various Slurry Components
App 20180281152 - CHEN; Kei-Wei ; et al. | 2018-10-04 |
Polishing Pad Having Grooves On Bottom Surface Of Top Layer
App 20180281150 - CHEN; Chih-Hung ; et al. | 2018-10-04 |
Semiconductor Structure
App 20180277678 - Tsai; Chun-Hsiung ; et al. | 2018-09-27 |
Semiconductor Device, Method, and Tool of Manufacture
App 20180269307 - Chen; Chih Hung ; et al. | 2018-09-20 |
Fin-type field effect transistor structure and manufacturing method thereof
Grant 10,079,291 - Tsai , et al. September 18, 2 | 2018-09-18 |
Semiconductor Device Including Fin Structures And Manufacturing Method Thereof
App 20180254346 - TSAI; Chun Hsiung ; et al. | 2018-09-06 |
Method for controlling chemical mechanical polishing process
Grant 10,058,974 - Chen , et al. August 28, 2 | 2018-08-28 |
FinFET device
Grant 10,062,780 - Tsai , et al. August 28, 2 | 2018-08-28 |
Semiconductor Device And Method For Manufacturing The Same
App 20180233565 - HUNG; Chi-Cheng ; et al. | 2018-08-16 |
Fin-type field effect transistor structure and manufacturing method thereof
Grant 10,002,867 - Tsai , et al. June 19, 2 | 2018-06-19 |
Semiconductor device including fin structures and manufacturing method thereof
Grant 9,991,384 - Tsai , et al. June 5, 2 | 2018-06-05 |
Semiconductor structure and manufacturing method thereof
Grant 9,978,866 - Tsai , et al. May 22, 2 | 2018-05-22 |
Semiconductor structure and manufacturing method thereof
Grant 9,947,753 - Hung , et al. April 17, 2 | 2018-04-17 |
Wafer edge trimming tool using abrasive tape
Grant 9,931,726 - Chang , et al. April 3, 2 | 2018-04-03 |
Finfet Structure And Method For Manufacturing Thereof
App 20180053825 - TSAI; CHUN HSIUNG ; et al. | 2018-02-22 |
FinFET structure and method for manufacturing thereof
Grant 9,859,404 - Tsai , et al. January 2, 2 | 2018-01-02 |
Apparatus And Method For Treating Wafer
App 20170352574 - CHEN; Kei-Wei ; et al. | 2017-12-07 |
Lithography tool with backside polisher
Grant 9,829,806 - Chang , et al. November 28, 2 | 2017-11-28 |
Fin-type Field Effect Transistor Structure And Manufacturing Method Thereof
App 20170323954 - Tsai; Chun Hsiung ; et al. | 2017-11-09 |
Block Layer in the Metal Gate of MOS Devices
App 20170323940 - Tsao; Jung-Chih ; et al. | 2017-11-09 |
Finfet Device
App 20170323971 - Tsai; Chun Hsiung ; et al. | 2017-11-09 |
FinFET structure and method for manufacturing thereof
Grant 9,806,154 - Tsai , et al. October 31, 2 | 2017-10-31 |
Image sensor isolation region and method of forming the same
Grant 9,786,707 - JangJian , et al. October 10, 2 | 2017-10-10 |
Semiconductor Device And Fabrication Method Therefor
App 20170278743 - TSAI; Chun Hsiung ; et al. | 2017-09-28 |
Fin-type Field Effect Transistor Structure And Manufacturing Method Thereof
App 20170256539 - Tsai; Chun Hsiung ; et al. | 2017-09-07 |
Fin-type Field Effect Transistor Structure And Manufacturing Method Thereof
App 20170250281 - Tsai; Chun Hsiung ; et al. | 2017-08-31 |
Fin Field Effect Transistor And Method For Fabricating The Same
App 20170250278 - Tsai; Chun Hsiung ; et al. | 2017-08-31 |
Block layer in the metal gate of MOS devices
Grant 9,735,231 - Tsao , et al. August 15, 2 | 2017-08-15 |
Methods and Systems for Dopant Activation Using Microwave Radiation
App 20170221713 - Tsai; Chun-Hsiung ; et al. | 2017-08-03 |
Finfet Device And Method Of Forming The Same
App 20170222051 - Tsai; Chun Hsiung ; et al. | 2017-08-03 |
FinFET device and method of forming the same
Grant 9,722,081 - Tsai , et al. August 1, 2 | 2017-08-01 |
Wafer edge trim blade with slots
Grant 9,676,114 - Kuo , et al. June 13, 2 | 2017-06-13 |
Image sensor isolation region and method of forming the same
Grant 9,673,244 - JangJian , et al. June 6, 2 | 2017-06-06 |
Gate Structure, Semiconductor Device And The Method Of Forming Semiconductor Device
App 20170110550 - TSAI; Chun-Hsiung ; et al. | 2017-04-20 |
Methods and systems for dopant activation using microwave radiation
Grant 9,627,212 - Tsai , et al. April 18, 2 | 2017-04-18 |
Finfet Structure And Method For Manufacturing Thereof
App 20170077269 - TSAI; CHUN HSIUNG ; et al. | 2017-03-16 |
Method for wafer grinding
Grant 9,566,683 - Wei , et al. February 14, 2 | 2017-02-14 |
Modular grinding apparatuses and methods for wafer thinning
Grant 9,570,311 - Kuo , et al. February 14, 2 | 2017-02-14 |
Method and apparatus for thermal mapping and thermal process control
Grant 9,536,762 - Tsai , et al. January 3, 2 | 2017-01-03 |
Semiconductor device and fabricating method thereof
Grant 9,520,477 - Hung , et al. December 13, 2 | 2016-12-13 |
FinFET structure and method for manufacturing thereof
Grant 9,515,072 - Tsai , et al. December 6, 2 | 2016-12-06 |
Method for fabricating fin field effect transistor and semiconductor device
Grant 9,508,556 - Tsai , et al. November 29, 2 | 2016-11-29 |
Resistive random-access memory (RRAM) with a low-K porous layer
Grant 9,502,647 - Chang , et al. November 22, 2 | 2016-11-22 |
Oxidation-free copper metallization process using in-situ baking
Grant 9,502,290 - Wang , et al. November 22, 2 | 2016-11-22 |
Semiconductor Structure And Manufacturing Method Thereof
App 20160336412 - HUNG; Chi-Cheng ; et al. | 2016-11-17 |
Methods And Systems For Dopant Activation Using Microwave Radiation
App 20160329212 - TSAI; CHUN-HSIUNG ; et al. | 2016-11-10 |
Semiconductor Structure And Manufacturing Method Thereof
App 20160322474 - TSAI; Chun-Hsiung ; et al. | 2016-11-03 |
Semiconductor Structure And Manufacturing Method Thereof
App 20160315191 - TSAI; Chun-Hsiung ; et al. | 2016-10-27 |
Semiconductor Device And Fabricating Method Thereof
App 20160276456 - HUNG; CHI-CHENG ; et al. | 2016-09-22 |
Methods and systems for dopant activation using microwave radiation
Grant 9,401,274 - Tsai , et al. July 26, 2 | 2016-07-26 |
Finfet Structure And Method For Manufacturing Thereof
App 20160211326 - TSAI; CHUN HSIUNG ; et al. | 2016-07-21 |
Semiconductor Device Including Fin Structures And Manufacturing Method Thereof
App 20160211371 - TSAI; Chun Hsiung ; et al. | 2016-07-21 |
Finfet Structure And Method For Manufacturing Thereof
App 20160190137 - TSAI; CHUN HSIUNG ; et al. | 2016-06-30 |
Dry etching gas and method of manufacturing semiconductor device
Grant 9,368,394 - Hung , et al. June 14, 2 | 2016-06-14 |
CIS image sensors with epitaxy layers and methods for forming the same
Grant 9,368,540 - JangJian , et al. June 14, 2 | 2016-06-14 |
BSI image sensor chips and methods for forming the same
Grant 9,356,059 - JangJian , et al. May 31, 2 | 2016-05-31 |
System and method for reducing irregularities on the surface of a backside illuminated photodiode
Grant 9,349,902 - JangJian , et al. May 24, 2 | 2016-05-24 |
Wafer polishing tool using abrasive tape
Grant 9,339,912 - Chang , et al. May 17, 2 | 2016-05-17 |
Method Of Forming Diamond Conditioners For Cmp Process
App 20160114460 - CHAO; Yen-Chang ; et al. | 2016-04-28 |
Resistive random-access memory (RRAM) with multi-layer device structure
Grant 9,281,475 - Chang , et al. March 8, 2 | 2016-03-08 |
Method of forming diamond conditioners for CMP process
Grant 9,254,548 - Chao , et al. February 9, 2 | 2016-02-09 |
Semiconductor device contact structures
Grant 9,224,691 - Chang , et al. December 29, 2 | 2015-12-29 |
Apparatus for Wafer Grinding
App 20150367475 - Wei; Kuo-Hsiu ; et al. | 2015-12-24 |
Resistive Random-access Memory (rram) With Multi-layer Device Structure
App 20150349250 - CHANG; TING-CHANG ; et al. | 2015-12-03 |
Resistive Random-access Memory (rram) With A Low-k Porous Layer
App 20150349251 - CHANG; TING-CHANG ; et al. | 2015-12-03 |
Block Layer In The Metal Gate Of Mos Devices
App 20150279838 - Tsao; Jung-Chih ; et al. | 2015-10-01 |
Lithography Tool With Backside Polisher
App 20150262831 - CHANG; TANG-KUEI ; et al. | 2015-09-17 |
Apparatus for wafer grinding
Grant 9,120,194 - Wei , et al. September 1, 2 | 2015-09-01 |
Epitaxy In Semiconductor Structure And Manufacturing Method Thereof
App 20150236124 - CHANG; SHIH-CHIEH ; et al. | 2015-08-20 |
Methods And Systems For Dopant Activation Using Microwave Radiation
App 20150228485 - TSAI; CHUN-HSIUNG ; et al. | 2015-08-13 |
Device with MOS device including a secondary metal and PVD tool with target for making same
Grant 9,070,664 - Chang , et al. June 30, 2 | 2015-06-30 |
Methods for minimizing edge peeling in the manufacturing of BSI chips
Grant 9,064,770 - Kuo , et al. June 23, 2 | 2015-06-23 |
CIS Image Sensors with Epitaxy Layers and Methods for Forming the Same
App 20150041851 - JangJian; Shiu-Ko ; et al. | 2015-02-12 |
CIS image sensors with epitaxy layers and methods for forming the same
Grant 8,889,461 - JangJian , et al. November 18, 2 | 2014-11-18 |
Methods and apparatus for an improved reflectivity optical grid for image sensors
Grant 8,890,273 - JangJian , et al. November 18, 2 | 2014-11-18 |
Image sensor and method of manufacturing
Grant 8,847,286 - Jangjian , et al. September 30, 2 | 2014-09-30 |
Semiconductor Device With Multi Level Interconnects And Method Of Forming The Same
App 20140209984 - Liang; Jeng Min ; et al. | 2014-07-31 |
Wafer Polishing Tool Using Abrasive Tape
App 20140213153 - Chang; Tang-Kuei ; et al. | 2014-07-31 |
Wafer Edge Trimming Tool Using Abrasive Tape
App 20140213152 - Chang; Tang-Kuei ; et al. | 2014-07-31 |
Method and apparatus for backside illumination sensor
Grant 8,772,899 - JangJian , et al. July 8, 2 | 2014-07-08 |
Methods for Minimizing Edge Peeling in the Manufacturing of BSI Chips
App 20140024170 - Kuo; Chun-Ting ; et al. | 2014-01-23 |
Device with MOS Device Including a Secondary Metal and PVD Tool with Target for Making Same
App 20130334581 - Chang; Shih-Chieh ; et al. | 2013-12-19 |
Semiconductor Device Contact Structures
App 20130320541 - CHANG; Shih-Chieh ; et al. | 2013-12-05 |
System and Method for Processing a Backside Illuminated Photodiode
App 20130320478 - JangJian; Shiu-Ko ; et al. | 2013-12-05 |
CIS Image Sensors with Epitaxy Layers and Methods for Forming the Same
App 20130320419 - JangJian; Shiu-Ko ; et al. | 2013-12-05 |
Method Of Forming Diamond Conditioners For Cmp Process
App 20130288582 - CHAO; Yen-Chang ; et al. | 2013-10-31 |
Image Sensor Isolation Region and Method of Forming the Same
App 20130280849 - JangJian; Shiu-Ko ; et al. | 2013-10-24 |
Image Sensor Manufacturing Methods
App 20130273686 - Cheng; Mu-Han ; et al. | 2013-10-17 |
Oxidation-Free Copper Metallization Process Using In-situ Baking
App 20130273735 - Wang; Yu-Sheng ; et al. | 2013-10-17 |
Semiconductor device
Grant 8,552,529 - Tsao , et al. October 8, 2 | 2013-10-08 |
Nickel alloy target including a secondary metal
Grant 8,551,193 - Chang , et al. October 8, 2 | 2013-10-08 |
Image Sensor Isolation Region and Method of Forming the Same
App 20130234202 - JangJian; Shiu-Ko ; et al. | 2013-09-12 |
Via/contact and damascene structures
Grant 8,531,036 - Chang , et al. September 10, 2 | 2013-09-10 |
Method and Apparatus for Backside Illumination Sensor
App 20130228886 - JangJian; Shiu-Ko ; et al. | 2013-09-05 |
Wafer Edge Trim Blade With Slots
App 20130220090 - KUO; Chun-Ting ; et al. | 2013-08-29 |
Semiconductor device contact structures and methods for making the same
Grant 8,518,819 - Chang , et al. August 27, 2 | 2013-08-27 |
Modular Grinding Apparatuses And Methods For Wafer Thinning
App 20130210321 - KUO; Chun-Ting ; et al. | 2013-08-15 |
Wafer Thinning Apparatus Having Feedback Control And Method Of Using
App 20130210172 - Chen; Yuan-Hsuan ; et al. | 2013-08-15 |
Methods and Apparatus for an Improved Reflectivity Optical Grid for Image Sensors
App 20130193538 - JangJian; Shiu-Ko ; et al. | 2013-08-01 |
Image Sensor And Method Of Manufacturing
App 20130181258 - JangJian; Shiu-Ko ; et al. | 2013-07-18 |
Oxidation-free copper metallization process using in-situ baking
Grant 8,470,390 - Wang , et al. June 25, 2 | 2013-06-25 |
BSI Image Sensor Chips and Methods for Forming the Same
App 20130153901 - JangJian; Shiu-Ko ; et al. | 2013-06-20 |
Stressed semiconductor device and method of manufacturing
Grant 8,455,883 - Liao , et al. June 4, 2 | 2013-06-04 |
Semiconductor Manufacturing Apparatus And Method Of Manufacturing Semiconductor Device
App 20130102152 - CHAO; Yen-Chang ; et al. | 2013-04-25 |
Nickel Alloy Target Including a Secondary Metal
App 20130020617 - Chang; Shih-Chieh ; et al. | 2013-01-24 |
Apparatus for Wafer Grinding
App 20130023188 - Wei; Kuo-Hsiu ; et al. | 2013-01-24 |
Stressed Semiconductor Device And Method Of Manufacturing
App 20120292639 - Liao; Miao-Cheng ; et al. | 2012-11-22 |
Via/contact And Damascene Structures
App 20120292768 - Chang; Shih-Chieh ; et al. | 2012-11-22 |
Chemical Mechanical Polishing Slurry, System And Method
App 20120264303 - CHEN; Kei-Wei ; et al. | 2012-10-18 |
Semiconductor Device
App 20120241908 - TSAO; Jung-Chih ; et al. | 2012-09-27 |
Semiconductor Device Contact Structures And Methods For Making The Same
App 20120235299 - CHANG; Shih Chieh ; et al. | 2012-09-20 |
Via/contact and damascene structures and manufacturing methods thereof
Grant 8,247,322 - Chang , et al. August 21, 2 | 2012-08-21 |
Current-leveling electroplating/electropolishing electrode
Grant 8,099,861 - Chang , et al. January 24, 2 | 2012-01-24 |
Alpha tantalum capacitor plate
Grant 7,969,708 - Tsao , et al. June 28, 2 | 2011-06-28 |
Current-leveling Electroplating/electropolishing Electrode
App 20100314256 - Chang; Shih-Chieh ; et al. | 2010-12-16 |
Apparatuses for electrochemical deposition, conductive layer, and fabrication methods thereof
Grant 7,837,841 - Chen , et al. November 23, 2 | 2010-11-23 |
Current-leveling electroplating/electropolishing electrode
Grant 7,803,257 - Chang , et al. September 28, 2 | 2010-09-28 |
Semiconductor Device
App 20100230815 - Tsao; Jung-Chih ; et al. | 2010-09-16 |
Oxidation-Free Copper Metallization Process Using In-situ Baking
App 20090181164 - Wang; Yu-Sheng ; et al. | 2009-07-16 |
Forming Seed Layer in Nano-Trench Structure Using Net Deposition and Net Etch
App 20090127097 - Chen; Kei-Wei ; et al. | 2009-05-21 |
Alpha Tantalum Capacitor Plate
App 20090116169 - Tsao; Jung-Chih ; et al. | 2009-05-07 |
Semiconductor Device
App 20080251889 - Tsao; Jung-Chih ; et al. | 2008-10-16 |
Apparatuses For Electrochemical Deposition, Conductive Layer, And Fabrication Methods Thereof
App 20080223724 - Chen; Kei-Wei ; et al. | 2008-09-18 |
Via/contact And Damascene Structures And Manufacturing Methods Thereof
App 20080211106 - Chang; Shih-Chieh ; et al. | 2008-09-04 |
Via structure and process for forming the same
Grant 7,417,321 - Tsao , et al. August 26, 2 | 2008-08-26 |
Multi-layer interconnect structure for semiconductor devices
Grant 7,368,379 - Tsao , et al. May 6, 2 | 2008-05-06 |
Method of reducing oxygen content in ECP solution
App 20080067076 - Cheng; Ming-Yuan ; et al. | 2008-03-20 |
Copper plating of semiconductor devices using single intermediate low power immersion step
Grant 7,312,149 - Chen , et al. December 25, 2 | 2007-12-25 |
Test device and method for laser alignment calibration
Grant 7,304,728 - Chang , et al. December 4, 2 | 2007-12-04 |
Barrier layer for semiconductor interconnect structure
App 20070257366 - Wang; Yu-Sheng ; et al. | 2007-11-08 |
Semiconductor Devices And Fabrication Method Thereof
App 20070252277 - Tsao; Jung-Chih ; et al. | 2007-11-01 |
Low-k dielectric layer, semiconductor device, and method for fabricating the same
App 20070205516 - Chen; Kei-Wei ; et al. | 2007-09-06 |
Via structure and process for forming the same
App 20070152342 - Tsao; Jung-Chih ; et al. | 2007-07-05 |
Semiconductor device
App 20070126120 - Tsao; Jung-Chih ; et al. | 2007-06-07 |
Method to reduce Rs pattern dependence effect
Grant 7,208,404 - Tsao , et al. April 24, 2 | 2007-04-24 |
Plating apparatuses and processes
App 20070084730 - Chen; Kei-Wei ; et al. | 2007-04-19 |
Metal-filled openings for submicron devices and methods of manufacture thereof
Grant 7,199,045 - Liu , et al. April 3, 2 | 2007-04-03 |
Method of reducing the pattern effect in the CMP process
Grant 7,183,199 - Liu , et al. February 27, 2 | 2007-02-27 |
Interconnect structure for semiconductor devices
App 20070034517 - Tsao; Jung-Chih ; et al. | 2007-02-15 |
Electropolishing method for removing particles from wafer surface
Grant 7,128,821 - Lin , et al. October 31, 2 | 2006-10-31 |
Method of forming barrier layer with reduced resistivity and improved reliability in copper damascene process
Grant 7,071,100 - Chen , et al. July 4, 2 | 2006-07-04 |
Current-leveling electroplating/electropolishing electrode
App 20060086609 - Chang; Shih-Chieh ; et al. | 2006-04-27 |
Test device and method for laser alignment calibration
App 20060055928 - Chang; Shih-Tzung ; et al. | 2006-03-16 |
Metal-filled openings for submicron devices and methods of manufacture thereof
App 20050275941 - Liu, Chi-Wen ; et al. | 2005-12-15 |
Copper plating of semiconductor devices using intermediate immersion step
App 20050250327 - Chen, Chao-Lung ; et al. | 2005-11-10 |
Novel ECP method for preventing the formation of voids and contamination in vias
App 20050236181 - Chen, Kei-Wei ; et al. | 2005-10-27 |
Method of forming barrier layer with reduced resistivity and improved reliability in copper damascene process
App 20050191855 - Chen, Kei-Wei ; et al. | 2005-09-01 |
Electropolishing method for removing particles from wafer surface
App 20050155869 - Lin, Shih-Ho ; et al. | 2005-07-21 |
Thrust pad assembly for ECP system
App 20050121329 - Tsao, Jung-Chih ; et al. | 2005-06-09 |
Method of reducing the pattern effect in the CMP process
App 20050118808 - Liu, Chi-Wen ; et al. | 2005-06-02 |
Novel method to reduce Rs pattern dependence effect
App 20050085066 - Tsao, Jung-Chih ; et al. | 2005-04-21 |
Removal of SiON residue after CMP
Grant 6,828,226 - Chen , et al. December 7, 2 | 2004-12-07 |
Method and system for slurry usage reduction in chemical mechanical polishing
Grant 6,769,959 - Chen , et al. August 3, 2 | 2004-08-03 |
Novel method to reduce stress for copper CMP
App 20040147116 - Chen, Kei-Wei ; et al. | 2004-07-29 |
Method for improving thickness uniformity on a semiconductor wafer during chemical mechanical polishing
Grant 6,626,741 - Wang , et al. September 30, 2 | 2003-09-30 |
Method and system for slurry usage reduction in chemical mechanical polishing
App 20030143924 - Chen, Kei-Wei ; et al. | 2003-07-31 |
Method for improving thickness uniformity on a semiconductor wafer during chemical mechanical polishing
App 20030017784 - Wang, Ting-Chun ; et al. | 2003-01-23 |
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