U.S. patent application number 16/572895 was filed with the patent office on 2021-03-18 for chemical mechanical polishing apparatus and method.
The applicant listed for this patent is Taiwan Semiconductor Manufacturing Company, Ltd.. Invention is credited to Kei-Wei Chen, Hui-Chi Huang, Chun-Hao Kung, Ching-Hsiang Tsai, Shang-Yu Wang.
Application Number | 20210078130 16/572895 |
Document ID | / |
Family ID | 1000004368030 |
Filed Date | 2021-03-18 |
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United States Patent
Application |
20210078130 |
Kind Code |
A1 |
Wang; Shang-Yu ; et
al. |
March 18, 2021 |
CHEMICAL MECHANICAL POLISHING APPARATUS AND METHOD
Abstract
A method includes placing a polisher head on platen, the
polisher head including a set of first magnets, and controlling a
set of second magnets to rotate the polisher head on the platen,
wherein controlling the set of second magnets includes reversing
the polarity of at least one second magnet of the set of second
magnets to produce a magnetic force on at least one first magnet of
the set of first magnets, wherein the set of second magnets are
external to the polisher head.
Inventors: |
Wang; Shang-Yu; (Changhua
County, TW) ; Kung; Chun-Hao; (Hsinchu, TW) ;
Tsai; Ching-Hsiang; (Hsinchu, TW) ; Chen;
Kei-Wei; (Tainan, TW) ; Huang; Hui-Chi;
(Zhubei, TW) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
Taiwan Semiconductor Manufacturing Company, Ltd. |
Hsinchu |
|
TW |
|
|
Family ID: |
1000004368030 |
Appl. No.: |
16/572895 |
Filed: |
September 17, 2019 |
Current U.S.
Class: |
1/1 |
Current CPC
Class: |
B24B 37/107 20130101;
H01L 21/30625 20130101; B24B 37/042 20130101 |
International
Class: |
B24B 37/10 20060101
B24B037/10; B24B 37/04 20060101 B24B037/04; H01L 21/306 20060101
H01L021/306 |
Claims
1. A method, comprising: placing a polisher head on a platen, the
polisher head comprising a set of first magnets; and controlling a
set of second magnets to rotate the polisher head on the platen,
wherein controlling the set of second magnets comprises reversing
the polarity of at least one second magnet of the set of second
magnets to produce a magnetic force on at least one first magnet of
the set of first magnets, wherein the set of second magnets are
external to the polisher head.
2. The method of claim 1, wherein the set of second magnets is
disposed within the platen.
3. The method of claim 1, wherein the set of second magnets is
external to the platen.
4. The method of claim 1, wherein controlling the set of second
magnets further comprises vertically translating at least one
second magnet of the set of second magnets.
5. The method of claim 1, wherein controlling the set of second
magnets comprises controlling the strength of the magnetic force
generated by at least one second magnet of the set of second
magnets.
6. The method of claim 1, wherein the magnetic force comprises a
downward force.
7. The method of claim 1, wherein the polisher head is placed on
the platen by a polisher head holder, and wherein after placing the
polisher head on the platen, the polisher head is detached from the
polisher head holder.
8. The method of claim 1, wherein the polisher head is free of
electrical connections to other components.
9. The method of claim 1, wherein controlling the set of second
magnets comprises simultaneously controlling the polarity of each
second magnet of the set of second magnets.
10. The method of claim 1, wherein the first magnets are oriented
laterally within the polisher head.
11. A method, comprising: attaching a wafer to a polisher head,
wherein the polisher head comprises a plurality of first magnets;
placing the polisher head on a platen, wherein the platen comprises
a plurality of second magnets, wherein each second magnet comprises
an electromagnet coupled to a controller; and using the controller,
controlling the electrical power delivered to each second magnet to
generate magnetic fields that impart lateral forces on the
plurality of first magnets to rotate the polisher head with respect
to the platen.
12. The method of claim 11, wherein the plurality of first magnets
are oriented vertically within the polisher head.
13. The method of claim 11, further comprising controlling the
electrical power delivered to each second magnet to generate
magnetic fields that impart vertical forces on the plurality of
first magnets to press the wafer onto the platen.
14. The method of claim 13, wherein the wafer is pressed onto the
platen with a pressure between 0 psi and 10 psi.
15. The method of claim 11, further comprising controlling the
electrical power delivered to each second magnet to generate
magnetic fields that impart lateral forces to laterally translate
the polisher head.
16. The method of claim 11, wherein the polisher head comprises a
suction cup, and wherein attaching the wafer to the polisher head
comprises using the suction cup.
17. The method of claim 11, wherein, after placing the polisher
head on the platen, the polisher head is free of mechanical
connection to the platen.
18.-20. (canceled)
21. The method of claim 1 further comprising attaching a wafer to
the polisher head prior to placing the polisher head on the
platen.
22. A method, comprising: attaching a wafer to a polisher head,
wherein the polisher head comprises a plurality of first magnets;
placing the polisher head on a platen, wherein the platen comprises
a plurality of second magnets, wherein each second magnet comprises
an electromagnet coupled to a controller; and using the controller,
controlling the electrical power delivered to each second magnet to
generate magnetic fields that impart lateral forces on the
plurality of first magnets to rotate the polisher head with respect
to the platen, wherein controlling the electrical power delivered
to each second magnet comprises reversing the polarity of at least
one second magnet of the set of second magnets to produce a
magnetic force on at least one first magnet of the set of first
magnets.
23. The method of claim 22, wherein the plurality of first magnets
are arranged horizontally along a circumference of the polisher
head.
Description
BACKGROUND
[0001] Generally, semiconductor devices comprise active components,
such as transistors, formed on a substrate. Any number of
interconnect layers may be formed over the substrate connecting the
active components to each other and to outside devices. The
interconnect layers are typically made of low-k dielectric
materials comprising metallic trenches/vias.
[0002] As the layers of a device are formed, it is sometimes
desirable to planarize the device. For example, the formation of
metallic features in the substrate or in a metal layer may cause
uneven topography. This uneven topography creates difficulties in
the formation of subsequent layers. For example, uneven topography
may interfere with the photolithographic process used to form
various features in a device. It is, therefore, desirable to
planarize the surface of the device after various features or
layers are formed. One method of planarization is chemical
mechanical polishing (CMP).
BRIEF DESCRIPTION OF THE DRAWINGS
[0003] Aspects of the present disclosure are best understood from
the following detailed description when read with the accompanying
figures. It is noted that, in accordance with the standard practice
in the industry, various features are not drawn to scale. In fact,
the dimensions of the various features may be arbitrarily increased
or reduced for clarity of discussion.
[0004] FIG. 1 illustrates a perspective view of a CMP apparatus in
accordance with some embodiments.
[0005] FIG. 2 illustrates a top view of a CMP apparatus in
accordance with some embodiments.
[0006] FIGS. 3A-B illustrate side views of a CMP apparatus in
accordance with some embodiments.
[0007] FIG. 4 illustrates components of a CMP apparatus in
accordance with some embodiments.
[0008] FIGS. 5A-B illustrate top views of a CMP apparatus in
accordance with some embodiments.
[0009] FIG. 6 illustrates a side view of a CMP apparatus in
accordance with some embodiments.
[0010] FIG. 7 illustrates a magnetic base of a polisher head in
accordance with some embodiments.
[0011] FIG. 8 illustrates a top view of a CMP apparatus in
accordance with some embodiments.
[0012] FIG. 9 illustrates a flow chart of a CMP process, in
accordance with some embodiments.
DETAILED DESCRIPTION
[0013] The following disclosure provides many different
embodiments, or examples, for implementing different features of
the invention. Specific examples of components and arrangements are
described below to simplify the present disclosure. These are, of
course, merely examples and are not intended to be limiting. For
example, the formation of a first feature over or on a second
feature in the description that follows may include embodiments in
which the first and second features are formed in direct contact,
and may also include embodiments in which additional features may
be formed between the first and second features, such that the
first and second features may not be in direct contact. In
addition, the present disclosure may repeat reference numerals
and/or letters in the various examples. This repetition is for the
purpose of simplicity and clarity and does not in itself dictate a
relationship between the various embodiments and/or configurations
discussed.
[0014] Further, spatially relative terms, such as "beneath,"
"below," "lower," "above," "upper" and the like, may be used herein
for ease of description to describe one element or feature's
relationship to another element(s) or feature(s) as illustrated in
the figures. The spatially relative terms are intended to encompass
different orientations of the device in use or operation in
addition to the orientation depicted in the figures. The apparatus
may be otherwise oriented (rotated 90 degrees or at other
orientations) and the spatially relative descriptors used herein
may likewise be interpreted accordingly.
[0015] Various embodiments are described with respect to a specific
context, namely a chemical mechanical polishing (CMP) apparatus and
a method of polishing a semiconductor wafer using the CMP
apparatus. Various embodiments include using magnets within a
polisher head and stator magnets to move the polisher head during a
CMP process. The stator magnets may be located, for example, within
the platen or external to the platen. The polarity and strength of
the stator magnets may be controlled to rotate the polisher head.
By using magnetic interaction to move the polisher head, polishing
uniformity may be improved. Additionally, maintenance cost of a CMP
apparatus may be reduced.
[0016] FIGS. 1 through 3A-3B illustrate views of a CMP device 100
in accordance with some embodiments. FIG. 1 illustrates a
perspective view, FIG. 2 illustrates a plan view, and FIGS. 3A-3B
illustrate a side view. The illustrations shown in FIGS. 1 through
FIGS. 3A-3B are also reflected schematically in the process flow
400 shown in FIG. 9.
[0017] In some embodiments, the CMP device 100 includes a platen
101 over which a polishing pad 103 has been placed. In some
embodiments, the polishing pad 103 may be a single layer or a
composite layer of materials such as felts, polymer impregnated
felts, microporous polymers films, microporous synthetic leathers,
filled polymer films, unfilled textured polymer films, or the like.
The polymers may include polyurethane, polyolefins, or the
like.
[0018] In some embodiments, a polisher head 105 is placed over the
polishing pad 103. The polisher head 105 includes a carrier 107, a
magnetic base 110, and a suction cup 108. The carrier 107 includes
one or more catch holes 106 to facilitate placing of the polisher
head 105 by a holder 150, described in greater detail below in
FIGS. 3A-B. During a CMP process, a wafer 109 is attached to the
polisher head 105 using the suction cup 108. The respective step is
illustrated as step 402 in the process flow 400 shown in FIG. 9.
The suction cup 108 may be, for example, a flexible membrane that
uses a pressure differential to securely hold the wafer 109. The
suction cup 108 may be used by, for example, generating a pressure
differential by pressing the wafer 109 and the suction cup 108
together to expel air from the volume enclosed by the wafer and the
suction cup 108. In some embodiments, an adhesive (e.g., a glue or
the like) may be used instead of the suction cup 108 or in addition
to the suction cup 108 to attach the wafer 109 to the polisher head
105. The wafer 109 is positioned so that the surface to be polished
faces downward towards the polishing pad 103. The magnetic base 110
of the polisher head 105 includes multiple magnets 120 that are
configured to interact with stator magnets (e.g., stators 130 or
stators 330, described below in FIGS. 4 and 6, respectively) in
order to apply a downward force or pressure on the wafer 109 when
the wafer 109 is in contact with the polishing pad 103. The
magnetic base 110 is also configured to interact with stator
magnets to translate or rotate the polisher head 105 during a CMP
process. In some embodiments, the polisher head 105 is freestanding
(e.g., not mechanically attached to another component) during a CMP
process.
[0019] In some embodiments, the CMP apparatus 100 includes a slurry
dispenser 111, which is configured to deposit a slurry 113 onto the
polishing pad 103. In some embodiments, the platen 101 is
configured to rotate, which can cause the slurry 113 to be
distributed between the wafer 109 and the polishing pad 103. In
some embodiments, the platen 101 remains fixed during a CMP
process. The composition of the slurry 113 depends on a type of
material to be polished. For example, the slurry may comprise a
reactant, an abrasive, a surfactant, and/or a solvent. The reactant
may be a chemical, such as an oxidizer or a hydrolyzer, which will
chemically react with a material of the wafer 109 in order to
assist the polishing pad 103 in grinding away the material. In some
embodiments in which the material is tungsten, the reactant may be
hydrogen peroxide, although any other suitable reactant, such as
hydroxylamine, periodic acid, ammonium persulfate, other
periodates, iodates, peroxomonosulfates, peroxymonosulfuric acid,
perborates, malonamide, combinations of these, and the like, that
will aid in the removal of the material may alternatively be
utilized. For example, tungsten may be deposited as part of a
replacement gate process in which the replacement gate comprises
tungsten, and a CMP process such as described herein may be used to
remove excess tungsten and/or planarize the tungsten. Other
reactants may be used in order to remove other materials. For
example, in some embodiments in which the material is an oxide, the
reactant may comprise HNO.sub.3, KOH, NH.sub.4OH, or the like. For
example, an oxide may be deposited to form a shallow trench
isolation (STI) region, an inter-layer dielectric (ILD) region, an
inter-metal dielectric (IMD) region, or the like, and a CMP process
such as described herein may be used to remove excess oxide and/or
planarize the oxide.
[0020] The abrasive may be any suitable particulate that, in
conjunction with the polishing pad 103, aids in the polishing of
the wafer 109. In some embodiments, the abrasive may comprise
silica, aluminum oxide, cerium oxide, polycrystalline diamond,
polymer particles such as polymethacrylate or polymethacryclic,
combinations of these, or the like.
[0021] The surfactant may be utilized to help disperse the reactant
and abrasive within the slurry 113 and to prevent (or at least
reduce) the abrasive from agglomerating during a CMP process. In
some embodiments, the surfactant may include sodium salts of
polyacrylic acid, potassium oleate, sulfosuccinates, sulfosuccinate
derivatives, sulfonated amines, sulfonated amides, sulfates of
alcohols, alkylanyl sulfonates, carboxylated alcohols, alkylamino
propionic acids, alkyliminodipropionic acids, potassium oleate,
sulfosuccinates, sulfosuccinate derivatives, sulfates of alcohols,
alkylanyl sulfonates, carboxylated alcohols, sulfonated amines,
sulfonated amides, alkylamino propionic acids,
alkyliminodipropionic acids, combinations of these, or the like.
However, these embodiments are not intended to be limited to these
surfactants, as any suitable surfactant may alternatively be
utilized as the surfactant.
[0022] The remainder of the slurry 113 may be a solvent that may be
utilized to combine the reactant, the abrasive, and/or the
surfactant and allow the mixture to be moved and dispersed onto the
polishing pad 103. In some embodiments, the solvent of the slurry
113 may be a solvent such as deionized (DI) water or an alcohol.
However, any other suitable solvent may alternatively be
utilized.
[0023] Referring to further to FIG. 1, in the illustrated
embodiment, the CMP apparatus 100 has a single polisher head (such
as the polisher head 105) and a single polishing pad (such as the
polishing pad 103). However, in other embodiments, the CMP
apparatus 100 may have multiple polisher heads and/or multiple
polishing pads. In some embodiments in which the CMP apparatus 100
has multiple polisher heads and a single polishing pad, multiple
wafers may be polished at the same time. In other embodiments in
which the CMP apparatus 100 has a single polisher head and multiple
polishing pads, a CMP process may be a multi-step process. In such
embodiments, a first polishing pad may be used for bulk material
removal from a wafer, a second polishing pad may be used for global
planarization of the wafer and a third polishing pad may be used to
buff a surface of the wafer. In some embodiments, different
slurries may be used for different CMP stages. In other
embodiments, the same slurry may be used for all CMP stages.
[0024] FIG. 2 illustrates a plan view of the CMP apparatus 100 in
accordance with some embodiments. In some embodiments, the polisher
head 105 is configured to be rotated in a clockwise or a
counter-clockwise direction, as indicated by the double-headed
arrow 102. In some embodiments, the polisher head 105 is configured
to be translated laterally over the surface of the polishing pad
103, as indicated by the double-headed arrows 104. In some
embodiments, the polisher head 105 may be rotated and translated
simultaneously.
[0025] FIGS. 3A-B illustrate side views of the CMP apparatus 100 in
accordance with some embodiments. In addition to the platen 101 and
polisher head 105 of the CMP apparatus (as shown in FIG. 1 and FIG.
2), FIG. 3A and FIG. 3B show a holder 150 in accordance with some
embodiments. The holder 150 holds the polisher head 105 and is used
to place the polisher head 105 onto the polishing pad 103 and also
may be used to remove the polisher head 105 from the polishing pad
103. FIG. 3A shows the holder 150 when it is not holding the
polisher head 105, and FIG. 3B shows the holder 150 when it is
holding the polisher head 105. The CMP apparatus 100 may include a
holder positioning apparatus (not shown) that is attached to the
holder 150 and is configured to raise, lower, translate, rotate, or
otherwise position the holder 150.
[0026] The holder 150 includes catches 152 configured to fit within
catch holes 106 in the carrier 107 of the polisher head 105, as
shown in FIG. 3B. The catches 152 are configured to be moved once
within the catch holes 106 such that the catches 152 are able to
hold the polisher head 150. The respective step is illustrated as
step 404 in the process flow 400 shown in FIG. 9. In this manner,
the holder 150 can place the polisher head 105 onto the polishing
pad 103 and then move the catches 152 to release the polisher head
105 (as shown in FIG. 3A). The respective steps are illustrated as
steps 406 and 408 in the process flow 400 shown in FIG. 9. In some
embodiments, the wafer 109 is attached to the suction cup 108 while
the polisher head 150 is held by the holder 150. To remove the
polisher head 105 from the polishing pad 103 (e.g., after the CMP
process is completed), the holder 150 may align the catches 152
over the catch holes 106, insert the catches 152 into the catch
holes 106, and then lift the polisher head 105 (as shown in FIG.
3B). The respective steps are illustrated as steps 416 and 418 in
the process flow 400 shown in FIG. 9.
[0027] In this manner, the polisher head 105 may be placed on the
polishing pad 103 such that during a CMP process, the polisher head
105 is free to move without being attached to another component of
the CMP apparatus 100. In some embodiments, the polisher head 105
is placed on the polishing pad 103 and released by the holder 150
(e.g., by moving the catches 152) prior to rotation of the polisher
head 150 by the magnetic fields generated by the stators 130,
described in greater detail below. The holder 150 shown in FIG. 3
is an example, and in other embodiments, catches 152 and/or catch
holes 106 may be more or fewer than shown in FIG. 1, 2, or 3A-B and
may have other shapes or configurations.
[0028] Turning to FIG. 4, a magnetic base 110 and a platen 201 are
shown, in accordance with some embodiments. The magnetic base 110
and platen 201 shown in FIG. 4 may be part of a CMP apparatus such
as CMP apparatus 100 shown in FIGS. 1 through 3A-B or CMP apparatus
200 shown in FIGS. 5A-B. For clarity, other components of the CMP
apparatus are not shown in FIG. 4. The magnetic base 110 may be
part of a polisher head 105 similar to those shown in FIGS. 1
through 3A-B, and the platen 201 may be similar to the platen 101
shown in FIGS. 1 through 3A-B.
[0029] The magnetic base 110 shown in FIG. 4 includes multiple
magnets 120. FIG. 4 illustrates ten magnets 120, but more or fewer
magnets 120 may be present in other embodiments. In some
embodiments, the magnets 120 are evenly spaced around the perimeter
of the magnetic base 110, as shown in FIG. 4, though the magnets
120 may have other arrangements in other embodiments. In some
embodiments, the magnets 120 are arranged such that the
orientations of adjacent magnets 120 are parallel and have opposite
polarity. As an illustrative example, magnet 120A is oriented
parallel to the axis of the magnetic base 110, with the north ("N")
pole of the magnet 120A toward the bottom of the magnetic base 110
and with the south ("S") pole of the magnet 120A toward the top of
the magnetic base 110. The magnet 120B is adjacent the magnet 120A
and parallel to the axis of the magnetic base 110 (and thus is also
parallel to the magnet 120A), but the south pole of the magnet 120B
is toward the bottom of the magnetic base 110 and the north pole of
the magnet 120B is toward the top of the magnetic base 110. The
magnets 120 may be any suitable magnets, such as permanent magnets
(e.g., comprising Ferrite, NdFeB, or the like), electromagnets
(e.g., comprising copper wiring around a core or the like),
superconducting magnets (e.g., NbTi, (RE)BCO, or the like), other
types of magnets, the like, or a combination.
[0030] The platen 201 shown in FIG. 4 is similar to the platen 101
shown in FIGS. 1 through 3B, except the platen 201 includes
multiple stators 130. The stators 130 are controllable magnets
(e.g., electromagnets or the like) disposed within the platen 201.
In some embodiments, the stators 130 are stationary with respect to
the polisher head 105 during a CMP process, and in some
embodiments, the platen 101 and/or the stators 130 rotate during a
CMP process. The stators 130 are configured to generate magnetic
fields that interact with the magnetic fields of the magnets 120 of
the magnetic base 110 in order to move the polisher head 105
(described in greater detail below). FIG. 4 illustrates eight
stators 130, but more or fewer stators 130 may be present in other
embodiments. The number of stators 130 within the platen 201 may be
the same as or different than the number of magnets 120 in the
polisher head 105 of the CMP apparatus 100. In some embodiments,
the stators 130 are evenly spaced around the perimeter of the
platen 201, as shown in FIG. 4, though the stators 130 may have
other arrangements in other embodiments. The stators 130 may be
oriented parallel to the axis of the platen 201 or parallel to the
top surface of the platen 201, or a combination.
[0031] In some embodiments, each of the stators 130 within the
platen 201 are connected to a controller 132. The controller 132 is
configured to control each stator 130 to control its magnetic field
strength and/or polarity. For example, the controller 132 can
control the electrical power supplied to a stator 130 to increase
or decrease the strength of the magnetic fields generated by that
stator 130. For example, to begin the CMP process, the controller
132 can provide power to the stators 130 in order to generate
magnetic fields using the stators 130. The respective step is
illustrated as step 410 in the process flow 400 shown in FIG. 9. In
some embodiments, the controller 132 may send signals to a stator
130 that instruct the stator 130 to adjust its magnetic field
strength and/or polarity. In some embodiments, a stator 130 may
generate a magnetic field having between about 100 Gauss and about
20,000 Gauss, though other magnetic fields are possible. In some
cases, generating a stronger magnetic field may allow for a greater
pressure to be exerted between the wafer 109 and the polishing pad
103. In this manner, stators 130 that are configured to generate a
larger range of magnetic field strengths can allow for more
flexibility and control of the polishing pressures used during a
CMP process. In some embodiments, the controller 132 can control
the polarity of the electrical power (e.g., direction of electrical
current or polarity of voltage) supplied to a stator 130 in order
to control the polarity of the magnetic fields generated by that
stator 130. For example, the controller 132 can control a stator
130 to have either its north pole or its south pole oriented toward
one end of the stator 130, and the controller 132 can control the
stator 130 to reverse the polarity of the stator 130. In some
cases, the polarity of the electrical power may be controlled to
have a sinusoidal variation in time.
[0032] Turning to FIGS. 5A-5B, plan views of an example operation
of a CMP apparatus 200 is shown, in accordance with some
embodiments. The CMP apparatus 200 may be similar to the CMP
apparatus 100 (see FIGS. 1 through 3A-B). The CMP apparatus 200
includes a polisher head 105 that includes a magnetic base 110,
which may be similar to the magnetic base 110 described in FIG. 4.
The CMP apparatus 200 also includes a platen 201 similar to the
platen 201 described in FIG. 4. FIGS. 5A-5B show the polisher head
105 as placed on the polishing pad 103 (not shown in FIGS. 5A-B)
during a CMP process, similar to FIGS. 1 and 3A. In FIGS. 5A-5B,
the poles of the magnets 120 closest to the platen 201 are labeled
as "N" for north and "S" for south, and the poles of the stators
130 closest to the polisher head 105 are also labeled. For example,
as shown in FIGS. 5A-5B, the magnet 120A has its north pole
oriented toward the bottom of the magnetic base 110, and the magnet
120B has its south pole oriented toward the bottom of the magnetic
base 110, similar to magnet 120A and magnet 120B shown in FIG. 4.
The illustrations shown in FIGS. 5A-5B are also reflected
schematically in the process flow 400 shown in FIG. 9.
[0033] In FIGS. 5A-5B, the strength and polarity of the stators 130
are controlled (e.g., by controller 132) to translate and rotate
the polisher head 105 using the interaction (e.g., attraction or
repulsion) between the magnetic fields of the stators 130 and the
magnetic fields of the magnets 120. The strength and polarity of
the stators 130 may be controlled based on the position or
orientation of the polisher head 105 in order to move the polisher
head 105. For example, in FIG. 5A, the polarity of stator 130A is
controlled such that the south pole of stator 130A is oriented
toward the top of the platen 201, and the polarity of stator 130B
is controlled such that the north pole of stator 130A is oriented
toward the top of the platen 201.
[0034] After the polisher head 105 has been placed on the polishing
pad 103 and released by the holder 150 (e.g., steps 404 and 406 in
FIG. 9), the controller 132 may be used to control the magnetic
fields of the stators 130 to polish the wafer 109 by rotating
and/or translating the polisher head 105 on the polishing pad 103.
The respective step is illustrated as step 412 in the process flow
400 shown in FIG. 9. Because the polisher head 105 is freestanding
after being released by the holder 150, the polisher head 105 may
be rotated or translated on the polishing pad 103 without
limitations imposed by mechanical linkages, wires, tubes, etc. In
some embodiments, to rotate the polisher head 105, the controller
132 may repeatedly reverse the polarities of the stators 130. For
example, the controller 132 may supply alternating currents to the
stators 130, the alternating currents having appropriate
frequencies to produce the desired rotation. At the moment shown in
FIG. 5A, the south pole of stator 130A attracts the north pole of
magnet 120A and repels the south pole of magnet 120B. The north
pole of stator 130B also attracts the south pole of magnet 120B.
Similarly, other stators 130 attract or repel corresponding nearby
magnets 120. This interaction between the magnets 120 within the
polisher head 105 and the stators 130 that surround the polisher
head 105 causes the polisher head 105 to rotate. Turning to FIG.
5B, the polisher head 105 has been rotated, and the controller 132
has reversed the polarity of the stators 130. The controller 132
reverses the polarity of the stators 130 to maintain the rotation
of the polisher head 105. For example, in FIG. 5B, the polarity of
stator 130A has been reversed, and the north pole of stator 130A
repels the north pole of magnet 130A. The polarity of stator 130B
has been reversed, and the south pole of stator 130B attracts the
north pole of magnet 130A and repels the south pole of magnet 120A.
The polarity of the stators 130 may be subsequently reversed to
continue rotating the polisher head 105. In this manner, the
polisher head 105 can be rotated during a CMP process.
[0035] In FIGS. 5A-5B, the polisher head 105 is rotated in a
counter-clockwise direction, but in other cases the polisher head
105 may be rotated in a clockwise direction or may maintain a fixed
angular position. In some embodiments, the controller 132 may not
reverse the polarity of all of the stators 130 simultaneously
during a CMP process. In some embodiments, the controller 132 may
activate or deactivate some stators 130 during a CMP process to
translate or rotate the polisher head 105. In some cases, the
controller 132 may control the stators 130 to increase or decrease
the speed of rotation. The polisher head 105 may be rotated about a
fixed axis or may be rotated about a moving axis. In some
embodiments, the polisher head 105 may be rotated at a speed
between about 0 RPM and about 1000 RPM. By controlling the rotation
speed, some characteristics of the CMP process may be controlled,
such as the material removal rate. Thus, the use of magnetic fields
generated by stators 130 as described can allow for greater
flexibility and dynamic control of the CMP process. Additionally,
FIGS. 5A-B illustrate the polisher head 105 as being off-centered
from the platen 201, but in other cases the polisher head 105 may
be maintained approximately centered on the platen 201.
[0036] In some embodiments, the controller 132 may reduce or cease
powering the stators 130 to stop the polisher head 105 from moving.
For example, after the wafer 109 has been sufficiently polished,
the stators 130 may be controlled in this manner to stop further
polishing due to movement of the polisher head 105. The respective
step is illustrated as step 414 in the process flow 400 shown in
FIG. 9. The holder 150 may then be controlled to remove the
polisher head 105 from the polishing pad 103 by aligning the
catches 152 over the catch holes 106, inserting the catches 152
into the catch holes 106, and then lifting the polisher head 105
from the polishing pad 103. The respective steps are illustrated as
steps 416 and 418 in the process flow 400 shown in FIG. 9. In some
embodiments, the stators 103 may be controlled to position the
polisher head 105 at a particular location or orientation on the
polishing pad 103 to facilitate removal of the polisher head 105 by
the holder 150. After removing the polisher head 105 from the
polishing pad 103, the wafer 109 may be released from the suction
cup 108. The respective step is illustrated as step 420 in the
process flow 400 shown in FIG. 9. In some cases, the polisher head
105 may be released from the holder 150 prior to releasing the
wafer 109 from the suction cup 108.
[0037] In addition to the lateral forces that rotate the polisher
head 105, the interaction between the magnetic fields of the
magnets 120 and the magnetic fields of the stators 130 to can be
controlled to produce vertical forces on the polisher head 105 that
press the wafer 109 into the polishing pad 103. For example, the
controller 132 may control the strength of the magnetic fields of
the stators 130 such that the vertical component of the attractive
forces between the magnets 120 and the stators 130 are greater than
the vertical component of the repulsive forces between the magnets
120 and the stators 130. For example, the polarity and strength of
each stator 130 may be controlled to increase the attractive forces
exerted by stators 130 that are close to magnets 120 of opposite
polarity by increasing the strength of those stators' 130 magnetic
fields and to decrease the repulsive forces exerted by stators 130
that are close to magnets 120 of the same polarity by decreasing
the strength of those stators' 130 magnetic fields. In some
embodiments, the stators 130 may be controlled to provide a
pressure of the wafer 109 against the polishing pad 103 that is
between about 0 psi and about 10 psi. By controlling the pressure,
some characteristics of the CMP process may be controlled, such as
the material removal rate. Thus, the use of magnetic fields
generated by stators 130 as described can allow for greater
flexibility and dynamic control of the CMP process.
[0038] In this manner, the interaction of the magnets 120 in the
polisher head 105 and the stators 130 in the platen 201 can be
controlled to polish the wafer 109 during a CMP process. By the use
of magnets to move a freestanding polisher head 105 during a CMP
process, there may be less chance of mechanical or electrical
failure than if the polisher head 105 were moved by a mechanism
during a CMP process. In some cases, maintenance costs may also be
relatively lower. Additionally, the magnetic fields generated by
the stators 130 can be controlled to generate uniform pressure
between the wafer 109 and the polishing pad 103. In some cases, the
wafer 109 can be maintained at a more parallel orientation with
respect to the polishing pad 103, reducing uneven polishing of the
wafer 109.
[0039] Turning to FIG. 6, a CMP apparatus 300 is shown, in
accordance with some embodiments. The CMP apparatus 300 may be
similar to the CMP apparatus 100 (see FIGS. 1 through 3A-3B) or CMP
apparatus 200 (see FIGS. 5A-5B), except the CMP apparatus 300
includes stators 330 that are external to the platen 101. The CMP
apparatus 300 includes a polisher head 105 that includes a magnetic
base 110, which may be similar to the magnetic base 110 described
in FIG. 4 or may be similar to the magnetic base 110 described
below in FIG. 7. FIG. 6 shows the polisher head 105 as placed on
the polishing pad 103 during a CMP process, similar to FIGS. 1 and
3A. The illustration shown in FIG. 6 is also reflected
schematically in the process flow 400 shown in FIG. 9.
[0040] Still referring to FIG. 6, the stators 330 are attached to
the CMP apparatus 300 such that they are laterally separated from
the polisher head 105 and the platen 101. The stators 330 surround
the polisher head 105 and are configured to generate magnetic
fields that interact with the magnetic fields of the magnets 120 of
the magnetic base 110 in order to move the polisher head 105
(described in greater detail below). In some embodiments, the
stators 330 are stationary with respect to the polisher head 105
during a CMP process. In some embodiments, each of the stators 330
are connected to a controller 132, which may be similar to the
controller 132 described previously in FIG. 4. The controller 132
is configured to control each stator 330 to control its magnetic
field strength and/or polarity. In some embodiments, the controller
132 may send signals to a stator 330 that instruct the stator 330
to adjust its magnetic field strength and/or polarity. In some
embodiments, a stator 330 may generate a magnetic field having
between about 100 Gauss and about 20,000 Gauss. In some cases,
generating a stronger magnetic field may allow for a greater
pressure to be exerted between the wafer 109 and the polishing pad
103, or to increase the rotational/translational forces exerted on
the polishing head 105. In this manner, stators 330 that are
configured to generate a larger range of magnetic field strengths
can allow for more flexibility and control of the polishing
pressures or polishing head 105 movement during a CMP process. In
some embodiments, the controller 132 can control the polarity of
the electrical power (e.g., direction of electrical current or
polarity of voltage) supplied to a stator 330 in order to control
the polarity of the magnetic fields generated by that stator 330.
For example, the controller 132 can control a stator 330 to have
either its north pole or its south pole oriented toward one end of
the stator 330, and the controller 132 can control the stator 330
to reverse the polarity of the stator 330.
[0041] In some embodiments, the stators 330 are configured to be
repositioned in order to control the interaction between the
magnetic fields of the stators 330 and the magnetic fields of the
polisher head 105. For example, a stator 330 may be brought closer
to the polisher head 105 to increase the strength of the magnetic
field of the stator 330 that interacts with the polisher head 105.
As another example, a stator 330 may be tilted to change the
relative strengths of the horizontal component and vertical
component of the magnetic field of the stator 330 that interacts
with the polisher head 105. For example, the stators 330 may be
tilted to an angle between about 0 degrees and about 90 degrees
with respect to the plane of the platen 101. A more vertical angle
(e.g., closer to 90 degrees) may impart a stronger vertical
component of the magnetic field relative to the horizontal
component, and a more horizontal angle (e.g., closer to 0 degrees)
may impart a stronger horizontal component of the magnetic field
relative to the vertical component. By adjusting the location
and/or tilt of the stators 330 in this manner, the movement of the
polisher head 105 may be controlled during a CMP process.
[0042] In some embodiments, the repositioning of the stators 330
may be controlled by the controller 132. For example, the
controller 132 may send signals to actuators (not shown) connected
to the stators that translate and/or tilt the stators 330. In some
embodiments, the stators 330 may be repositioned collectively or
repositioned separately. For example, different stators 330 may be
positioned at the same relative height or tilt angle, or different
stators may be positioned at different relative heights or tilt
angles. FIG. 6 shows example repositioning of the stators 330 to
positions 332, though stators 330 may be repositioned in other
orientations or arrangements. In some embodiments, the positions of
individual stators 330 may be adjusted during a CMP process, for
example, to impart a greater or lesser magnetic field on a
particular region of the polisher head 105. In this manner, the
strength and/or position of the stators 330 may be adjusted during
a CMP process to maintain a more level polishing, for instance.
[0043] Turning to FIG. 7, a magnetic base 110 is shown, in
accordance with some embodiments. The magnetic base 110 may be used
as part of a polisher head 105 such as that shown in FIG. 6 or 8.
The magnetic base 110 is similar to the magnetic base 110 shown in
FIG. 4, except for the arrangement of the magnets 120. FIG. 7
illustrates eight magnets 120, but more or fewer magnets 120 may be
present in other embodiments. In some embodiments, the magnets 120
are evenly spaced in a single ring around the perimeter of the
magnetic base 110, as shown in FIG. 7, though the magnets 120 may
have other arrangements or orientations in other embodiments. As
shown in FIG. 7, the magnets 120 are arranged such that the magnets
120 are positioned end-to-end in a ring pattern. The magnets 120
are arranged such that the adjacent poles of neighboring magnets
are opposite poles (e.g., the north pole of one magnet 120 is
adjacent the south pole of a neighboring magnet 120). In this
manner, the magnets 120 are arranged laterally within the magnetic
base 110, in which all of the magnetic poles of the magnets 120 are
approximately coplanar. The magnets 120 may be any suitable
magnets, such as those described above in FIG. 4. The illustration
shown in FIG. 7 is also reflected schematically in the process flow
400 shown in FIG. 9.
[0044] Turning to FIG. 8, a plan view of an example operation of a
CMP apparatus 300 is shown, in accordance with some embodiments.
FIG. 8 shows the polisher head 105 as placed on the polishing pad
103 (not shown in FIG. 8) during a CMP process, similar to FIGS.
5A-B. FIG. 8 illustrates eight stators 330 and a polisher head 105
having four magnets 120, but more or fewer stators 330 or magnets
120 may be present in other embodiments. The number of stators 330
may be the same as or different than the number of magnets 120 in
the polisher head 105 of the CMP apparatus 300. FIG. 8 shows the
stators 330 as evenly spaced in a circular arrangement surrounding
the polisher head 105, but in other embodiments, the stators 130
may not be evenly spaced or may not be in a circular arrangement.
The illustration shown in FIG. 8 is also reflected schematically in
the process flow 400 shown in FIG. 9.
[0045] Referring to FIG. 8, the strength and polarity of the
stators 330 are controlled (e.g., by controller 132) to translate
and rotate the polisher head 105 using the interaction (e.g.,
attraction or repulsion) between the magnetic fields of the stators
330 and the magnetic fields of the magnets 120. The movement of the
polisher head 105 by the stators 330 shown in FIG. 8 may be similar
in operation to the movement of the polisher head 105 by the
stators 130 shown in FIGS. 5A-B. For example, at the moment shown
in FIG. 8, the south pole of stator 330A attracts the north pole of
magnet 120C and repels the south pole of magnet 120D. The north
pole of stator 330B also attracts the south pole of magnet 120D and
repels the north pole of magnet 120D. Similarly, other stators 330
attract or repel corresponding nearby magnets 120. This interaction
between the magnets 120 within the polisher head 105 and the
stators 330 that surround the polisher head 105 causes the polisher
head 105 to rotate. In some embodiments, to rotate the polisher
head 105, the controller 132 may repeatedly reverse the polarities
of the stators 330.
[0046] In FIG. 8, the polisher head 105 is rotated in a
counter-clockwise direction, but in other cases the polisher head
105 may be rotated in a clockwise direction or may maintain a fixed
angular position. In some embodiments, the controller 132 may not
reverse the polarity of all of the stators 330 simultaneously
during a CMP process. In some embodiments, the controller 132 may
activate or deactivate some stators 330 during a CMP process to
translate or rotate the polisher head 105. In some embodiments, the
controller 132 may reposition the stators 330 during a CMP process.
In some cases, the controller 132 may control the stators 330 to
increase or decrease the speed of rotation. The polisher head 105
may be rotated about a fixed axis or may be rotated about a moving
axis. In some embodiments, the polisher head 105 may be rotated at
a speed between about 0 RPM and about 1000 RPM. By controlling the
rotation speed, some characteristics of the CMP process may be
controlled, such as the material removal rate. Thus, the use of
magnetic fields generated by stators 330 as described can allow for
greater flexibility and dynamic control of the CMP process.
Additionally, FIG. 8 illustrates the polisher head 105 as being
off-centered from the platen 101, but in other cases the polisher
head 105 may be maintained approximately centered on the platen
101. In some embodiments, the platen 101 may be rotated (e.g. by a
motor) during the CMP process.
[0047] Additionally, the interaction between the magnetic fields of
the magnets 120 and the magnetic fields of the stators 330 to can
be controlled to produce a vertical force on the polisher head 105
that presses the wafer 109 into the polishing pad 103. For example,
the controller 132 may control the strength of the magnetic fields
of the stators 330 or the positions of the stators 330 such that
the vertical component of the repulsive forces between the magnets
120 and the stators 330 are greater than the vertical component of
the attractive forces between the magnets 120 and the stators 330.
For example, stators 330 that are closer to magnets 120 of opposite
polarity may have their magnetic strength decreased to decrease the
attractive forces, and stators that are closer to magnets 120 of
the same polarity may have their magnetic strength increased to
increase the repulsive forces. In some embodiments, the controller
132 may control the vertical position, lateral position, radial
position, or the tilt of the stators 330 in order to control the
vertical force on the polisher head 105. In some embodiments, the
stators 130 may be controlled to provide a pressure of the wafer
109 against the polishing pad 103 that is between about 0 psi and
about 10 psi.
[0048] In some cases, the use of magnets to move a polisher head
during a CMP process may allow for a more uniform polish. The
magnetic interaction can be controlled during the CMP process to
both translate and rotate the polisher head. Additionally, the
pressure with which the polisher head presses on the polishing pad
may be controlled by controlling the magnetic interaction. In some
cases, the polishing head may be freestanding and not connected to
another component during a CMP process. A holder mechanism may be
used to place the polisher head on the polishing pad or remove the
polisher head from the polishing pad. In some cases, the polisher
head may have no mechanical or electronic components, for example,
if the magnets used are permanent magnets, or if the wafer is held
in place by a suction cup instead of an actively generated negative
pressure. By using magnets to move the polisher head, the number of
mechanical or electronic components (e.g., linkages, motors,
tubing, bearings, wiring, etc.) in a CMP apparatus may be reduced.
By using fewer such components, the likelihood of component
breakdown may be reduced, and the cost of component maintenance may
also be reduced. The weight or cost of a CMP apparatus may also be
reduced.
[0049] In an embodiment, a method includes placing a polisher head
on platen, the polisher head including a set of first magnets, and
controlling a set of second magnets to rotate the polisher head on
the platen, wherein controlling the set of second magnets includes
reversing the polarity of at least one second magnet of the set of
second magnets to produce a magnetic force on at least one first
magnet of the set of first magnets, wherein the set of second
magnets are external to the polisher head. In an embodiment, the
set of second magnets is disposed within the platen. In an
embodiment, the set of second magnets is external to the platen. In
an embodiment, controlling the set of second magnets further
includes vertically translating at least one second magnet of the
set of second magnets. In an embodiment, controlling the set of
second magnets includes controlling the strength of the magnetic
force generated by at least one second magnet of the set of second
magnets. In an embodiment, the magnetic force includes a downward
force. In an embodiment, the polisher head is placed on the platen
by a polisher head holder, and wherein after placing the polisher
head on the platen, the polisher head is detached from the polisher
head holder. In an embodiment, the polisher head is free of
electrical connections to other components. In an embodiment,
controlling the set of second magnets includes simultaneously
controlling the polarity of each second magnet of the set of second
magnets. In an embodiment, the first magnets are oriented laterally
within the polisher head.
[0050] In an embodiment, a method includes attaching a wafer to a
polisher head, wherein the polisher head includes multiple first
magnets, placing the polisher head on a platen, wherein the platen
includes multiple second magnets, wherein each second magnet
includes an electromagnet coupled to a controller, and using the
controller, controlling the electrical power delivered to each
second magnet to generate magnetic fields that impart lateral
forces on the multiple first magnets to rotate the polisher head
with respect to the platen. In an embodiment, the multiple first
magnets are oriented vertically within the polisher head. In an
embodiment, the method further includes controlling the electrical
power delivered to each second magnet to generate magnetic fields
that impart vertical forces on the multiple first magnets to press
the wafer onto the platen. In an embodiment, the wafer is pressed
onto the platen with a pressure between 0 psi and 10 psi. In an
embodiment, the method further includes controlling the electrical
power delivered to each second magnet to generate magnetic fields
that impart lateral forces to laterally translate the polisher
head. In an embodiment, the polisher head includes a suction cup,
and wherein attaching the wafer to the polisher head includes using
the suction cup. In an embodiment, after placing the polisher head
on the platen, the polisher head is free of mechanical connection
to the platen.
[0051] In an embodiment, a polishing apparatus includes a polisher
head, the polisher head including multiple first magnets, a platen
including multiple second magnets, a holder configured to place the
polisher head on the platen, wherein the holder is configured to
release the polisher head after placing the polisher head on the
platen, and a controller coupled to the multiple second magnets,
the controller configured to control the polarity of each of the
second magnets to rotate the polisher head after the holder has
released the polisher head. In an embodiment, the polisher head
includes catch holes, and the holder includes catch mechanisms
configured to be inserted within the catch holes. In an embodiment,
the first magnets include permanent magnets.
[0052] The foregoing outlines features of several embodiments so
that those skilled in the art may better understand the aspects of
the present disclosure. Those skilled in the art should appreciate
that they may readily use the present disclosure as a basis for
designing or modifying other processes and structures for carrying
out the same purposes and/or achieving the same advantages of the
embodiments introduced herein. Those skilled in the art should also
realize that such equivalent constructions do not depart from the
spirit and scope of the present disclosure, and that they may make
various changes, substitutions, and alterations herein without
departing from the spirit and scope of the present disclosure.
* * * * *