| Patent | Date |
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Methods to clean chemical mechanical polishing systems
Grant 11,446,785 - Chang , et al. September 20, 2 | 2022-09-20 |
Semiconductor device structure with interconnect structure and method for forming the same
Grant 11,417,566 - Kung , et al. August 16, 2 | 2022-08-16 |
Chemical mechanical polishing method
Grant 11,373,879 - Chen , et al. June 28, 2 | 2022-06-28 |
Methods and systems for chemical mechanical polish cleaning
Grant 11,264,232 - Lee , et al. March 1, 2 | 2022-03-01 |
Composition And Method For Polishing And Integrated Circuit
App 20220017780 - CUI; JI ; et al. | 2022-01-20 |
Multiple metallization scheme
Grant 11,217,479 - Ho , et al. January 4, 2 | 2022-01-04 |
Slurry Composition And Method For Polishing And Integratged Circuit
App 20210371702 - CUI; JI ; et al. | 2021-12-02 |
Magnetic Slurry for Highly Efficiency CMP
App 20210327720 - Chen; Yen-Ting ; et al. | 2021-10-21 |
Semiconductor structure with doped contact plug and method for forming the same
Grant 11,145,751 - Chen , et al. October 12, 2 | 2021-10-12 |
Chemical Mechanical Polish Slurry and Method of Manufacture
App 20210313190 - Kung; Chun-Hao ; et al. | 2021-10-07 |
Chemical Mechanical Polishing Apparatus And Method
App 20210205950 - Wang; Shang-Yu ; et al. | 2021-07-08 |
Magnetic slurry for highly efficient CMP
Grant 11,056,352 - Chen , et al. July 6, 2 | 2021-07-06 |
Bevel Edge Removal Methods, Tools, And Systems
App 20210202239 - Huang; Hui-Chi ; et al. | 2021-07-01 |
Chemical mechanical polish slurry and method of manufacture
Grant 11,043,396 - Kung , et al. June 22, 2 | 2021-06-22 |
Detecting the cleanness of wafer after post-CMP cleaning
Grant 10,957,609 - Yen , et al. March 23, 2 | 2021-03-23 |
Chemical mechanical polishing apparatus and method
Grant 10,953,514 - Wang , et al. March 23, 2 | 2021-03-23 |
Chemical Mechanical Polishing Apparatus And Method
App 20210078130 - Wang; Shang-Yu ; et al. | 2021-03-18 |
Compositions for use in chemical mechanical polishing
Grant 10,947,414 - Chih , et al. March 16, 2 | 2021-03-16 |
Chemical Mechanical Planarization Tool
App 20210053184 - Chen; Tung-Kai ; et al. | 2021-02-25 |
Novel CMP Pad Design and Method of Using the Same
App 20210053179 - Su; Pin-Chuan ; et al. | 2021-02-25 |
Mega-sonic Vibration Assisted Chemical Mechanical Planarization
App 20210016415 - Kung; Chun-Hao ; et al. | 2021-01-21 |
Chemical Mechanical Polishing Method
App 20200411329 - CHEN; TUNG-KAI ; et al. | 2020-12-31 |
Chemical mechanical polishing method
Grant 10,777,423 - Chen , et al. Sept | 2020-09-15 |
Methods To Clean Chemical Mechanical Polishing Systems
App 20200130138 - CHANG; Chih-Chieh ; et al. | 2020-04-30 |
Multiple Metallization Scheme
App 20200043784 - Ho; Hsin-Ying ; et al. | 2020-02-06 |
Semiconductor Device Structure with Interconnect Structure and Method for Forming the Same
App 20200043777 - Kung; Chun-Hao ; et al. | 2020-02-06 |
Self-healing Polishing Pad
App 20200039022 - Kung; Chun-Hao ; et al. | 2020-02-06 |
Chemical Mechanical Polish Slurry and Method of Manufacture
App 20200043745 - Kung; Chun-Hao ; et al. | 2020-02-06 |
Compositions For Use In Chemical Mechanical Polishing
App 20200040221 - CHIH; Fang-I ; et al. | 2020-02-06 |
Magnetic Slurry for Highly Efficient CMP
App 20200043747 - Chen; Yen-Ting ; et al. | 2020-02-06 |
Semiconductor Structure With Doped Contact Plug And Method For Forming The Same
App 20190305107 - CHEN; Kuo-Ju ; et al. | 2019-10-03 |
Chemical Mechanical Polishing Method
App 20190157103 - CHEN; TUNG-KAI ; et al. | 2019-05-23 |
Detecting the Cleanness of Wafer after Post-CMP Cleaning
App 20190122942 - Yen; Yu-Ting ; et al. | 2019-04-25 |
Post-CMP Cleaning and Apparatus for Performing the Same
App 20190096661 - Huang; Hui-Chi | 2019-03-28 |
Detecting the cleanness of wafer after post-CMP cleaning
Grant 10,157,801 - Yen , et al. Dec | 2018-12-18 |
Methods and Systems for Chemical Mechanical Polish Cleaning
App 20180247838 - Lee; Chien-Ping ; et al. | 2018-08-30 |
Methods and systems for chemical mechanical polish cleaning
Grant 9,966,281 - Lee , et al. May 8, 2 | 2018-05-08 |
Planarization process for forming semiconductor device structure
Grant 9,859,165 - Wu , et al. January 2, 2 | 2018-01-02 |
Detecting the Cleanness of Wafer After Post-CMP Cleaning
App 20170194217 - Yen; Yu-Ting ; et al. | 2017-07-06 |
Methods of forming contact feature
Grant 9,620,628 - Huang , et al. April 11, 2 | 2017-04-11 |
Adaptive endpoint method for pad life effect on chemical mechanical polishing
Grant 9,333,619 - Lee , et al. May 10, 2 | 2016-05-10 |
Systems and methods for chemical mechanical planarization with fluorescence detection
Grant 9,305,851 - Liu , et al. April 5, 2 | 2016-04-05 |
Post-CMP Cleaning and Apparatus for Performing the Same
App 20150147883 - Huang; Hui-Chi | 2015-05-28 |
Methods And Systems For Chemical Mechanical Polish Cleaning
App 20150140818 - Lee; Chien-Ping ; et al. | 2015-05-21 |
Systems And Methods For Chemical Mechanical Planarization With Fluorescence Detection
App 20150140691 - LIU; I-SHUO ; et al. | 2015-05-21 |
Field effect transistors and method of forming the same
Grant 8,969,922 - Liu , et al. March 3, 2 | 2015-03-03 |
Semiconductor Device and Method of Forming the Same
App 20130200461 - Liu; Chia-Chu ; et al. | 2013-08-08 |
Adapative Endpoint Method For Pad Life Effect On Chemical Mechanical Polishing
App 20130146224 - Lee; Chu-An ; et al. | 2013-06-13 |
Adaptive endpoint method for pad life effect on chemical mechanical polishing
Grant 8,367,429 - Lee , et al. February 5, 2 | 2013-02-05 |
Adaptive Endpoint Method For Pad Life Effect On Chemical Mechanical Polishing
App 20120231555 - Lee; Chu-An ; et al. | 2012-09-13 |
Retaining Structure, Disk Retaining Structure And Disk Storage Structure With Double-face Carrier Function
App 20110215011 - CHANG; CHIN-CHI ; et al. | 2011-09-08 |
Multiple optical disc storage case with anti-theft mechanism
App 20080017534 - Lo; Ming-Chien ; et al. | 2008-01-24 |
Disc box structure
App 20070158218 - Chan; Hsun-Cheng ; et al. | 2007-07-12 |
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