Ring for a plasma processing apparatus

Isozaki , et al.

Patent Grant D891636

U.S. patent number D891,636 [Application Number D/688,724] was granted by the patent office on 2020-07-28 for ring for a plasma processing apparatus. This patent grant is currently assigned to Hitachi High-Tech Corporation. The grantee listed for this patent is Hitachi High-Tech Corporation. Invention is credited to Takao Arase, Masakazu Isozaki, Taku Iwase, Masahito Mori, Kenetsu Yokogawa.


United States Patent D891,636
Isozaki ,   et al. July 28, 2020

Ring for a plasma processing apparatus

Claims

CLAIM The ornamental design for a ring for a plasma processing apparatus, as shown and described.
Inventors: Isozaki; Masakazu (Tokyo, JP), Mori; Masahito (Tokyo, JP), Yokogawa; Kenetsu (Tokyo, JP), Arase; Takao (Tokyo, JP), Iwase; Taku (Tokyo, JP)
Applicant:
Name City State Country Type

Hitachi High-Tech Corporation

Minato-ku, Tokyo

N/A

JP
Assignee: Hitachi High-Tech Corporation (Tokyo, JP)
Appl. No.: D/688,724
Filed: April 24, 2019

Foreign Application Priority Data

Oct 25, 2018 [JP] 2018-023399
Current U.S. Class: D24/224
Current International Class: 2402
Field of Search: ;D24/104,110.6,113,129,144,193,197,206,216,224 ;D23/200,213,214,215

References Cited [Referenced By]

U.S. Patent Documents
D694790 December 2013 Matsumoto et al.
D694791 December 2013 Matsumoto et al.
D697038 January 2014 Matsumoto et al.
8703249 April 2014 Tong
9123661 September 2015 Kellogg
9165812 October 2015 Ouye
D802790 November 2017 Tauchi
D810705 February 2018 Krishnan
D836573 December 2018 Ichino
10170283 January 2019 Kubota
D840365 February 2019 Ichino
D871608 December 2019 Okuda
D871609 December 2019 Isozaki
Primary Examiner: Hattan; Susan Bennett
Assistant Examiner: Tisdell; Suzanne E
Attorney, Agent or Firm: Crowell & Moring LLP

Description



FIG. 1 is a front, bottom and right side perspective view of a ring for a plasma processing apparatus according to the design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a left side elevational view thereof;

FIG. 4 is a right side elevational view thereof;

FIG. 5 is a top plan view thereof;

FIG. 6 is a bottom plan view thereof;

FIG. 7 is a rear elevational view thereof;

FIG. 8 is a cross-sectional view taken along line 8-8 of FIG. 2; and,

FIG. 9 is an enlarged view of the portion shown in BOX 9 in FIG. 8.

The box labelled as 9 in FIG. 8 is shown in broken lines and forms no part of the claimed design.

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Patent Diagrams and Documents

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