Electrode cover for a plasma processing apparatus

Description

This application contains subject matter related to the following co-pending U.S. design patent applications:

Application Ser. No. 29/610,995, filed herewith and entitled "Electrode Cover for a Plasma Processing Apparatus";

Application Ser. No. 29/610,998, filed herewith and entitled "Ring for a Plasma Processing Apparatus";

Application Ser. No. 29/610,999, filed herewith and entitled "Cover Ring for a Plasma Processing Apparatus"; and

Application Ser. No. 29/611,001, filed herewith and entitled "Discharge Chamber for a Plasma Processing Apparatus".

FIG. 1 is a front, top and right side perspective view of an electrode cover for a plasma processing apparatus, showing our new design;

FIG. 2 is a front, bottom and right side perspective view thereof;

FIG. 3 is a front elevational view thereof;

FIG. 4 is a rear elevational view thereof;

FIG. 5 is a right side elevational view thereof;

FIG. 6 is a left side elevational view thereof;

FIG. 7 is a top plan view thereof;

FIG. 8 is a bottom plan view thereof;

FIG. 9 is a cross-sectional view taken along line 9-9 of FIG. 3; and,

FIG. 10 is an enlarged view of the portion shown in BOX 10 in FIG. 9.

The box labeled FIG. 10 in FIG. 9 is shown in broken lines and forms no part of the claimed design.

Claims

CLAIM The ornamental design for an electrode cover for a plasma processing apparatus, as shown and described.

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Inventors:	Ichino; Takamasa (Tokyo, JP), Sato; Kohei (Tokyo, JP), Nakamoto; Kazunori (Tokyo, JP)
Applicant:	Name City State Country Type Hitachi High-Technologies Corporation Minato-ku, Tokyo N/A JP
Assignee:	Hitachi High-Technologies Corporation (Tokyo, JP)
Appl. No.:	D/610,996
Filed:	July 18, 2017

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Foreign Application Priority Data

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Jan 31, 2017 [JP]			2017-001753

Current U.S. Class:	D13/182
Current International Class:	1303
Field of Search:	;D13/158-177,182,184 ;204/286.1,297.1 ;205/118,123 ;200/1R,5R,52R,315,310,6A,302.1,308,314,317,11R,16B

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References Cited [Referenced By]

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U.S. Patent Documents

D404372	January 1999	Ishii
D494551	August 2004	Doba
D557226	December 2007	Uchino et al.
D557425	December 2007	Nakamura et al.
D559993	January 2008	Nagakubo
D559994	January 2008	Nagakubo et al.
D699199	February 2014	Kuwabara
D699200	February 2014	Nagakubo
D709536	July 2014	Yoshimura
D709537	July 2014	Kuwabara
D709538	July 2014	Mizukami
D709539	July 2014	Kuwabara
D717746	November 2014	Lau
D729730	May 2015	Gillespie-Brown
D770992	November 2016	Tauchi et al.
D783922	April 2017	Kirkland
D789888	June 2017	Jang
D797691	September 2017	Joubert
D803917	November 2017	Harada
D804556	December 2017	Harada
D810705	February 2018	Krishnan
D813181	March 2018	Okajima
2004/0077167	April 2004	Willis
2009/0050272	February 2009	Rosenberg
2012/0263569	October 2012	Priddy
2015/0024330	January 2015	Tian
2016/0002788	January 2016	Nal

Foreign Patent Documents

	D1210213		Jun 2004		JP
	D1361441		Jun 2009		JP
	D1551512		Jun 2014		JP

Other References

Ichino et al., Design U.S. Appl. No. 29/610,995, filed Jul. 18, 2017. cited by applicant . Ichino et al., Design U.S. Appl. No. 29/610,998, filed Jul. 18, 2017. cited by applicant . Ichino et al., Design U.S. Appl. No. 29/610,999, filed Jul. 18, 2017. cited by applicant . Nunomura et al., Design U.S. Appl. No. 29/611,001, filed Jul. 18, 2017. cited by applicant.

Primary Examiner: Oswecki; Elizabeth J
Attorney, Agent or Firm: Crowell & Moring LLP

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