U.S. patent number D793,972 [Application Number D/522,214] was granted by the patent office on 2017-08-08 for wafer carrier with a 31-pocket configuration. This patent grant is currently assigned to Veeco Instruments Inc.. The grantee listed for this patent is Veeco Instruments Inc.. Invention is credited to Sandeep Krishnan, Keng Moy.
United States Patent | D793,972 |
Krishnan , et al. | August 8, 2017 |
Inventors: | Krishnan; Sandeep (Princeton, NJ), Moy; Keng (Basking Ridge, NJ) | ||||||||||
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Applicant: |
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Assignee: | Veeco Instruments Inc.
(Plainview, NY) |
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Family ID: | 55312602 | ||||||||||
Appl. No.: | D/522,214 | ||||||||||
Filed: | March 27, 2015 |
Current U.S. Class: | D13/182; D23/386; D23/499 |
Current CPC Class: | H01L21/68764 20130101; H01L21/68771 20130101; C23C16/4584 20130101; C23C16/458 20130101 |
Current International Class: | 1303 |
Field of Search: | ;D14/356 ;D10/93,104.1,108,114 ;D8/4,25,52 ;D17/20,22,23 ;D23/323,328,333,335,336,337,341,352,357,370,385,386,397,399,400,406,411,413,499 ;D13/182 |
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