Wafer transfer apparatus

Description

FIG. 1 is a top view of the wafer transfer apparatus of the present design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a back elevational view thereof;

FIG. 4 is a bottom view thereof;

FIG. 5 is a right side view thereof;

FIG. 6 is a left side view thereof;

FIG. 7 is a reference figure showing a perspective view seen from a back-left hand side of the apparatus;

FIG. 8 is a reference figure showing a top view seen from a back-left hand side of the apparatus;

FIG. 9 is a reference figure showing a perspective view seen from a front-right hand side of the apparatus;

FIG. 10 is a reference figure showing a perspective view seen from a back-right hand side of the apparatus;

FIG. 11 is a reference figure showing a right side view seen from a back side of the apparatus;

FIG. 12 is a reference figure showing a perspective view seen from the back-left hand side of the apparatus;

FIG. 13 is a reference figure showing a perspective view seen from a front-right hand side of the apparatus;

FIG. 14 is a reference figure showing a perspective view seen from the front-left hand side of the apparatus;

FIG. 15 is a reference figure showing a perspective view seen from a back-left hand side of the apparatus; and,

FIG. 16 is a reference figure showing a perspective view seen from a back-right hand side of the apparatus.

The broken line showing of wafers in some of the figures is included for the purpose of illustrating environment and forms no part of the claimed design.

Claims

CLAIM We claim the ornamental design for a wafer transfer apparatus, as shown and described.

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Inventors:	Hiroki; Tsutomu (Yamanashi, JP), Machiyama; Wataru (Yamanashi, JP), Shindo; Takehiro (Yamanashi, JP)
Assignee:	Tokyo Electron Limited (Tokyo, JP)
Appl. No.:	D/220,627
Filed:	January 5, 2005

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Foreign Application Priority Data

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Jul 20, 2004 [JP]			2004-21726

Current U.S. Class:	D34/28; D34/35
Current International Class:	1205
Field of Search:	;D34/29,35 ;198/771,866,890,367,890.1,370.1,370.04,782,722 ;193/35A,35C ;438/220,232,5,689

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References Cited [Referenced By]

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U.S. Patent Documents

4810019	March 1989	Brucher
6279730	August 2001	Schreger et al.
6927181	August 2005	Wakizako et al.
6949466	September 2005	Jeong
D525408	July 2006	Nitadori
7104867	September 2006	Jeong
2002/0162742	November 2002	Bae et al.
2003/0064902	April 2003	Ng et al.
2004/0048474	March 2004	Asano
2004/0092069	May 2004	Ishii et al.
2005/0145584	July 2005	Buckley et al.
2005/0255609	November 2005	Kumagai et al.
2006/0046376	March 2006	Hofer et al.
2006/0105580	May 2006	Wirth et al.
2006/0166503	July 2006	Sasaki et al.
2006/0169674	August 2006	Mao et al.
2006/0194445	August 2006	Hayashi et al.

Primary Examiner: Ramirez; Cynthia E.
Attorney, Agent or Firm: Smith, Gambrell & Russell, LLP