Wafer conveyor arm for semiconductor manufacturing equipment

Description

FIG. 1 is a front/top/left-side perspective view of a wafer conveyor arm for semiconductor manufacturing equipment showing my new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a rear elevational view thereof;

FIG. 4 is a top plan view thereof;

FIG. 5 is a bottom plan view thereof;

FIG. 6 is a left-side elevational view thereof; and,

FIG. 7 is a right-side elevational view thereof.

Claims

CLAIM I claim the ornamental design for wafer conveyor arm for semiconductor manufacturing equipment, as shown and described.

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Inventors:	Nitadori; Hiromi (Tokyo, JP)
Assignee:	Tokyo Electron Limited (Tokyo, JP)
Appl. No.:	D/207,457
Filed:	June 14, 2004

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Foreign Application Priority Data

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Dec 17, 2003 [JP]			2003-037296

Current U.S. Class:	D34/35; D8/371; D8/499
Current International Class:	1205
Field of Search:	;D34/29,35 ;D8/366,371,499 ;198/771,866,890,367,890.1,370.01,370.04,782 ;193/35A,35C

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References Cited [Referenced By]

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U.S. Patent Documents

D32840	June 1900	Sanders
D214383	June 1969	Johnson
D240015	May 1976	Buckley
4138011	February 1979	Lapeyre
D276586	December 1984	Hanna
D286932	November 1986	Bode et al.
5131937	July 1992	Kuster et al.
D407174	March 1999	Baker
6607065	August 2003	Peppel
D479637	September 2003	Flippo

Primary Examiner: Ramirez; Cynthia E.
Attorney, Agent or Firm: Ladas and Parry LLP