| Patent | Date |
|---|
Stage, stage manufacturing method, and heat exchanger
Grant 11,437,259 - Hiroki September 6, 2 | 2022-09-06 |
Substrate processing device and substrate transfer method
Grant 11,139,185 - Hiroki October 5, 2 | 2021-10-05 |
Heat transfer medium supply system and substrate processing apparatus
Grant 11,004,664 - Hiroki May 11, 2 | 2021-05-11 |
Substrate Processing Apparatus And Stage Cleaning Method
App 20210098269 - HIROKI; Tsutomu | 2021-04-01 |
Substrate Processing Device And Substrate Transfer Method
App 20200365431 - HIROKI; Tsutomu | 2020-11-19 |
Stage and substrate processing apparatus
Grant 10,763,764 - Hiroki Sep | 2020-09-01 |
Stage and substrate processing apparatus
Grant 10,658,160 - Hiroki | 2020-05-19 |
Stage, Stage Manufacturing Method, And Heat Exchanger
App 20190385881 - HIROKI; Tsutomu | 2019-12-19 |
System including temperature-controllable stage, semiconductor manufacturing equipment and stage temperature control method
Grant 10,502,508 - Hiroki Dec | 2019-12-10 |
Stage, stage manufacturing method, and heat exchanger
Grant 10,475,686 - Hiroki Nov | 2019-11-12 |
Temperature control system and temperature control method
Grant 10,312,062 - Hiroki | 2019-06-04 |
Drive device and substrate processing system
Grant 9,995,378 - Hiroki , et al. June 12, 2 | 2018-06-12 |
Stage And Substrate Processing Apparatus
App 20180138835 - HIROKI; Tsutomu | 2018-05-17 |
Heat Transfer Medium System And Substrate Processing Apparatus
App 20180130645 - HIROKI; Tsutomu | 2018-05-10 |
Conveyance base and conveyance system
Grant 9,947,564 - Hiroki , et al. April 17, 2 | 2018-04-17 |
Stage And Substrate Processing Apparatus
App 20170316923 - HIROKI; Tsutomu | 2017-11-02 |
Substrate processing apparatus and substrate processing method
Grant 9,520,309 - Hiroki December 13, 2 | 2016-12-13 |
Substrate Processing Device
App 20160293454 - HIROKI; Tsutomu | 2016-10-06 |
Substrate transfer apparatus
Grant 9,406,539 - Hiroki August 2, 2 | 2016-08-02 |
Temperature Control System And Temperature Control Method
App 20160104605 - HIROKI; Tsutomu | 2016-04-14 |
Substrate processing system, transfer module, substrate processing method, and method for manufacturing semiconductor element
Grant 9,312,153 - Hiroki April 12, 2 | 2016-04-12 |
Substrate Processing Device and Substrate Processing Device-Use Coupling Member
App 20160035604 - HIROKI; Tsutomu | 2016-02-04 |
Transfer device and transfer method
Grant 9,227,320 - Hiroki , et al. January 5, 2 | 2016-01-05 |
Substrate transfer device for substrate processing system
Grant 9,230,840 - Hiroki January 5, 2 | 2016-01-05 |
System Including Temperature-controllable Stage, Semiconductor Manufacturing Equipment And Stage Temperature Control Method
App 20150377571 - HIROKI; Tsutomu | 2015-12-31 |
Substrate processing apparatus
Grant 9,209,055 - Hiroki December 8, 2 | 2015-12-08 |
Bearing Mechanism And Transfer Device
App 20150316098 - HIROKI; Tsutomu | 2015-11-05 |
Conveyance Base And Conveyance System
App 20150318197 - HIROKI; Tsutomu ; et al. | 2015-11-05 |
Conveyance device and substrate processing system
Grant 9,165,810 - Hiroki , et al. October 20, 2 | 2015-10-20 |
Transfer device, substrate processing system and posture control unit
Grant 9,138,901 - Hiroki , et al. September 22, 2 | 2015-09-22 |
Stage, Stage Manufacturing Method, And Heat Exchanger
App 20150179485 - HIROKI; Tsutomu | 2015-06-25 |
Conveyance Device And Substrate Processing System
App 20150125238 - Hiroki; Tsutomu ; et al. | 2015-05-07 |
Conveyor
App 20150078863 - HIROKI; Tsutomu | 2015-03-19 |
Transfer Device And Transfer Method
App 20150019004 - HIROKI; Tsutomu ; et al. | 2015-01-15 |
Maintenance System, and Substrate Processing Device
App 20150012124 - HIROKI; Tsutomu | 2015-01-08 |
Substrate Processing Apparatus And Substrate Processing Method
App 20140271051 - HIROKI; Tsutomu | 2014-09-18 |
Substrate Transfer Device For Substrate Processing System
App 20140271052 - Hiroki; Tsutomu | 2014-09-18 |
Bevel/backside polymer removing method and device, substrate processing apparatus and storage medium
Grant 8,821,644 - Sakuragi , et al. September 2, 2 | 2014-09-02 |
Drive Device And Substrate Processing System
App 20140209241 - HIROKI; Tsutomu ; et al. | 2014-07-31 |
Substrate conveyer for a substrate processing device
Grant D704,753 - Hiroki May 13, 2 | 2014-05-13 |
Substrate Transfer Apparatus
App 20140093336 - HIROKI; Tsutomu | 2014-04-03 |
Substrate Processing Apparatus
App 20140044505 - HIROKI; Tsutomu | 2014-02-13 |
Gate valve and substrate processing apparatus equipped with the same
Grant 8,590,861 - Hiroki , et al. November 26, 2 | 2013-11-26 |
Transfer device and semiconductor processing system
Grant 8,562,275 - Hiroki October 22, 2 | 2013-10-22 |
Transfer Device, Substrate Processing System And Posture Control Unit
App 20130216335 - Hiroki; Tsutomu ; et al. | 2013-08-22 |
Substrate Processing System, Transfer Module, Substrate Processing Method, And Method For Manufacturing Semiconductor Element
App 20130202387 - Hiroki; Tsutomu | 2013-08-08 |
Vacuum processing apparatus and vacuum transfer apparatus
Grant 8,380,337 - Hiroki February 19, 2 | 2013-02-19 |
Substrate Holder, Substrate Transfer Apparatus, And Substrate Processing Apparatus
App 20120315113 - Hiroki; Tsutomu | 2012-12-13 |
Transfer Device And Semiconductor Processing System
App 20120201634 - HIROKI; Tsutomu | 2012-08-09 |
Transfer Module
App 20120087766 - Hiroki; Tsutomu | 2012-04-12 |
Gate Valve And Substrate Processing Apparatus Equipped With The Same
App 20120055400 - Hiroki; Tsutomu ; et al. | 2012-03-08 |
Substrate transfer device, substrate processing apparatus and substrate transfer method
Grant 8,057,153 - Hiroki November 15, 2 | 2011-11-15 |
Vacuum Processing Apparatus And Vacuum Transfer Apparatus
App 20110238201 - Hiroki; Tsutomu | 2011-09-29 |
Substrate Processing Apparatus And Method
App 20110062113 - HIROKI; Tsutomu | 2011-03-17 |
Semiconductor processing system
Grant 7,857,569 - Hiroki , et al. December 28, 2 | 2010-12-28 |
Transportation apparatus and drive mechanism
Grant 7,837,425 - Saeki , et al. November 23, 2 | 2010-11-23 |
Vacuum Processing Apparatus, Vacuum Processing Method, And Computer Readable Storage Medium
App 20100279014 - Hiroki; Tsutomu | 2010-11-04 |
Substrate processing device
Grant 7,780,391 - Matsuoka , et al. August 24, 2 | 2010-08-24 |
Vacuum container apparatus used for manufacturing semiconductor devices and lid apparatus for same
Grant 7,762,425 - Kimura , et al. July 27, 2 | 2010-07-27 |
Substrate processing apparatus, substrate processing method, computer program, and storage medium
Grant 7,706,907 - Hiroki April 27, 2 | 2010-04-27 |
Gate valve apparatus of vacuum processing system
Grant 7,637,477 - Hiroki December 29, 2 | 2009-12-29 |
Gate valve and vacuum container for semiconductor processing system
Grant 7,622,008 - Hiroki November 24, 2 | 2009-11-24 |
Equipment and method for processing semiconductor
Grant 7,572,742 - Hiroki August 11, 2 | 2009-08-11 |
Method For Adjusting Position Of Laser Emitting Device
App 20090184234 - Shindo; Takehiro ; et al. | 2009-07-23 |
Bevel/backside Polymer Removing Method And Device, Substrate Processing Apparatus And Storage Medium
App 20090143894 - SAKURAGI; Isamu ; et al. | 2009-06-04 |
Semiconductor Processing System
App 20080187416 - Hiroki; Tsutomu ; et al. | 2008-08-07 |
Sealing ring and its managing system
Grant 7,398,692 - Hiroki , et al. July 15, 2 | 2008-07-15 |
Substrate processing apparatus, substrate processing method, computer program, and storage medium
App 20080071408 - Hiroki; Tsutomu | 2008-03-20 |
Substrate Transfer Device, Substrate Processing Apparatus And Substrate Transfer Method
App 20080056857 - Hiroki; Tsutomu | 2008-03-06 |
Wafer transfer apparatus
Grant D562,524 - Hiroki , et al. February 19, 2 | 2008-02-19 |
Equipment And Method For Processing Semiconductor
App 20070275486 - Hiroki; Tsutomu | 2007-11-29 |
Transfer apparatus for target object
Grant 7,286,890 - Machiyama , et al. October 23, 2 | 2007-10-23 |
Gate valve apparatus for vacuum processing system
Grant 7,281,700 - Hiroki October 16, 2 | 2007-10-16 |
Sealing ring and its managing system
App 20070012117 - Hiroki; Tsutomu ; et al. | 2007-01-18 |
Transfer apparatus for target object
App 20060291988 - Machiyama; Wataru ; et al. | 2006-12-28 |
Gate valve apparatus for vacuum processing system
App 20060226388 - Hiroki; Tsutomu | 2006-10-12 |
Transportation apparatus and drive mechanism
App 20060210387 - Saeki; Hiroaki ; et al. | 2006-09-21 |
Gate valve for semiconductor treatment system and vacuum container
App 20060196422 - Hiroki; Tsutomu | 2006-09-07 |
Bellows-supporting structure and movable stage device
App 20060192505 - Hiroki; Tsutomu | 2006-08-31 |
Transfer device and semiconductor processing system
App 20060182529 - Hiroki; Tsutomu | 2006-08-17 |
Gate valve apparatus of vacuum processing system
App 20060182534 - Hiroki; Tsutomu | 2006-08-17 |
Cover body device and vacuum vessel device
App 20060021992 - Narushima; Hiroshi ; et al. | 2006-02-02 |
Substrate processing device
App 20050238464 - Matsuoka, Takaaki ; et al. | 2005-10-27 |
Substrate support mechanism for semiconductor processing system
App 20050155823 - Hiroki, Tsutomu ; et al. | 2005-07-21 |
Semiconductor processing system and semiconductor carrying mechanism
App 20050005847 - Hiroki, Tsutomu | 2005-01-13 |
Transfer apparatus and accommodating apparatus for semiconductor process, and semiconductor processing system
Grant 6,709,521 - Hiroki March 23, 2 | 2004-03-23 |
Transfer system for conveying LCD glass substrate
Grant 6,681,916 - Hiroki January 27, 2 | 2004-01-27 |
Transfer System For Conveying Lcd Glass Substrate
App 20030168313 - Hiroki, Tsutomu | 2003-09-11 |
Transportation system and processing apparatus employing the transportation system
Grant 6,331,095 - Hiroki December 18, 2 | 2001-12-18 |
Semiconductor processing apparatus
Grant 5,989,346 - Hiroki November 23, 1 | 1999-11-23 |
Transfer device for transferring a substrate
Grant 5,374,147 - Hiroki , et al. December 20, 1 | 1994-12-20 |
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