| Patent | Date |
|---|
Apparatus For Processing Substrate And Method Of Transferring Substrate
App 20220301921 - SHINDO; Takehiro | 2022-09-22 |
Opening/closing Apparatus And Transport Chamber
App 20220301911 - LI; Dongwei ; et al. | 2022-09-22 |
Substrate Transfer Device And Substrate Processing System
App 20220285191 - LI; Dongwei ; et al. | 2022-09-08 |
Method Of Delivering Substrate, And Substrate Delivery System
App 20220199456 - SHINDO; Takehiro | 2022-06-23 |
Apparatus For Transporting Substrate, System For Processing Substrate, And Method Of Transporting Substrate
App 20220193897 - SHINDO; Takehiro ; et al. | 2022-06-23 |
Correction Method And Substrate Transfer Apparatus
App 20220181178 - SHINDO; Takehiro | 2022-06-09 |
Transfer device
Grant 11,335,586 - Shindo , et al. May 17, 2 | 2022-05-17 |
Control Method And Substrate Transfer System
App 20220084862 - SHINDO; Takehiro | 2022-03-17 |
Method Of Controlling Substrate Transfer System And The Substrate Transfer System
App 20220068683 - MATSUMOTO; Wataru ; et al. | 2022-03-03 |
Substrate Transport System And Substrate Transport Method
App 20220020622 - SHINDO; Takehiro | 2022-01-20 |
Transfer Device
App 20210305081 - SHINDO; Takehiro ; et al. | 2021-09-30 |
Teaching Method
App 20210252695 - SHINDO; Takehiro | 2021-08-19 |
Transfer device
Grant 11,075,106 - Koizumi , et al. July 27, 2 | 2021-07-27 |
Extendable Device
App 20210220989 - SHINDO; Takehiro | 2021-07-22 |
Substrate processing apparatus and transfer position correcting method
Grant 10,971,385 - Oka , et al. April 6, 2 | 2021-04-06 |
Vacuum transfer module and substrate processing apparatus
Grant 10,763,139 - Shindo Sep | 2020-09-01 |
Substrate processing apparatus
Grant 10,748,796 - Shindo A | 2020-08-18 |
Semiconductor Manufacturing Apparatus And Method Of Controlling Rotation Of Stage
App 20200251368 - Kind Code | 2020-08-06 |
Transfer Device
App 20200161163 - Koizumi; Hiroshi ; et al. | 2020-05-21 |
Substrate Processing Apparatus And Transfer Position Correcting Method
App 20200126828 - Oka; Hiroki ; et al. | 2020-04-23 |
Transport Apparatus, Semiconductor Manufacturing Apparatus, and Transport Method
App 20200094399 - SHINDO; Takehiro ; et al. | 2020-03-26 |
Transfer device and control method thereof
Grant 10,586,729 - Koizumi , et al. | 2020-03-10 |
Substrate Processing Apparatus
App 20190355599 - SHINDO; Takehiro | 2019-11-21 |
Vacuum Transfer Module And Substrate Processing Apparatus
App 20180342409 - SHINDO; Takehiro | 2018-11-29 |
Conveyance robot replacement apparatus and conveyance robot replacement method
Grant 10,133,266 - Dogome , et al. November 20, 2 | 2018-11-20 |
Substrate conveyance method
Grant 9,805,960 - Shindo , et al. October 31, 2 | 2017-10-31 |
Substrate transfer method with a second positioning step
Grant 9,589,822 - Shindo March 7, 2 | 2017-03-07 |
Substrate Conveyance Method
App 20170011940 - SHINDO; Takehiro ; et al. | 2017-01-12 |
Transfer Device And Control Method Thereof
App 20170004992 - Koizumi; Hiroshi ; et al. | 2017-01-05 |
Conveyance Robot Replacement Apparatus And Conveyance Robot Replacement Method
App 20160011587 - DOGOME; Masahiro ; et al. | 2016-01-14 |
Substrate collecting method
Grant 9,082,798 - Shindo July 14, 2 | 2015-07-14 |
Substrate Transfer Method And Device
App 20150016936 - SHINDO; Takehiro | 2015-01-15 |
Bevel/backside polymer removing method and device, substrate processing apparatus and storage medium
Grant 8,821,644 - Sakuragi , et al. September 2, 2 | 2014-09-02 |
Vacuum processing apparatus
Grant 8,523,138 - Shindo September 3, 2 | 2013-09-03 |
Foreign matter removal method and storage medium
Grant 8,216,382 - Shindo July 10, 2 | 2012-07-10 |
Substrate Position Determining Method And Substrate Collecting Method
App 20120130529 - Shindo; Takehiro | 2012-05-24 |
Vacuum Processing Apparatus
App 20120111668 - SHINDO; Takehiro | 2012-05-10 |
Substrate position detection apparatus, and method of adjusting a position of an imaging component of the same
Grant 8,159,653 - Shindo April 17, 2 | 2012-04-17 |
Substrate position determining method and substrate position detecting method
Grant 8,135,486 - Shindo March 13, 2 | 2012-03-13 |
Vacuum processing apparatus
Grant 8,113,487 - Shindo February 14, 2 | 2012-02-14 |
Transportation apparatus and drive mechanism
Grant 7,837,425 - Saeki , et al. November 23, 2 | 2010-11-23 |
Substrate position detection apparatus, and method of adjusting a position of an imaging component of the same
App 20100033706 - Shindo; Takehiro | 2010-02-11 |
Substrate Position Determining Method, Substrate Position Detecting Method, And Substrate Collecting Method
App 20100030347 - Shindo; Takehiro | 2010-02-04 |
Vacuum Processing Apparatus
App 20090321187 - Shindo; Takehiro | 2009-12-31 |
Vacuum processing apparatus
Grant 7,611,124 - Shindo November 3, 2 | 2009-11-03 |
Method For Adjusting Position Of Laser Emitting Device
App 20090184234 - Shindo; Takehiro ; et al. | 2009-07-23 |
Bevel/backside Polymer Removing Method And Device, Substrate Processing Apparatus And Storage Medium
App 20090143894 - SAKURAGI; Isamu ; et al. | 2009-06-04 |
Substrate Cleaning Apparatus, Substrate Processing Apparatus, Substrate Cleaning Method, Substrate Processing Method And Storage Medium
App 20090084403 - Shindo; Takehiro | 2009-04-02 |
Wafer transfer apparatus
Grant D562,524 - Hiroki , et al. February 19, 2 | 2008-02-19 |
Transportation apparatus and drive mechanism
App 20060210387 - Saeki; Hiroaki ; et al. | 2006-09-21 |
Vacuum processing apparatus
App 20060163519 - Shindo; Takehiro | 2006-07-27 |
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