U.S. patent number 7,183,165 [Application Number 10/702,234] was granted by the patent office on 2007-02-27 for reliable high voltage gate dielectric layers using a dual nitridation process.
This patent grant is currently assigned to Texas Instruments Incorporated. Invention is credited to James J. Chambers, Douglas T. Grider, April Gurba, Rajesh Khamankar, Hiroaki Niimi, Toan Tran.
United States Patent |
7,183,165 |
Khamankar , et al. |
February 27, 2007 |
Reliable high voltage gate dielectric layers using a dual
nitridation process
Abstract
Dual gate dielectric layers are formed on a semiconductor
substrate for MOS transistor fabrication. A first dielectric layer
(30) is formed on a semiconductor substrate (10). A first plasma
nitridation process is performed on said first dielectric layer.
The first dielectric layer (30) is removed in regions of the
substrate and a second dielectric layer (50) is formed in these
regions. A second plasma nitridation process is performed on the
first dielectric layer and the second dielectric layer. MOS
transistors (160, 170) are then fabricated using the dielectric
layers (30, 50).
Inventors: |
Khamankar; Rajesh (Coppell,
TX), Grider; Douglas T. (McKinney, TX), Niimi;
Hiroaki (Richardson, TX), Gurba; April (Plano, TX),
Tran; Toan (Rowlett, TX), Chambers; James J. (Plano,
TX) |
Assignee: |
Texas Instruments Incorporated
(Dallas, TX)
|
Family
ID: |
32712967 |
Appl.
No.: |
10/702,234 |
Filed: |
November 6, 2003 |
Prior Publication Data
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Document
Identifier |
Publication Date |
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US 20040102010 A1 |
May 27, 2004 |
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Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
Issue Date |
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60428871 |
Nov 25, 2002 |
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Current U.S.
Class: |
438/287;
257/E21.625; 257/E21.268; 257/500 |
Current CPC
Class: |
H01L
21/28185 (20130101); H01L 21/28202 (20130101); H01L
29/518 (20130101); H01L 21/823462 (20130101); H01L
21/3144 (20130101) |
Current International
Class: |
H01L
21/336 (20060101) |
Field of
Search: |
;438/218,219,287,294,301,257 ;257/222,253,500 |
References Cited
[Referenced By]
U.S. Patent Documents
Foreign Patent Documents
Primary Examiner: Ha; Nathan W.
Attorney, Agent or Firm: McLarty; Peter K. Brady, III; W.
James Telecky, Jr.; Frederick J.
Parent Case Text
This application claims priority under 35 USC .sctn. 119(e)(1) of
provisional application Ser. No. 60/428,871, filed Nov. 25, 2002.
Claims
We claim:
1. A method for forming MOS transistor gate dielectrics,
comprising: providing a semiconductor substrate; forming a first
dielectric layer on said semiconductor substrate; performing a
first plasma nitridation of said first dielectric layer; removing
said first dielectric from a region of said substrate; forming a
second dielectric layer on said semiconductor substrate in said
region from which said first dielectric layer was removed; and
simultaneously performing a second plasma nitridation of said
second dielectric layer and said first dielectric layer, said first
dielectric layer having a nitrogen concentration of 5 to 20 atomic
percent following said second plasma nitridation.
2. The method of claim 1 wherein said first dielectric layer
comprises silicon oxide.
3. The method of claim 2 wherein said second dielectric layer
comprises silicon oxide.
4. The method of claim 1 wherein said second dielectric layer has a
final nitrogen concentration of 5 to 20 atomic percent following
said first and second plasma nitridation.
5. A method for forming integrated circuit MOS transistors,
comprising: providing a semiconductor substrate; forming a first
silicon oxide layer; performing a plasma nitridation process on
said first silicon oxide layer forming a first plasma nitrided
oxide layer; removing said first plasma nitrided oxide layer from
regions of said substrate; and forming a second plasma nitrided
oxide layer on said semiconductor substrate in said regions from
which said first plasma nitrided oxide layer was removed, said
first dielectric layer having a nitrogen concentration of 5 to 20
atomic percent after forming said second plasma nitridation.
6. The method of claim 5 wherein said forming said second plasma
nitrided oxide layer comprises: forming a second silicon oxide
layer in said regions from which said first plasma nitrided oxide
layer was removed; and performing a second plasma nitridation
process on said second oxide layer and said first plasma nitrided
oxide layer.
Description
FIELD OF THE INVENTION
The present invention relates to a method for forming dual gate (or
split gate) dielectrics for integrated circuit MOS transistors
using a dual plasma nitridation process.
BACKGROUND OF THE INVENTION
High performance integrated circuits often require metal oxide
semiconductor (MOS) transistors to operate at different voltages.
Given the electric field constraints required for reliable
transistor operation, different operating voltages will require
that the MOS transistors on the same integrated circuit be formed
with more than one gate dielectric thickness. For example a 0.18
.mu.m gate length transistor designed to operate at 1.8 volts may
require a gate dielectric thickness of 38 .ANG. while a 0.5 .mu.m
gate length transistor designed to operate at 3.3 volts will
require a gate dielectric thickness of 65 .ANG..
Shown in FIG. 1 are two MOS transistors 120 and 130 with differing
gate dielectric thickness. The semiconductor substrate 10 can
comprise epitaxial layers and/or buried insulator structures. The
isolation structure 20 is a shallow trench isolation (STI)
structure and is formed using standard processing technology. Other
isolation structures such as localized oxidation of silicon (LOCOS)
can also be used. To form the gate dielectric layers 140 and 150 a
split gate process can be used. In the split gate process a first
dielectric layer is grown on the surface of the semiconductor
substrate 10. The region of the first dielectric layer that will
eventually form the dielectric layer 150 is masked using a
patterned photomask and the unmasked regions of the first
dielectric layer removed. Following the removal of the patterned
photomask the dielectric layer 140 is formed. Formation of
dielectric layer 140 comprises thermally growing the dielectric
layer. During the growth process addition dielectric layer
thickness is added to the remaining first dielectric layer
resulting in dielectric layer 150 being formed. For the transistors
described above the dielectric layer 140 for the lower voltage
transistor 120 will be about 38 A thick and the dielectric layer
150 for the higher voltage transistor 130 will be about 65 A thick.
Following the formation of the dielectric layers 140 and 150, the
gate structures 60 and 70 of the MOS transistors are formed. If
source and drain extension regions are required these are formed at
this time by implanting the required dopant species into the
semiconductor substrate aligned to the edge of the gate structures
60 and 70. Sidewall structures 80 and 90 are formed adjacent to the
gate structures 60 and 70 followed by the formation of the source
and drain regions 100 and 110.
As the current size of the MOS transistors is reduced the thickness
of the gate dielectric layers used to form these transistors must
also be reduced to ensure proper operation. The transistor gate
leakage current is related to the thickness of the dielectric layer
increasing with a reduction in dielectric layer thickness. For the
thinner gate dielectric layer (i.e., 140 in FIG. 1) techniques such
as the addition of nitrogen to the dielectric layer have been used
to reduce the transistor gate leakage current. Previously the
thickness of the dielectric layer for the higher voltage transistor
has been such that no special techniques were required to keep the
gate leakage current for these transistors below acceptable levels.
However as the transistors continue to scale downwards gate leakage
currents from the higher voltage transistors 130 with the thicker
dielectric layers 150 is becoming a serious limitation to
integrated circuit performance. There is therefore a need for a
method to simultaneously optimize both dielectric layers for
reduced gate leakage current while reducing the dielectric layer
thickness.
SUMMARY OF INVENTION
The instant invention is a method for forming multiple gate
dielectrics with different thickness. The method comprises forming
first dielectric layer on a semiconductor substrate. The first
dielectric layer can comprise silicon oxide or silicon oxynitride
formed using thermal or plasma techniques. The first dielectric
layer is then subjected to a plasma nitridation process that
incorporates nitrogen into the layer. Using masking techniques, the
first dielectric layer is removed from regions of the substrate and
a second dielectric layer formed in regions from which the first
dielectric layers were removed. The second dielectric layer and the
first dielectric layer are subjected to a second plasma nitridation
process that incorporates nitrogen into both layers. MOS
transistors are formed using the different dielectric layers.
BRIEF DESCRIPTION OF THE DRAWINGS
For a more complete understanding of the present invention and the
advantages thereof, reference is now made to the following
description taken in conjunction with the accompanying drawings,
wherein like reference numerals represent like features, in
which:
FIG. 1 is a cross-sectional diagram showing MOS transistors with
different gate dielectric layer thickness.
FIGS. 2(a) 2(c) are cross-sectional diagrams showing an embodiment
of the instant invention.
FIG. 3 is a cross-sectional diagram showing MOS transistors with
different gate dielectric layer thickness according to an
embodiment of the instant invention.
DETAILED DESCRIPTION OF THE INVENTION
The semiconductor substrate 10 shown in FIG. 2(a) can comprise a
bulk substrate, an epitaxial layer, and/or a buried insulator
layer. Isolation structures 20 formed in the substrate 10 can
comprise STI structures, LOCOS isolation or any other suitable
isolation scheme or structure. Following the formation of the
isolation structures 20 and any additional processes, a first
dielectric layer 30 is formed on the substrate surface as shown in
FIG. 2(a). In a first embodiment of the instant invention a thermal
oxidation process is used to form a first dielectric layer 30
comprising silicon oxide. The thermal oxidation process comprises
oxidation temperatures of 600.degree. C. to 1000.degree. C. using
gases from the group comprising O.sub.2, O.sub.3, N.sub.2O, NO,
O.sub.2/N.sub.2, N.sub.2O/N.sub.2 or NO/N.sub.2 along with any
other suitable gases. The silicon oxide thickness so formed will be
between 15 to 35 angstroms thick. In a preferred embodiment the
silicon oxide thickness will be 25 angstroms thick. In a second
embodiment of the instant invention a plasma oxidation process can
be used to form the first dielectric layer 30. Such a process can
be performed at temperatures up to 700.degree. C. at power levels
of 50 watts to 2000 watts using RF or microwave plasma excitation.
Gases such as O.sub.2, N.sub.2O, NO, O.sub.2/N.sub.2,
N.sub.2O/N.sub.2 or NO/N.sub.2 can be used to perform the oxidation
in a He, Ar, Xe, or Kr plasma. The silicon oxide thickness so
formed will be between 15 to 35 angstroms thick. Following the
formation of the first dielectric layer 30, a first plasma
nitridation process is performed on the first dielectric layer. In
the first plasma nitridation process the first dielectric layer 30
is exposed to a plasma containing nitrogen species. During the
process nitrogen is incorporated into the first dielectric layer.
In a preferred embodiment a silicon oxide first dielectric layer is
exposed to a nitrogen containing plasma formed using a power level
of 600 to 950 Watts at a pressure of 15 to 24 millitorr with the
plasma comprising nitrogen and helium gases. The first plasma
nitridation process results in the formation of a plasma nitrided
oxide layer. Following the first plasma nitridation process an
optional anneal may be performed. In an embodiment the optional
anneal comprises annealing the plasma nitrided oxide layer at
800.degree. C. to 1000.degree. C. in a N.sub.2/O.sub.2 ambient.
Following the formation of the first dielectric layer 30 and the
subsequent first plasma nitridation treatment, a patterned
photoresist layer 40 is formed over the first dielectric layer as
shown in FIG. 2(b). The portions of the first dielectric layers not
covered by the patterned photoresist layer 40 are then removed
using standard techniques such as etching in 0.49% buffered
hydrogen fluoride. Following the removal of the exposed first
dielectric layer the patterned photoresist layer 40 is removed.
As shown in FIG. 2(c), a second dielectric layer 50 is formed on
the surface of the substrate in those regions where the first
dielectric layer was removed. In an embodiment of the instant
invention the second dielectric layer 50 will comprise a plasma
nitrided oxide. The plasma nitrided oxide can be formed using
either a thermally grown silicon oxide layer or a deposited silicon
oxide layer followed by a second plasma nitridation process. In the
thermal oxidation process 8 to 19 angstroms of silicon oxide is
formed at temperatures between 600.degree. C. to 1100.degree. C.
using gases from the group comprising O.sub.2, O.sub.3, N.sub.2O,
NO, O.sub.2/N.sub.2, O.sub.3/N.sub.2, N.sub.2O/N.sub.2, NO/N.sub.2,
H.sub.2/O.sub.2, H.sub.2/O.sub.3, and any other suitable gas.
Following the formation of the silicon oxide layer a second plasma
nitridation process is performed. The second plasma nitridation
process will incorporate 5 to 20 atomic percent of nitrogen into
the silicon oxide layer resulting in a plasma nitrided oxide layer
50 with 5 to 20 atomic percent of nitrogen. In the second plasma
nitridation process the silicon oxide layer is exposed to a RF or
microwave He, Ar, Xe, or Kr plasma at power levels between 50 watts
and 500 watts at pressures between 20 milliTorr and 200 milliTorr
using gases from the group comprising N.sub.2, N.sub.2O, NO, or
NH.sub.3.
During the formation of the plasma nitrided dielectric layer 50,
the dielectric layer 30 is exposed to all the processes. During the
growth of the second dielectric layer 50, additional oxide growth
will take place in the remaining region of the first dielectric
layer 30. The amount of growth will be small compared to the
thickness of the first dielectric layer. In addition the first
dielectric layer will be exposed to the second plasma nitridation
process of the second dielectric layer. Therefore the first
dielectric layer 30 undergoes dual nitridation treatments. The
first occurs during the first plasma nitridation treatment of the
first dielectric layer and the second during the second plasma
nitridation of the second dielectric layer. The dual plasma
nitridation of the first dielectric layer 30 will result in a final
nitrogen concentration of 5 to 20 atomic percent. The resulting
nitrogen t concentration will be uniformly distributed throughout
the first dielectric layer 30.
Shown in FIG. 3 are MOS transistors fabricated using the dielectric
layers of the instant invention. The MOS transistor 160 formed
using the plasma nitrided dielectric layer 50 will operate using
the lower voltages and the MOS transistor formed using the dual
plasma nitrided dielectric layer 30 will operate using the higher
voltages. Therefore the operating voltage of MOS transistor 160
will be lower than the operating voltage of MOS transistor 170. The
gate regions of the transistors 60 and 70 can be formed using
polycrystalline silicon, a silicide or a metal. Any suitable
dielectric material can be used to form the sidewall structures 80
and 90 and the source and drain regions 100 and 110 are formed
using standard processing techniques.
While this invention has been described with reference to
illustrative embodiments, this description is not intended to be
construed in a limiting sense. Various modifications and
combinations of the illustrative embodiments, as well as other
embodiments of the invention will be apparent to persons skilled in
the art upon reference to the description. It is therefore intended
that the appended claims encompass any such modifications or
embodiments.
* * * * *