U.S. patent application number 16/413605 was filed with the patent office on 2020-11-19 for semiconductor structure and manufacturing method thereof.
This patent application is currently assigned to Taiwan Semiconductor Manufacturing Co., Ltd.. The applicant listed for this patent is Taiwan Semiconductor Manufacturing Co., Ltd.. Invention is credited to Hsien-Wei Chen, Ming-Fa Chen, Ching-Jung Yang.
Application Number | 20200365514 16/413605 |
Document ID | / |
Family ID | 1000005192178 |
Filed Date | 2020-11-19 |
United States Patent
Application |
20200365514 |
Kind Code |
A1 |
Yang; Ching-Jung ; et
al. |
November 19, 2020 |
SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF
Abstract
A semiconductor structure and the manufacturing method thereof
are provided. A semiconductor structure includes a first
semiconductor substrate, a first interconnect structure, a first
conductive pad, a first dielectric layer, and a first conductive
connector. The first semiconductor substrate includes a plurality
of first semiconductor devices therein. The first interconnect
structure is disposed over the first semiconductor substrate and
electrically coupled to the first semiconductor devices. The first
conductive pad is disposed over and electrically coupled to the
first interconnect structure. The first dielectric layer covers the
first conductive pad and the first interconnect structure, and the
first dielectric layer includes a portion extending through the
first conductive pad. The first conductive connector is disposed on
and electrically coupled to the first interconnect structure, and
the first conductive connector extends through the portion of the
first dielectric layer.
Inventors: |
Yang; Ching-Jung; (Taoyuan
City, TW) ; Chen; Hsien-Wei; (Hsinchu City, TW)
; Chen; Ming-Fa; (Taichung City, TW) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
Taiwan Semiconductor Manufacturing Co., Ltd. |
Hsinchu |
|
TW |
|
|
Assignee: |
Taiwan Semiconductor Manufacturing
Co., Ltd.
Hsinchu
TW
|
Family ID: |
1000005192178 |
Appl. No.: |
16/413605 |
Filed: |
May 16, 2019 |
Current U.S.
Class: |
1/1 |
Current CPC
Class: |
H01L 23/5384 20130101;
H01L 23/5386 20130101; H01L 23/5385 20130101; H01L 21/76802
20130101 |
International
Class: |
H01L 23/538 20060101
H01L023/538; H01L 21/768 20060101 H01L021/768 |
Claims
1. A semiconductor structure, comprising: a first semiconductor
substrate comprising a plurality of first semiconductor devices
therein; a first interconnect structure disposed over the first
semiconductor substrate and electrically coupled to the first
semiconductor devices; a first conductive pad disposed over and
electrically coupled to the first interconnect structure; a first
dielectric layer covering the first conductive pad and the first
interconnect structure, the first dielectric layer comprising a
portion extending into a through hole of the first conductive pad;
a first conductive connector disposed on and electrically coupled
to the first interconnect structure, the first conductive connector
extending through the portion of the first dielectric layer; a
second semiconductor substrate comprising a plurality of second
semiconductor devices therein; a second interconnect structure
disposed over the second semiconductor substrate and electrically
coupled to the second semiconductor devices; a second conductive
pad disposed over and electrically coupled to the second
interconnect structure; a second dielectric layer covering the
second conductive pad and the second interconnect structure, the
second dielectric layer bonded to the first dielectric layer; and a
second conductive connector disposed on and electrically coupled to
the second interconnect structure, the second conductive connector
bonded to the first conductive connector and extending towards the
second conductive pad.
2. The semiconductor structure of claim 1, further comprising: a
dummy connector disposed aside the first conductive connector and
embedded in the first dielectric layer.
3. The semiconductor structure of claim 2, wherein a depth of the
dummy connector in the first dielectric layer is less than a depth
of the first conductive connector in the first dielectric layer,
and a top surface of the dummy connector is substantially leveled
with a top surface of the first conductive connector.
4. The semiconductor structure of claim 2, wherein the dummy
connector extends from a dummy pattern of the first interconnect
structure and penetrates through the first dielectric layer.
5. The semiconductor structure of claim 2, wherein the dummy
connector is electrically floating.
6. The semiconductor structure of claim 1, wherein the second
conductive connector is electrically coupled to the second
interconnect structure through the second conductive pad.
7. The semiconductor structure of claim 1, wherein a portion of the
second dielectric layer extends through the second conductive pad,
and the second conductive connector extends through the portion of
the second dielectric layer.
8. The semiconductor structure of claim 1, further comprising: a
first dummy connector disposed aside the first conductive connector
and embedded in the first dielectric layer; and a second dummy
connector disposed aside the second conductive connector and
embedded in the second dielectric layer, and the second dummy
connector being bonded to the first dummy connector.
9. The semiconductor structure of claim 8, wherein the first dummy
connector penetrates through the first dielectric layer to be in
contact with a first dummy pattern of the first interconnect
structure, and the second dummy connector penetrates through the
second dielectric layer to be in contact with a second dummy
pattern of the second interconnect structure.
10. A semiconductor structure, comprising: a first semiconductor
die comprising: a first interconnecting layer; a first conductive
pad disposed on and electrically coupled to the first
interconnecting layer; a first dielectric layer disposed over the
first interconnecting layer and covering the first conductive pad;
a first conductive connector embedded in the first dielectric layer
and extending towards the first conductive pad to be electrically
coupled to the first interconnecting layer; and a first dummy
connector disposed aside the first conductive connector and
embedded in the first dielectric layer; and a second semiconductor
die stacked on and bonded to the first semiconductor die, the
second semiconductor die comprising: a second dielectric layer
bonded to the first dielectric layer of the first semiconductor
die; and a second conductive connector and a second dummy connector
embedded in the second dielectric layer and respectively bonded to
the first conductive connector of the first semiconductor die and
the first dummy connector of the first semiconductor die.
11. The semiconductor structure of claim 10, wherein the first
conductive connector extends from a bonding interface between the
first semiconductor die and the second semiconductor die and lands
on the first conductive pad, and the first conductive connector is
electrically coupled to the first interconnecting layer through the
first conductive pad.
12. The semiconductor structure of claim 10, wherein the first
conductive connector extends from a bonding interface between the
first semiconductor die and the second semiconductor die and
penetrates through the first conductive pad to be in contact with
the first interconnecting layer, and the first conductive connector
is laterally isolated from the first conductive pad by the first
dielectric layer.
13. The semiconductor structure of claim 10, wherein the first
dummy connector extends from a bonding interface between the first
semiconductor die and the second semiconductor die and penetrates
through the first dielectric layer to be in contact with a dummy
pattern of the first interconnecting layer.
14. The semiconductor structure of claim 10, wherein the first
conductive connector and the first dummy connector are tapered from
a bonding interface between the first semiconductor die and the
second semiconductor die towards the first interconnecting
layer.
15. The semiconductor structure of claim 10, wherein the first
dummy connector of the first semiconductor die and the second dummy
connector of the second semiconductor die are electrically
floating.
16. The semiconductor structure of claim 10, wherein the first
semiconductor die further comprises: a semiconductor substrate
comprising a plurality of semiconductor devices therein, wherein
the first interconnecting layer is disposed over the semiconductor
substrate and electrically coupled to the semiconductor devices;
and a through semiconductor via penetrating through the
semiconductor substrate and electrically coupled to the first
interconnecting layer.
17-20. (canceled)
21. A semiconductor structure, comprising: a first semiconductor
die comprising: a first dielectric layer covering a first
conductive pad; and a first conductive connector penetrating
through the first dielectric layer to be in contact with a first
interconnect structure, and the first conductive connector disposed
within a through hole of the first conductive pad, wherein a
portion of the first dielectric layer disposed in the through hole
of the first conductive pad separates the first conductive pad from
the first conductive connector; and a second semiconductor die
stacked on the first semiconductor die and comprising: a second
conductive pad bonded to the first conductive pad; a second
dielectric layer covering the second conductive pad and bonded to
the first dielectric layer; and a second conductive connector
bonded to the first conductive connector and extending towards the
second conductive pad.
22. The semiconductor structure as claimed in claim 21, wherein the
first semiconductor die further comprises: a semiconductor
substrate disposed on the first interconnect structure opposite to
the first conductive pad; and a through semiconductor via
penetrating through the semiconductor substrate to be connected to
the first interconnect structure.
23. The semiconductor structure as claimed in claim 21, wherein the
second conductive connector penetrates through the second
conductive pad, and a portion of the second dielectric layer is
disposed inside the second conductive pad to laterally cover the
second conductive connector.
24. The semiconductor structure as claimed in claim 21, wherein the
second conductive connector lands on the second conductive pad.
Description
BACKGROUND
[0001] In recent years, the semiconductor industry has experienced
rapid growth due to continuous improvement in integration density
of various electronic components, e.g., transistors, diodes,
resistors, capacitors, etc. For the most part, this improvement in
integration density has come from successive reductions in minimum
feature size, which allows more components to be integrated into a
given area. For example, the area occupied by integrated components
is proximate to the surface of a semiconductor wafer; however,
there are physical limitations to an achievable density in
two-dimensional (2D) integrated circuit formation. For example, one
of these limitations comes from the significant gains in the number
and length of interconnections between semiconductor devices as the
number of semiconductor devices increases. As the existing
integrated circuit design rules require a decreasing pitch for
laying out conductive wirings in a semiconductor structure, there
is continuous effort in developing new mechanisms of forming
semiconductor structures.
BRIEF DESCRIPTION OF THE DRAWINGS
[0002] Aspects of the present disclosure are best understood from
the following detailed description when read with the accompanying
figures. It is noted that, in accordance with the standard practice
in the industry, various features are not drawn to scale. In fact,
the dimensions of the various features may be arbitrarily increased
or reduced for clarity of discussion.
[0003] FIG. 1A to FIG. 1F are schematic cross-sectional views
showing various stages in a manufacturing method of a tier of a
semiconductor structure according to some exemplary embodiments of
the present disclosure.
[0004] FIG. 2A and FIG. 2B are schematic cross-sectional views
showing various stages in a manufacturing method of a tier of a
semiconductor structure according to some exemplary embodiments of
the present disclosure.
[0005] FIG. 3A to FIG. 3C are schematic cross-sectional views
showing various stages in a manufacturing method of a tier of a
semiconductor structure according to some exemplary embodiments of
the present disclosure.
[0006] FIG. 4A and FIG. 4B are schematic cross-sectional views
showing various stages in a manufacturing method of a tier of a
semiconductor structure according to some exemplary embodiments of
the present disclosure.
[0007] FIG. 5A and FIG. 5B are schematic cross-sectional views
showing various stages in a manufacturing method of a semiconductor
structure according to some exemplary embodiments of the present
disclosure.
[0008] FIG. 6 to FIG. 11 are schematic cross-sectional views
showing various semiconductor structures according to some
exemplary embodiments of the present disclosure.
[0009] FIG. 12 is a schematic cross-sectional view showing an
application of a semiconductor structure according to some
exemplary embodiments of the present disclosure.
DETAILED DESCRIPTION
[0010] The following disclosure provides many different
embodiments, or examples, for implementing different features of
the provided subject matter. Specific examples of components and
arrangements are described below to simplify the present
disclosure. These are, of course, merely examples and are not
intended to be limiting. For example, the formation of a first
feature over or on a second feature in the description that follows
may include embodiments in which the first and second features are
formed in direct contact, and may also include embodiments in which
additional features may be formed between the first and second
features, such that the first and second features may not be in
direct contact. In addition, the present disclosure may repeat
reference numerals and/or letters in the various examples. This
repetition is for the purpose of simplicity and clarity and does
not in itself dictate a relationship between the various
embodiments and/or configurations discussed.
[0011] Further, spatially relative terms, such as "beneath,"
"below," "lower," "above," "upper" and the like, may be used herein
for ease of description to describe one element or feature's
relationship to another element(s) or feature(s) as illustrated in
the figures. The spatially relative terms are intended to encompass
different orientations of the device in use or operation in
addition to the orientation depicted in the figures. The apparatus
may be otherwise oriented (rotated 90 degrees or at other
orientations) and the spatially relative descriptors used herein
may likewise be interpreted accordingly.
[0012] Other features and processes may also be included. For
example, testing structures may be included to aid in the
verification testing of the 3D packaging or 3DIC devices. The
testing structures may include, for example, test pads formed in a
redistribution layer or on a substrate that allows the testing of
the 3D packaging or 3DIC, the use of probes and/or probe cards, and
the like. The verification testing may be performed on intermediate
structures as well as the final structure. Additionally, the
structures and methods disclosed herein may be used in conjunction
with testing methodologies that incorporate intermediate
verification of known good dies to increase the yield and decrease
costs.
[0013] FIG. 1A to FIG. 1F are schematic cross-sectional views
showing various stages in a manufacturing method of a tier of a
semiconductor structure according to some exemplary embodiments of
the present disclosure. Referring to FIG. 1A and FIG. 1B, an
interconnect structure 120 is formed on a semiconductor substrate
110. For example, the semiconductor substrate 110 includes a bulk
semiconductor, a semiconductor-on-insulator (SOI) substrate, other
supporting substrate (e.g., quartz, glass, etc.), combinations
thereof, or the like, which may be doped or undoped. In some
embodiments, the semiconductor substrate 110 includes an elementary
semiconductor (e.g., silicon or germanium in a crystalline, a
polycrystalline, or an amorphous structure, etc.), a compound
semiconductor (e.g., silicon carbide, gallium arsenide, gallium
phosphide, indium phosphide, indium arsenide, and/or indium
antimonide, etc.), an alloy semiconductor (e.g., silicon-germanium
(SiGe), gallium arsenide phosphide (GaAsP), aluminum indium
arsenide (AlInAs), aluminium gallium arsenide (AlGaAs), gallium
indium arsenide (GaInAs), gallium indium phosphide (GaInP), etc.),
combinations thereof, or other suitable materials. For example, the
compound semiconductor substrate may have a multilayer structure,
or the substrate may include a multilayer compound semiconductor
structure. In some embodiments, the alloy SiGe is formed over a
silicon substrate. In other embodiments, a SiGe substrate is
strained. In some embodiments, the semiconductor substrate 110 is a
device wafer. For example, the semiconductor substrate 110 includes
a plurality of semiconductor devices 112 formed therein. The
semiconductor devices 112 may be or may include active devices
(e.g., transistors, diodes, etc.) and/or passive devices (e.g.,
capacitors, resistors, inductors, etc.), or other suitable
electrical components.
[0014] The semiconductor substrate 110 may include circuitry (not
shown) formed in a front-end-of-line (FEOL), and the interconnect
structure 120 may be formed in a back-end-of-line (BEOL). In some
embodiments, the interconnect structure 120 includes an inter-layer
dielectric (ILD) layer formed over the semiconductor substrate 110
and covering the semiconductor devices 112, and an
inter-metallization dielectric (IMD) layer formed over the ILD
layer. In some embodiments, the ILD layer and the IMD layer are
formed of a low-K dielectric material, such as phosphosilicate
glass (PSG), borophosphosilicate glass (BPSG), SiOxCy,
Spin-On-Glass, Spin-On-Polymers, silicon carbon material, compounds
thereof, composites thereof, combinations thereof, or the like. The
ILD layer and the IMD layer may include any suitable number of
dielectric material layers which is not limited thereto.
[0015] In some embodiments, the interconnect structure 120
interconnects the semiconductor devices 112. For example, the
interconnect structure 120 includes at least one dielectric layer
124 disposed on the semiconductor substrate 110, and a plurality of
interconnecting layers 122 embedded in the dielectric layers 124.
For example, each of the interconnecting layers 122 includes
conductive lines, conductive pads, conductive vias, etc. A material
of the interconnecting layers 122 may include copper or copper
alloys, although other metals (e.g., aluminum, silver, gold, and
combinations thereof) may also be used. In some embodiments, two or
more layers of conductive lines of the interconnecting layers 122
are vertically interconnected by conductive vias of the
interconnecting layers 122 and embedded in the dielectric layer
124. The interconnecting layers 122 of the interconnect structure
120 disposed over the semiconductor substrate 110 may be
electrically coupled to the semiconductor devices 112 formed in
and/or on the semiconductor substrate 110 to one another and to
external components.
[0016] For example, the interconnecting layers 122 of the
interconnect structure 120 includes a bottom interconnecting layer
M1, a top interconnecting layer Mt, and intermediate level(s) of
the interconnecting layers therebetween (e.g., a second-level
interconnecting layer M2 immediately over the bottom
interconnecting layer M1, a third-level interconnecting layer M3
immediately beneath the top interconnecting layer Mt, and other
interconnecting layers (not shown) between the second-level
interconnecting layer M2 and the third-level interconnecting layer
M3). For ease of description, the term "top" is used herein to
refer to one of the layers that is most distal to the semiconductor
substrate 110, and the term "bottom" is used to refer to one of the
layers that is most proximal to the semiconductor substrate 110,
relative to other layers. It should be noted that a four-level
interconnecting layer structure illustrated in the figures is
merely exemplary, the interconnect structure 120 may include more
or less interconnecting layers depending on requirements of circuit
design. In some embodiments, at least one passivation layer 126' of
the interconnect structure 120 is disposed on the dielectric layer
124 and partially covers the top interconnecting layer Mt of the
interconnecting layers 122. In some embodiments, the passivation
layer 126' is a non-low-k dielectric layer. For example, the
passivation layer 126' is formed of silicon oxide, silicon nitride,
un-doped silicate glass, polyimide, or the like. Alternatively, the
passivation layer 126' is omitted. The passivation layer 126' may
include openings (not labeled) accessibly exposing at least a
portion of the top interconnecting layer Mt for further electrical
connection.
[0017] In some embodiments, a conductive material is formed on the
passivation layer 126' and inside the openings of the passivation
layer 126' to be in physical and electrical contact with the
underlying interconnecting layers 122 (e.g., top interconnecting
layer Mt). Next, a portion of the conductive material is removed to
form a patterned conductive pad 130 having through hole(s) TH. A
material of the conductive pad 130 may include aluminum, but other
suitable conductive materials (e.g., copper) may be used. In some
embodiments, after forming the conductive material on the
passivation layer 126' and inside the openings of the passivation
layer 126', the conductive material is patterned to form a
conductive pad 130'. It should be noted that although only one
conductive pad 130' is illustrated, multiple conductive pads may be
formed on the interconnect structure 120. In some embodiments, the
conductive pad 130' may be a test pad which allows functional
tests. Subsequently, a portion of the conductive pad 130' is
removed to form the through hole(s) TH of the patterned conductive
pad 130. For example, the forming process of the through holes TH
is performed after testing. In some embodiments, a portion of the
passivation layer 126' is exposed by the through holes TH of the
patterned conductive pad 130 as shown in FIG. 1B. It should be
noted that the structure described in conjunction with FIG. 1B is
merely exemplary. In other embodiments, a portion of the top
interconnecting layer Mt of the interconnecting layers 122 is
exposed by the through holes TH of the patterned conductive pad
130.
[0018] In some embodiments, after forming the conductive material
on the passivation layer 126' and inside the openings of the
passivation layer 126', the conductive material is patterned to
form the patterned conductive pad 130 having the through holes TH
in one time. In some embodiments, after forming the conductive
material, lithography and etching may be used to form the patterned
conductive pad 130. For example, the lithography techniques involve
depositing a photoresist material (not shown) on the conductive
material, which is subsequently irradiated (or exposed) and
developed to remove a portion of the photoresist material. The
remaining photoresist material protects the underlying materials
from subsequent etching steps. A suitable etching process, such as
a reactive ion etch or other dry etch, an isotropic or anisotropic
wet etch, or any other suitable etch or patterning process may be
applied to the conductive material to remove exposed portions of
the conductive material until the underlying passivation layer 126'
is exposed, such that the patterned conductive pad 130 including
through holes TH is formed. Subsequently, stripping solutions
tailored for the photoresist material followed by etching to remove
any photoresist residue. It should be noted that alternative
processes may be used to form the patterned conductive pad 130 with
the through holes TH.
[0019] In some embodiments, the outer sidewall 130a of the
patterned conductive pad 130 is substantially vertical and
substantially perpendicular to the top surface of the passivation
layer 126'. In some embodiments, the through holes TH are tapered
from the top surface 130t of the patterned conductive pad 130 to
the passivation layer 126'. In some embodiments, one of through
holes TH includes a top width WH1 greater than a bottom width WH2
thereof. For example, a width of one of through holes TH gradually
increases in a direction towards the top surface 130t of the
patterned conductive pad 130, thereby creating sloped inner
sidewalls 130b of the patterned conductive pad 130. The top surface
130t is connected to the inner sidewalls 130b and the outer
sidewall 130a. It should be noted that the structure described in
conjunction with FIG. 1B is merely exemplary, in other embodiments,
the outer sidewall 130a and/or the inner sidewalls 130b of the
patterned conductive pad 130 may be tilted or may be substantially
vertical depending on the forming process of the through holes
TH.
[0020] Referring to FIG. 1C and FIG. 1D, a dielectric material 140'
is formed on the passivation layer 126' to cover the patterned
conductive pad 130. For example, the top surface 130t, the outer
sidewall 130a, and the inner sidewall 130b of the patterned
conductive pad 130 are covered by the dielectric material 140'. In
some embodiments, the through holes TH of the patterned conductive
pad 130 are filled with the dielectric material 140'. The
dielectric material 140' may be or may include any suitable
electrically insulating material for the subsequent bonding
process. In some embodiments, the dielectric material 140' includes
a silicon-containing dielectric layer. For example, the dielectric
material 140' includes silicon oxide (SiO), silicon oxynitride
(SiON), silicon nitride (SiN), or the like, and may be formed by a
deposition process (e.g., chemical vapor deposition (CVD), physical
vapor deposition (PVD), etc.) or other suitable techniques.
[0021] Next, portions of the dielectric material 140' and the
underlying passivation layer 126' may be removed to respectively
form a patterned dielectric layer 140 and a patterned passivation
layer 126. For example, a damascene technique or other suitable
patterning process may be used. In some embodiments, a dual
damascene process is performed on the dielectric material 140' and
the underlying passivation layer 126'. For example, a plurality of
trench openings TR1 and TR2 are formed in the dielectric material
140', and a plurality of via openings VO are form in the dielectric
material 140' and the passivation layer 126' and extend from the
corresponding trench openings TR2. The trench openings TR1 and TR2
may be formed as a sporadic recess pattern distributed on the
dielectric material 140'. The via openings VO may pass through the
underlying passivation layer 126' to form the patterned passivation
layer 126 accessibly exposing the top interconnecting layer Mt of
the interconnecting layers 122. In other embodiments, the via
openings VO may further extend into the dielectric layer 124 of the
interconnect structure 120 to expose any level(s) of the
interconnecting layers 122 beneath the top interconnecting layer Mt
depending on the design requirements. It should be appreciated that
the dual damascene technique described in conjunction with FIG. 1D
is merely exemplary, and a single damascene process or other
suitable patterning process may be used in other embodiments.
[0022] In some embodiments, the via openings VO and the trench
openings TR1 and TR2 are formed using lithography and etching
techniques. The via openings VO may be formed prior to the trench
openings TR1 and TR2. For example, a via-first approach includes at
least the following steps. A photoresist (not shown) is applied and
patterned on the dielectric material 140'. The photoresist may be a
single-layer photoresist, a bi-layer photoresist, a tri-layer
photoresist, or the like. The via openings VO are then formed at
the predetermined locations corresponding to the through holes TH
of the patterned conductive pads 130 using the photoresist as a
mask. For example, portions of the dielectric material 140' and the
underlying passivation layer 126' are removed through the patterned
photoresist until the interconnecting layer(s) 122 is exposed. In
some embodiments, a selective etching process is employed to etch
the dielectric material 140' and the underlying passivation layer
126', and the etching process may continue until the top
interconnecting layer Mt is exposed. Subsequently, the patterned
photoresist is removed, for example, by stripping and/or ashing
optionally followed by cleaning. An additional photoresist may be
formed and patterned, the trench openings TR1 and TR2 are then
formed by further etching the dielectric material 140' through the
additional patterned photoresist. In some embodiments, the etching
process is performed such that the trench openings TR1 and TR2
extend from the top portions of the dielectric material 140' to an
intermediate point of the dielectric material 140' using, for
example, a time-mode. Other detection techniques for etching may be
contemplated. In some other embodiments, a trench-first approach
(e.g., the trench openings TR1 and TR2 are formed prior to the via
openings VO) is performed. Alternatively, the via openings VO and
the trench openings TR1 and TR2 are formed during the same process
using such as half tone mask, multi-tone mask, etc. It should be
appreciated that etch stop layer(s) (not shown) may be disposed in
the interconnect structure 120 or may be disposed between the
dielectric material 140' and the interconnect structure 120
depending on the process requirements.
[0023] Continue to FIG. 1D, in some embodiments, the trench
openings TR1 may not correspond to any of via openings in a cross
section. For example, the trench TR1 may be used for forming
conductive lines or dummy pads. Alternatively, the via openings VO
are formed corresponding to the trench openings TR1 and TR2. The
trench openings TR1 may be formed in unoccupied top portions of the
dielectric material 140' so that the spacing of the trench openings
TR2 may be maintained. In some embodiments, the trench openings TR2
are surrounded by the trench openings TR1. The trench openings TR1
and TR2 may be tapered from the top to the bottom. The dimensions
of the trench openings TR1 may be substantially equal to those of
the trench openings TR2. In some embodiments, the via openings VO
may also be tapered from the top to the bottom. For example, each
of trench openings TR1 and TR2 includes a top width (or diameter)
WT1 greater than a bottom width WT2 thereof. The bottom widths WT2
of trench openings TR2 and top widths WV1 of the corresponding via
openings VO may be located at the same plane and overlap. For
example, the bottom widths WT2 of trench openings TR2 are slightly
greater than the top widths WV1 of the corresponding via openings
VO. The top width WV1 of each of the via openings VO may be greater
than a bottom width WV2 thereof. In some embodiments, the top width
WV1 of one of the via openings VO is substantially equal to or
greater than about 1.8 .mu.m. In some embodiments, a width WV3 of
the each of the via openings VO at a plane where the top surface
130t of the patterned conductive pad 130 is less than the top width
WH1 of the through hole TH of the patterned conductive pad 130. The
bottom width WH2 of the through hole TH of the patterned conductive
pad 130 is greater than a width WV4 of the each of the via openings
VO at a plane where the top surface of the patterned passivation
layer 126 is located. The dimensions of the through holes TH, the
via openings VO, and the trench openings TR1 and TR2 may be sized
depending on the functions of the subsequently formed connectors
and the process requirements. Alternatively, the patterned
dielectric layer 140 includes substantially vertical sidewalls at
the locations where the trench openings TR1 and TR2 and/or the via
openings VO are formed.
[0024] After forming the via openings VO and the trench openings
TR1 and TR2, a portion of the dielectric material 140' is remained
in the through holes TH of the patterned conductive pad 130 and
covers the inner sidewalls 130b of the patterned conductive pad
130. The portion of the dielectric material 140' remained in the
through holes TH may also cover part of the top surface of the
patterned passivation layer 126 corresponding to the through holes
TH. In some embodiments, the patterned conductive pad 130 disposed
on the top surface of the patterned passivation layer 126 is
encapsulated by the patterned dielectric layer 140.
[0025] Referring to FIG. 1E and FIG. 1F, conductive materials CM
are formed in the via openings VO and the trench openings TR1 and
TR2 to form a plurality of conductive connectors 152 and dummy
connectors 154. For example, the conductive materials CM formed in
the trench openings TR1 may be viewed as the dummy connectors 154,
and the conductive materials CM formed in the via openings VO and
the corresponding trench openings TR2 may be viewed as the
conductive connectors 152. It should be noted that the conductive
connectors and the dummy connectors illustrated herein are merely
exemplary. For example, the conductive connectors 152 and the dummy
connectors 154 are formed as multi-layered structures.
[0026] In an exemplary embodiment, the method of forming the
conductive connectors 152 and the dummy connectors 154 includes at
least the following steps. For example, a diffusion barrier layer
(not shown) is conformally formed on the patterned dielectric layer
140 and covers sidewalls and bottoms of the via openings VO and the
trench openings TR1 and TR2. The diffusion barrier layer may be in
physical and electrical contact with the interconnecting layers 122
(e.g., top interconnecting layer Mt) exposed by the via openings VO
and the corresponding trench openings TR2. For example, the
diffusion barrier layer includes barrier materials (e.g., titanium,
titanium nitride, tantalum, tantalum nitride, and combinations
thereof), and may be formed using such as physical vapor deposition
(PVD) or other suitable deposition process. Next, a seed layer (not
shown) may be conformally formed on the diffusion barrier layer
using sputtering, plating, or other suitable depositing process.
The seed layer may be or may include a copper layer, a
titanium/copper bilayer, or other suitable metal layer that aids in
the formation of a thicker conductive material during subsequent
processing steps. Subsequently, a conductive material (e.g.,
copper, aluminum, silver, gold, metal alloy, etc.) is formed on the
seed layer and inside the via openings VO and the trench openings
TR1 and TR2 using plating, printing, or other suitable depositing
process.
[0027] Afterwards, excess conductive materials CM may be removed
until the underlying patterned dielectric layer 140 is exposed,
such that the conductive connectors 152 and the dummy connectors
154 are formed. For example, a planarization process, such as a
chemical mechanical polish (CMP) process or other suitable process,
is performed on excess conductive materials CM to form a planar
surface. In some embodiments, top surfaces 152t of the conductive
connectors 152 and top surfaces 154t of the dummy connectors 154
are substantially leveled. It should be noted that the conductive
connectors 152 and the dummy connectors 154 may be formed using
other suitable techniques. Up to here, a tier TD1 of a
semiconductor structure is substantially formed. In some
embodiments, the tier TD1 of a semiconductor structure is viewed as
a semiconductor die or a semiconductor chip. For example, the
foregoing manufacturing steps of the tier TD1 are performed at a
wafer level, and the tier TD1 may be or may not be singulated into
a plurality of semiconductor dies (or chips) before undergoing the
next step (e.g., bonding).
[0028] Still referring to FIG. 1F, the tier TD1 includes a first
surface S1 and a second surface S2 opposite to the first surface
S1. In some embodiments, the top surfaces 152t of the conductive
connectors 152, the top surfaces 154t of the dummy connectors 154,
and the top surface 140t of the patterned dielectric layer 140 are
substantially leveled at the first surface S1. In some embodiments,
the depths Dd of the dummy connectors 154 in the patterned
dielectric layer 140 is less than the depths Dc of the conductive
connectors 152 in the patterned dielectric layer 140 and the
patterned passivation layer 126. The dummy connectors 154 of the
tier TD1 are disposed aside the conductive connectors 152 and
embedded in the patterned dielectric layer 140. The dummy
connectors 154 may not be in contact with any of the underlying
conductive features in a cross section as shown in FIG. 1F. For
example, the dummy connectors 154 may not have electrical
functions, and may be electrically floating. In some embodiments,
during the use of the tier TD1, electrical signals may be connected
to the semiconductor devices 112 through the interconnecting layers
122 of the interconnect structure 120 and the conductive connectors
152. However, no electrical signal or voltage may be connected to
the dummy connectors 154. In some embodiments, the dummy connectors
154 are distributed at the periphery of the first surface S1, and
the conductive connectors 152 may be surrounded by the dummy
connectors 154. In some embodiments, with the formation of the
dummy connectors 154, the pattern densities in the tier TD1 become
more uniform, and hence the pattern-loading effect in the formation
of the conductive connectors 152 is reduced.
[0029] In some embodiments, each of the conductive connectors 152
includes a trench portion (or pad portion) 152a, a via portion 152b
extending downwardly from the corresponding trench portion 152a,
and a bottom portion 152c extending from the corresponding via
portion to be in contact with the interconnecting layers 122 (e.g.,
top interconnecting layer Mt). The trench portions 152a and the via
portions 152b are laterally covered by the patterned dielectric
layer 140, and the bottom portions 152c of the conductive
connectors 152 are laterally covered by the patterned passivation
layer 126. For example, the trench portions 152a of the conductive
connectors 152 are the part of conductive materials correspondingly
formed in the trench openings TR2, and the via portions 152b and
the bottom portions 152c of the conductive connectors 152 are the
conductive materials formed in the via openings VO. In some
embodiments, the via portions 152b and the corresponding bottom
portions 152c of the conductive connectors 152 are tapered from the
corresponding trench portions 152a of the conductive connectors 152
to the top interconnecting layer Mt. The dimensions of the trench
portions 152a, the via portions 152b, and the bottom portions 152c
may be sized depending on the corresponding via openings VO and the
trench openings TR2. In some embodiments, a portion of the via
portions 152b of the conductive connectors 152 corresponds to the
through holes TH of the patterned conductive pad 130 and may be
laterally isolated from the patterned conductive pad 130 by the
patterned dielectric layer 140. In some embodiments, the conductive
connectors 152 are not directly connected to the patterned
conductive pad 130. For example, the conductive connectors 152 are
electrically coupled to the patterned conductive pad 130 through
the interconnecting layers 122 (e.g., top interconnecting layer
Mt). In some embodiments, the patterned conductive pad 130 is
formed by the test pad. Since placing the test pads takes away the
real-estate on the surface of the semiconductor die, forming the
patterned conductive pad 130 by the test pads and forming the
conductive connectors 152 passing through the through holes TH of
the patterned conductive pad 130 to reach the interconnecting
layers 122 may minimize the impact of the test pads occupying the
real-estate of the surface of semiconductor die.
[0030] FIG. 2A and FIG. 2B are schematic cross-sectional views
showing various stages in a manufacturing method of a tier of a
semiconductor structure according to some exemplary embodiments of
the present disclosure. The manufacturing method of the illustrated
embodiment is similar to the manufacturing method of the tier TD1
described in FIG. 1A to FIG. 1F, and like elements throughout the
drawings are designated with the same reference numbers for ease of
understanding and the details thereof are not repeated herein.
Referring to FIG. 2A, an interconnect structure 220 is formed on
the semiconductor substrate 110. For example, the interconnect
structure 220 includes at least one dielectric layer 224 disposed
on the semiconductor substrate 110, and a plurality of
interconnecting layers 222 embedded in the dielectric layers 224.
The interconnecting layers 222 may be electrically coupled to the
semiconductor devices 112 of the semiconductor substrate 110 to one
another and to external components. The interconnecting layers 222
and the dielectric layers 224 may be similar to the interconnecting
layers 122 and the dielectric layers 124 described in FIG. 1A,
except that the interconnecting layers 222 of the interconnect
structure 220 include a dummy pattern DP. In some embodiments, the
dummy pattern DP of the interconnect structure 220 is electrically
floating. In other embodiments, the dummy pattern DP is
electrically coupled to some functional semiconductor devices 112
or provides short grounding paths for grounding the integrated
circuits. For example, the dummy pattern DP is formed in the top
interconnecting layer Mt' of the interconnecting layers 222. It
should be noted that the dummy pattern DP may be formed in, or not
in, any level(s) of the interconnecting layers 222 depending on the
design requirements. In some embodiments, the conductive pattern
other than the dummy pattern DP may be viewed as active pattern AP.
For example, the active pattern AP formed in the top
interconnecting layer Mt' may be surrounded by the dummy pattern DP
of the top interconnecting layer Mt'. It should be noted that the
illustrated configuration of the dummy pattern DP and the active
pattern AP is merely exemplary, other configuration(s) may be
possible.
[0031] Continue to FIG. 2A, the patterned passivation layer 226 of
the interconnect structure 220 is formed on the topmost one of the
dielectric layers 224 and partially covers top interconnecting
layer Mt'. In some embodiments, the patterned passivation layer 226
includes a plurality of first openings 226a, second openings 226b,
and third openings 226c. For example, the first openings 226a and
the third openings 226c respectively expose at least portions of
the active pattern AP, and the second openings 226b expose at least
a portion of the dummy pattern DP. The patterned conductive pad 130
is disposed on the top surface of the patterned passivation layer
226 and inside the third openings 226c of the patterned passivation
layer 226 to be electrically coupled to the interconnect structure
220. For example, the patterned conductive pad 130 is electrically
coupled to the active pattern AP of the interconnecting layers 222.
The first openings 226a of the patterned passivation layer 226 may
correspond to the through holes TH of the patterned conductive pad
130. For example, a bottom width of one of through holes TH is
greater than or substantially equal to a top width of the
corresponding first opening 226a of the patterned passivation layer
226.
[0032] A patterned dielectric layer 240 covers the patterned
conductive pad 130 and the interconnect structure 220. For example,
the patterned dielectric layer 240 is formed on the patterned
passivation layer 226 and encapsulates the patterned conductive pad
130. In some embodiments, a portion of the patterned dielectric
layer 240 extends through the through holes TH of the patterned
conductive pad 130 and covers the inner sidewalls 130b of the
patterned conductive pad 130. For example, the patterned dielectric
layer 240 includes a plurality of first openings 240a and second
openings 240b. The first openings 240a of the patterned dielectric
layer 240 correspond to the through holes TH of the patterned
conductive pad 130, and may be in communication with the first
openings 226a of the patterned passivation layer 226. The second
openings 240b of the patterned dielectric layer 240 are disposed
aside the first openings 240a, and may be in communication with the
second openings 226b of the patterned passivation layer 226. In
some embodiments, at least a portion of the dummy pattern DP of the
top interconnecting layer Mt' is exposed by the second openings
226b of the patterned passivation layer 226 and the second openings
240b of the patterned dielectric layer 240.
[0033] Still referring to FIG. 2A, the forming methods of the
patterned passivation layer 226, the patterned conductive pad 130,
and the patterned dielectric layer 240 may include at least the
following steps. For example, the passivation material is formed on
the top interconnecting layer Mt' and the topmost one of the
dielectric layers 224, and then the passivation material is
patterned to form the third openings 226c. Alternatively, the first
openings 226a and/or the second openings 226b may be formed
together with the third openings 226c to form the patterned
passivation layer 226. The passivation material may be similar to
the material of the patterned passivation layer 126 described
above. Next, a conductive material is formed on the top surface of
the passivation material and inside the third openings 226c, and
then the conductive material is patterned to form the patterned
conductive pad 130 with the through holes TH. Next, the dielectric
material may be formed on the passivation material to cover the
patterned conductive pad 130 and to fill the through holes TH. The
dielectric material may be similar to the material of the patterned
dielectric layer 140. In certain embodiments in which the second
openings 226b and/or the first openings 226a are formed together
with the third openings 226c, the dielectric material may be formed
in the first openings 226a and the second openings 226b of the
patterned passivation layer 226. Subsequently, the dielectric
material may be patterned to form the patterned dielectric layer
240 with the first openings 240a and the second openings 240b
using, for example, a damascene process. The underlying passivation
material may be patterned during the same process to form the
patterned passivation layer 226
[0034] In some embodiments, the first openings 240a and the second
openings 240b of the patterned dielectric layer 240 are tapered
from a top surface 240t of the patterned dielectric layer 240
towards the top interconnecting layer Mt'. For example, a width of
each of first openings 240a and the second openings 240b gradually
increases in a direction towards the top surface 240t of the
patterned dielectric layer 240, thereby creating sloped inner
sidewalls of the patterned dielectric layer 240. It should be
appreciated that the single damascene technique described in
conjunction with FIG. 2A is merely exemplary, and a dual damascene
process or other suitable patterning process may be used in other
embodiments. It is also noted that the forming methods of the
patterned passivation layer 226, the patterned conductive pad 130,
and the patterned dielectric layer 240 can be performed in any
logical order which are not limited in the disclosure.
[0035] Referring to FIG. 2B, conductive materials are formed in the
patterned passivation layer 226 and the patterned dielectric layer
240 to form conductive connectors 252 and dummy connectors 254. In
an embodiment, the conductive materials may be formed by depositing
one or more diffusion barrier layer(s) on the inner sidewalls of
the patterned dielectric layer 240, and on the inner sidewalls and
the bottom of the patterned passivation layer 226 so as to be in
contact with the interconnecting layers 222 (e.g., top
interconnecting layer Mt'), and then depositing a seed layer. Once
the seed layer has been deposited in the patterned dielectric layer
240 and the patterned passivation layer 226, a conductive material
is filled into the first openings 240a and the second openings 240b
of the patterned dielectric layer 240 and the first openings 226a
and the second openings 226b of the patterned passivation layer
226. Excess conductive materials and/or dielectric films may be
removed from the top surface 240t of the patterned dielectric layer
240. The filled first openings 240a and 226a form the conductive
connectors 252, and the filled second openings 240b and 226b form
the dummy connectors 254. Up to here, a tier TS1 of a semiconductor
structure is substantially formed.
[0036] Continue to FIG. 2B, the tier TS1 includes a first surface
S1 and a second surface S2 opposite to the first surface S1. The
top surfaces 254t of the dummy connectors 254, the top surfaces
252t of the conductive connectors 252, and the top surface 240t of
the patterned dielectric layer 240 may be substantially leveled at
the first surface S1 of the tier TS1. In some embodiments, the
depth Dd' of one of the dummy connectors 254 in the patterned
dielectric layer 240 and the patterned passivation layer 226 is
substantially equal to the depth Dc of one of the conductive
connectors 252 in the patterned dielectric layer 240 and the
patterned passivation layer 226. In some embodiments, all of the
conductive connectors 252 and the dummy connectors 254 of the tier
TS1 penetrate through the patterned dielectric layer 240 and the
patterned passivation layer 226. Alternatively, the dummy
connectors 254 may be inlaid with the patterned dielectric layer
240 and may not pass through the patterned dielectric layer 240. In
some embodiments, the conductive connectors 252 are surrounded by
the dummy connectors 254. In some embodiments, the conductive
connectors 252 of the tier TS1 pass through the portion of the
patterned dielectric layer 240 extending into the through holes TH
of patterned conductive pad 130 so as to be in physical and
electrical contact with the active pattern AP (e.g., located at the
top interconnecting layer Mt' or other level(s) of the
interconnecting layers 222) of the interconnect structure 220. The
conductive connectors 252 may be electrically coupled to the
patterned conductive pad 130 through the active pattern AP of the
interconnect structure 220. In some embodiments, the dummy
connectors 254 of the tier TS1 pass through the patterned
dielectric layer 240 and the patterned passivation layer 226 to be
in contact with the dummy pattern DP (e.g., located at the top
interconnecting layer Mt' or other level(s) of the interconnecting
layers 222) of the interconnect structure 220.
[0037] The dummy connectors 254 and the dummy pattern DP of the
interconnect structure may not have electrical functions, and may
be electrically floating in the tier TS1. In subsequent steps, the
tier TS1 may be sawed into semiconductor dies. During the use of
the semiconductor dies, electrical signals may be connected to the
active pattern AP and the conductive connectors 252, but no
electrical signal or voltage may be connected to dummy connectors
254 and the dummy pattern DP. In some embodiments, a conductive
path may be found between the dummy connectors 254 and the dummy
pattern DP, although both of them may be floating. In some
embodiments, the dummy connectors 254 and the dummy pattern DP are
used for thermal dissipation. In other embodiments, the dummy
connectors 254 and the dummy pattern DP are used to provide short
grounding paths for grounding the integrated circuits of the tier
TS1.
[0038] FIG. 3A to FIG. 3C are schematic cross-sectional views
showing various stages in a manufacturing method of a tier of a
semiconductor structure according to some exemplary embodiments of
the present disclosure. The manufacturing method of the illustrated
embodiment is similar to the manufacturing method of the tier TD1
described in FIG. 1A to FIG. 1F, and like elements throughout the
drawings are designated with the same reference numbers for ease of
understanding and the details thereof are not repeated herein.
Referring to FIG. 3A, a dielectric material 340' is formed on the
passivation layer 126' of the interconnect structure 120 over the
semiconductor substrate 110 to encapsulate the conductive pad 330.
For example, a conductive material is formed on the passivation
layer 126' and inside the openings of the passivation layer 126' to
be in physical and electrical contact with the top interconnecting
layer Mt, and then the conductive material is patterned to form the
conductive pad 330. The conductive pad 330 is electrically coupled
to the semiconductor devices 112 through the interconnecting layers
122 of the interconnect structure 120. In the illustrated
embodiment, the conductive pad 330 is not patterned to form through
holes. After forming the conductive pad 330, the dielectric
material 340' is formed on the passivation layer 126' to cover the
conductive pad 330 using a deposition process or other suitable
techniques. The materials of the conductive pad 330 and the
dielectric material 340' may be similar to those of the conductive
pad 130' and the dielectric material 140', respectively.
[0039] Referring to FIG. 3B, a portion of the dielectric material
340' is removed to form a patterned dielectric layer 340. In some
embodiments, a dual damascene process is performed on the
dielectric material 340' to form the patterned dielectric layer 340
with a plurality of trench openings TR1 and TR2 and a plurality of
via openings VO' extend from the bottoms of the trench openings
TR2. The via openings VO' and the trench openings TR1 and TR2 may
be formed by several approaches, such as via-first approach,
trench-first approach, and others suitable patterning techniques.
The trench openings TR2 may correspond to the conductive pad 330,
and may be surrounded by the trench openings TR1. In other
embodiments, the trench openings TR1 are omitted. Each of the
trench openings TR2 may be in communication with one of the via
openings VO'. The opening depth of one of the trench openings TR1
may be less than the total opening depth of one of the trench
openings TR2 and the corresponding via opening VO'. In some
embodiments, at least a portion of the conductive pad 330 is
accessibly exposed by the trench openings TR2 and the corresponding
via openings VO' for further electrical connection. It should be
noted that two sets of trench openings TR2 and the via openings VO'
illustrated in FIG. 3B are merely exemplary, more sets or only one
set of trench openings TR2 and the via openings VO' may be
possible.
[0040] Referring to FIG. 3C, conductive materials may be formed in
the via openings VO' and the trench openings TR1 and TR2 to form a
plurality of conductive connectors 352 and dummy connectors 354.
For example, the conductive materials formed in the trench openings
TR1 may be viewed as the dummy connectors 354, and the conductive
materials formed in the trench openings TR2 and the via openings
VO' and landing on the conductive pad 330 may be viewed as the
conductive connectors 352. The conductive connectors 352 are in
physical and electrical contact with the underlying conductive pad
330. It should be noted that the conductive connectors 352 and the
dummy connectors 354 illustrated herein are merely exemplary, and
the conductive connectors 352 and the dummy connectors 354 may be
formed as multi-layered structures including diffusion barrier
layer, seed layer, and plated metal layer, etc. The forming process
of conductive connectors 352 and dummy connectors 354 may be
similar to that of the conductive connectors 152 and dummy
connectors 154 described in FIG. 1E and FIG. 1F, and the detailed
descriptions are omitted for brevity. Up to here, a tier TD2 of a
semiconductor structure is substantially formed.
[0041] Continue to FIG. 3C, the tier TD2 includes a first surface
S1 and a second surface S2 opposite to the first surface S1. In
some embodiments, the top surfaces 352t of the conductive
connectors 352, the top surfaces 354t of the dummy connectors 354,
and the top surface 340t of the patterned dielectric layer 340 are
substantially leveled at the first surface S1. In some embodiments,
the depth Dd of one of the dummy connectors 354 in the patterned
dielectric layer 340 is less than the depth Dc' of one of the
conductive connectors 352 in the patterned dielectric layer 340.
Alternatively, the depth Dd of one of the dummy connectors 354 may
be substantially equal to or greater than the depth Dc' of one of
the conductive connectors 352 in other embodiments. The conductive
connectors 352 laterally covered by the patterned dielectric layer
340 may be electrically coupled to the interconnecting layers 122
through the conductive pad 330. The dummy connectors 354 disposed
aside the conductive connectors 352 and embedded in the patterned
dielectric layer 340 may not have electrical functions, and may be
electrically floating. In some embodiments, during the use of the
tier TD2, electrical signals may be connected to semiconductor
devices 112 through the interconnecting layers 122, the conductive
pad 330, and the conductive connectors 352. However, no electrical
signal or voltage may be connected to the dummy connectors 354. In
some embodiments, with the formation of the dummy connectors 354,
the pattern densities in the tier TD2 become more uniform, and
hence the pattern-loading effect in the formation of the conductive
connectors 352 is reduced.
[0042] FIG. 4A and FIG. 4B are schematic cross-sectional views
showing various stages in a manufacturing method of a tier of a
semiconductor structure according to some exemplary embodiments of
the present disclosure. The manufacturing method of the illustrated
embodiment is similar to the manufacturing methods of the tier TS1
and tier TD2 respectively described in FIG. 2A to FIG. 2B and FIG.
3A to FIG. 3C. Like elements throughout the drawings are designated
with the same reference numbers for ease of understanding and the
details thereof are not repeated herein. Referring to FIG. 4A, an
interconnect structure 220' is formed on the semiconductor
substrate 110. For example, the interconnect structure 220'
includes at least one dielectric layer 224 disposed on the
semiconductor substrate 110, a plurality of interconnecting layers
222 embedded in the dielectric layers 224 and electrically coupled
to the semiconductor devices 112, and a patterned passivation layer
226' formed on the topmost one of the dielectric layers 224 and
partially exposing the top interconnecting layer Mt'. The material
and the forming process of the patterned passivation layer 226' may
be similar to those of the patterned passivation layer 226
described in FIG. 2A. The difference between the patterned
passivation layer 226' and the patterned passivation layer 226
described in FIG. 2A lies in that the patterned passivation layer
226' in the illustrated embodiment includes the second openings
226b and the third openings 226c, but not include the first
openings 226a.
[0043] In some embodiments, at least a portion of the dummy pattern
DP of the interconnecting layers 222 (e.g., the top interconnecting
layer Mt') is accessibly exposed by the second openings 226b of the
patterned passivation layer 226'. The third openings 226c of the
patterned passivation layer 226' surrounded by the second openings
226b may accessibly expose at least a portion of the active pattern
AP of the interconnecting layers 222 (e.g., the top interconnecting
layer Mt') for connection of the subsequently formed conductive pad
330. The conductive pad 330 is formed on the top surface of the
patterned passivation layer 226' and inside the third openings 226c
of the patterned passivation layer 226'. The material of and the
forming process of the conductive pad 330 is similar to those of
the conductive pad 330 described in FIG. 3A, so the detailed
descriptions are not repeated for brevity.
[0044] Continue to FIG. 4A, after forming the conductive pad 330, a
patterned dielectric layer 440 is formed on the patterned
passivation layer 226' and partially covers the conductive pad 330.
The material of and the forming process of the patterned dielectric
layer 440 is similar those of the patterned dielectric layer 240
described in FIG. 2A. In some embodiments, the first openings 440a
of the patterned dielectric layer 440 accessibly expose at least a
portion of the conductive pad 330 for further electrical
connection. The second openings 440b of the patterned dielectric
layer 440 may correspond to and may be in communication with the
second openings 226b of the patterned passivation layer 226' so as
to accessibly expose the underlying dummy pattern DP. In some
embodiments, the opening depths of the second openings 440b of the
patterned dielectric layer 440 are greater than the opening depths
of the first openings 440a of the patterned dielectric layer 440.
In some embodiments, the third openings 226c of the patterned
passivation layer 226' may be formed prior to the second openings
226b of the patterned passivation layer 226', and the second
openings 440b of the patterned dielectric layer 440 and the second
openings 226b of the patterned passivation layer 226' are formed in
the same patterning process. It should be noted that the numbers of
the openings illustrated herein are merely exemplary, more openings
or less openings may be possible depending on the design
requirements.
[0045] Referring to FIG. 4B, conductive materials may be formed in
the second openings 226b of the patterned passivation layer 226',
the first openings 440a and the second openings 440b of the
patterned dielectric layer 440 to form a plurality of conductive
connectors 452 and dummy connectors 454. The conductive connectors
452 are in physical and electrical contact with the underlying
conductive pad 330. It should be noted that the conductive
connectors 452 and the dummy connectors 454 shown in FIG. 4B are
for illustrative purpose, and the conductive connectors 352 and the
dummy connectors 354 may be formed as multi-layered structures
including diffusion barrier layer, seed layer, and plated metal
layer, or the like. Up to here, a tier TS2 of a semiconductor
structure is substantially formed. The tier TS2 includes a first
surface S1 and a second surface S2 opposite to the first surface
S1. The top surfaces 454t of the dummy connectors 454, the top
surfaces 452t of the conductive connectors 452, and the top surface
440t of the patterned dielectric layer 440 may be substantially
leveled at the first surface S1 of the tier TS2.
[0046] Continue to FIG. 4B, in some embodiments, the dummy
connectors 454 of the tier TS2 penetrate through the patterned
dielectric layer 440 and the patterned passivation layer 226' to be
in physical contact with the dummy pattern DP (e.g., located at the
top interconnecting layer Mt' or other level(s) of the
interconnecting layers 222) of the interconnect structure 220'.
Alternatively, the dummy connectors 454 may not pass through the
patterned dielectric layer 440 and may not be connected to the
interconnect structure 220'. In some embodiments, the conductive
connectors 452 are surrounded by the dummy connectors 454, and may
extend from the top surface 440t of the patterned dielectric layer
to land on the conductive pad 330. The conductive connectors 452
may be electrically coupled to the interconnect structure 220'
through the conductive pad 330. In some embodiments, the depth Dd'
of one of the dummy connectors 454 in the patterned dielectric
layer 440 and the patterned passivation layer 226' are greater than
the depth Dc' of one of the conductive connectors 452 in the
patterned dielectric layer 440. The dummy connectors 454 and the
dummy pattern DP connected thereof may not have electrical
functions, and may be electrically floating in the tier TS2. In
subsequent steps, the tier TS2 may be sawed into semiconductor
dies. During the use of the semiconductor dies, electrical signals
may be connected to the active pattern AP, the conductive pad 330,
and the conductive connectors 452, but no electrical signal or
voltage may be connected to dummy connectors 454 and the dummy
pattern DP. In some embodiments, a conductive path may be found
between the dummy connectors 454 and the dummy pattern DP, although
both of them may be floating. In other embodiments, the dummy
connectors 454 and the dummy pattern DP are used to provide short
grounding paths for grounding the integrated circuits of the tier
TS2 and/or provide additional thermal dissipation paths.
[0047] FIG. 5A and FIG. 5B are schematic cross-sectional views
showing various stages in a manufacturing method of a semiconductor
structure according to some exemplary embodiments of the present
disclosure. Referring to FIG. 5A, two of the tiers TD1 are bonded
together in a face-to-face configuration. For example, the tiers
TD1 are arranged with the first surfaces S1 facing each other and
are bonded. Alternatively, the tiers are arranged in a face-to-back
configuration, where the first surface of one of the tiers is boned
to the second surface of the other one of the tiers. In some
embodiments, the tiers TD1 are fabricated separately, and a hybrid
bonding process is performed on the tiers TD1. It should be noted
that various bonding schemes can be used to stack the semiconductor
structures, thereby forming three-dimensional integrated circuit
(3DIC). For example, a bonding interface IF between the tiers TD1
includes dielectric-to-dielectric bonding (e.g., oxide-to-oxide
bonding), metal-to-metal bonding (e.g., copper-to-copper bonding),
metal-to-dielectric bonding (e.g., oxide-to-copper bonding), any
combinations thereof, and/or the like.
[0048] In an exemplary embodiment, the hybrid bonding process of
the tiers TD1 includes at least the following steps. For example,
surface preparation for bonding surfaces (e.g., the first surfaces
S1 of the tiers TD1) is performed to remove particles thereon. The
surface preparation may include surface cleaning and activation or
other suitable process. In some embodiments, the top surfaces 152t
of the conductive connectors 152 and the top surfaces 154t of the
dummy connectors 154 may be cleaned by wet cleaning before
performing a bonding process. Not only particles are removed, but
also native oxide formed on the top surfaces 152t and 154t of the
conductive connectors 152 and the dummy connectors 154 of the tiers
TD1 may be removed by chemicals used in the wet cleaning. After
cleaning, activation of the top surfaces 140t of the patterned
dielectric layers 140 of the tiers TD1 may be performed for
development of high bonding strength. In some embodiments, plasma
activation may be performed to treat the top surfaces 140t of the
patterned dielectric layers 140. In some embodiments, the tiers TD1
are aligned with each other and sub-micron alignment precision may
be achieved. Once the tiers TD1 are aligned precisely, one of the
tiers TD1 is placed on and in contact with the other one of the
tiers TD1. When the activated top surfaces 140t of the patterned
dielectric layers 140 of the tiers TD1 are in contact with each
other, the top surfaces 140t of the patterned dielectric layers 140
of the tiers TD1 are pre-bonded. In other words, the tiers TD1 are
pre-bonded through the pre-bonding of the patterned dielectric
layers 140. After pre-bonding, the conductive connectors 152 and
the dummy connectors 154 of one of the tiers TD1 may respectively
correspond to and may be in physical contact with the conductive
connectors 152 and the dummy connectors 154 of the other one of the
tiers TD1.
[0049] In some embodiments, after pre-bonding, a hybrid bonding of
the tiers TD1 is performed. The hybrid bonding may include a
treatment for dielectric bonding to strengthen the bonding between
the patterned dielectric layers 140, and a thermal annealing to
facilitate the bonding between the conductive connectors 152 and
the dummy connectors 154 of the tiers TD1. In some embodiments, the
process temperature of the thermal annealing for connectors'
bonding is higher than that of the treatment for dielectric
bonding. Since the thermal annealing performing onto the conductive
connectors 152 and the dummy connectors 154 is performed at
relative higher temperature, metal diffusion and grain growth may
occur at the bonding interface IF between the conductive connectors
152 and the dummy connectors 154 of two tiers TD1. After the
bonding is performed, the conductive connectors 152 of these two
tiers TD1 provide vertical and electrical connections therebetween.
The patterned dielectric layers 140 may function as bonding
dielectric layers. The conductive connectors 152 may be referred to
as bonding connectors. The dummy connectors 154 of two tiers TD1
are bonded together and may also be referred to as bonding
connectors, but the dummy connectors 154 are electrically isolated
from the underlying conductive features. For example, the bonded
dummy connectors 154 may not have electrical functions, and may be
electrically floating. Up to here, a bonded structure of two tiers
TD1 is formed.
[0050] Referring to FIG. 5B, after boning, a through semiconductor
via (TSV) 70 is formed in the semiconductor substrate 110 and
extends into the interconnect structure 120 of at least one of the
tiers TD1. The TSV 70 may extend into the dielectric layers 124 to
reach any level(s) of the interconnecting layers 122 so that the
TSV 70 may be electrically coupled to the semiconductor devices 112
through the interconnecting layers 122. The formation of TSV 70 may
be performed before or after bonding the tiers TD1. In some
embodiments, the TSV 70 is formed using a via-first approach, and
is formed during the formation of the interconnect structure 120.
In other embodiments, the TSV 70 is formed using a via-last
approach, and may be formed after the formation of interconnect
structure 120. It should be noted that the forming step of the TSV
70 can be performed in any logical order which are not limited in
the disclosure. In some embodiments, the TSV 70 is tapered from the
semiconductor substrate 110 towards the interconnecting layers 122.
In other embodiments, the width of the TSV 70 increases in a
direction towards the bonding interfaces IF. Alternatively, the
sidewalls of the TSV 70 may be substantially vertical relative to
the bonding interface IF. It should be noted that although only one
TSV is illustrated in FIG. 5B, more TSVs may be disposed in the
bonded structure to perform one or more functions. It is also noted
that any number of the tiers TD1 may be stacked vertically in any
combination depending on the design requirements, and different
tiers may be electrically communicated to one another through at
least the conductive connectors, the TSVs, and other conductive
features.
[0051] Continue to FIG. 5B, a redistribution structure 80 may be
formed on the semiconductor substrate 110 and the TSV 70. In some
embodiments, before forming the redistribution structure 80, a
thinning process (e.g., grinding, polishing, and/or etching, etc.)
is applied to the second surface S2 of one of the tier T1 to
accessibly reveal the TSV 70 and to reduce the thickness of the
semiconductor substrate 110. In some embodiments, before forming
the redistribution structure 80, isolation layer(s) may be formed
on the second surface S2 for protection. The redistribution
structure 80 may include at least one dielectric pattern 82 and at
least one conductive pattern 84 (e.g., lines, vias, pads) disposed
in the dielectric pattern 82. The conductive pattern 84 of the
redistribution structure 80 may redistribute the underlying
circuitry and may reroute the electrical signal of the bonded
structure. For example, the conductive pattern 84 and the
dielectric pattern 82 may be formed using suitable depositing,
patterning, and metallization techniques (e.g., dielectric
deposition, lithography, etching, seed layer deposition, plating,
planarization, etc.), or other suitable processes. The bottommost
one of the conductive pattern 84 may be embedded in the bottommost
one of the dielectric pattern 82, and may be in physical and
electrical contact with the underlying TSV 70. The topmost one of
the conductive pattern 84 may be accessibly revealed by the topmost
one of the dielectric pattern 82. In some embodiments, the topmost
one of the dielectric pattern 82 may include one or more suitable
passivation and/or protective materials in order to provide a
degree of protection for the underlying conductive pattern 84. In
some embodiments, the topmost one of the conductive pattern 84
includes external contact pad(s) for further electrical connection.
For example, the external contact pads are the under-bump
metallurgy (UBM) pads for the subsequent ball-mounting process. It
should be noted that although a two-layered redistribution
structure is illustrated in FIG. 5B, the numbers of dielectric
pattern 82 and conductive pattern 84 are not limited thereto.
[0052] Still referring to FIG. 5B, external terminal(s) 90 may be
formed on the redistribution structure 80. For example, a plurality
of external terminals 90 (e.g., conductive balls/bumps) arranged in
array are formed on the external contact pads of the topmost one of
the conductive pattern 84. In some embodiments, the external
terminals 90 may be solder balls formed by ball placement and
reflowing processes. In some other embodiments, the external
terminals 90 may be or may include copper pillars, controlled
collapse chip connection (C4) bumps, micro-bumps, a copper layer, a
nickel layer, a lead free (LF) layer, an electroless nickel
electroless palladium immersion gold (ENEPIG) layer, a Cu/LF layer,
a Sn/Ag layer, a Sn/Pb, combinations of these, or the like. It
should be noted that any suitable external terminals, and any
suitable process for forming the external terminals, may be
utilized for the external terminals 90.
[0053] In some embodiments, after forming the external terminal 90,
a singulation process may be performed along scribe lines (not
shown) to dice the resulted structure into a plurality of
semiconductor structures 10A. In some embodiments, the foregoing
steps may be performed at wafer-to-wafer level, where the tiers TD1
are provided in a wafer form for bonding, and then the structure
shown in FIG. 5B may be singulated into a plurality of
semiconductor structures 10A. In other embodiments, the foregoing
steps may be performed at the die-to-die level, where the tiers TD1
are singulated from the same or different device wafer(s) into a
plurality of semiconductor dies (or chips) before bonding.
Alternatively, the foregoing steps may be performed at the
die-to-wafer level.
[0054] For advanced technologies, more devices are needed to
perform more tasks in a single semiconductor die and the real
estate on the semiconductor die is very valuable. By forming the
conductive connectors 152 passing through the through holes TH of
the patterned conductive pad 130 and interposing the patterned
dielectric layer 140 between the conductive connector 152 and the
patterned conductive pad 130 to resolve device concerns, precious
space on semiconductor dies can be saved. Accordingly, the entire
size of the semiconductor structure 10A may be reduced.
[0055] FIG. 6 to FIG. 11 are schematic cross-sectional views
showing various semiconductor structures according to some
exemplary embodiments of the present disclosure. The variations of
the embodiments are discussed and like elements throughout the
drawings are designated with the same reference numbers for ease of
understanding and the details thereof are not repeated herein.
Referring to FIG. 6, a semiconductor structure 10B including the
tiers TS1 and TD1 is provided. The tier TS1 may be stacked on and
bonded to the tier TD1 in a face-to-face configuration using a
similar bonding method described in FIG. 5A. Alternatively, the
tiers TS1 and TD1 are arranged in a face-to-back configuration,
where the first surface of one of the tiers TS1 and TD1 is boned to
the second surface of the other one of the tiers TS1 and TD1. For
example, a bonding interface IF between the tiers TS1 and TD1
includes dielectric-to-dielectric bonding (e.g., oxide-to-oxide
bonding), metal-to-metal bonding (e.g., copper-to-copper bonding),
metal-to-dielectric bonding (e.g., copper-to-oxide bonding), any
combinations thereof, and/or the like.
[0056] In some embodiments, the bonding between the conductive
connectors 252 of the tier TS1 and the conductive connectors 152 of
the tier TD1 and/or the bonding between the dummy connectors 254 of
the tier TS1 and the dummy connectors 154 of the tier TD1 may be
via-to-pad bonding. In some embodiments, the via perimeters of the
conductive connectors 252 and/or the dummy connectors 254 overlap
the pad perimeters of the corresponding conductive connectors 152
and/or the corresponding dummy connectors 154. In some embodiments,
the via perimeter may be within the corresponding pad perimeter. In
some other embodiments, the via perimeter may be laterally offset
from the corresponding pad perimeter. For example, the conductive
connectors 252 and the dummy connectors 254 of the tier TS1 may be
shifted slightly in one direction (e.g., to the right or left)
relative to the conductive connectors 152 and the dummy connectors
154 of the tier TD1 due to formation and/or alignment process
variations. It should be noted that the via perimeters and the pad
perimeters construe no limitation in the disclosure as long as the
conductive connectors 252 and the dummy connectors 254 of the tier
TS1 are reliably bonded to the conductive connectors 152 and the
dummy connectors of the tier TD1. It is also noted that any number
of the tier TS1 and/or the tier TD1 may be stacked vertically in
any combination depending on the design requirements, and different
tiers may be electrically communicated to one another through at
least the conductive connectors, the TSVs, and other conductive
features.
[0057] In some embodiments, the TSV 70 is formed in the
semiconductor substrate 110 and inserts into the dielectric layer
224 of interconnect structure 220 of the tier TS1 to the
interconnecting layer 222. Alternatively, the TSV is formed in the
tier TD1 of the semiconductor structure 10B. The redistribution
structure 80 is formed on the TSV 70 and the semiconductor
substrate 110, and the external terminals 90 are formed on the
redistribution structure 80 for external electrical connection. As
shown in FIG. 6, forming the conductive connectors 152 and 252
passing through the through holes TH of the patterned conductive
pads 130 to reach the interconnecting layers 112 and 222 may
increase the available routing area of the semiconductor structure
10B.
[0058] Referring to FIG. 7, a semiconductor structure 10C including
the tiers TD1 and TD2 is provided. The tiers TD1 may be stacked on
and bonded to one another in a face-to-face configuration using a
similar bonding method described in FIG. 5A. Alternatively, the
tiers TD1 and TD2 are arranged in a face-to-back configuration,
where the first surface of one of the tiers TD1 and TD2 is boned to
the second surface of the other one of the tiers TD1 and TD2. For
example, a bonding interface IF between the tiers TD1 and TD2
includes dielectric-to-dielectric bonding (e.g., oxide-to-oxide
bonding), metal-to-metal bonding (e.g., copper-to-copper bonding),
metal-to-dielectric bonding (e.g., copper-to-oxide bonding), any
combinations thereof, and/or the like. In some embodiments, the
bonding between the conductive connectors 352 of the tier TD2 and
the conductive connectors 152 of the tier TD1 and/or the bonding
between the dummy connectors 354 of the tier TD2 and the dummy
connectors 154 of the tier TD1 may be pad-to-pad bonding. It is
noted that any number of the tier TD1 and/or the tier TD2 may be
stacked vertically in any combination depending on the design
requirements, and different tiers may be electrically communicated
to one another through at least the conductive connectors, the
TSVs, and other conductive features. In some embodiments, the TSV
70 is formed in the semiconductor substrate 110 and inserts into
the dielectric layer 124 of interconnect structure 120 of the tier
TD2 to the interconnecting layer 122. Alternatively, the TSV is
formed in the tier TD1 of the semiconductor structure 10C. The
redistribution structure 80 is formed on the TSV 70 and the
semiconductor substrate 110, and the external terminals 90 are
formed on the redistribution structure 80 for external electrical
connection.
[0059] As shown in FIG. 7, forming the conductive connectors 152
passing through the through holes TH of the patterned conductive
pad 130 to reach the interconnecting layers 112 of the tier TD1 may
increase the available routing area of the semiconductor structure
10C. Since the conductive connectors 352 land on the conductive pad
330 of the tier TD2, the heat generated in the semiconductor
structure 10C during operation may be conducted through at least
the conductive connectors 352 and the conductive pad 330 to the
external terminals 90, and subsequently dissipated, thereby
providing better vertical heat dissipation pathways for
semiconductor structures that require thermal management.
[0060] Referring to FIG. 8, a semiconductor structure 10D including
the tiers TD1 and TS2 is provided. The tier TS2 may be stacked on
and bonded to the tier TD1 in a face-to-face configuration using a
similar bonding method described in FIG. 5A. Alternatively, the
tiers TD1 and TS2 are arranged in a face-to-back configuration,
where the first surface of one of the tiers TD1 and TS2 is boned to
the second surface of the other one of the tiers TD1 and TS2. For
example, a bonding interface IF between the tiers TS2 and TD1
includes dielectric-to-dielectric bonding (e.g., oxide-to-oxide
bonding), metal-to-metal bonding (e.g., copper-to-copper bonding),
metal-to-dielectric bonding (e.g., copper-to-oxide bonding), any
combinations thereof, and/or the like. In some embodiments, the
bonding between the conductive connectors 452 of the tier TS2 and
the conductive connectors 152 of the tier TD1 and/or the bonding
between the dummy connectors 454 of the tier TS2 and the dummy
connectors 154 of the tier TD1 may be via-to-pad bonding. It should
be noted that the via perimeters and the pad perimeters construe no
limitation in the disclosure as long as the conductive connectors
452 and the dummy connectors 454 of the tier TS2 are reliably
bonded to the conductive connectors 152 and the dummy connectors of
the tier TD1. It is also noted that any number of the tier TD1
and/or the tier TS2 may be stacked vertically in any combination
depending on the design requirements, and different tiers may be
electrically communicated to one another through at least the
conductive connectors, the TSVs, and other conductive features.
[0061] In some embodiments, the TSV 70 is formed in the
semiconductor substrate 110 and inserts into the dielectric layer
224 of interconnect structure 220' of the tier TS2 to the active
pattern of the interconnecting layer 222. Alternatively, the TSV is
formed in the tier TD1 of the semiconductor structure 10D. The
redistribution structure 80 is formed on the TSV 70 and the
semiconductor substrate 110, and the external terminals 90 are
formed on the redistribution structure 80 for external electrical
connection. As shown in FIG. 8, forming the conductive connectors
152 passing through the through holes TH of the patterned
conductive pad 130 to reach the interconnecting layers 112 of the
tier TD1 may increase the available routing area of the
semiconductor structure 10D. The conductive connectors 452 of the
tier TS2 connected to the conductive pad 330 and the dummy
connectors 454 of the tier TS2 connected to the dummy pattern of
the interconnect structure 220' may provide greater areas for heat
dissipation during operation of the semiconductor structure
10D.
[0062] Referring to FIG. 9, a semiconductor structure 10E including
two tiers TS1 is provided. For example, two of the tiers TS1 are
bonded together in a face-to-face configuration using a similar
bonding method described in FIG. 5A. Alternatively, the tiers TS1
are arranged in a face-to-back configuration, where the first
surface of one of the tiers TS1 is boned to the second surface of
the other one of the tiers TS1. For example, a bonding interface IF
between two tiers TS1 includes dielectric-to-dielectric bonding
(e.g., oxide-to-oxide bonding), metal-to-metal bonding (e.g.,
copper-to-copper bonding), metal-to-dielectric bonding (e.g.,
copper-to-oxide bonding), any combinations thereof, and/or the
like. In some embodiments, the bonding between the conductive
connectors 252 of two tiers TS1 and/or the bonding between the
dummy connectors 254 of the two tiers TS1 may be via-to-via
bonding. It should be noted that the via perimeters construe no
limitation in the disclosure as long as the conductive connectors
252 and the dummy connectors 254 of two tiers TS1 are reliably
bonded to one another. It is also noted that any number of the
tiers TS1 may be stacked vertically in any combination depending on
the design requirements, and different tiers may be electrically
communicated to one another through at least the conductive
connectors, the TSVs, and other conductive features.
[0063] In some embodiments, the TSV 70 is formed in the
semiconductor substrate 110 and inserts into the dielectric layer
224 of interconnect structure 220 of one of the tier TS1 to the
interconnecting layer 222. The redistribution structure 80 is
formed on the TSV 70 and the semiconductor substrate 110, and the
external terminals 90 are formed on the redistribution structure 80
for external electrical connection. As shown in FIG. 9, forming the
bonding connectors (e.g., conductive connectors 252) passing
through the through holes TH of the patterned conductive pad 130 to
reach the interconnecting layers 222 may increase the available
layout area, thereby providing improved feasibility of routing in
the semiconductor structure 10E. It should be noted that the
configuration illustrated in FIG. 9 is merely exemplary. For
example, one of the tiers TS1 (e.g., the one encircled by dashed
lines) may be replaced by any tier (e.g., the tier TD2 illustrated
in FIG. 3C, the tier TS2 illustrated in 4B, etc.) described above
with the TSV(s) disposed therein, so that variations thereof may be
carried out while still remaining within the scope of the claims
and disclosure.
[0064] Referring to FIG. 10, a semiconductor structure 10F
including two tiers TD2 is provided. For example, two of the tiers
TD2 are bonded together in a face-to-face configuration using a
similar bonding method described in FIG. 5A. Alternatively, the
tiers TD2 are arranged in a face-to-back configuration, where the
first surface of one of the tiers TD2 is boned to the second
surface of the other one of the tiers TD2. For example, a bonding
interface IF between two tiers TD2 includes
dielectric-to-dielectric bonding (e.g., oxide-to-oxide bonding),
metal-to-metal bonding (e.g., copper-to-copper bonding),
metal-to-dielectric bonding (e.g., copper-to-oxide bonding), any
combinations thereof, and/or the like. In some embodiments, the
bonding between the conductive connectors 352 of two tiers TD2
and/or the bonding between the dummy connectors 354 of the two
tiers TD2 may be pad-to-pad bonding. It should be noted that the
pad perimeters construe no limitation in the disclosure as long as
the conductive connectors 352 and the dummy connectors 354 of two
tiers TD2 are reliably bonded to one another. It is also noted that
any number of the tiers TD2 may be stacked vertically in any
combination depending on the design requirements, and different
tiers may be electrically communicated to one another through at
least the conductive connectors, the TSVs, and other conductive
features.
[0065] In some embodiments, the TSV 70 is formed in the
semiconductor substrate 110 and inserts into the dielectric layers
124 of interconnect structure 120 of one of the tier TD2 to the
interconnecting layer 122. The redistribution structure 80 is
formed on the TSV 70 and the semiconductor substrate 110, and the
external terminals 90 are formed on the redistribution structure 80
for external electrical connection. As shown in FIG. 10, disposing
the conductive connectors 352 from the bonding interface IF to land
on the conductive pad 330 may increase the available layout area,
thereby providing improved feasibility of routing in the
semiconductor structure 10F. The heat generated in the
semiconductor structure 10F during operation may be conducted at
least from the conductive connectors 352 to the conductive pads 330
so as to provide vertical heat dissipation pathways for stacking
structure. It should be noted that the configuration illustrated in
FIG. 10 is merely exemplary. For example, one of the tiers TD2
(e.g., the one encircled by dashed lines) may be replaced by any
tier (e.g., the tier TS2 illustrated in 4B, etc.) described above
with the TSV(s) disposed therein, so that variations thereof may be
carried out while still remaining within the scope of the claims
and disclosure.
[0066] Referring to FIG. 11, a semiconductor structure 10G
including two tiers TS2 is provided. For example, two of the tiers
TS2 are bonded together in a face-to-face configuration using a
similar bonding method described in FIG. 5A. Alternatively, the
tiers TS2 are arranged in a face-to-back configuration, where the
first surface of one of the tiers TS2 is boned to the second
surface of the other one of the tiers TS2. For example, a bonding
interface IF between two tiers TS2 includes
dielectric-to-dielectric bonding (e.g., oxide-to-oxide bonding),
metal-to-metal bonding (e.g., copper-to-copper bonding),
metal-to-dielectric bonding (e.g., copper-to-oxide bonding), any
combinations thereof, and/or the like. In some embodiments, the
bonding between the conductive connectors 452 of two tiers TS2
and/or the bonding between the dummy connectors 454 of the two
tiers TS2 may be via-to-via bonding. It should be noted that the
via perimeters construe no limitation in the disclosure as long as
the conductive connectors 452 and the dummy connectors 454 of the
tiers TS2 are reliably bonded to one another. It is also noted that
any number of the tiers TS2 may be stacked vertically in any
combination depending on the design requirements, and different
tiers may be electrically communicated to one another through at
least the conductive connectors, the TSVs, and other conductive
features.
[0067] In some embodiments, the TSV 70 is formed in the
semiconductor substrate 110 and inserts into the dielectric layers
224 of interconnect structure 220' of one of the tier TS2 to the
interconnecting layer 222'. The redistribution structure 80 is
formed on the TSV 70 and the semiconductor substrate 110, and the
external terminals 90 are formed on the redistribution structure 80
for external electrical connection. As shown in FIG. 11, disposing
the conductive connectors 452 from the bonding interface IF to land
on the conductive pad 330 may increase the available layout area,
thereby providing improved feasibility of routing in the
semiconductor structure 10G. The heat generated in the
semiconductor structure 10G during operation may be conducted at
least from the conductive connectors 452 to the conductive pads 330
and/or from the dummy connectors 454 to the interconnecting layers
222' so as to provide vertical heat dissipation pathways for
stacking structure. It should be noted that the configuration
illustrated in FIG. 11 is merely exemplary. For example, one of the
tiers TS2 (e.g., the one encircled by dashed lines) may be replaced
by any tier described above with the TSV(s) disposed therein, so
that variations thereof may be carried out while still remaining
within the scope of the claims and disclosure.
[0068] FIG. 12 is a schematic cross-sectional view showing an
application of a semiconductor structure according to some
exemplary embodiments of the present disclosure. Referring to FIG.
12, a structure 20 including a first component 22 and a second
component 24 disposed over the first component 22 is provided. The
first component 22 may be or may include a printed circuit board
(PCB), a printed wiring board, interposer, package substrate,
and/or other carrier that is capable of carrying integrated
circuits. In some embodiments, the second component 24 mounted on
the first component 22 is similar to one of the semiconductor
structures 10A to 10G described above. For example, one or more the
semiconductor structures may be electrically coupled to the first
component 22 through the plurality of terminals 24a (e.g., external
terminals 90). In some other embodiments, the second component 24
mounted on the first component 22 may be an integrated fan-out
(InFO) package including at least one semiconductor structure
(e.g., 10A to 10G described above in conjunction with FIG. 5B, and
FIG. 6 to FIG. 11) packaged therein. For example, the second
component 24 may include a plurality of semiconductor structures
(e.g., any combinations of semiconductor structures 10A to 10G)
separately and laterally encapsulated by an insulating
encapsulation (not shown). The second component 24 may further
include a fan-out redistribution structure (not shown) formed on
the insulating encapsulation and these semiconductor structures
encapsulated by the insulating encapsulation, and the fan-out
redistribution structure may be electrically coupled to these
semiconductor structures. The second component 24 may further
include a plurality of terminals 24a formed on the fan-out
redistribution structure to be electrically coupled to the first
component 22 and these semiconductor structures through the fan-out
redistribution structure. Other packaging techniques may be used to
form the structure 20, which are not limited in the disclosure. The
structure 20 may be part of an electronic system for such as
computers (e.g., high-performance computer), computational devices
used in conjunction with an artificial intelligence system,
wireless communication devices, computer-related peripherals,
entertainment devices, etc. It should be noted that other
electronic applications are also possible.
[0069] In accordance with some embodiments of the disclosure, a
semiconductor structure includes a first semiconductor substrate, a
first interconnect structure, a first conductive pad, a first
dielectric layer, and a first conductive connector. The first
semiconductor substrate includes a plurality of first semiconductor
devices therein. The first interconnect structure is disposed over
the first semiconductor substrate and electrically coupled to the
first semiconductor devices. The first conductive pad is disposed
over and electrically coupled to the first interconnect structure.
The first dielectric layer covers the first conductive pad and the
first interconnect structure, and the first dielectric layer
includes a portion extending through the first conductive pad. The
first conductive connector is disposed on and electrically coupled
to the first interconnect structure, and the first conductive
connector extends through the portion of the first dielectric
layer.
[0070] In accordance with some embodiments of the disclosure, a
semiconductor structure includes a first semiconductor die and a
second semiconductor die stacked on and bonded to the first
semiconductor die. The first semiconductor die includes a first
interconnecting layer, a first conductive pad disposed on and
electrically coupled to the first interconnecting layer, a first
dielectric layer disposed over the first interconnecting layer and
covering the first conductive pad, a first conductive connector
embedded in the first dielectric layer and extending towards the
first conductive pad to be electrically coupled to the first
interconnecting layer, and a first dummy connector disposed aside
the first conductive connector and embedded in the first dielectric
layer. The second semiconductor die a second dielectric layer, a
second conductive connector, and a second dummy connector. The
second dielectric layer is bonded to the first dielectric layer of
the first semiconductor die. The second conductive connector and
the second dummy connector are embedded in the second dielectric
layer and respectively bonded to the first conductive connector of
the first semiconductor die and the first dummy connector of the
first semiconductor die.
[0071] In accordance with some embodiments of the disclosure, a
manufacturing method of a semiconductor structure includes at least
the following steps. A patterned conductive pad with a through hole
is formed on an interconnect structure over a semiconductor
substrate. A dielectric material over the interconnect structure is
patterned to form a patterned dielectric layer with a first
opening. The first opening passes through a portion of the
dielectric material formed inside the through hole of the patterned
conductive pad to accessibly expose the interconnect structure. A
conductive material is formed inside the first opening of the
patterned dielectric layer and in contact with the interconnect
structure to form a conductive connector. The conductive connector
is laterally isolated from the patterned conductive pad by the
patterned dielectric layer.
[0072] The foregoing outlines features of several embodiments so
that those skilled in the art may better understand the aspects of
the present disclosure. Those skilled in the art should appreciate
that they may readily use the present disclosure as a basis for
designing or modifying other processes and structures for carrying
out the same purposes and/or achieving the same advantages of the
embodiments introduced herein. Those skilled in the art should also
realize that such equivalent constructions do not depart from the
spirit and scope of the present disclosure, and that they may make
various changes, substitutions, and alterations herein without
departing from the spirit and scope of the present disclosure.
* * * * *