U.S. patent application number 16/368065 was filed with the patent office on 2020-10-01 for stacked resistive random access memory with integrated access transistor and high density layout.
The applicant listed for this patent is INTERNATIONAL BUSINESS MACHINES CORPORATION. Invention is credited to TAKASHI ANDO, Li-Wen Hung, HARI MALLELA, REINALDO VEGA.
Application Number | 20200312912 16/368065 |
Document ID | / |
Family ID | 1000005087304 |
Filed Date | 2020-10-01 |
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United States Patent
Application |
20200312912 |
Kind Code |
A1 |
VEGA; REINALDO ; et
al. |
October 1, 2020 |
STACKED RESISTIVE RANDOM ACCESS MEMORY WITH INTEGRATED ACCESS
TRANSISTOR AND HIGH DENSITY LAYOUT
Abstract
A stacked resistive random access memory (ReRAM) structure is
provided. The stacked ReRAM structure includes a channel, a ReRAM
cell sub-structure and a contact via sub-structure. The ReRAM cell
structure includes ReRAM cell, drain, gate and source layers, which
are insulated from one another and respectively disposed in
operative contact with the channel. The contact via sub-structures
includes first, second, third and fourth contact vias, which are
separate from one another. The first contact via is disposed in
exclusive operative contact with the ReRAM cell layer. The second
contact via is disposed in exclusive operative contact with the
drain layer. The third contact via is disposed in exclusive
operative contact with the gate layer. The fourth contact via is
disposed in exclusive operative contact with the source layer.
Inventors: |
VEGA; REINALDO; (Mahopac,
NY) ; ANDO; TAKASHI; (Tuckahoe, NY) ; MALLELA;
HARI; (Poughquag, NY) ; Hung; Li-Wen;
(Mahopac, NY) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
ARMONK |
NY |
US |
|
|
Family ID: |
1000005087304 |
Appl. No.: |
16/368065 |
Filed: |
March 28, 2019 |
Current U.S.
Class: |
1/1 |
Current CPC
Class: |
H01L 27/2436 20130101;
H01L 45/1683 20130101; G11C 13/0026 20130101; H01L 45/1206
20130101; H01L 45/145 20130101; H01L 45/1608 20130101; G11C
2013/0078 20130101; G11C 13/003 20130101; G11C 13/0069 20130101;
G11C 13/0028 20130101; G11C 13/004 20130101; G11C 2013/0045
20130101; H01L 27/2481 20130101 |
International
Class: |
H01L 27/24 20060101
H01L027/24; H01L 45/00 20060101 H01L045/00; G11C 13/00 20060101
G11C013/00 |
Claims
1. A stacked resistive random access memory (ReRAM) structure,
comprising: a channel; a ReRAM cell sub-structure comprising ReRAM
cell, drain, gate and source layers, which are insulated from one
another and respectively disposed in operative contact with the
channel; and a contact via sub-structure comprising first, second,
third and fourth contact vias, which are separate from one another,
the first contact via being disposed in exclusive operative contact
with the ReRAM cell layer, the second contact via being disposed in
exclusive operative contact with the drain layer, the third contact
via being disposed in exclusive operative contact with the gate
layer, and the fourth contact via being disposed in exclusive
operative contact with the source layer.
2. The stacked ReRAM structure according to claim 1, wherein the
channel is selected from the group consisting of deposited channel
material, epitaxially grown channel material, and epitaxially grown
channel material surrounded by a liner.
3. The stacked ReRAM structure according to claim 1, wherein: the
channel comprises multiple edges; the ReRAM cell, the drain, the
gate and the source layers extend outwardly from each of the
multiple edges of the channel with successively increasing
distances; and the contact via sub-structure is provided as an
individual contact via sub-structure with a linear formation at
each of the multiple edges.
4. The stacked ReRAM structure according to claim 1 further
comprising: a word line disposed in operative contact with the
first contact via; a first bit line disposed in operative contact
with the fourth contact via; a second bit line disposed in
operative contact with the second contact via; and a gate line
disposed in operative contact with the third contact via.
5. The stacked ReRAM structure according to claim 4, wherein: the
stacked ReRAM structure is configured to perform a current driven
write operation, a voltage driven write operation and a read
operation, the current driven write operation comprises biasing the
gate line, biasing the word line and the first bit line and forcing
the second bit line to zero current or to have a same bias as the
word line, the voltage driven write operation comprises grounding
the gate line and the first bit line and applying positive and
negative biases to the word line and the second bit line,
respectively, and the read operation comprises grounding the gate
line and the first bit line, biasing the word line and reading a
current of the second bit line.
6. A stacked resistive random access memory (ReRAM) structure with
a dense layout, the stacked ReRAM structure comprising: a channel
with multiple edges; a ReRAM cell sub-structure comprising ReRAM
cell, drain, gate and source layers, which are insulated from one
another and respectively disposed in operative contact with the
channel; and an individual contact via sub-structure at each of the
multiple edges, each of the individual contact via sub-structures
respectively comprising first, second, third and fourth contact
vias, which are separate from one another, the first contact via
being disposed in exclusive operative contact with the ReRAM cell
layer, the second contact via being disposed in exclusive operative
contact with the drain layer, the third contact via being disposed
in exclusive operative contact with the gate layer, and the fourth
contact via being disposed in exclusive operative contact with the
source layer.
7. The stacked ReRAM structure with the dense layout according to
claim 6, wherein the channel is selected from a group consisting of
deposited channel material, epitaxially grown channel material, and
epitaxially grown channel material surrounded by a liner.
8. The stacked ReRAM structure with the dense layout according to
claim 6, wherein: the ReRAM cell, the drain, the gate and the
source layers extend outwardly from each of the multiple edges of
the channel with successively increasing distances; each individual
contact via sub-structure has a spiral formation; and the stacked
ReRAM structure with the dense layout further comprises insulating
bodies interposed between neighboring individual contact via
sub-structures.
9. The stacked ReRAM structure with the dense layout according to
claim 6, the structure further comprising: a word line disposed in
operative contact with each of the first contact vias of each of
the individual contact via sub-structures; a first bit line
disposed in operative contact with each of the fourth contact vias
of each of the individual contact via sub-structures; a second bit
line disposed in operative contact with each of the second contact
vias of each of the individual contact via sub-structures; and a
gate line disposed in operative contact with each of the third
contact vias of each of the individual contact via
sub-structures.
10. The stacked ReRAM structure with the dense layout according to
claim 9, wherein: the stacked ReRAM structure is configured to
perform a current driven write operations, a voltage driven write
operation, and a read operation; the current driven write operation
comprises biasing the gate line, biasing the word line and the
first bit line and forcing the second bit line to zero current or
to have a same bias as the word line, the voltage driven write
operation comprises grounding the gate line and the first bit line
and applying positive and negative biases to the word line and the
second bit line, respectively, and the read operation comprises
grounding the gate line and the first bit line, biasing the word
line and reading a current of the second bit line.
11. A method of fabricating a stacked resistive random access
memory (ReRAM) structure, the method comprising: forming a channel;
layering a ReRAM cell sub-structure comprising ReRAM cell, drain,
gate and source layers, which are insulated from one another and
respectively disposed in operative contact with the channel; and
building a contact via sub-structure comprising first, second,
third and fourth contact vias, which are separate from one another,
the first contact via being disposed in exclusive operative contact
with the ReRAM cell layer, the second contact via being disposed in
exclusive operative contact with the drain layer, the third contact
via being disposed in exclusive operative contact with the gate
layer, and the fourth contact via being disposed in exclusive
operative contact with the source layer.
12. The method according to claim 11, wherein the forming of the
channel comprises etching a trench for channel region formation and
one of: depositing channel material in the trench; epitaxially
growing channel material in the trench; and forming a liner along
sidewalls of the trench and epitaxially growing channel material
within the liner.
13. The method according to claim 11, wherein the layering of the
ReRAM cell sub-structure is executed in order of the source layer
first, the gate layer second, the drain layer third and the ReRAM
cell layer last.
14. The method according to claim 11, wherein: the forming of the
channel is executed such that the channel comprises multiple edges;
the layering of the ReRAM cell sub-structure is executed such that
the ReRAM cell, the drain, the gate and the source layers extend
outwardly from each of the multiple edges of the channel with
successively increasing distances; and the building of the contact
via sub-structure is executed such that the contact via
sub-structure is provided as an individual contact via
sub-structure with a linear formation at each of the multiple
edges.
15. The method according to claim 14 further comprising: disposing
a word line in operative contact with each of the first contact
vias of each of the individual contact via sub-structures;
disposing a first bit line in operative contact with each of the
fourth contact vias of each of the individual contact via
sub-structures; disposing a second bit line in operative contact
with each of the second contact vias of each of the individual
contact via sub-structures; and disposing a gate line in operative
contact with each of the third contact vias of each of the
individual contact via sub-structures.
16. The method according to claim 15, wherein: executing a current
driven write operation comprises biasing the gate line, biasing the
word line and the first bit line and forcing the second bit line to
zero current or to have a same bias as the word line; executing a
voltage driven write operation comprises grounding the gate line
and the first bit line and applying positive and negative biases to
the word line and the second bit line, respectively; and executing
a read operation comprises grounding the gate line and the first
bit line, biasing the word line and reading a current of the second
bit line.
17. The method according to claim 11, wherein: the forming of the
channel is executed such that the channel comprises multiple edges;
the layering of the ReRAM cell sub-structure is executed such that
the ReRAM cell, the drain, the gate and the source layers extend
outwardly from each of the multiple edges of the channel with
successively increasing distances; and the building of the contact
via sub-structure is executed such that the contact via
sub-structure is provided as an individual contact via
sub-structure with a spiral formation at each of the multiple
edges.
18. The method according to claim 17 further comprising interposing
insulating bodies between neighboring individual contact via
sub-structures.
19. The method according to claim 17 further comprising: disposing
a word line in operative contact with each of the first contact
vias of each of the individual contact via sub-structures;
disposing a first bit line in operative contact with each of the
fourth contact vias of each of the individual contact via
sub-structures; disposing a second bit line in operative contact
with each of the second contact vias of each of the individual
contact via sub-structures; and disposing a gate line in operative
contact with each of the third contact vias of each of the
individual contact via sub-structures.
20. The method according to claim 19, wherein: executing a current
driven write operation comprises biasing the gate line, biasing the
word line and the first bit line and forcing the second bit line to
zero current or to have a same bias as the word line; executing a
voltage driven write operation comprises grounding the gate line
and the first bit line and applying positive and negative biases to
the word line and the second bit line, respectively; and executing
a read operation comprises grounding the gate line and the first
bit line, biasing the word line and reading a current of the second
bit line.
Description
BACKGROUND
[0001] The present invention generally relates to fabrication
methods and resulting structures for semiconductor devices. More
specifically, the present invention relates to a stacked resistive
random access memory (ReRAM) structure with an integrated access
transistor and a high density layout for neuromorphic
computing.
[0002] ReRAM structures can be used as a type of non-volatile (NV)
random-access memory (RAM) in computing resources. ReRAM typically
operates by controlled changes in resistance across a dielectric
solid-state material. The dielectric solid-state material can be
referred to as a "memristor."
SUMMARY
[0003] Embodiments of the present invention are directed to a
stacked ReRAM structure. A non-limiting example of the stacked
ReRAM structure includes a channel, a ReRAM cell sub-structure and
a contact via sub-structure. The ReRAM cell structure includes
ReRAM cell, drain, gate and source layers which are insulated from
one another and respectively disposed in operative contact with the
channel. The contact via sub-structures includes first, second,
third and fourth contact vias which are separate from one another.
The first contact via is disposed in exclusive operative contact
with the ReRAM cell layer. The second contact via is disposed in
exclusive operative contact with the drain layer. The third contact
via is disposed in exclusive operative contact with the gate layer.
The fourth contact via is disposed in exclusive operative contact
with the source layer.
[0004] Embodiments of the present invention are directed to stacked
ReRAM structure with a dense layout. A non-limiting example of the
stacked ReRAM structure includes a channel with multiple edges, a
ReRAM cell sub-structure and an individual contact via
sub-structure at each of the multiple edges. The ReRAM cell
sub-structure includes ReRAM cell, drain, gate and source layers
which are insulated from one another and respectively disposed in
operative contact with the channel. Each of the individual contact
via sub-structures respectively includes first, second, third and
fourth contact vias which are separate from one another. The first
contact via is disposed in exclusive operative contact with the
ReRAM cell layer. The second contact via is disposed in exclusive
operative contact with the drain layer. The third contact via is
disposed in exclusive operative contact with the gate layer. The
fourth contact via is disposed in exclusive operative contact with
the source layer.
[0005] Embodiments of the invention are directed to a method of
fabricating a stacked ReRAM structure. A non-limiting example of
the method includes forming a channel, layering a ReRAM cell
sub-structure and building a contact via sub-structure. The
layering of the ReRAM cell sub-structure is executed such that the
ReRAM cell sub-structure includes ReRAM cell, drain, gate and
source layers which are insulated from one another and respectively
disposed in operative contact with the channel. The building of the
contact via sub-structure is executed such that the contact via
sub-structure includes first, second, third and fourth contact vias
which are separate from one another. The first contact via is
disposed in exclusive operative contact with the ReRAM cell layer.
The second contact via is disposed in exclusive operative contact
with the drain layer. The third contact via is disposed in
exclusive operative contact with the gate layer. The fourth contact
via is disposed in exclusive operative contact with the source
layer.
[0006] Additional technical features and benefits are realized
through the techniques of the present invention. Embodiments and
aspects of the invention are described in detail herein and are
considered a part of the claimed subject matter. For a better
understanding, refer to the detailed description and to the
drawings.
BRIEF DESCRIPTION OF THE DRAWINGS
[0007] The specifics of the exclusive rights described herein are
particularly pointed out and distinctly claimed in the claims at
the conclusion of the specification. The foregoing and other
features and advantages of the embodiments of the invention are
apparent from the following detailed description taken in
conjunction with the accompanying drawings in which:
[0008] FIG. 1 depicts a method of fabricating a ReRAM structure in
accordance with embodiments of the present invention;
[0009] FIG. 2 is a schematic side view of an initial structure with
trenches etched therein and filled with channel material to be
fabricated into a stacked ReRAM structure in accordance with
embodiments of the present invention;
[0010] FIG. 3 is a schematic side view of the initial structure
with a second trench etched between channel materials in accordance
with embodiments of the present invention;
[0011] FIG. 4 is a schematic side view of an intermediate structure
with a dummy gate removed via the second trench in accordance with
embodiments of the present invention;
[0012] FIG. 5 is a schematic side view of an intermediate structure
following gate formation and the second trench being re-etched in
accordance with embodiments of the present invention;
[0013] FIG. 6 is a schematic side view of an intermediate structure
with dummy source/drain layers removed via the second trench in
accordance with embodiments of the present invention;
[0014] FIG. 7 is a schematic side view of an intermediate structure
following source/drain layer refills and the second trench being
re-etched in accordance with embodiments of the present
invention;
[0015] FIG. 8 is a schematic side view of an intermediate structure
with a dummy gate removed via the second trench in accordance with
embodiments of the present invention;
[0016] FIG. 9 is a schematic side view of an intermediate structure
following ReRAM layer formation and the second trench being
re-etched and filled in accordance with embodiments of the present
invention;
[0017] FIG. 10 is a schematic side view of an intermediate
structure following a multi-step organic planarization layer (OPL)
recess and isotropic etch-back of exposed layers to result in a
ReRAM cell sub-structure in accordance with embodiments of the
present invention;
[0018] FIG. 11 is a schematic side view of an intermediate
structure following an OPL fill in accordance with embodiments of
the present invention;
[0019] FIG. 12 is a schematic side view of a late stage structure
with a ReRAM cell sub-structure and a contact via sub-structure in
accordance with embodiments of the present invention;
[0020] FIG. 13 is a schematic top-down view of an arrangement of
contact vias in accordance with embodiments of the present
invention; and
[0021] FIG. 14 is a schematic top-down view of dense arrangements
of contact vias in accordance with embodiments of the present
invention.
[0022] The diagrams depicted herein are illustrative. There can be
many variations to the diagram or the operations described therein
without departing from the spirit of the invention. For instance,
the actions can be performed in a differing order or actions can be
added, deleted or modified. Also, the term "coupled" and variations
thereof describes having a communications path between two elements
and does not imply a direct connection between the elements with no
intervening elements/connections between them. All of these
variations are considered a part of the specification.
[0023] In the accompanying figures and following detailed
description of the described embodiments, the various elements
illustrated in the figures are provided with two or three digit
reference numbers. With minor exceptions, the leftmost digit(s) of
each reference number correspond to the figure in which its element
is first illustrated.
DETAILED DESCRIPTION
[0024] For the sake of brevity, conventional techniques related to
semiconductor device and integrated circuit (IC) fabrication may or
may not be described in detail herein. Moreover, the various tasks
and process steps described herein can be incorporated into a more
comprehensive procedure or process having additional steps or
functionality not described in detail herein. In particular,
various steps in the manufacture of semiconductor devices and
semiconductor-based ICs are well known and so, in the interest of
brevity, many conventional steps will only be mentioned briefly
herein or will be omitted entirely without providing the well-known
process details.
[0025] Turning now to an overview of technologies that are more
specifically relevant to aspects of the invention, in a ReRAM
structure, a dielectric is provided as a normally insulating
element but is made to conduct electricity through one or more
filaments or conduction paths that are formed after an application
of a sufficiently high voltage. The one or more filaments or
conduction paths can arise from different mechanisms, including
vacancy or metal defect migration. Once the one or more filaments
or conduction paths are formed, they may be reset (i.e., broken,
resulting in high resistance) or set (i.e., re-formed, resulting in
lower resistance) by another application of voltage.
[0026] Three dimensionally stacked ReRAM structures can be provided
and typically include one or more ReRAM cells. Known methods for
building such three-dimensionally stacked ReRAM structures do not
possess the capacity or ability to include or provide for
connections between one selector device and each individual ReRAM
cell in the three-dimensionally stacked ReRAM structure. Instead,
one selector device usually represents an entire wordline of cells.
This is analogous to having one passgate per wordline in an eDRAM
array when one passgate per eDRAM cell in a wordline is
desired.
[0027] Turning now to an overview of the aspects of the invention,
one or more embodiments of the invention address the
above-described shortcomings of the prior art by providing for a
ReRAM structure in which a dedicated selection transistor is
integrated into a memory cell. The ReRAM structure includes a ReRAM
cell structure in which ReRAM cell, drain, gate and source layers
are insulated from one another and respectively contact a channel.
The ReRAM structure further includes a contact via sub-structures
in which first, second, third and fourth contact vias are separate
from one another. The first contact via contacts the ReRAM cell
layer, the second contact contacts the drain layer, the third
contact via contacts the gate layer and the fourth contact via
contacts the source layer.
[0028] The above-described aspects of the invention address the
shortcomings of the prior art by providing for a
three-dimensionally stacked ReRAM structure with one or more ReRAM
cells in which connections are each respectively disposed between
one selector device and each individual ReRAM cell. This
configuration stands in contrast to conventional configurations in
which one selector device represents an entire wordline of cells,
such as where one passgate is provided per wordline in an eDRAM
array.
[0029] Turning now to a more detailed description of aspects of the
present invention, FIG. 1 depicts a flow diagram illustrating a
method of fabricating a stacked ReRAM structure. As shown in FIG.
1, the method includes forming a channel (101), layering a ReRAM
cell sub-structure (102) and building a contact via sub-structure
(103). In accordance with embodiments of the present invention, the
layering of the ReRAM cell sub-structure of operation 102 is
executed such that the ReRAM cell sub-structure includes a ReRAM
cell layer, a drain layer, a gate layer and a source layer. The
ReRAM cell layer, the drain layer, the gate layer and the source
layer are insulated from one another and are respectively disposed
in operative contact with the channel. In accordance with
embodiments of the present invention, the building of the contact
via sub-structure of operation 103 is executed such that the
contact via sub-structure includes a first contact via, a second
contact via, a third contact via and a fourth contact via. The
first contact via, the second contact via, the third contact via
and the fourth contact via are separate from one another. The first
contact via is disposed in exclusive operative contact with the
ReRAM cell layer. The second contact via is disposed in exclusive
operative contact with the drain layer. The third contact via is
disposed in exclusive operative contact with the gate layer. The
fourth contact via is disposed in exclusive operative contact with
the source layer.
[0030] Further details of the method will now be described with
reference to FIGS. 2-12.
[0031] As shown in FIG. 2, an initial structure 200 is formed and
includes a substrate 201, a first nitride layer 202 disposed over
the substrate 201, a first oxide layer 203 disposed over the first
nitride layer 202, a second nitride layer 204 disposed over the
first oxide layer 203, a poly-silicon (poly-Si) layer 205 disposed
over the second nitride layer 204, a third nitride layer 206
disposed over the poly-Si layer 105, a second oxide layer 207
disposed over the third nitride layer 106, a fourth nitride layer
208 disposed over the second oxide layer 207, a poly-silicon
germanium (poly-SiGe) layer 209 disposed over the fourth nitride
layer 208 and a fifth nitride layer 210 disposed over the poly-SiGe
layer 209.
[0032] A first trench 220 is etched into the initial structure 200
for enabling channel region formation. The first trench 220 can be
etched in accordance with multiple embodiments of the present
invention. For example, in a first embodiment of the present
invention, first trench 220.sub.1 extends from the fifth nitride
layer 210 to an interior of the substrate 201 and includes channel
material 221, such as molybdenum sulfide (MoS.sub.2), which has
been deposited therein. As another example, in a second embodiment
of the present invention, first trench 220.sub.2 extends from the
fifth nitride layer 210 to the interior of the substrate 201 and
includes dielectric liner material deposited therein to form a
liner 222 and epitaxially grown channel material 223, such as Si,
SiGe, etc., which is epitaxially grown within the liner 222. As
another example, in a third embodiment of the present invention,
first trench 220.sub.3 extends from the fifth nitride layer 210 to
an uppermost surface of the substrate 201 and includes the channel
material 221. As yet another example, in a fourth embodiment of the
present invention, first trench 220.sub.4 extends from the fifth
nitride layer 210 to the uppermost surface of the substrate 201 and
includes the dielectric liner material deposited therein to form
the liner 222 and the epitaxially grown channel material 223 that
is epitaxially grown within the liner 222.
[0033] The following description will generally relate to the third
embodiment of the present invention described above although the
first trench 220.sub.3 will be referred to simply as the first
trench 220. This is being done for purposes of clarity and brevity
and should not be read or interpreted in a manner that would
otherwise limit the scope of the following description or the
claims.
[0034] As shown in FIG. 3, an initial or preliminary structure 301
of a stacked ReRAM structure is provided with the initial structure
200, first trenches 220 etched therein and filled with the channel
material 221 and a second trench 310 etched therein between the
first trenches 220. The second trench 310 can be etched by an
etching process, such as a reactive ion etch (RIE), and extends
from the fifth nitride layer 210 to an uppermost surface of the
substrate 201 and exposes dummy material sidewalls 311 that serves
to provide access to release regions.
[0035] As shown in FIG. 4, once the second trench 310 is etched, a
dummy gate removal operation can be executed by way of the second
trench 310 by a subway etch process. This subway etch process
removes the poly-Si layer 205 and results in a first release region
420.
[0036] As shown in FIG. 5, a replacement metal gate process is
executed to form a gate layer 510 in the first release region 420
of FIG. 4 and is followed by an etching process, such as RIE, to
re-open the second trench 310 to thus re-expose the dummy material
sidewalls 311. The gate layer 510 includes one or more layers of
metal gate material 511 and dielectric material 512 surrounding the
metal gate material 511. In accordance with embodiments of the
present invention, depending on a composition of the channel
material 221, the dielectric material 512 can include a combination
of high-k dielectric and inter layer dielectric materials or,
alternately, high-k dielectric material only.
[0037] As shown in FIG. 6, once the second trench 310 is re-opened,
a dummy source/drain removal operation can be executed by way of
the second trench 310 by a subway etch process. This subway etch
process removes the first oxide layer 203 and the second oxide
layer 207 and results in a second release region 610 and a third
release region 620. In accordance with embodiments of the present
invention, the subway etch process can laterally etch a cavity 630
into the channel material 221 of one or more of the first trenches
220 which is exposed by the removal of dummy source/drain regions.
This will result in source/drain junctions (doped or metallic)
being in closer proximity to the resulting gate edge.
[0038] The following description will generally relate to the
embodiment of the present invention described above in which the
subway etch process removes the first oxide layer 203 and the
second oxide layer 207 but the cavity 630 is not formed. This is
being done for purposes of clarity and brevity and should not be
read or interpreted in a manner that would otherwise limit the
scope of the following description or the claims.
[0039] As shown in FIG. 7, a replacement source/drain process is
executed to form a source layer 710 in the second release region
610 and a drain layer 720 in the third release region 620 and is
followed by an etching process, such as RIE, to re-open the second
trench 310 to thus re-expose the dummy material sidewalls 311. The
source layer 710 and the gate layer 720 includes one or more
metallic materials.
[0040] As shown in FIG. 8, once the second trench 310 is re-opened,
a dummy gate removal operation can be executed by way of the second
trench 310 by a subway etch process. This subway etch process
removes the poly-SiGe layer 209 and results in a fourth release
region 810.
[0041] As shown in FIG. 9, a ReRAM formation process is executed to
form a ReRAM cell layer 910 in the fourth release region 810 and is
followed by an etching process, such as RIE, to re-open the second
trench 310 to thus re-expose the dummy material sidewalls 311. This
is followed by an organic planarization layer (OPL) material fill
process and a chemical mechanical polishing (CMP) process to form a
contact filler 920 in the second trench 310. The ReRAM cell layer
910 includes one or more layers of metal gate material 911 and
dielectric material 912 surrounding the metal gate material 911. In
accordance with embodiments of the present invention, depending on
a composition of the channel material 221, the dielectric material
912 can include a combination of high-k dielectric and inter layer
dielectric materials or, alternately, high-k dielectric material
only. In accordance with further embodiments of the present
invention, a thickness (.about.4 nm) of the dielectric material 912
between the metal gate material 911 and the channel material 221 in
the ReRAM cell layer 910 is thicker than a thickness (.about.2 nm)
of the dielectric material 512 between the metal gate material 511
and the channel material 221 in the gate layer 510.
[0042] As shown in FIG. 10, a multi-step OPL recess process is
executed to remove the contact filler 920 in the second trench 310
and is followed by an isotropic etch-back of the exposed surfaces
of the gate layer 510, the drain layer 720 and the ReRAM cell layer
910 that results in a step-wise opening 1010. This isotropic
etch-back results in the ReRAM cell layer 910 extending outwardly
from the channel material 221 by a first distance D1, the drain
layer 720 extending outwardly from the channel material 221 by a
second distance D1 that exceeds the first distance D1 and the gate
layer 510 extending outwardly from the channel material 221 by a
third distance D3 that exceeds the second distance D2. The source
layer 710, which is not subject to the isotropic etch-back process,
extends outwardly from the channel material 221 by a fourth
distance D4 that exceeds the third distance D3.
[0043] The layered structure resulting from the multi-step OPL
recess process illustrated in FIG. 10 is a ReREM cell sub-structure
1020.
[0044] As shown in FIG. 11, a dielectric fill operation is executed
to fill the step-wise opening 1010 with dielectric material
1110.
[0045] As shown in FIG. 12, a contact via sub-structure 1200 is
built. The contact via sub-structure 1200 includes a first contact
via 1210, a second contact via 1220, a third contact via 1230 and a
fourth contact vias 1240 that are all separate from one another.
The first contact via 1210 is disposed in exclusive operative
contact with the ReRAM cell layer 910, the second contact via 1220
is disposed in exclusive operative contact with the drain layer
720, the third contact via 1230 is disposed in exclusive operative
contact with the gate layer 510, and the fourth contact via 1240 is
disposed in exclusive operative contact with the source layer
710.
[0046] In accordance with embodiments of the present invention, the
left side of the illustration in FIG. 12 shows that the contact via
sub-structure 1200 can be built entirely on one side of the channel
material 221 while the other side can be used for another or
separate device. This option can be leveraged to increase memory
density. In accordance with alternative embodiments of the
invention, the contact via sub-structure 1200 can be built on both
sides of the channel material 221 assuming both sides are part of a
same device (e.g., the channel material 221 is contained in a
circular trench surrounded by a coaxial gate). This option can be
leveraged to increase via spacing to enable operating voltage
margins.
[0047] With reference to FIG. 13, a stacked ReRAM structure 1300 is
fabricated as described above and includes a channel 1310 with
multiple edges 1311, a ReRAM cell sub-structure 1320 (see FIG. 12)
and a contact via sub-structure 1330. The channel 1310 includes one
of deposited channel material, epitaxially grown channel material
and epitaxially grown channel material surrounded by a liner. The
ReRAM cell sub-substructure 1320 includes a ReRAM cell layer 1321,
a drain layer 1322, a gate layer 1323 and a source layer 1324 as
described above (see FIG. 10 and the accompanying text) which are
insulated from one another and which are respectively disposed in
operative contact with the channel 1310. The contact via
sub-structure 1330 includes a first contact via 1331, a second
contact via 1332, a third contact via 1333 and a fourth contact via
1334 as described above (see FIG. 12 and the accompanying text)
which are separate from one another. The first contact via 1331 is
disposed in exclusive operative contact with the ReRAM cell layer
1321, the second contact via 1332 is disposed in exclusive
operative contact with the drain layer 1322, the third contact via
1333 is disposed in exclusive operative contact with the gate layer
1323, and the fourth contact via 1334 is disposed in exclusive
operative contact with the source layer 1324.
[0048] Although it is not specifically illustrated in FIG. 13, each
of the ReRAM cell layer 1321, the drain layer 1322, the gate layer
1323 and the source layer 1324 extends outwardly from each of the
multiple edges 1311 of the channel 1310 with successively
increasing distances. Correspondingly, the contact via
sub-structure 1330 can be provided as an individual contact via
sub-structure 1330 with a linear formation 1340 at each of the
multiple edges 1311.
[0049] The stacked ReRAM structure 1300 can further includes a word
line 1351, which is disposed in operative contact with the first
contact via 1331, a first bit line 1352, which is disposed in
operative contact with the fourth contact via 1334, a second bit
line 1353, which is disposed in operative contact with the second
contact via 1332, and a gate line 1354, which is disposed in
operative contact with the third contact via 1333 (the word line
1351, the first bit line 1352, the second bit line 1353 and the
gate line 1354 can each be disposed in operative contact with the
corresponding features of each of the individual contact via
sub-structures 1330 at each of the multiple edges 1311 as shown in
a different configuration of FIG. 14 to be described below).
[0050] As shown in FIG. 14, a stacked ReRAM structure 1400 is
provided with a dense layout. The stacked ReRAM structure 1400 is
constructed similarly as the stacked ReRAM structure 1300 of FIG.
13 and includes a channel 1410 with multiple edges 1411, a ReRAM
cell sub-structure 1420 (see FIG. 12) and individual contact via
sub-structures 1430 at each of the multiple edges 1411. Each
individual contact via sub-structure 1430 has a first contact via
1431, a second contact via 1432, a third contact via 1433 and a
fourth contact via 1434. Each individual contact via sub-structure
1430 can have a spiral formation 1440. An insulating body 1450 can
be interposed between neighboring individual contact via
sub-structures 1430.
[0051] The stacked ReRAM structure 1400 can further include a word
line 1441, which is disposed in operative contact with each of the
first contact vias 1431 of each of the individual contact via
sub-structures 1430, a first bit line 1442, which is disposed in
operative contact with each of the fourth contact vias 1434 of each
of the individual contact via sub-structures 1430, a second bit
line 1443, which is disposed in operative contact with each of the
second contact vias 1432 of each of the individual contact via
sub-structures 1430, and a gate line 1444, which is disposed in
operative contact with each of the third contact vias 1433 of each
of the individual contact via sub-structures 1430.
[0052] For stacked ReRAM structures, such as the stacked ReRAM
structures 1300 and 1400 of FIGS. 13 and 14, current and voltage
driven write operations and a read operation are possible. The
current driven write operation can include biasing the gate line
1354/1444, biasing the word line 1351/1441 and the first bit line
1352/1442 and forcing the second bit line 1353/1443 to zero current
or to have a same bias as the word line 1351/1441. The voltage
driven write operation can include grounding the gate line
1354/1444 and the first bit line 1352/1442 and applying positive
and negative biases to the word line 1351/1441 and the second bit
line 1353/1443, respectively. The read operation can include a
grounding of the gate line 1354/1444 and the first bit line
1352/1442, a biasing of the word line 1351/1441 and a reading of a
current of the second bit line 1353/1443.
[0053] Various embodiments of the present invention are described
herein with reference to the related drawings. Alternative
embodiments can be devised without departing from the scope of this
invention. Although various connections and positional
relationships (e.g., over, below, adjacent, etc.) are set forth
between elements in the following description and in the drawings,
persons skilled in the art will recognize that many of the
positional relationships described herein are
orientation-independent when the described functionality is
maintained even though the orientation is changed. These
connections and/or positional relationships, unless specified
otherwise, can be direct or indirect, and the present invention is
not intended to be limiting in this respect. Accordingly, a
coupling of entities can refer to either a direct or an indirect
coupling, and a positional relationship between entities can be a
direct or indirect positional relationship. As an example of an
indirect positional relationship, references in the present
description to forming layer "A" over layer "B" include situations
in which one or more intermediate layers (e.g., layer "C") is
between layer "A" and layer "B" as long as the relevant
characteristics and functionalities of layer "A" and layer "B" are
not substantially changed by the intermediate layer(s).
[0054] The following definitions and abbreviations are to be used
for the interpretation of the claims and the specification. As used
herein, the terms "comprises," "comprising," "includes,"
"including," "has," "having," "contains" or "containing," or any
other variation thereof, are intended to cover a non-exclusive
inclusion. For example, a composition, a mixture, process, method,
article, or apparatus that comprises a list of elements is not
necessarily limited to only those elements but can include other
elements not expressly listed or inherent to such composition,
mixture, process, method, article, or apparatus.
[0055] Additionally, the term "exemplary" is used herein to mean
"serving as an example, instance or illustration." Any embodiment
or design described herein as "exemplary" is not necessarily to be
construed as preferred or advantageous over other embodiments or
designs. The terms "at least one" and "one or more" are understood
to include any integer number greater than or equal to one, i.e.
one, two, three, four, etc. The terms "a plurality" are understood
to include any integer number greater than or equal to two, i.e.
two, three, four, five, etc. The term "connection" can include an
indirect "connection" and a direct "connection."
[0056] References in the specification to "one embodiment," "an
embodiment," "an example embodiment," etc., indicate that the
embodiment described can include a particular feature, structure,
or characteristic, but every embodiment may or may not include the
particular feature, structure, or characteristic. Moreover, such
phrases are not necessarily referring to the same embodiment.
Further, when a particular feature, structure, or characteristic is
described in connection with an embodiment, it is submitted that it
is within the knowledge of one skilled in the art to affect such
feature, structure, or characteristic in connection with other
embodiments whether or not explicitly described.
[0057] For purposes of the description hereinafter, the terms
"upper," "lower," "right," "left," "vertical," "horizontal," "top,"
"bottom," and derivatives thereof shall relate to the described
structures and methods, as oriented in the drawing figures. The
terms "overlying," "atop," "on top," "positioned on" or "positioned
atop" mean that a first element, such as a first structure, is
present on a second element, such as a second structure, wherein
intervening elements such as an interface structure can be present
between the first element and the second element. The term "direct
contact" means that a first element, such as a first structure, and
a second element, such as a second structure, are connected without
any intermediary conducting, insulating or semiconductor layers at
the interface of the two elements.
[0058] Spatially relative terms, e.g., "beneath," "below," "lower,"
"above," "upper," and the like, can be used herein for ease of
description to describe one element or feature's relationship to
another element(s) or feature(s) as illustrated in the figures. It
will be understood that the spatially relative terms are intended
to encompass different orientations of the device in use or
operation in addition to the orientation depicted in the figures.
For example, if the device in the figures is turned over, elements
described as "below" or "beneath" other elements or features would
then be oriented "above" the other elements or features. Thus, the
term "below" can encompass both an orientation of above and below.
The device can be otherwise oriented (rotated 90 degrees or at
other orientations) and the spatially relative descriptors used
herein interpreted accordingly.
[0059] The phrase "selective to," such as, for example, "a first
element selective to a second element," means that the first
element can be etched and the second element can act as an etch
stop.
[0060] The terms "about," "substantially," "approximately," and
variations thereof, are intended to include the degree of error
associated with measurement of the particular quantity based upon
the equipment available at the time of filing the application. For
example, "about" can include a range of +8% or 5%, or 2% of a given
value.
[0061] The term "conformal" (e.g., a conformal layer) means that
the thickness of the layer is substantially the same on all
surfaces, or that the thickness variation is less than 15% of the
nominal thickness of the layer.
[0062] The terms "epitaxial growth and/or deposition" and
"epitaxially formed and/or grown" mean the growth of a
semiconductor material (crystalline material) on a deposition
surface of another semiconductor material (crystalline material),
in which the semiconductor material being grown (crystalline
overlayer) has substantially the same crystalline characteristics
as the semiconductor material of the deposition surface (seed
material). In an epitaxial deposition process, the chemical
reactants provided by the source gases can be controlled and the
system parameters can be set so that the depositing atoms arrive at
the deposition surface of the semiconductor substrate with
sufficient energy to move about on the surface such that the
depositing atoms orient themselves to the crystal arrangement of
the atoms of the deposition surface. An epitaxially grown
semiconductor material can have substantially the same crystalline
characteristics as the deposition surface on which the epitaxially
grown material is formed. For example, an epitaxially grown
semiconductor material deposited on a {100} orientated crystalline
surface can take on a {100} orientation. In some embodiments of the
invention, epitaxial growth and/or deposition processes can be
selective to forming on semiconductor surface, and cannot deposit
material on exposed surfaces, such as silicon dioxide or silicon
nitride surfaces.
[0063] As previously noted herein, for the sake of brevity,
conventional techniques related to semiconductor device and
integrated circuit (IC) fabrication may or may not be described in
detail herein. By way of background, however, a more general
description of the semiconductor device fabrication processes that
can be utilized in implementing one or more embodiments of the
present invention will now be provided. Although specific
fabrication operations used in implementing one or more embodiments
of the present invention can be individually known, the described
combination of operations and/or resulting structures of the
present invention are unique. Thus, the unique combination of the
operations described in connection with the fabrication of a
semiconductor device according to the present invention utilize a
variety of individually known physical and chemical processes
performed on a semiconductor (e.g., silicon) substrate, some of
which are described in the immediately following paragraphs.
[0064] In general, the various processes used to form a micro-chip
that will be packaged into an IC fall into four general categories,
namely, film deposition, removal/etching, semiconductor doping and
patterning/lithography. Deposition is any process that grows,
coats, or otherwise transfers a material onto the wafer. Available
technologies include physical vapor deposition (PVD), chemical
vapor deposition (CVD), electrochemical deposition (ECD), molecular
beam epitaxy (MBE) and more recently, atomic layer deposition (ALD)
among others. Removal/etching is any process that removes material
from the wafer. Examples include etch processes (either wet or
dry), and chemical-mechanical planarization (CMP), and the like.
Semiconductor doping is the modification of electrical properties
by doping, for example, transistor sources and drains, generally by
diffusion and/or by ion implantation. These doping processes are
followed by furnace annealing or by rapid thermal annealing (RTA).
Annealing serves to activate the implanted dopants. Films of both
conductors (e.g., poly-silicon, aluminum, copper, etc.) and
insulators (e.g., various forms of silicon dioxide, silicon
nitride, etc.) are used to connect and isolate transistors and
their components. Selective doping of various regions of the
semiconductor substrate allows the conductivity of the substrate to
be changed with the application of voltage. By creating structures
of these various components, millions of transistors can be built
and wired together to form the complex circuitry of a modern
microelectronic device. Semiconductor lithography is the formation
of three-dimensional relief images or patterns on the semiconductor
substrate for subsequent transfer of the pattern to the substrate.
In semiconductor lithography, the patterns are formed by a light
sensitive polymer called a photo-resist. To build the complex
structures that make up a transistor and the many wires that
connect the millions of transistors of a circuit, lithography and
etch pattern transfer steps are repeated multiple times. Each
pattern being printed on the wafer is aligned to the previously
formed patterns and slowly the conductors, insulators and
selectively doped regions are built up to form the final
device.
[0065] The flowchart and block diagrams in the Figures illustrate
possible implementations of fabrication and/or operation methods
according to various embodiments of the present invention. Various
functions/operations of the method are represented in the flow
diagram by blocks. In some alternative implementations, the
functions noted in the blocks can occur out of the order noted in
the Figures. For example, two blocks shown in succession can, in
fact, be executed substantially concurrently, or the blocks can
sometimes be executed in the reverse order, depending upon the
functionality involved.
[0066] The descriptions of the various embodiments of the present
invention have been presented for purposes of illustration, but are
not intended to be exhaustive or limited to the embodiments
described. Many modifications and variations will be apparent to
those of ordinary skill in the art without departing from the scope
and spirit of the described embodiments. The terminology used
herein was chosen to best explain the principles of the
embodiments, the practical application or technical improvement
over technologies found in the marketplace, or to enable others of
ordinary skill in the art to understand the embodiments described
herein.
* * * * *