U.S. patent application number 16/879318 was filed with the patent office on 2020-09-10 for ultra small molded module integrated with die by module-on-wafer assembly.
The applicant listed for this patent is Intel Corporation. Invention is credited to Javier A. FALCON, Joshua D. HEPPNER, Eric J. LI, Shawna M. LIFF, Tomita YOSHIHIRO.
Application Number | 20200286834 16/879318 |
Document ID | / |
Family ID | 1000004843292 |
Filed Date | 2020-09-10 |
United States Patent
Application |
20200286834 |
Kind Code |
A1 |
YOSHIHIRO; Tomita ; et
al. |
September 10, 2020 |
ULTRA SMALL MOLDED MODULE INTEGRATED WITH DIE BY MODULE-ON-WAFER
ASSEMBLY
Abstract
Embodiments of the invention include molded modules and methods
for forming molded modules. According to an embodiment the molded
modules may be integrated into an electrical package. Electrical
packages according to embodiments of the invention may include a
die with a redistribution layer formed on at least one surface. The
molded module may be mounted to the die. According to an
embodiment, the molded module may include a mold layer and a
plurality of components encapsulated within the mold layer.
Terminals from each of the components may be substantially coplanar
with a surface of the mold layer in order to allow the terminals to
be electrically coupled to the redistribution layer on the die.
Additional embodiments of the invention may include one or more
through mold vias formed in the mold layer to provide power
delivery and/or one or more faraday cages around components.
Inventors: |
YOSHIHIRO; Tomita;
(Tsukuba-shi, JP) ; LI; Eric J.; (Chandler,
AZ) ; LIFF; Shawna M.; (Scottsdale, AZ) ;
FALCON; Javier A.; (Chandler, AZ) ; HEPPNER; Joshua
D.; (Chandler, AZ) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
Intel Corporation |
Santa Clara |
CA |
US |
|
|
Family ID: |
1000004843292 |
Appl. No.: |
16/879318 |
Filed: |
May 20, 2020 |
Related U.S. Patent Documents
|
|
|
|
|
|
Application
Number |
Filing Date |
Patent Number |
|
|
15776773 |
May 16, 2018 |
10707171 |
|
|
PCT/US2015/067422 |
Dec 22, 2015 |
|
|
|
16879318 |
|
|
|
|
Current U.S.
Class: |
1/1 |
Current CPC
Class: |
H01L 2224/04105
20130101; H01L 25/16 20130101; H01L 21/561 20130101; H01L 25/072
20130101; H01L 2224/48091 20130101; H01L 2924/1436 20130101; H01L
24/19 20130101; H01L 2224/81024 20130101; H01L 2924/181 20130101;
H01L 2924/15192 20130101; H01L 2225/06568 20130101; H01L 2224/16225
20130101; H01L 2224/48106 20130101; H01L 24/96 20130101; H01L
2924/1203 20130101; H01L 21/568 20130101; H01L 21/565 20130101;
H01L 25/115 20130101; H01L 2224/48227 20130101; H01L 21/486
20130101; H01L 2224/13101 20130101; H01L 25/071 20130101; H01L
2224/12105 20130101; H01L 2224/73204 20130101; H01L 23/49816
20130101; H01L 25/04 20130101; H01L 2225/0651 20130101; H01L
23/5389 20130101; H01L 23/13 20130101; H01L 2924/1815 20130101;
H01L 25/112 20130101; H01L 23/552 20130101; H01L 24/16 20130101;
H01L 23/5384 20130101; H01L 2924/00014 20130101; H01L 2924/1304
20130101; H01L 25/0753 20130101; H01L 23/3121 20130101; H01L
2224/48247 20130101; H01L 25/0655 20130101; H01L 2224/16227
20130101; H01L 23/5385 20130101; H01L 2225/06586 20130101; H01L
24/48 20130101; H01L 23/5386 20130101; H01L 23/48 20130101; H01L
25/042 20130101; H01L 2225/06517 20130101; H01L 25/0652
20130101 |
International
Class: |
H01L 23/538 20060101
H01L023/538; H01L 23/00 20060101 H01L023/00; H01L 25/04 20060101
H01L025/04; H01L 23/48 20060101 H01L023/48; H01L 21/48 20060101
H01L021/48; H01L 21/56 20060101 H01L021/56; H01L 23/13 20060101
H01L023/13; H01L 23/31 20060101 H01L023/31; H01L 23/498 20060101
H01L023/498; H01L 23/552 20060101 H01L023/552; H01L 25/065 20060101
H01L025/065; H01L 25/16 20060101 H01L025/16 |
Claims
1. A method of forming a molded module, comprising: mounting a
plurality of components on a temporary adhesive formed over a
carrier substrate, wherein the components each have terminals that
are in contact with the temporary adhesive; encapsulating the
plurality of components with a mold layer; and removing the
temporary adhesive and the carrier substrate from the mold layer,
wherein the terminals are exposed and are substantially coplanar
with a first surface of the mold layer.
2. The method of claim 1, further comprising: singulating the mold
layer to form a plurality of molded modules.
3. The method of claim 2, further comprising: mounting at least one
of the molded modules to a die, wherein the die includes a
redistribution layer.
4. The method of claim 1, further comprising: forming one or more
via openings in the mold layer; and disposing a conductive material
in the one or more via openings to form through mold vias.
5. The method of claim 4, wherein the via openings are formed with
a laser drilling process.
6. The method of claim 1, further comprising: mounting one or more
conductive pins on the temporary adhesive; and forming the mold
layer to a thickness that exposes a surface of the conductive
pins.
7. The method of claim 1, wherein forming the mold layer includes
forming a one or more partial via openings.
8. The method of claim 7, further comprising: forming one or more
via openings in the mold layer by laser drilling portions of the
mold layer below the partial via openings; and disposing a
conductive material in the one or more via openings to form through
mold vias.
9. A molded module, comprising: a mold layer having a first surface
and a second surface that is opposite to the first surface; and a
plurality of components encapsulated within the mold layer, wherein
each of the components include terminals that are substantially
coplanar with the first surface of the mold layer.
10. The molded module of claim 9, further comprising one or more
through mold vias, wherein the through mold vias include a first
surface that is substantially coplanar with the first surface of
the mold layer and a second surface that is substantially coplanar
with the second surface of the mold layer.
11. The molded module of claim 10, wherein the through mold vias
have tapered sidewalls.
12. The molded module of claim 10, wherein the through mold vias
have substantially vertical sidewalls.
13. The molded module of claim 10, wherein the through mold vias
are conductive pins or via bars.
14. The molded module of claim 10, wherein a plurality of through
mold vias are arranged around one or more components to form a
faraday cage.
15. The molded module of claim 9, wherein the components include
active and/or passive components.
16. The molded module of claim 9, further comprising one or more
stacked components that are electrically coupled to a pad with a
wire bond.
17. The molded module of claim 16, wherein the pad has a surface
that is substantially coplanar with the first surface of the mold
layer.
Description
CROSS-REFERENCE TO RELATED APPLICATION
[0001] This patent application is a divisional of U.S. patent
application Ser. No. 15/776,773 filed May 16, 2018, which is a U.S.
National Phase Application under 35 U.S.C. .sctn. 371 of
International Application No. PCT/US2015/067422, filed Dec. 22,
2015, entitled "ULTRA SMALL MOLDED MODULE INTEGRATED WITH DIE BY
MODULE-ON-WAFER ASSEMBLY," which designates the United States of
America, the entire disclosures of which are hereby incorporated by
reference in their entirety and for all purposes.
FIELD OF THE INVENTION
[0002] Embodiments of the present invention relate generally to the
manufacture of semiconductor devices. In particular, embodiments of
the present invention relate to semiconductor packages that include
molded modules that are mounted on a die surface and methods for
manufacturing such devices.
BACKGROUND OF THE INVENTION
[0003] In order to provide increased flexibility in design and
improve the time to market, packaging technologies (e.g., system in
package (SiP), system on a chip (SoC), or the like) may include a
plurality of discrete components coupled to an integrated circuit
(IC) die. These additional components may be mounted to the
packaging substrate, embedded within the packaging substrate, or
embedded in a mold layer formed around the die. For example,
components may be embedded in the mold layer formed around the die
in embedded wafer level ball grid array (eWLB) or embedded panel
level ball grid array (ePLB) packages. In such packages, additional
components are located in the mold layer outside an outer perimeter
of the die, and electrical connections from the die to the
components are made with a redistribution layer (RDL) that is
formed over the mold layer. Accordingly, eWLB and ePLB packages
require additional surface area in the X-Y dimension in order to
package the components and the die in a single mold layer.
[0004] In addition to increasing the area needed to package all of
the components and the die in the same mold layer, patterning the
RDL on the mold layer is limited by the minimum line width and
spacing dictated by design rules. The limit for each is typically
about 5 .mu.m or greater. The line width and spacing needs to be
relatively large to account for misalignment that occurs during the
molding process. For example, embedded components on the edge of
the wafer or panel move a significant amount due to mold flow and
coefficient of thermal expansion (CTE) mismatch. The misalignment
issues are becoming an even greater concern as more than one RDL is
needed. Misalignment between multiple redistribution layers further
decreases the reliability and yield of such packages.
[0005] Accordingly, there is a need in the art for packaging
technologies that allow for the formation of reliable packages with
a small footprint.
BRIEF DESCRIPTION OF THE DRAWINGS
[0006] FIG. 1A is a cross-sectional illustration of a molded
module, according to an embodiment of the invention.
[0007] FIG. 1B is a cross-sectional illustration of a molded module
that includes a plurality of through mold vias, according to an
embodiment of the invention.
[0008] FIG. 1C is a cross-sectional illustration of a molded module
that is mounted to a die, according to an embodiment of the
invention.
[0009] FIG. 2A is a cross-sectional illustration of a molded module
and a die that is flip-chip mounted to a package substrate,
according to an embodiment of the invention.
[0010] FIG. 2B is a cross-sectional illustration of a molded module
and a die that is wire bonded to a package substrate, according to
an embodiment of the invention.
[0011] FIG. 2C is a cross-sectional illustration of a molded module
that includes a plurality of through mold vias that electrically
couple the die to a package substrate, according to an embodiment
of the invention.
[0012] FIG. 3A is a cross-sectional illustration of a plurality of
components mounted to a temporary adhesive on a carrier substrate,
according to an embodiment of the invention.
[0013] FIG. 3B is a cross-sectional illustration of FIG. 3A after a
mold layer is formed over the plurality of components and the
temporary adhesive, according to an embodiment of the
invention.
[0014] FIG. 3C is a cross-sectional illustration of FIG. 3B after
the mold layer is removed from the temporary adhesive on the
carrier substrate, according to an embodiment of the invention.
[0015] FIG. 3D is a cross-sectional illustration of FIG. 3C after
the mold layer is diced to form molded modules and the molded
modules are positioned over a wafer that includes a plurality of
integrated circuit dice, according to an embodiment of the
invention.
[0016] FIG. 3E is a cross-sectional illustration of FIG. 3D after
the molded modules are mounted to the wafer and the wafer is diced,
according to an embodiment of the invention.
[0017] FIG. 4A is a cross-sectional illustration of a plurality of
components and a plurality of via pins mounted on a temporary
adhesive on a carrier substrate, according to an embodiment of the
invention.
[0018] FIG. 4B is a cross-sectional illustration of FIG. 4A after a
mold layer is formed over the plurality of components, the
plurality of via bars, and the temporary adhesive, according to an
embodiment of the invention.
[0019] FIG. 5A is a cross-sectional illustration of a mold layer
formed over a plurality of components after a plurality of via
openings are formed through the mold layer, according to an
embodiment of the invention.
[0020] FIG. 5B is a cross-sectional illustration of FIG. 5A after a
conductive material is deposited into the via openings to form a
plurality of vias, according to an embodiment of the invention.
[0021] FIG. 6A is a cross-sectional illustration of a mold with via
protrusions that is used to form a mold layer over a plurality of
components, according to an embodiment of the invention.
[0022] FIG. 6B is a cross-sectional illustration of FIG. 6A after
the mold layer is formed with a plurality of partial via openings
formed into the mold layer, according to an embodiment of the
invention.
[0023] FIG. 6C is a cross-sectional illustration of FIG. 6B after
the partial via openings are completely opened, according to an
embodiment of the invention.
[0024] FIG. 6D is a cross-sectional illustration of FIG. 6C after a
conductive material is deposited into the via openings to form a
plurality of vias, according to an embodiment of the invention.
[0025] FIG. 7 is a schematic of a computing device built in
accordance with an embodiment of the invention.
DETAILED DESCRIPTION OF THE INVENTION
[0026] Described herein are systems that include a semiconductor
package and methods of forming such semiconductor packages. In the
following description, various aspects of the illustrative
implementations will be described using terms commonly employed by
those skilled in the art to convey the substance of their work to
others skilled in the art. However, it will be apparent to those
skilled in the art that the present invention may be practiced with
only some of the described aspects. For purposes of explanation,
specific numbers, materials and configurations are set forth in
order to provide a thorough understanding of the illustrative
implementations. However, it will be apparent to one skilled in the
art that the present invention may be practiced without the
specific details. In other instances, well-known features are
omitted or simplified in order not to obscure the illustrative
implementations.
[0027] Various operations will be described as multiple discrete
operations, in turn, in a manner that is most helpful in
understanding the present invention, however, the order of
description should not be construed to imply that these operations
are necessarily order dependent. In particular, these operations
need not be performed in the order of presentation.
[0028] Embodiments of the invention allow for the integration of
active and/or passive components with a die without increasing the
footprint of the package while also allowing for increases in
yield. The packaging solutions described according to embodiments
of the invention are able to achieve these benefits by utilizing
molded modules that include a plurality of active and/or passive
components. Instead of arranging the components around a die, as
described above, the molded module may be flip-chip mounted to a
surface of the die.
[0029] Such packaging configurations provide several advantages.
For example, flip-chip mounting the molded module to the die
reduces the footprint of the package and reduces the length of the
interconnect lines between the components and the die.
Additionally, the RDL may be formed on the die instead of being
formed over the mold layer. Eliminating the redistribution layer
from over the mold layer reduces fabrication costs compared to
molding solutions such as eWLB and ePLB structures that need an RDL
over the mold. Instead of forming the RDL on the molded layer, a
standardized pad layout can be patterned on the die with
inexpensive backend masks. Moving the formation of the RDL from the
mold layer to the die also leverages the fine line width and
spacing design rules available in backend processing and can
therefore produce finer pitched interconnects. Furthermore, the
yield can be increased when no lithography is required on the mold
layer after embedding the components. Terminals of the components
remain exposed and can be easily screened to ensure that only
functional molded modules are used in subsequent assembly of the
package.
[0030] Referring now to FIG. 1A, a cross-sectional illustration of
a molded module 100 is shown according to an embodiment of the
invention. The molded module 100 may include a plurality of
components 120 embedded in a mold layer 110. The plurality of
components 120 may include one or more active or passive devices.
For example, passive components 120 may include capacitors,
resistors, inductors, or the like, and active components 120 may
include transistors, diodes, power sources, or the like. The number
and type of components 120 that are included in the molded module
100 may be dependent on the desired use of the molded module 100.
The flexibility in the number and type of components 120 that may
be used allows for rapid design and integration of the molded
module 100 into packaged devices, therefore allowing for quicker
time to market.
[0031] As illustrated, each of the components 120 may include
terminals 124 that are positioned along a first surface 111 of the
mold layer 110. In an embodiment, each of the terminals 124 may
include a surface 125 that is substantially coplanar with the first
surface 111 of the mold layer 110. Additional embodiments may
include components 120S that are stacked over another component
120. In such embodiments, one or more wire bonds 126 may be
embedded in the mold layer 110 to provide a conductive path between
the stacked component 120S and a pad 122 formed along the first
surface 111 of the mold layer 110. According to an additional
embodiment of the invention, one or more of the components 120 or
120S may also extend above the mold layer (i.e., the entire
component may not be embedded in the mold layer).
[0032] As illustrated, the terminals 124 and pads 122 are not
covered by a redistribution layer (RDL). In such embodiments, an
RDL may be included on the integrated circuit die (not shown in
FIG. 1A) instead of on the mold layer 110. The use of molded
modules without an RDL formed over the contacts also allows for
quick inspection of the components. For example, good units can be
easily screened and then good sub-assembly screened with a socket
test prior to assembly. Accordingly, molded modules 100 that have
defective components can be prevented from being included in the
finished package, which produces an increase in the yield.
[0033] Referring now to FIG. 1B, a cross-sectional illustration of
a molded module 101 that includes a plurality of through mold vias
140 formed through the mold layer 110 is shown according to an
embodiment of the invention. The through mold vias 140 provide a
conductive pathway through the mold layer 110. Accordingly,
embodiments of the invention may include through mold vias 140 that
have a first surface 141 that is substantially coplanar with a
first surface 111 of the mold layer 110 and a second surface 142
that is substantially coplanar with a second surface 112 of the
mold layer 110. However, it is to be appreciated that the second
surface 112 of the mold layer 110 may not be completely planar. For
example, embodiments of the invention may also include a surface
with one or more cavities or a stepped surface. As such, the entire
second surface 112 of the mold layer does not need to be
substantially coplanar with a second surface 142 of the through
mold vias 140, according to some embodiments of the invention. An
example of such an embodiment is illustrated and described in
greater detail below with respect to FIG. 2C.
[0034] The use of through mold vias 140 provides several
advantages. In one embodiment, a plurality of through mold vias 140
may be used to form a faraday cage around one or more components
120 that need to be isolated from interference. In the illustrated
embodiment, a via 140 is formed on either side of a component 120,
and it is to be appreciated that additional through mold vias 140
may be formed around the component 120 in planes that are not
visible in the illustrated cross-sectional view. Additionally, the
use of through mold vias 140 may allow for a connection to be made
from an integrated circuit die to a package substrate through the
molded module 101. In such embodiments, the molded module 101 may
include one or more through mold vias 140 to produce the desired
number of connections.
[0035] In the embodiment illustrated in FIG. 1B, the through mold
vias 140 have tapered sidewalls. Tapered sidewalls may be formed
when a laser drilling process is used to define via openings.
However embodiments are not limited to through mold vias 140 that
have tapered sidewalls. For example, pins and/or via bars may be
used instead of laser drilled through mold vias 140. In such
embodiments, the sidewalls may be substantially vertical. Molded
modules that include pins or via bars, and processes for forming
through mold vias 140, are described in greater detail below.
[0036] Referring now to FIG. 1C, a cross-sectional illustration of
an assembly 103 that includes a molded module 100 that is
electrically and mechanically coupled to a die 113 is shown
according to an embodiment of the invention. The illustrated
embodiment includes a molded module 100 that is substantially
similar to the molded module 100 described above with respect to
FIG. 1A. However, it is appreciated that any molded module formed
in accordance with embodiments of the invention may be mounted to a
die 113. For example, a molded module that includes through mold
vias 140, such as the molded module 101 illustrated in FIG. 1B, may
also be mounted to the die 113. According to an embodiment, the die
113 may be any active device. For example, the die 113 may be an
integrated circuit (IC) device or an interposer (e.g., a system on
a chip (SoC), an antenna chip, a sensor, a radio frequency (RF)
die, or the like).
[0037] According to an embodiment, the molded module 100 may be
mounted directly to the die 113 with a plurality of solder bumps
117. For example, the solder bumps 117 may be controlled collapse
chip connection (C4) bumps which may also be referred to as
flip-chip connections. According to an embodiment, a flux 118 may
also be formed over the solder bumps 117. Embodiments of the
invention may utilize any suitable flux 118 that aids in the
formation of reliable electrical connections between the solder
bumps 117 and the terminals 124. For example, the flux 118 may be
an epoxy based flux or the like.
[0038] Since the molded module 100 does not include an RDL, an RDL
116 may be formed over the die 113. Forming the RDL 116 on the die
113 may allow for increased routing density for the conductive
traces and vias 114 of the RDL 116 because finer line width and
spacing are available in the backend fabrication processes used to
form the die 113. According to an embodiment, the conductive traces
and vias 114 may be formed in one or more dielectric layers 123 and
may electrically couple the terminals 124 of the components 120 to
pads 115 and solder bumps 119 located on the die 113 and/or to any
circuitry within the die 113. According to an additional
embodiment, the solder bumps 117 may be replaced with an
anisotropic conductive paste or film. In such an embodiment, the
combination of pressure from the mounting process and heat allows
for conductive paths to be formed in the anisotropic paste between
the terminals 124 and the contacts on the RDL 116 of the die
113.
[0039] Referring now to FIG. 2A, a cross-sectional illustration of
a package 205 is shown according to an embodiment of the invention.
Package 205 may include a die 213 that is flip-chip mounted to a
package substrate. According to an embodiment, one or more molded
modules 200 may be electrically coupled to the die 213. In the
illustrated embodiment, a single molded module 200 is shown, but it
is to be appreciated that more than one molded module may be used
according to additional embodiments. In some embodiments the die
213 may be mounted on an interposer 252. The interposer 252
includes an opening 255 that forms a cavity that accommodates the
placement of the molded module 200 between the die 213 and the
package substrate 250. Embodiments of the invention may include a
cavity fill material 270 that fills the remaining portion of the
cavity that is not occupied by the molded module. The cavity fill
material 270 may be any suitable cavity fill material, such as an
epoxy or a filled epoxy.
[0040] In the embodiment illustrated in FIG. 2A, the components 220
that are embedded in the mold layer 220 are illustrated as having
terminals 224 that are coupled to the die 213 by solder bumps 217
covered by flux 218. It is to be appreciated that the solder bumps
217 may be coupled to an RDL (not shown) in the die 213. The
redistribution layers in the die may be substantially similar to
the RDL 116 layers illustrated in FIG. 1C and are omitted from FIG.
2A in order to not unnecessarily obscure the figure.
[0041] Embodiments of the invention may also include one or more
components 262 that are mounted to the interposer 252. The
components 262 may be any needed component, such as an active or
passive component. The interposer 252 and the package 250 may
include one or more routing layers (not shown) that electrically
couple the solder bumps 219 and 263 to second level interconnects
256 on the opposite side of the package substrate 250. The second
level interconnects 256 may be solder bumps or the like, and may be
used to electrically and mechanically couple the package 205 to a
substrate, such as a motherboard or the like.
[0042] Referring now to FIG. 2B, a cross-sectional illustration of
a package 206 that includes a molded module 200 formed on a die 213
is shown according to an embodiment of the invention. The package
206 is similar to the package 205 illustrated in FIG. 2A, with the
exception that the die 213 is wirebonded to the package substrate
250 with wires 264 instead of being flip-chip bonded. In such
embodiments, there may not be a need for a cavity since the molded
module 200 is not positioned between the die 213 and the package
substrate 250. Therefore, the interposer 252 may be omitted.
[0043] Referring now to FIG. 2C, a cross-sectional illustration of
a package 207 that includes a molded module 200 with through mold
vias 240 is shown according to an embodiment of the invention.
Embodiments of the invention include a package 207 that is
substantially similar to the package 205 illustrated in FIG. 2A,
with the exception that the molded module 200 may include one or
more through mold vias 240. The through mold vias 240 are
substantially similar to those described above with respect to FIG.
1B, and therefore will not be described in greater detail here. The
use of through mold vias 240 allows for connections from the
package substrate 250 to be made to the die 213 through the molded
module 200. Additionally, conductive lines and vias 272 in the
package substrate 250 may electrically couple the through mold vias
240 to one or more of the second level interconnects 256. In some
embodiment, the through mold vias 240 may be used for power
delivery and/or for the formation of one or more faraday cages
around components 220.
[0044] FIG. 2C also illustrates a stepped mold surface that may be
included in different embodiments of the invention. As illustrated,
the second surface 212 of the mold layer may have a step or cavity
237. The step or cavity 237 may be formed during the molding
process used to form the mold layer 210. In such an embodiment, the
step or cavity 237 may allow for one or more additional components
220 to be mounted on the package substrate 250 below the mold
layer. Accordingly, additional surface area available for mounting
components 220 may be provided when embodiments that include a step
or cavity 237 are used.
[0045] Referring now to FIGS. 3A-3E, cross-sectional illustrations
of different processing operations used to form molded modules that
may be mounted to a die are shown according to an embodiment of the
invention.
[0046] Referring now to FIG. 3A, a cross-sectional illustration of
a carrier substrate 390 after a plurality of components 320 are
mounted on a temporary adhesive 392 is shown according to an
embodiment of the invention. Embodiments of the invention may
include a carrier substrate 390 that is any suitable material for
mounting components 320. For example, the carrier substrate 390 may
be a stainless steel plate, an organic panel or plate, a silicon,
sapphire, or glass wafer, or the like. Increasing the size of the
carrier substrate 390 allows for more molded modules to be formed
with a single process flow, thereby increasing the throughput. The
components 320 may include one or more active or passive devices.
For example, passive components 320 may include capacitors,
resistors, inductors, or the like, and active components 320 may
include transistors, diodes, power sources, or the like. The number
and type of components 320 that are mounted to the temporary
adhesive 392 may be dependent on the desired use of the molded
module and how many molded modules will be formed from the
process.
[0047] According to an embodiment, each of the components 320 may
include terminals 324 that are mounted to the temporary adhesive
392 formed over the carrier substrate 390. In an embodiment, each
of the terminals 324 may include a surface 325 that is placed in
direct contact with a top surface of the adhesive layer 392.
Additional embodiments may include components 320S that are stacked
over other components 320. In such embodiments, a terminal 324 may
be mounted to the temporary adhesive and then a wire bond 326 may
electrically couple the terminal 324 to the stacked component 320S.
According to an embodiment, the components 320 may be mounted to
the temporary adhesive 392 with a pick and place tool. The pick and
place tool may pick up individual components 320, or the pick and
place tool may allow for an array of components 320 to be mounted
on the carrier substrate at substantially the same time (e.g., gang
bonding).
[0048] Referring now to FIG. 3B, a cross-sectional illustration of
the carrier substrate 390 after a mold layer 310 is formed over the
components 320 and the temporary adhesive 392 is shown according to
an embodiment of the invention. The mold layer 310 may be any
suitable material that can be used to encapsulate the components
320, such as epoxy, silicone, or the like. In an embodiment, the
mold layer 310 may be filled with filler particles made of silica,
aluminum, or the like. Additionally, embodiments of the invention
may form the mold layer 310 with any suitable process, such as
compression molding, transfer molding, injection molding, or any
other suitable encapsulation process. It is to be appreciated that
molding processes, such as these, are capable of producing a high
yield because local positional movement of the components will be
relatively small and global movement of components can be
accommodated for during the singulation process, as described in
greater detail below.
[0049] Referring now to FIG. 3C, a cross-sectional illustration of
the mold layer 310 after the temporary adhesive 392 and the carrier
substrate 390 are removed is shown according to an embodiment of
the invention. For example, the mold layer 310 may be removed from
the temporary adhesive 392 with a peeling or delamination process.
The removal of the carrier substrate 390 and the temporary adhesive
392 exposes the surface 325 of the terminals 324. For example, the
exposed surface 325 of the terminals 324 may be substantially
coplanar with a first surface 311 of the mold layer. In some
embodiments, residue that may remain on the surface 325 of the
terminal 324 (e.g., residue from the temporary adhesive) may be
removed with a cleaning process, such as a plasma etching
process.
[0050] FIG. 3C also illustrates dashed lines 398 formed through the
mold layer 310. The dashed lines 398 define the boundary between
multiple molded modules formed from the same mold layer 310. For
example, the dashed lines 398 in FIG. 3C illustrate the boundary
between a first molded module 300A and second and third molded
modules 300B and 300C. Accordingly, the dashed lines 398 indicate
the locations where the mold layer 310 may be singulated. It is to
be appreciated that the exact location of the dashed lines 398 may
be moved depending on global movement of components 320 that may
occur during the molding process. As such, even if there is global
movement of the components, the singulation process can be used to
account for the unwanted movement and still provide molded modules
300 that have properly aligned terminals 324.
[0051] According to an embodiment, the components 320 may be tested
after the mold layer 310 is formed and the terminals 324 are
exposed. Since no additional lithographic processes are needed to
form an RDL over the mold layer 310, testing at this point will
provide a way to screen functional molded modules from
non-functional molded modules. The molded modules 300 that pass
screening can then be used in subsequent assembly of the package.
Accordingly, the yield of the assembled packages may be increased
because only functional molded modules 300 will pass this
processing step. In an embodiment the components 320 of each of the
molded modules 300 may be tested before or after the mold layer is
singulated.
[0052] Referring now to FIG. 3D, a cross-sectional illustration of
the molded modules 300 being aligned over a wafer that includes a
plurality of dies 313 is shown according to an embodiment of the
invention. Since the molded modules 300 do not include an RDL, an
RDL 316 may be formed on the die 313. Forming the RDL 316 on the
dice 313 prior to dicing the wafer may allow for finer line width
and spacing design rules that are available in the backend
fabrication processes used to form the die 313. Accordingly,
forming the RDL 316 on the die 313 may allow for increased routing
density for the conductive traces and vias 314 of the RDL 316. The
conductive traces and vias 314 in the RDL 316 may electrically
couple the terminals 324 of the components 320 to solder bumps 319
located on the die 313. It is to be appreciated that the RDL 316 is
illustrated in the Figures is exemplary in nature and may include
any number of layers, traces, or vias, and in any desired pattern,
according to various embodiments.
[0053] According to an embodiment, the molded module 300 may be
mounted directly to the die 313 with a plurality of solder bumps
317. For example, the solder bumps 317 may be C4 bumps. In the
illustrated embodiment, the solder bumps 317 may also include a
flux 318, such as an epoxy flux. In an embodiment, the molded
module 300 may be mounted to the die 313 with a thermal compression
bonding (TCB) process. According to an additional embodiment, the
solder bumps 317 may be replaced with anisotropic conductive paste
or film. In such an embodiment, the combination of pressure from
the mounting process and heat allows for conductive paths to be
formed in the anisotropic conductive paste between the terminals
324 and the contacts on the RDL 316 of the die 313.
[0054] Referring now to FIG. 3E, a cross-sectional illustration of
a singulated die 313 with a molded module 300 mounted on the die
313 is shown according to an embodiment of the invention. In an
embodiment, the wafer may be diced with a dicing process known in
the art. After the die 313 with a molded module 300 attached is
formed, embodiments of the invention may further include mounting
the chip to a package substrate to form a package substantially
similar to those described above with respect to FIGS. 2A-2C.
[0055] In addition to the process flow described with respect to
FIG. 3A-3E, embodiments of the invention may also include a process
for forming conductive through mold vias in the molded module.
[0056] Referring now to FIG. 4A, a cross-sectional illustration of
a substrate carrier after via pins 440 are mounted to the temporary
adhesive 492 is shown according to an embodiment. The view
illustrated in FIG. 4A is a substantially similar to the substrate
carrier 390 illustrated in FIG. 3A, with the exception that only
the components that will be used to form a single molded module are
illustrated. It is to be appreciated that carrier substrate 490 may
be supporting a plurality of components 420 used to form a
plurality of molded modules. Additionally, the embodiment
illustrated in FIG. 4A differs from the embodiment illustrated in
FIG. 3A, because of the addition of via pins 440. As illustrated
via pins 440 are formed on opposite sides of a component 420.
Additional embodiments may include forming a plurality of via pins
440 around multiple sides of the component 420 in order to form a
faraday cage. Alternative embodiments may include via pins 440 that
are mounted at any location along the carrier substrate. Even when
not used to form a faraday cage, the one or more via pins 440 may
be useful in providing a direct electrical pathway between the
second level interconnects and the die for signaling and/or power
lines.
[0057] According to an embodiment, the via pins 440 may be any
suitable conductive material that can be mounted on the temporary
adhesive 492. In the illustrated embodiment, the via pins 440 have
a substantially uniform width. However, embodiment are not limited
to such configurations, and embodiments may include via pins 440
that include tapered sidewalls. Additional embodiments may include
via pins 440 that have pads (not show) mounted on a top surface and
a bottom surface (i.e., via bars). According to an embodiment, the
height of the via pins 440 may be substantially similar to the
height of the molded module.
[0058] Referring now to FIG. 4B, a cross-sectional illustration of
a mold layer 410 that encapsulates the components 420 and the via
pins 440 is shown according to an embodiment of the invention. In
an embodiment, the mold layer 410 may be formed with any suitable
molding material and molding process, such as those described above
with respect to FIG. 3B. According to an embodiment, the mold layer
410 may have a thickness that is substantially similar to the
thickness of the via pins 440. When the thickness of the mold layer
410 is substantially similar to the height of the via pins 440, a
second surface 442 of the via pins 440 may be substantially
coplanar with a second surface 412 of the mold layer 410.
Additional embodiments of the invention may include a mold layer
410 that has a thickness that is greater than the height of the via
pins 440. In such embodiments, a top surface of the mold layer may
be polished back after being formed in order to expose the second
surface 442 of the via pins 440.
[0059] After the mold layer 410 is formed with exposed via pin
surfaces 442, processing may continue in substantially the same
manner as described above with respect to FIGS. 3C-3E above, and
therefore, will not be repeated here.
[0060] Alternative embodiments of the invention may form the
through mold vias after the mold layer is formed. A process for
forming vias in accordance with such an embodiment is illustrated
in FIGS. 5A and 5B. Referring now to FIG. 5A, a cross-sectional
illustration of a mold layer 510 that is formed over a carrier
substrate is shown according to an embodiment of the invention.
After the mold layer 510 is formed, one or more via openings 547
may be formed through the mold layer 510 and expose a surface of
the temporary adhesive 592. In an embodiment, the via openings may
be formed with a laser drilling process. Due to the laser drilling,
embodiments of the invention may include tapered sidewalls.
[0061] Referring now to FIG. 5B, a cross-sectional illustration of
the molded module after the vias 540 are formed in the via openings
is shown according to an embodiment of the invention. Embodiments
of the invention may include any suitable metal deposition process
to fill the via openings. For example, the via openings may be
filled with a solder paste or may be plated with an electroless or
electroplating process. In some embodiments, any overburden that
may form over the second surface 512 may be polished back so that a
second surface 542 of the vias 540 are substantially coplanar with
a second surface of the mold layer 510.
[0062] After the vias 540 are formed through the mold layer 510,
processing may continue in substantially the same manner as
described above with respect to FIGS. 3C-3E above, and therefore,
will not be repeated here.
[0063] Alternative embodiments of the invention may form the via
openings during the molding process. A process for forming via
openings in accordance with such an embodiment is illustrated in
FIGS. 6A-6D.
[0064] Referring now to FIG. 6A, a cross-sectional illustration of
a mold 698 being used to form the mold layer 610 is shown according
to an embodiment of the invention. In addition to the mold cavity
used to form mold layer 610 over the components, embodiments may
also include a mold 698 that includes protrusions 699 that extend
into the mold layer 610. As such, when the mold layer 610 is
formed, the protrusions 698 may form the via openings 646, as
illustrated in the cross-sectional illustration shown in FIG.
6B.
[0065] In some embodiments, the protrusions 699 do not extend
completely through the mold layer 610. Accordingly, the via
openings 646 may not extend completely through the mold layer 610
and a portion of the mold layer 610 may still cover the temporary
adhesive 692, as illustrated in FIG. 6C. Forming the via openings
646 partially through the mold layer provides an increase in the
throughput compared to laser drilling the entire opening. According
to an embodiment, the throughput may be increased because the laser
drilling process used to remove the remaining portion of the mold
layer 610 formed below the via openings 646 may be implemented
faster than the laser processing that would otherwise be needed to
form an opening through the entire thickness of the mold layer 610.
In alternative embodiments, the protrusions 699 on the mold 698 may
completely extend through the mold layer 610, and the via openings
646 formed with the mold 698 would expose a surface of the
temporary adhesive 692.
[0066] Referring now to FIG. 6D, a cross-sectional illustration of
the molded module after the vias 640 are formed in the via openings
is shown according to an embodiment of the invention. Embodiments
of the invention may include any suitable metal deposition process
to fill the via openings. For example, the via openings may be
filled with a solder paste or may be plated with an electroless or
electroplating process. In some embodiments, any overburden that
may form over the second surface 612 may be polished back so that a
second surface 642 of the vias 640 are substantially coplanar with
a second surface of the mold layer 610.
[0067] After the vias 640 are formed through the mold layer 610,
processing may continue in substantially the same manner as
described above with respect to FIGS. 3C-3E above, and therefore,
will not be repeated here.
[0068] FIG. 5 illustrates a computing device 500 in accordance with
one implementation of the invention. The computing device 500
houses a board 502. The board 502 may include a number of
components, including but not limited to a processor 504 and at
least one communication chip 506. The processor 504 is physically
and electrically coupled to the board 502. In some implementations
the at least one communication chip 506 is also physically and
electrically coupled to the board 502. In further implementations,
the communication chip 506 is part of the processor 504.
[0069] Depending on its applications, computing device 500 may
include other components that may or may not be physically and
electrically coupled to the board 502. These other components
include, but are not limited to, volatile memory (e.g., DRAM),
non-volatile memory (e.g., ROM), flash memory, a graphics
processor, a digital signal processor, a crypto processor, a
chipset, an antenna, a display, a touchscreen display, a
touchscreen controller, a battery, an audio codec, a video codec, a
power amplifier, a global positioning system (GPS) device, a
compass, an accelerometer, a gyroscope, a speaker, a camera, and a
mass storage device (such as hard disk drive, compact disk (CD),
digital versatile disk (DVD), and so forth).
[0070] The communication chip 506 enables wireless communications
for the transfer of data to and from the computing device 500. The
term "wireless" and its derivatives may be used to describe
circuits, devices, systems, methods, techniques, communications
channels, etc., that may communicate data through the use of
modulated electromagnetic radiation through a non-solid medium. The
term does not imply that the associated devices do not contain any
wires, although in some embodiments they might not. The
communication chip 506 may implement any of a number of wireless
standards or protocols, including but not limited to Wi-Fi (IEEE
802.11 family), WiMAX (IEEE 802.16 family), IEEE 802.20, long term
evolution (LTE), Ev-DO, HSPA+, HSDPA+, HSUPA+, EDGE, GSM, GPRS,
CDMA, TDMA, DECT, Bluetooth, derivatives thereof, as well as any
other wireless protocols that are designated as 3G, 4G, 5G, and
beyond. The computing device 500 may include a plurality of
communication chips 506. For instance, a first communication chip
506 may be dedicated to shorter range wireless communications such
as Wi-Fi and Bluetooth and a second communication chip 506 may be
dedicated to longer range wireless communications such as GPS,
EDGE, GPRS, CDMA, WiMAX, LTE, Ev-DO, and others.
[0071] The processor 504 of the computing device 500 includes an
integrated circuit die packaged within the processor 504. In some
implementations of the invention, the integrated circuit die of the
processor includes one or more devices that are assembled in a
package that that includes one or more molded modules that includes
a plurality of components that are mounted to a die with an RDL
formed on the die, in accordance with implementations of the
invention. The term "processor" may refer to any device or portion
of a device that processes electronic data from registers and/or
memory to transform that electronic data into other electronic data
that may be stored in registers and/or memory.
[0072] The communication chip 506 also includes an integrated
circuit die packaged within the communication chip 506. In
accordance with another implementation of the invention, the
integrated circuit die of the communication chip includes one or
more devices that are assembled in a package that that includes one
or more molded modules that includes a plurality of components that
are mounted to a die with an RDL formed on the die, in accordance
with implementations of the invention.
[0073] The above description of illustrated implementations of the
invention, including what is described in the Abstract, is not
intended to be exhaustive or to limit the invention to the precise
forms disclosed. While specific implementations of, and examples
for, the invention are described herein for illustrative purposes,
various equivalent modifications are possible within the scope of
the invention, as those skilled in the relevant art will
recognize.
[0074] These modifications may be made to the invention in light of
the above detailed description. The terms used in the following
claims should not be construed to limit the invention to the
specific implementations disclosed in the specification and the
claims. Rather, the scope of the invention is to be determined
entirely by the following claims, which are to be construed in
accordance with established doctrines of claim interpretation.
[0075] Embodiments of the invention may include a molded module,
comprising: a mold layer having a first surface and a second
surface that is opposite to the first surface; and a plurality of
components encapsulated within the mold layer, wherein each of the
components include terminals that are substantially coplanar with
the first surface of the mold layer.
[0076] Additional embodiments of the invention include a molded
module, further comprising one or more through mold vias, wherein
the through mold vias include a first surface that is substantially
coplanar with the first surface of the mold layer and a second
surface that is substantially coplanar with the second surface of
the mold layer.
[0077] Additional embodiments of the invention include a molded
module, wherein the through mold vias have tapered sidewalls.
[0078] Additional embodiments of the invention include a molded
module, wherein the through mold vias have substantially vertical
sidewalls.
[0079] Additional embodiments of the invention include a molded
module, wherein the through mold vias are conductive pins or via
bars.
[0080] Additional embodiments of the invention include a molded
module, wherein a plurality of through mold vias are arranged
around one or more components to form a faraday cage.
[0081] Additional embodiments of the invention include a molded
module, wherein the components include active and/or passive
components.
[0082] Additional embodiments of the invention include a molded
module, further comprising one or more stacked components that are
electrically coupled to a pad with a wire bond.
[0083] Additional embodiments of the invention include a molded
module, wherein the pad has a surface that is substantially
coplanar with the first surface of the mold layer.
[0084] Embodiments of the invention include an electrical package
comprising: a die with a redistribution layer formed on at least
one surface; a molded module mounted to the die, wherein the molded
module comprises: a mold layer having a first surface and a second
surface that is opposite to the first surface; and a plurality of
components encapsulated within the mold layer, wherein each of the
components include terminals that are substantially coplanar with
the first surface of the mold layer, and wherein the terminals are
electrically coupled to the redistribution layer on the die.
[0085] Additional embodiments of the invention include an
electrical package, wherein the terminals in the molded module are
electrically coupled to the redistribution layer on the die with
solder bumps.
[0086] Additional embodiments of the invention include an
electrical package, wherein the terminals in the molded module are
electrically coupled to the redistribution layer on the die with an
anisotropic film or paste.
[0087] Additional embodiments of the invention include an
electrical package, further comprising: a package substrate coupled
to the die with first level interconnects.
[0088] Additional embodiments of the invention include an
electrical package, wherein the molded module is positioned between
the die and the package substrate.
[0089] Additional embodiments of the invention include an
electrical package, further comprising an interposer formed between
the die and the package substrate, wherein the interposer forms a
cavity that accommodates the molded module.
[0090] Additional embodiments of the invention include an
electrical package, wherein the first level interconnects are wire
bonds.
[0091] Additional embodiments of the invention include an
electrical package, wherein the die is positioned between the
molded module and the package substrate.
[0092] Embodiments of the invention include a method of forming a
molded module, comprising: mounting a plurality of components on a
temporary adhesive formed over a carrier substrate, wherein the
components each have terminals that are in contact with the
temporary adhesive; encapsulating the plurality of components with
a mold layer; and removing the temporary adhesive and the carrier
substrate from the mold layer, wherein the terminals are exposed
and are substantially coplanar with a first surface of the mold
layer.
[0093] Additional embodiments of the invention include a method,
further comprising: singulating the mold layer to form a plurality
of molded modules.
[0094] Additional embodiments of the invention include a method,
further comprising: mounting at least one of the molded modules to
a die, wherein the die includes a redistribution layer.
[0095] Additional embodiments of the invention include a method,
further comprising: forming one or more via openings in the mold
layer; and disposing a conductive material in the one or more via
openings to form through mold vias.
[0096] Additional embodiments of the invention include a method,
wherein the via openings are formed with a laser drilling
process.
[0097] Additional embodiments of the invention include a method,
further comprising: mounting one or more conductive pins on the
temporary adhesive; and forming the mold layer to a thickness that
exposes a surface of the conductive pins.
[0098] Additional embodiments of the invention include a method,
wherein forming the mold layer includes forming a one or more
partial via openings.
[0099] Additional embodiments of the invention include a method,
further comprising: forming one or more via openings in the mold
layer by laser drilling portions of the mold layer below the
partial via openings; and disposing a conductive material in the
one or more via openings to form through mold vias.
* * * * *