U.S. patent application number 15/978882 was filed with the patent office on 2018-12-27 for optical module for a microlithography objective holding optical elements with supporting device located in non-equidistant manner.
The applicant listed for this patent is Carl Zeiss SMT GmbH. Invention is credited to Jens Kugler, Yim-Bun Patrick Kwan, Franz Sorg.
Application Number | 20180373007 15/978882 |
Document ID | / |
Family ID | 34968795 |
Filed Date | 2018-12-27 |
![](/patent/app/20180373007/US20180373007A1-20181227-D00000.png)
![](/patent/app/20180373007/US20180373007A1-20181227-D00001.png)
![](/patent/app/20180373007/US20180373007A1-20181227-D00002.png)
![](/patent/app/20180373007/US20180373007A1-20181227-D00003.png)
![](/patent/app/20180373007/US20180373007A1-20181227-D00004.png)
![](/patent/app/20180373007/US20180373007A1-20181227-D00005.png)
![](/patent/app/20180373007/US20180373007A1-20181227-D00006.png)
![](/patent/app/20180373007/US20180373007A1-20181227-D00007.png)
![](/patent/app/20180373007/US20180373007A1-20181227-M00001.png)
![](/patent/app/20180373007/US20180373007A1-20181227-M00002.png)
United States Patent
Application |
20180373007 |
Kind Code |
A1 |
Kugler; Jens ; et
al. |
December 27, 2018 |
OPTICAL MODULE FOR A MICROLITHOGRAPHY OBJECTIVE HOLDING OPTICAL
ELEMENTS WITH SUPPORTING DEVICE LOCATED IN NON-EQUIDISTANT
MANNER
Abstract
Disclosed is an optical module for a lens, especially a
microlithographic apparatus, comprising a first holding device (2)
with an inner circumference (2.1) that extends in a first
circumferential direction (2.2), and at least one first supporting
device (3.1) which is fastened to the inner circumference (2.1) of
said first holding device (2) and is used for supporting a first
optical element (5.1), an annular circumferential first assembly
space (3.18) being defined by displacing the first supporting
device (3.1) once in a revolving manner along the first
circumferential direction (2.2). At least one second supporting
device (3.2) which is fixed to the inner circumference (2.1) of the
first holding device (2) is provided for supporting a second
optical element (5.2), an annular circumferential second assembly
space (3.28) being defined by displacing the second supporting
device (3.2) once in a revolving manner along the first
circumferential direction (2.2). The first assembly space (3.18)
intersects the second assembly space (3.28).
Inventors: |
Kugler; Jens; (Aalen,
DE) ; Sorg; Franz; (Aalen, DE) ; Kwan; Yim-Bun
Patrick; (Oberkochen, DE) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
Carl Zeiss SMT GmbH |
Oberkochen |
|
DE |
|
|
Family ID: |
34968795 |
Appl. No.: |
15/978882 |
Filed: |
May 14, 2018 |
Related U.S. Patent Documents
|
|
|
|
|
|
Application
Number |
Filing Date |
Patent Number |
|
|
14289749 |
May 29, 2014 |
9977228 |
|
|
15978882 |
|
|
|
|
14199758 |
Mar 6, 2014 |
|
|
|
14289749 |
|
|
|
|
11597297 |
Jan 18, 2008 |
8711331 |
|
|
PCT/EP05/05600 |
May 24, 2005 |
|
|
|
14199758 |
|
|
|
|
Current U.S.
Class: |
1/1 |
Current CPC
Class: |
G02B 7/021 20130101;
G02B 17/0615 20130101; G03F 7/70833 20130101; G02B 7/023 20130101;
G02B 17/0605 20130101; G02B 7/182 20130101; G02B 7/026 20130101;
G02B 7/00 20130101; G02B 19/0023 20130101; G03F 7/70825
20130101 |
International
Class: |
G02B 19/00 20060101
G02B019/00; G02B 17/06 20060101 G02B017/06; G02B 7/00 20060101
G02B007/00; G03F 7/20 20060101 G03F007/20; G02B 7/02 20060101
G02B007/02; G02B 7/182 20060101 G02B007/182 |
Foreign Application Data
Date |
Code |
Application Number |
May 24, 2004 |
DE |
10 2004 025 832.5 |
Claims
2.-23. (canceled)
24. An optical module comprising: a first holding device with a
circumference extending in a first circumferential direction; and a
plurality of first supporting devices configured to support a first
optical element, the first supporting devices being fixed at the
circumference of the first holding device, wherein: along the first
circumferential direction, at least one of the first supporting
devices is located in a non-equidistant manner between two
neighboring first supporting devices; the first optical element has
a shape selected from a group consisting of a shape that is
asymmetric along the circumferential direction, a shape that is
non-rotationally symmetric along the circumferential direction, a
shape that has a recess forming a light passage, and a shape that
has a recess causing an asymmetry of the first optical element; and
the optical module is configured to be used in a microlithography
objective.
25. The optical module of claim 24, wherein each first supporting
device is a bipod with a first leg and a second leg.
26. The optical module of claim 24, further comprising a plurality
of second supporting devices, wherein: the second supporting
devices are configured to support a second optical element; the
second supporting devices are fixed at a circumference of the first
holding device; the first supporting devices do not contact the
second supporting devices; and the first optical element is
separate from the second optical element, or the first optical
element is non-contiguous with the second optical element.
27. The optical module of claim 26, wherein, along the first
circumferential direction, one of the first supporting devices is
located in a non-equidistant manner between two neighboring second
supporting devices.
28. The optical module of claim 26, wherein: a first assembly space
is defined by a first shell formed if the first supporting devices
were displaced through 360.degree. about a central axis and along
the first circumferential direction; a second assembly space is
defined by a second shell formed if the second supporting devices
were displaced through 360.degree. along the first circumferential
direction; and the outer surface of the first shell intersects the
outer surface of the second shell so that the first assembly space
intersects the second assembly space or penetrates the second
assembly space.
29. The optical module of claim 28, further comprising at least one
third supporting device configured to support a third optical
element, wherein the at least one third supporting device is fixed
at a circumference of the first holding device, a third assembly
space is defined by a third shell formed if the at least one third
supporting device were displaced through 360.degree. along the
first circumferential direction, and the third assembly space
intersects at least one of the first assembly space and the second
assembly space.
30. The optical module of claim 28, wherein: the first shell has an
outer surface having a first end located at the circumference of
the first holding device at a first level along the central axis
and a second end located adjacent the first optical element at a
second level along the central axis; the second end of the first
shell is opposite the first end of the first shell; the second
level is spaced from the first level along the central axis; the
second shell has an outer surface having a first end located at the
circumference of the first holding device and a second end adjacent
the second optical element; and the second end of the second shell
is opposite the first end of the second shell.
31. The optical module of claim 28, wherein the first shell is in
the shape of a truncated cone, and the second shell is in the shape
of a truncated cone.
32. The optical module of claim 28, wherein the first shell is in
the shape of a cylinder, and the second shell is in the shape of a
cylinder.
33. The optical module of claim 28, wherein the first shell is in
the shape of a toroidal body, and the second shell is in the shape
of a toroidal body.
34. The optical module of claim 26, wherein the first
circumferential direction lies in a first plane and at least one of
the following holds: at least one device selected from the group
consisting of the plurality of first supporting devices and the
plurality of second supporting devices extends at least in a first
direction which runs perpendicular to the first circumferential
direction in the first plane; and at least one device selected from
the group consisting of the plurality of first supporting devices
and at least one of the plurality of second supporting devices
extends at least in a second direction which runs perpendicular to
the first plane.
35. The optical module of claim 26, wherein at least one supporting
device is fixed detachably to the first holding device, the at
least one supporting device being selected from the group
consisting of one of the first supporting devices, one of the
second supporting devices, and a combination thereof.
36. The optical module of claim 35, wherein the at least one
supporting device includes at least one connection element for the
connection of the at least one supporting device to the first
holding device.
37. The optical module of claim 26, wherein: at least one of the
first supporting devices is connected to a first contact element of
the first holding device, at least one of the second supporting
devices is connected to a second contact element of the first
holding device, the first contact element and the second contact
element being arranged substantially in a common second plane,
which runs parallel to a first plane in which the first
circumferential direction lies.
38. The optical module of claim 26, wherein: at least one
supporting device is fixed to the first holding device so as to be
adjustable; and the at least one supporting device is selected from
the group consisting of the first supporting devices, the second
supporting devices, and a combination thereof.
39. The optical module of claim 26, wherein: at least one
supporting device is configured to adjust the position of the
optical element supported by the at least one supporting device;
and the at least one supporting device is selected from the group
consisting of the first supporting devices, the second supporting
devices, and a combination thereof.
40. The optical module of claim 26, wherein, for at least one
optical element, a plurality of supporting devices are fixed to the
holding device and are configured to statically support the at
least one optical element.
41. The optical module of claim 26, wherein at least one second
supporting device is a bipod comprising first and second legs.
42. The optical module of claim 26, further comprising a mounting
device for at least one optical element selected from the group
consisting of the first optical element and the second optical
element, wherein the mounting device is connected detachably to an
end of at least one supporting device for the at least one optical
element facing away from the first holding device, and the at least
one supporting device is selected from the group consisting of the
first supporting devices, the second supporting devices, and a
combination thereof.
43. The optical module of claim 26, wherein: at least one optical
element is supported by at least one supporting device on the
holding device; the at least one supporting device is selected from
the group consisting of one of the first supporting devices, one of
the second supporting devices, and a combination thereof; and the
at least one optical element is selected from the group consisting
of the first optical element and the second optical element.
44. The optical module of claim 43, wherein the at least one
optical element is connected directly to an end of the at least one
supporting device for the at least one optical element facing away
from the first holding device.
45. The optical module of claim 43, wherein the at least one
optical element comprises a reflecting element.
46. The optical module of claim 43, wherein the at least one
optical element has a projection which is connected to an end of
the at least one supporting device for the at least one optical
element facing away from the first holding device.
47. The optical module of claim 26, wherein the first optical
element is reflective, and the second optical element is
reflective.
48. The optical module of claim 47, wherein: the first optical
element comprises a reflecting face; the second optical element
comprises a reflecting face, the first optical element and second
optical elements are arranged directly adjacent to one another; and
the reflecting of the first optical element faces the reflecting
face of the second optical element.
49. The optical module of claim 47, wherein the first optical
element comprises an optical surface configured to reflect light
directly onto an optical surface of the second optical element.
50. The optical module of claim 24, wherein the first optical
element is reflective.
51. The optical module of claim 26, wherein: the optical module has
a total number S of supporting devices fixed at the circumference
of the first holding device; the total number S of the supporting
devices includes the first supporting devices and the second
supporting devices; one of the total number S of supporting devices
is displaced with respect to a neighboring one of the total number
S of supporting devices by an angle which is not equal to .alpha. =
360 .degree. S ##EQU00002## with respect to a central axis of the
first holding device in the first circumferential direction; the
central axis runs perpendicular to a first plane in which the first
circumferential direction lies.
52. The optical module of claim 24, wherein the optical module
comprises precisely three of the first supporting devices.
53. The optical module of claim 26, wherein the second optical
element has a shape selected from a group consisting of a shape
that is asymmetric along the circumferential direction, a shape
that is non-rotationally symmetric along the circumferential
direction, a shape that has a recess forming a light passage, and a
shape that has recess causing an asymmetry of the further optical
element.
54. The optical module of claim 26, wherein the optical module
comprises precisely three of the first supporting devices.
55. An optical module comprising: a holding device with a
circumference extending in a circumferential direction; and a
plurality of supporting devices configured to support an optical
element; wherein: each of the supporting devices is configured to
support the optical element at a first support location; each of
the supporting devices is fixed to the holding device at a second
support location which is different from the first support
location; along the circumferential direction, at least one of the
first support locations is located in a non-equidistant manner
between two neighboring first support locations; the optical
element has a shape selected from a group consisting of a shape
that is asymmetric along the circumferential direction, a shape
that is non-rotationally symmetric along the circumferential
direction, a shape that has a recess forming a light passage, and a
shape that has recess causing an asymmetry of the optical element;
and the optical module is configured to be used in a
microlithography objective.
Description
BACKGROUND OF THE INVENTION
[0001] The present invention relates to an optical module for an
objective. The invention can be used in connection with
microlithography employed in the production of microelectronic
circuits. It further concerns, therefore, an objective barrel which
is suitable in particular for application in a microlithographic
apparatus, as well as such a microlithographic apparatus including
such an objective barrel.
[0002] In the field of microlithography in particular, it is
necessary for the employed optical elements of the objective
barrel, i.e. the lenses for example, to be positioned spatially
with respect to one another with as high a degree of precision as
possible, in order to achieve a suitably high image quality. The
high precision requirements are not least a consequence of the
constant demand to increase the resolution of optical systems used
in the production of microelectronic circuits, in order to advance
the miniaturisation of the microelectronic circuits to be
produced.
[0003] With the increased resolution, the demands increase on the
positioning precision of the employed optical elements. The latter
must be maintained as far as possible in the installed state over
the whole service life in order to avoid image errors. Furthermore,
there is in this regard the requirement to achieve a dynamic
behaviour of the employed optical system that is as favourable as
possible, with resonant frequencies that are as high as
possible.
[0004] For a large number of optical applications, but especially
in the field of the aforementioned microlithography, objective
barrels consisting of a plurality of optical modules are employed.
The individual optical modules include as a rule an optical
element, such as a lens etc., which is supported by means of one or
more supporting devices at the inner circumference of a holder.
Depending on the conditions of the optical system, i.e. amongst
other things the optical properties of the objective that are to be
achieved, it is often necessary to position several optical
elements closely adjacent one another.
[0005] In the case of objectives with one lens per optical module,
such as are known for example from EP 1 168 028 A1, a close
arrangement of the lenses is achieved in which the supporting
devices with the lenses located therein are arranged in a nested
manner. This leads on the one hand to comparatively elongated lens
barrels. This is due to the tact that the holder of each optical
module must have a certain extension in the direction of the
optical axis of the objective barrel in order to have sufficient
strength and rigidity. Furthermore, the spacing requirement for the
lenses together with the axial extension of the holder may give
rise to very long supporting devices. These are disadvantageous
particularly from the rigidity standpoint, since this is
accompanied by an undesirably low rigidity and consequently
undesirably low resonant frequencies.
[0006] There is proposed in document US 2002/0163741 A1 an
arrangement of optical modules stacked one upon the other, wherein
there is provided in the given holder a recess for the
accommodation of a part of the supporting devices of the optical
module lying thereunder. A reduction in the length of the
supporting devices can certainly be achieved by this means. The
recesses, however, in turn cause a weakening and reduction in
rigidity of the given holder, and this has to be compensated for,
possibly at high cost. On the other hand, this solution is suitable
only for certain designs of the supporting devices.
[0007] The object of the present invention, therefore, is to make
available an optical module of the type mentioned at the outset,
which does not have the aforementioned drawbacks or at least only
to a lesser extent and guarantees, in particular, a space-saving,
rigid arrangement.
BRIEF SUMMARY OF THE INVENTION
[0008] The present invention solves this problem with the features
of claim 1.
[0009] Underlying the present invention is the cognition that,
especially in the case of an arrangement of a plurality of optical
elements lying close beside one another, a space-saving, rigid
arrangement can be achieved if, at the first holding device, at
least two optical elements are supported by, in each case, at least
one respective first or second supporting device. The supporting
devices each define respectively a first and second annular
circumferential assembly space in the circumferential direction of
the holding device. They are arranged in such a way that the first
assembly space intersects the second assembly space.
[0010] As a result of this arrangement of supporting devices
interlaced into one another or interlocked with one another,
respectively, it is possible for the dimension of the common
holding device for both to be kept short in the direction of their
central axis. This dimension may possibly even be smaller than in
the case of the support of a single optical element by a comparable
holding device, since the mounting of further supporting devices
may even contribute towards increasing the rigidity of the optical
module.
[0011] As a result of this compact arrangement, furthermore, the
supporting devices can also be kept as short as possible. This has
an advantageous effect on the mass and the rigidity of the
supporting devices and thus on the resonant frequencies of the
arrangement.
[0012] In other words, compared with the known optical modules, it
is possible, with identical rigidity of the arrangement, to achieve
a significant reduction in the required assembly space and thus in
the mass of the optical module, as a result of which an
advantageous increase in the resonant frequency is obtained.
[0013] An object of the present invention, therefore, is an optical
module for a lens, in particular for a microlithographic apparatus,
which includes a first holding device with an inner circumference
which extends in a first circumferential direction, and at least
one first supporting device for supporting a first optical element
and being connected to the inner circumference of the first holding
device. An annular circumferential first assembly space is defined
by displacing the first supporting device once in a revolving
manner along the first circumferential direction. Furthermore, at
least one second supporting device is provided for supporting a
second optical element and being fixed at the inner circumference
of the first holding device. An annular circumferential second
assembly space is defined by displacing the second supporting
device once in a revolving manner along the first circumferential
direction. The first assembly space intersects the second assembly
space.
[0014] A further object of the present invention is an objective
barrel, in particular for a microlithographic apparatus, with an
optical module according to the invention.
[0015] Finally, a further subject-matter of the present invention
is a microlithographic apparatus for the transfer of a pattern
formed on a mask onto a substrate using an optical projection
system which includes an objective barrel according to the
invention.
[0016] Further preferred embodiments of the invention will become
apparent from the dependent claims and the following description of
a preferred example of embodiment, which makes reference to the
appended drawings.
BRIEF DESCRIPTION OF THE DRAWINGS
[0017] FIG. 1 is a schematic sectional representation of a
preferred embodiment of the optical module according to the
invention
[0018] FIG. 2 is a schematic plan view of the optical module from
FIG. 1;
[0019] FIG. 3 is a schematic representation of a preferred
embodiment of the microlithographic apparatus according to the
invention with an objective barrel according to the invention;
[0020] FIG. 4 is a schematic sectional representation of a further
preferred embodiment of the optical module according to the
invention;
[0021] FIG. 5 is a schematic plan view of the optical module from
FIG. 4;
[0022] FIG. 6 is a schematic sectional representation of a further
preferred embodiment of the optical module according to the
invention;
[0023] FIG. 7 is a schematic plan view of the optical module from
FIG. 6.
DETAILED DESCRIPTION OF THE INVENTION
First Embodiment
[0024] A first preferred embodiment of the optical module 1
according to the invention for an objective for microlithography is
first described with reference to FIGS. 1 and 2, FIG. 1 shows a
diagrammatic sectional representation of the optical module 1,
whilst FIG. 2 shows a schematic plan view of optical module 1 in
the direction of module axis 1.1 of optical module 1. FIG. 1 is a
cross-section along section line I-I from FIG. 2.
[0025] Optical module 1 includes a first holding device in the form
of an annular holder 2, which is often referred to as a flange.
This holder 2 has an inner circumference 2.1, which extends in a
first circumferential direction 2.2. Three first supporting devices
in the form of first bipods 3.1 (shown in very simplified form) are
fixed with one end at the inner circumference 2.1 of the holder 2.
First bipods 3.1 are connected with their other end to a first
mounting device in the form of a first mounting 4.1. This first
mounting 4.1 in turn carries a first optical element in the form of
a lens 5.1. Accordingly, the first bipods 3.1 thus support the
first lens 5.1 via the first mounting 4.1 on the first holder 2. In
other words, the first lens 5.1 is thus fixed via the first
mounting 4.1 and the first bipods 3.1 on the first holder 2.
[0026] The first bipods 3.1 each have a first leg 3.11 and a second
leg 3.12. The latter are arranged inclined towards one another in
their common plane, so that the respective bipod 3.1 has a central
axis 3.13. the first bipods 3.1, furthermore, are distributed
uniformly at the first circumference 2.1 of the holder 2, so that
an angle of 120.degree. is enclosed in each case between their
first central axes 3.13 in the first plane, which lies parallel to
the drawing plane of FIG. 2 and in which the circumferential
direction 2.2 lies.
[0027] The first bipods 3.1 together form so-called parallel
kinematics in the manner of a hexapod, by means of which the first
mounting 4.1 and thus the first lens 5.1 are positioned spatially
with respect to the holder 2. The first leg 3.11 and the second leg
3.12 are each fixed to holder 2 via a flexure 3.14, 3.15 and 3.16
mobile in the manner of a ball-and-socket joint. Each first bipod
3.1 therefore constrains two spatial degrees of freedom, so that a
statically determined bearing of the first lens 5.1 on the holder 2
is brought about in the form of an isostatic bearing.
[0028] Whereas the flexure 3.14 on the mounting side is fixed
directly to the first mounting 4.1, the two flexures 3.15 and 3.16
on the holder side are fixed to a first connection element 3.17.
The first connection element 3.17 is in turn fixed detachably on a
first contact element in the form of a first shoulder 2.3 at the
inner circumference 2.1 of the holder 2. The first shoulders 2.3
are all located in a first connecting plane which runs
perpendicular to the module axis 1.1. An arbitrary connection, for
example a clamping joint or a screw joint, can be provided for the
connection of the first connection element 3.17 to the holder 2 and
the bipeds 3.1 to the mounting.
[0029] The first shoulder 2.3 extends in the circumferential
direction over roughly the same angular range as the first
connection element 3.17. Thanks to the detachable connection
between the respective connection element 3.17 and the respective
first shoulder 2.3, it is possible to rotate the lens 5.1 about the
module axis 1.1 and thus to compensate for image errors. It is also
possible by this means to dismantle the lens 5.1 from the holder 2
and, if need be, to subject it to reworking, for example by means
of an ion beam. As a result, an adjustment facility about the
module axis 1.1 may then become unnecessary, as the case may
be.
[0030] In order to be able to position the first lens 5.1 with
respect to the holder 2, the first leg 3.11 and the second leg 3.12
are length-adjustable. In addition, or as an alternative, the
position or spacing of at least one mobile part of the respective
first leg 3.11 or 3.12 can be adjusted with respect to the holder
2. Finally, the axial distance between the first connection element
3.17 and the first shoulder 2.3 can be adjusted in the direction of
the module axis 1.1. In any case, these adjustments can take place
both by means of passive elements (e.g. setscrews etc.) and by
means of controllable active elements (eg. piezoelements etc.). It
goes without saying, however, that with other variants of the
invention the supporting devices can, if need be, also be designed
non-adjustable at least in part.
[0031] The first lens 5.1 is fixed in the first mounting 4.1 in any
suitable way in a positive connection and/or a frictional
connection and/or and adhesive connection. Thus, for example, it
can be glued, clamped etc. The first mounting 4.1 forms a precisely
defined interface between the first lens 5.1 and the first bipeds
3.1. It goes without saying, however, that with other variants of
the invention provision can also be made such that the first bipods
are fixed without the interposition of a mounting or the like on
the lens.
[0032] As can also be seen from FIGS. 1 and 2, the optical module 1
also includes three second supporting devices in the form of second
bipods 3.2 (also shown in very simplified form). The latter, like
the first bipods 3.1, are each fixed with one end to the inner
circumference 2.1 of the holder 2 by means of a second connection
element 3.27. The second connection element 3.27 is again fixed
detachably on a second shoulder 2.4 at the inner circumference 2.1
of the holder 2. The second shoulders 2.4 are all located in a
second connecting plane which also runs normal to the module axis
1.1. The second connecting plane lies at a first distance below the
first connecting plane.
[0033] With their ether end, the second bipods 3.2 are connected to
a second mounting device in the form of a second mounting 4.2. This
second mounting 4.2 in turn carries a second optical element in the
form of a second lens 5.2. Accordingly, the second bipods 3.2 thus
support the second lens 5.2 via the second mounting 4.2 on the
first holder 2. In other words, the second lens 5.2 is thus fixed
via the second mounting 4.2 and the second bipods 3.2 to the first
holder 2.
[0034] The second bipeds 3.2 are designed like the first bipeds 3.1
and are fixed to the holder 2 and the second mounting 4.2
respectively, so that in this regard reference is made to the
explanations given above. In particular, the second bipeds 3.2 also
form so-called parallel kinematics in the manner of a hexapod, by
means of which the second mounting 4.2 and thus the second lens 5.2
can be actively positioned spatially with respect to the holder
2.
[0035] Finally, the optical module 1 also includes three third
supporting devices in the form of third bipods 3.3 (also shown in
very simplified form). The latter, like the first bipods 3.1, are
fixed with one end to the inner circumference 2.1 of the holder 2
by means of a third connection element 3.37. The respective further
connection element 3.37 is fixed detachably on a third shoulder 2.5
at the inner circumference 2.1 of the holder 2. The third shoulders
2.5, like the first shoulders 2.3, are all located in the first
connecting plane which runs normal to the module axis 1.1.
[0036] With their other end, the third bipeds 3.3 are connected to
a third mounting device in the form of a third mounting 4.3. This
third mounting 4.3 in turn carries a third optical element in the
form of a third lens 5.3. Accordingly, the third bipeds 3.3 thus
support the third lens 5.3 via the third mounting 4.3 on the first
holder 2. In other words, the third lens 5.2 is thus fixed via the
third mounting 4.3 and the third bipeds 3.3 to the first holder
2.
[0037] The third bipods 3.3 are designed like the first bipods 3.1
and are fixed to the holder 2 and the third mounting 4.3
respectively, so that in this regard reference is made to the
explanations given above. In particular, the third bipods 3.3 also
form so-called parallel kinematics in the manner of a hexapod, by
means of which the third mounting 4.3 and thus the third lens 5.3
can be actively positioned spatially with respect to the holder
2.
[0038] The first, the second and the third bipods 3.1, 3.2, 3.3 are
arranged in the circumferential direction 2.2 uniformly distributed
at inner circumference 2.1 of the holder 2. With a total number of
S=9 bipods, the central axes of neighbouring bipods 3.1, 3.2 and
3.3 are arranged, with respect to the module axis 1.1 in the first
circumferential direction 2.2, each rotated according to the
following equation through an angle
.alpha. = 360 .degree. S = 360 .degree. 9 = 40 .degree. ( 1 )
##EQU00001##
[0039] It goes without saying, however, that with other variants of
the present invention it is also possible for the supporting
devices not to be distributed uniformly in this way at the
circumference of the holding device. Particularly in the case of
numbers of supporting devices diverging from one another for the
respective optical element, less uniform distributions of the
supporting devices may be provided or necessary.
[0040] The legs 3.11 and 3.12 of the first bipods 3.1 each extend
both in the direction of the module axis 1.1 and radially to the
latter. By displacing one of the first bipods 3.1 once in a
revolving manner at the inner circumference 2.1 of the holder 2
along the first circumferential direction 2.2, therefore, an
annular circumferential the first assembly space is defined, as is
indicated in FIG. 1 by contour 3.18. The first assembly space has a
shape in the manner of the shell of a truncated cone. In the
present example with a circular holder, the first assembly space
3.18 is defined in other words by the toroidal body which arises
when one of the first bipods 3.1 is rotated about the module axis
1.1.
[0041] The legs 3.21 and 3.22 of the second bipods 3.2 each extend
both slightly in the direction of the module axis 1.1 and also
mainly radially to the latter. By displacing one of the second
bipods 3.2 once in a revolving manner at the inner circumference
2.1 of the holder 2 along the first circumferential direction 2.2,
therefore, an annular circumferential second assembly space is also
defined, as is indicated in FIG. 1 by the contour 3.28. The second
assembly space 3.28 also has a shape in the manner of the shell of
a very flat truncated cone. In the present example with a circular
holder, the second assembly space 3.28 is also defined in other
words by the toroidal body which arises when one of the second
bipods 3.2 is rotated about the module axis 1.1.
[0042] The legs 3.31 and 3.32 of the third bipeds 3.3 each extend
both slightly in the direction of the module axis 1.1 and also
mainly radially to the latter. By displacing one of the third
bipods 3.2 once in a revolving manner at the inner circumference
2.1 of the holder 2 along the first circumferential direction 2.2,
therefore, an annular circumferential third assembly space is also
defined, as is indicated in FIG. 1 by contour 3.38. the third
assembly space 3.38 also has a shape in the manner of the shell of
a very flat truncated cone. In the present example with a circular
holder, the third assembly space 3.38 is also defined in other
words by the toroidal body which arises when one of the third
bipods 3.3 is rotated about the module axis 1.1.
[0043] The first bipods 3.1 and the second bipods 3.2 are arranged
interlocked or interlaced in such a way that the first assembly
space 3.18 and the second assembly space 3.28 mutually intersect.
The two assembly spaces 3.18 and 3.28 penetrate one another in a
first penetration region 6.1. In the view of FIG. 2, the first
penetration region 6.1 has an annular contour. the first
penetration region 6.1 lies radially with respect to the module
axis 1.1 roughly in the middle between the holder 2 and the
mountings 4.1 and 4.2.
[0044] The first bipods 3.1 and the third bipods 3.3 are arranged
interlocked or interlaced in such a way that the first assembly
space 3.18 and the third assembly space 3.38 mutually intersect in
the region of the connection elements 3.17 and 3.37 respectively.
They intersect in a first intersection region 6.2. The latter also
has an annular contour in the view of FIG. 2.
[0045] As a result of this design with the penetrating or
intersecting assembly spaces 3.18 and 3.28 or 3.38 respectively, it
is possible to keep the height dimension of the holder 2 short in
the direction of the module axis 1.1, although a plurality of
lenses 5.1 to 5.3 can be held by the holder 2. An assembly-space
and weight reduction can be achieved as a result. The height
dimension may, as the case may be, even be smaller than in the case
where a single optical element is held by a comparable holding
device, since the connection of a plurality of supporting devices
may even contribute towards an increase in the rigidity of the
optical module.
[0046] As a result of this compact arrangement, moreover, the
bipods can also be kept as short as possible. This has an
advantageous effect on the mass and rigidity of the supporting
devices and thus on the resonant frequencies of the arrangement. In
other words, in contrast with known optical modules, it is possible
with the design of the optical module 1 according to the invention,
with identical rigidity of the arrangement, to achieve a noticeable
reduction in the required assembly space and thus in the mass of
the optical module 1, as a result of which an advantageous increase
in the resonant frequency of the overall arrangement is
obtained.
[0047] The arrangement of the first and the third shoulders 2.3 and
2.5 in a common plane not only reduces the required assembly space.
In fact, the production of the mounting is also thereby
facilitated, since it can be produced for example from a single
circumferential annular shoulder at the inner circumference
2.1.
[0048] The uniform distribution of the bipods 3.1, 3.2, 3.3 at the
inner circumference 2.1 of the holder 2 described above ensures,
together with their fixing at the shoulders 2.3, 2.4 and 2.5
respectively, which extend only to a limited extent in the
circumferential direction 2.2, that the lenses 5.1, 5.2 and 5.3 can
be assembled individually. Furthermore, it is possible to assemble
or dismantle the lower first lens 5.1 and the upper third lens 5.3
independently of one another, without one of the other lenses
having to be loosened or even removed. Only for the assembly of the
middle, second lens 5.2 is it necessary, of course, to remove the
first lens 5.1 and the third lens 5.3, respectively.
[0049] It goes without saying, however, that in other variants of
the invention the separate assembly capability of the optical
elements can also be ensured in any other way by a suitable design
and arrangement of the connection regions between the supporting
devices and the holding device.
[0050] Furthermore, it goes without saying that in other variants
of the present invention the supporting devices can also be
designed differently and be provided in a different number per
optical element. In particular, it may be sufficient, with a
suitable design, for only a single supporting device to be provided
per optical element. Said supporting devices can then extend, as
the case may be, over a correspondingly limited circumferential
segment, in order to ensure the interlocked or interlaced
arrangement with the intersection of the assembly spaces.
Alternatively, such individual supporting devices can also extend
over the whole circumference of the holding device. Here, suitable
perforations for the other supporting device or other supporting
devices must then be provided in order to ensure the interlocked or
interlaced arrangement with the intersection of the assembly
spaces.
[0051] FIG. 3 shows a diagrammatic representation of a preferred
embodiment of microlithographic apparatus 7 according to invention.
Microlithographic apparatus 7 includes an optical projection system
8 with a lighting system 9, a mask 10 and an objective barrel 11
with an optical objective axis 11.1. The lighting system 9
illuminates a mask 10. On the mask 10 is a pattern which is
projected via the objective barrel 11 onto a substrate 12, for
example a wafer.
[0052] The objective barrel 11 includes a series of barrel modules
11.2 with refractive, reflective and/or diffractive optical
elements such as lenses, mirrors, gratings or the like. The barrel
module 11.2 includes the optical module 1 from FIGS. 1 and 2. the
optical module 1 is fixed to a carrier structure 11.21 of the
barrel module 11.2.
Second Embodiment
[0053] FIGS. 4 and 5 show a schematic representation of a further,
second preferred embodiment of the optical module 101 according to
the invention for an objective for microlithography. FIG. 4 shows a
cross-section along the section line IV-IV from FIG. 5. This
embodiment does not differ in its basic mode of operation and its
basic structure from that shown in FIGS. 1 and 2, so that the
differences will mainly be dealt with here.
[0054] the optical module 101 includes a first holding device in
the form of an annular holder 102. This holder 102 has an inner
circumference 102.1, which extends in a first circumferential
direction 102.2. Three first supporting devices in the form of
first bipods 103.1 (shown in very simplified form) are fixed with
one end to the inner circumference 102.2 of the holder 102. the
first bipods 103.1 are connected with their other end to a first
mounting device in the form of a first mounting 104.1. This first
mounting 104.1 in turn carries a first optical element in the form
of a lens 105.1.
[0055] The first bipods 103.1 each have a first leg 103.11 and a
second leg 103.12. The latter are arranged inclined towards one
another in their common plane, so that the respective bipod 103.1
has a central axis 103.13. The first bipods 103.1 are distributed
uniformly at the first circumference 102.1 of the holder 102, so
that an angle of 120.degree. is enclosed in each case between their
first central axes 103.13 in the first plane, which is parallel to
the drawing plane of FIG. 5 and in which circumferential direction
102.2 lies.
[0056] The first bipods 103.1 are designed like the first bipods
103.1 from FIGS. 1 and 2 and are fixed to the holder 102 and the
first mounting 104.1 respectively. In particular, the first bipods
103.1 are again fixed by means of first connection elements 103.17
detachably on a first contact element in the form of a first
shoulder 102.3 at the inner circumference 102.1 of the holder 102.
The first shoulders 102.3 are all located in a first connecting
plane which runs perpendicular to the module axis 1.1.
[0057] Like the first bipods 103.1 from FIGS. 1 and 2, the first
bipods 103.1 form together parallel kinematics in the manner of a
hexapod, by means of which the first mounting 104.1 and thus the
first lens 105.1 can be actively positioned spatially with respect
to the holder 102 and is mounted isostatically.
[0058] As can be seen for FIGS. 4 and 5, furthermore, the optical
module 101 also includes three second supporting devices in the
form of the second bipods 103.2 (also shown in very simplified
form). The latter, like the first bipods 103.1, are each fixed with
one end to the inner circumference 102.1 of the holder 103 by means
of a second connection element 103.27. The second connection
element 103.27 is again fixed detachably on a second shoulder 102.4
at the inner circumference 102.1 of the holder 102. The second
shoulders 102.4 are all also located in the first connecting
plane.
[0059] With their other end, the second bipods 103.2 are connected
to a second mounting device in the form of a second mounting 104.2.
This second mounting 104.2 in turn carries a second optical element
in the form of a second lens 105.2. The second bipods 103.2 are
designed like the first bipods 103.1 and are fixed to the holder
102 and the second mounting 104.2 respectively, so that in this
regard reference is made to the explanations given above. In
particular, the second bipods 103.2 also form so-called parallel
kinematics in the manner of a hexapod, by means of which the second
mounting 104.2 and thus the second lens 105.2 can be actively
positioned spatially with respect to the holder 102.
[0060] The second bipods 103.2, furthermore, are also distributed
uniformly at the first circumference 102.1 of the holder 102, so
that an angle of 120.degree. is enclosed in each case between their
second central axes 103.23 in the first plane, which is parallel to
the drawing plane of FIG. 5 and in which the circumferential
direction 2.2 lies.
[0061] The first and second bipods 103.1, 103.2, furthermore, are
arranged distributed in the circumferential direction 102.2 at the
inner circumference 102.1 of the holder 102, in such a way that the
central axes of neighbouring bipods 103.1, 103.2 are each arranged
rotated through an angle .alpha.=40.degree. with respect to the
module axis 101.1 in the first circumferential direction 102.2.
[0062] The legs 103.11 and 103.12 of the first bipods 103.1 each
extend both in the direction of the module axis 101.1 and radially
to the latter. By displacing one of the first bipods 103.1 once in
a revolving manner at the inner circumference 102.1 of the holder
102 along the first circumferential direction 102.2, therefore, an
annular circumferential first assembly space is defined, as is
indicated in FIG. 4 by the contour 103.18. The first assembly space
has a shape in the manner of the shell of a truncated cone. In the
present example with a circular holder, the first assembly space
103.18 is defined in other words by the toroidal body which arises
when one of the first bipods 103.1 is rotated about the module axis
101.1.
[0063] The legs 103.21 and 103.22 of the second bipods 103.2 each
extend both slightly in the direction of the module axis 101.1 and
radially to the latter. By displacing one of the second bipods
103.2 once in a revolving manner at the inner circumference 102.1
of the holder 102 along first circumferential direction 102.2,
therefore, an annular circumferential second assembly space is also
defined, as is indicated in FIG. 4 by the contour 103.28. The
second assembly space 103.28 also has a shape in the manner of the
shell of a truncated cone. In the present example with a circular
holder, the second assembly space 103.28 is also defined in other
words by the toroidal body which arises when one of the second
bipods 103.2 is rotated about the module axis 101.1.
[0064] Apart from the number of lenses carried by the optical
module 101, the essential difference from the embodiment shown in
FIGS. 1 and 2 consists in fact that the first bipods 103.1 and the
second bipods 103.2 are orientated in such a way that the first
lens 105.1 is held above the first connecting plane, whilst the
second lens 105.2 is held below the first connecting plane.
[0065] The first bipods 103.1 and the second bipods 103.2 are also
arranged interlocked or interlaced in such a way that the first
assembly space 103.18 and the second assembly space 103.28 mutually
intersect. The first intersection region 106.1 has an annular
contour in the view of FIG. 5.
[0066] As a result of this design with intersecting assembly spaces
103.18 and 103.28, it is possible to keep the height dimension of
the holder 102 short in the direction of the module axis 101.1,
although a plurality of lenses 105.1 to 105.3 are held by the
holder 102. An assembly-space and weight reduction as well as an
increase in the resonant frequency of the overall arrangement can
be achieved by this means, as already described in detail above. By
the arrangement of the lenses 105.1 and 105.2 respectively above
and below the first connecting plane, it is possible in particular
to achieve a very compact arrangement with very short bipods 103.1
and 103.2.
[0067] The arrangement of the first and third shoulders 102.3 and
102.4 in a common plane again not only reduces the required
assembly space. In fact, the production of the mounting 102 is also
thereby facilitated, since it can be produced for example from a
single circumferential annular shoulder at the inner circumference
102.1.
[0068] the optical module 101 can be used instead of any optical
module, e.g. instead of the optical module 1, in the
microlithographic apparatus from FIG. 3.
Third Embodiment
[0069] FIGS. 6 and 7 show schematic representations of a third
preferred embodiment of the optical module 201 according to the
invention for an objective for microlithography. FIG. 6 is a
cross-section along the section line VI-VI from FIG. 7. This
embodiment does not differ in its basic mode of operation and its
basic structure from that shown in FIGS. 1 and 2, so that the
differences will mainly be dealt with here.
[0070] The optical module 201 includes a first holding device in
the form of an annular holder 202. This holder 202 has an inner
circumference 202.1, which extends in a first circumferential
direction 202.2. Three first supporting devices in the form of
active first bipods 203.1 (shown in very simplified form) are fixed
with one end to the inner circumference 202.2 of the holder 202.
The first bipods 203.1 are connected with their other end directly
to a first optical element in the form of a mirror 205.1.
[0071] The first bipods 203.1 each have a first leg 203.11 and a
second leg 203.12. The latter are arranged inclined towards one
another in their common plane, so that the respective bipod 203.1
has a first central axis 203.13. The first bipods 203.1 are
distributed uniformly at the first circumference 202.1 of the
holder 202, so that an angle of 120.degree. is enclosed in each
case between their first central planes 203.13, which run
perpendicular to the drawing plane of FIG. 7, in the first plane
parallel to the drawing plane of FIG. 7 in which the
circumferential direction 202.2 lies.
[0072] The respective first bipod 203.1 is, as mentioned, connected
directly to the first mirror 205.1, i.e. without an interposed
mounting or the like. For this purpose, the first mirror 205.1 has
three radial projections 205.11, to which the legs 203.11 and
203.12 of the respective first bipod 203.1 are fixed.
[0073] The first bipods 203.1 are in principle designed like the
first bipods 203.1 from FIGS. 1 and 2 and are fixed to the holder
202 and the first mirror 205.1, respectively. In particular, the
first bipods 203.1 are again fixed detachably at the inner
circumference 202.1 of the holder 202 by means of first connection
elements 203.17. The first connection elements 203.17 are all
located in a first connecting plane which runs perpendicular to the
module axis 201.1. The first connection elements 203.7 can be
connected to the holder 202 for example by means of screw joints,
clamping joints or the like acting in the radial direction of the
holder 202.
[0074] Like the first bipods 3.1 shown in FIGS. 1 and 2, the first
bipods 203.1 form together so-called parallel kinematics in the
manner of a hexapod, by means of which the first mirror 205.1 can
be actively positioned spatially with respect to the holder 202 and
is mounted isostatically.
[0075] As can also be seen from FIGS. 6 and 7, the optical module
201 also includes three second supporting devices in the form of
active second bipeds 203.2 (also shown in very simplified form).
The latter, like the first bipods 203.1, are each fixed with one
end at the inner circumference 202.1 of the holder 203 by means of
a second connection element 203.27. The second connection elements
203.27 can be connected detachably to the holder 202, once again
for example by means of screw joints, clamping joints are suchlike
acting in the radial direction of the holder 202. The second
connection elements 203.27 are all located in a second connecting
plane.
[0076] With their other end, the second bipods 203.2 are connected
directly, i.e. without an interposed mounting or the like, to a
second optical element in the form of a second mirror 205.2. For
this purpose, the second mirror 205.2 also has three radial
projections 205.21, to which the legs 203.21 and 203.22 of the
respective second biped 203.2 are fixed.
[0077] The second bipeds 203.2 are designed like the first bipods
203.1 and are fixed to the holder 202 and the second mirror 205.2
respectively, so that in this regard reference is made to the
explanations given above. In particular, the second bipeds 203.2
also form so-called parallel kinematics in the manner of a hexapod,
by means of which the second mirror 205.2 can be actively
positioned spatially with respect to the holder 202.
[0078] Furthermore, the second bipods 203.2 are also uniformly
distributed at the first circumference 202.1 of the holder 202, so
that an angle of 120.degree. is enclosed in each case between their
second central planes 203.23, which run perpendicular to the
drawing plane of FIG. 7, in the first plane parallel to the drawing
plane of FIG. 7, in which the circumferential direction 202.2
lies.
[0079] Furthermore, the first and second bipeds 203.1, 203.2 are
arranged, in the circumferential direction 202.2, uniformly
distributed at inner circumference 202.1 of the holder 202, so that
the central planes of neighbouring bipods 203.1, 203.2 are
arranged, with respect to the module axis 201.1 in the first
circumferential direction 202.2, each rotated according to the
above equation (1) through an angle .alpha.=60'.
[0080] The legs 203.11 and 203.12 of the first bipeds 203.1 each
extend both in the direction of the module axis 201.1 and
tangentially to the first circumferential direction 202.2. By
displacing one of the first bipods 203.1 once in a revolving manner
at the inner circumference 202.1 of the holder 202 along the first
circumferential direction 202.2, therefore, an annular
circumferential first assembly space is defined, as is indicated in
FIG. 6 by the contour 203.18. The first assembly space has a shape
in the manner of the shell of a cylinder. In the present example
with an annular holder, the first assembly space 203.18 is defined
in other words by the toroidal body which arises when one of the
first bipods 203.1 is rotated about the module axis 201.1.
[0081] The legs 203.21 and 203.22 of the second bipods 203.2 each
extend both slightly in the direction of the module axis 201.1 and
tangentially to the first circumferential direction 202.2. By
displacing one of the second bipeds 203.2 once in a revolving
manner at the inner circumference 202.1 of the holder 202 along the
first circumferential direction 202.2, therefore, an annular
circumferential second assembly space is also defined, as is
indicated in FIG. 6 by contour 203.28. The second assembly space
203.28 also has a shape in the manner of the shell of a cylinder.
In the present example with a circular holder, the second assembly
space 203.28 is also defined in other words by the toroidal body
which arises when one of the second bipeds 203.2 is rotated about
the module axis 201.1.
[0082] Apart from the number of mirrors carried by the optical
module 201, an essential difference from the embodiment shown in
FIGS. 1 and 2 consists in fact that the first bipods 203.1 and the
second bipods 203.2 are orientated in such a way that the first
mirror 205.1 is held below the first connecting plane, whilst the
second mirror 205.2 is held above the second connecting plane,
which in turn lies below the first connecting plane.
[0083] A further difference consists in the fact that the first
bipods 203.1 and the second breads 203.2 are orientated in such a
way that a cylinder shell-shaped first assembly space 203.18 and a
cylinder jacket-shaped second assembly space 203.28 coaxial thereto
and of essentially the same diameter are defined. The first bipods
203.1 and the second bipods 203.2 are arranged interlocked or
interlaced in such a way that the first assembly space 203.18 and
the second assembly space 203.28 mutually intersect or penetrate.
The first intersection region 206.1 also has a cylinder
shell-shaped contour. The first assembly space 203.18 and the
second assembly space 203.28 in other words penetrate one another
in such a way that they essentially overlap one another over a wide
section. This produces a particularly space-saving supporting
structure, which also enables the assembly of optical elements of
large diameter into an objective barrel of predetermined internal
diameter.
[0084] As a result of this design with the penetrating assembly
spaces 203.18 and 203.28, it is possible to keep the height
dimension of holder 202 short in the direction of the module axis
201.1 although a plurality of the mirrors 205.1 to 205.3 are held
by the holder 202. An assembly-space and weight reduction as well
as an increase in the resonant frequency of the overall arrangement
can be achieved by this means, as already described in detail
above. By the arrangement of the mirrors 205.1 and 205.2
respectively above and below the assigned connecting plane, it is
possible in particular to achieve a very compact arrangement with
very short bipods 203.1 and 203.2.
[0085] The first mirror 205.1 has a reflecting first face 205.12
and a first through hole 205.13. The same applies to the second
mirror 205.1, which has a reflecting second face 205.22 and a
second through hole 205.23. The mirrors 205.1 and 205.2 are held in
such a way that their reflecting faces 205.12 and 205.22 are facing
towards one another. The through holes 205.13 and 205.23 ensure
that the useful light can first pass through the first perforation
205.13 into the space between the reflecting faces 205.12 and
205.22, is deflected by the reflecting first face 205.12 onto the
second reflecting face 205.22 and from the latter can leave the
space between the reflecting faces 205.12 and 205.22 through the
second through hole 205.23. In this way, it is possible to achieve
a very compact catadioptric arrangement in an extremely narrow
space.
[0086] In the same way as in the second embodiment, the optical
module 201 can be used instead of any optical module, in particular
in place of the optical module 1, in the microlithographic
apparatus from FIG. 3.
[0087] The present invention has been described above solely with
the aid of examples, wherein optical elements of the same kind are
held in a single optical module. It goes without saying, however,
that the present invention can also be used for any combinations of
optical elements of different kinds which are held in a single
optical module.
[0088] The present invention has also been described above solely
with the aid of examples from the area of objectives for
microlithography. It goes without saying, however, that the present
invention can also be used for any other objectives.
* * * * *