Kugler; Jens

Patent Applications and Registrations

Patent applications and USPTO patent grants for Kugler; Jens.The latest application filed is for "support of an optical unit".

Company Profile

12.71.76

Kugler; Jens - Aalen DE
Kugler; Jens - Heubach N/A DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Support Of An Optical Unit App 20220283509 - Pnini; Boaz ; et al.	2022-09-08
Supporting an optical element Grant 11,314,177 - Kugler , et al. April 26, 2	2022-04-26
Projection exposure apparatus for semiconductor lithography Grant 11,281,114 - Kugler , et al. March 22, 2	2022-03-22
Supporting An Optical Element App 20210181644 - Kugler; Jens ; et al.	2021-06-17
Projection Exposure Apparatus For Semiconductor Lithography App 20210080841 - Kugler; Jens ; et al.	2021-03-18
Optical imaging arrangement with actively adjustable metrology support units Grant 10,890,850 - Hembacher , et al. January 12, 2	2021-01-12
Imaging optical system for microlithography Grant 10,754,132 - Rogalsky , et al. A	2020-08-25
Projection exposure apparatus, and method for reducing deformations, resulting from dynamic accelerations, of components of the projection exposure apparatus Grant 10,599,051 - Hembacher , et al.	2020-03-24
Optical imaging arrangement with a piezoelectric device Grant 10,416,570 - Kugler , et al. Sept	2019-09-17
Projection Exposure Apparatus, And Method For Reducing Deformations, Resulting From Dynamic Accelerations, Of Components Of The App 20190219926 - Hembacher; Stefan ; et al.	2019-07-18
Microlithographic projection exposure apparatus and measuring device for a projection lens Grant 10,345,710 - Ehrmann , et al. July 9, 2	2019-07-09
Optical Imaging Arrangement With A Piezoelectric Device App 20190094705 - Kugler; Jens ; et al.	2019-03-28
Optical element module with minimized parasitic loads Grant 10,215,948 - Kugler , et al. Feb	2019-02-26
Optical element unit for exposure processes Grant 10,203,607 - Schwertner , et al. Feb	2019-02-12
Optical module for a microlithography objective holding optical elements with supporting devices located in a non-equidistant manner Grant 10,197,925 - Kugler , et al. Fe	2019-02-05
Optical Module For A Microlithography Objective Holding Optical Elements With Supporting Device Located In Non-equidistant Manner App 20180373007 - Kugler; Jens ; et al.	2018-12-27
Positioning unit and apparatus for adjustment of an optical element Grant 10,133,021 - Weber , et al. November 20, 2	2018-11-20
Optical Imaging Arrangement With Actively Adjustable Metrology Support Units App 20180275527 - Hembacher; Stefan ; et al.	2018-09-27
Optical Projection System App 20180259856 - Rau; Johannes ; et al.	2018-09-13
Optical Imaging Device With Thermal Attenuation App 20180181007 - Gellrich; Bernhard ; et al.	2018-06-28
Optical module for a microlithography objective holding optical elements with supporting device located in non-equidistant manner Grant 9,977,228 - Kugler , et al. May 22, 2	2018-05-22
EUV imaging apparatus Grant 9,904,175 - Kugler , et al. February 27, 2	2018-02-27
Optical projection system Grant 9,891,535 - Rau , et al. February 13, 2	2018-02-13
Support Elements For An Optical Element App 20180024438 - Kugler; Jens ; et al.	2018-01-25
Positioning Unit And Apparatus For Adjustment Of An Optical Element App 20170351047 - Weber; Ulrich ; et al.	2017-12-07
Optical imaging device and method for reducing dynamic fluctuations in pressure difference Grant 9,817,322 - Hembacher , et al. November 14, 2	2017-11-14
Optical imaging device with thermal attenuation Grant 9,810,996 - Gellrich , et al. November 7, 2	2017-11-07
Optical imaging arrangement with simplified manufacture Grant 9,804,500 - Kugler , et al. October 31, 2	2017-10-31
Optical Projection System App 20170219929 - Rau; Johannes ; et al.	2017-08-03
Support elements for an optical element Grant 9,709,895 - Kugler , et al. July 18, 2	2017-07-18
Positioning unit and apparatus for adjustment of an optical element Grant 9,664,873 - Weber , et al. May 30, 2	2017-05-30
Microlithographic Projection Exposure Apparatus And Measuring Device For A Projection Lens App 20170082930 - Ehrmann; Albrecht ; et al.	2017-03-23
Optical projection system Grant 9,557,653 - Rau , et al. January 31, 2	2017-01-31
Exposure apparatus and measuring device for a projection lens Grant 9,436,095 - Ehrmann , et al. September 6, 2	2016-09-06
Optical Imaging Arrangement With Simplified Manufacture App 20160179013 - Kugler; Jens ; et al.	2016-06-23
Optical Imaging Device App 20160147159 - Hembacher; Stefan ; et al.	2016-05-26
Euv Imaging Apparatus App 20160077441 - Kugler; Jens ; et al.	2016-03-17
Replacement Apparatus For An Optical Element App 20160041475 - Kugler; Jens ; et al.	2016-02-11
Positioning Unit And Apparatus For Adjustment Of An Optical Element App 20160041360 - Weber; Ulrich ; et al.	2016-02-11
Optical arrangement in a microlithographic projection exposure apparatus Grant 9,250,417 - Schaffer , et al. February 2, 2	2016-02-02
Optical Projection System App 20150323873 - Rau; Johannes ; et al.	2015-11-12
Support Elements For An Optical Element App 20150316853 - Kugler; Jens ; et al.	2015-11-05
Optical module with a measuring device Grant 9,175,948 - Schoeppach , et al. November 3, 2	2015-11-03
Optical projection system Grant 9,104,016 - Rau , et al. August 11, 2	2015-08-11
Replacement apparatus for an optical element Grant 9,081,296 - Kugler , et al. July 14, 2	2015-07-14
Positioning unit and apparatus for adjustment of an optical element Grant 9,075,174 - Weber , et al. July 7, 2	2015-07-07
Optical Element Unit For Exposure Processes App 20150168846 - Schwertner; Tilman ; et al.	2015-06-18
Lithography Apparatus With Restricted Movement Relative To Floor And Related Method App 20150168853 - Schumacher; Mathias ; et al.	2015-06-18
Optical element unit for exposure processes having sealing element Grant 9,046,795 - Schwertner , et al. June 2, 2	2015-06-02
Holding Device for an Optical Element in an Objective App 20150138520 - Gellrich; Bernhard ; et al.	2015-05-21
Optical Imaging Device With Thermal Attenuation App 20150109591 - Gellrich; Bernhard ; et al.	2015-04-23
Support elements for an optical element Grant 8,988,654 - Kugler , et al. March 24, 2	2015-03-24
Replacement Apparatus For An Optical Element App 20150070789 - Kugler; Jens ; et al.	2015-03-12
Positioning Unit And Apparatus For Adjustment Of An Optical Element App 20140368933 - Weber; Ulrich ; et al.	2014-12-18
Replacement apparatus for an optical element Grant 8,902,519 - Kugler , et al. December 2, 2	2014-12-02
Optical imaging device with thermal attenuation Grant 8,902,401 - Gellrich , et al. December 2, 2	2014-12-02
Holding device for an optical element in an objective Grant 8,854,602 - Gellrich , et al. October 7, 2	2014-10-07
Optical Module For A Microlithography Objective Holding And Supporting Devices App 20140268381 - Kugler; Jens ; et al.	2014-09-18
Optical Module For An Objective App 20140254036 - Kugler; Jens ; et al.	2014-09-11
Positioning unit and apparatus for adjustment of an optical element Grant 8,760,777 - Weber , et al. June 24, 2	2014-06-24
Optical Module With A Measuring Device App 20140125995 - Schoeppach; Armin ; et al.	2014-05-08
Optical module for a microlithography objective including holding and supporting devices Grant 8,711,331 - Kugler , et al. April 29, 2	2014-04-29
Protection module for EUV lithography apparatus, and EUV lithography apparatus Grant 8,698,999 - Ehm , et al. April 15, 2	2014-04-15
Optical system with an exchangeable, manipulable correction arrangement for reducing image aberrations Grant 8,659,745 - Limbach , et al. February 25, 2	2014-02-25
Lithography Apparatus And Method App 20140021324 - Schumacher; Mathias ; et al.	2014-01-23
Positioning Unit And Apparatus For Adjustment Of An Optical Element App 20130286490 - Weber; Ulrich ; et al.	2013-10-31
Replacement Apparatus For An Optical Element App 20130279029 - Kugler; Jens ; et al.	2013-10-24
Optical System With An Exchangeable, Manipulable Correction Arrangement For Reducing Image Aberrations App 20130278911 - Limbach; Guido ; et al.	2013-10-24
Projection objective for microlithography Grant 8,553,202 - Kugler , et al. October 8, 2	2013-10-08
Optical system with an exchangeable, manipulable correction arrangement for reducing image aberrations Grant 8,542,346 - Limbach , et al. September 24, 2	2013-09-24
Imaging Optical System for Microlithography App 20130188246 - Rogalsky; Olaf ; et al.	2013-07-25
Positioning unit and alignment device for an optical element Grant 8,493,674 - Kugler , et al. July 23, 2	2013-07-23
Replacement apparatus for an optical element Grant 8,488,261 - Kugler , et al. July 16, 2	2013-07-16
Euv Collector Mirror Shell Of An Euv Collector For Euv Lithography App 20130176614 - Anderl; Willi ; et al.	2013-07-11
Positioning Unit And Alignment Device For An Optical Element App 20130135760 - Weber; Ulrich ; et al.	2013-05-30
Exposure Apparatus And Measuring Device For A Projection Lens App 20130120723 - Ehrmann; Albrecht ; et al.	2013-05-16
Optical Imaging Device With Thermal Attenuation App 20130114057 - Gellrich; Bernhard ; et al.	2013-05-09
Optical Element Module With Minimized Parasitic Loads App 20130100547 - Kugler; Jens ; et al.	2013-04-25
Positioning unit and alignment device for an optical element Grant 8,416,515 - Weber , et al. April 9, 2	2013-04-09
Optical Projection System App 20130044304 - Rau; Johannes ; et al.	2013-02-21
Optical imaging device with thermal attenuation Grant 8,363,206 - Gellrich , et al. January 29, 2	2013-01-29
Optical element module with minimized parasitic loads Grant 8,351,139 - Kugler , et al. January 8, 2	2013-01-08
Exposure apparatus and measuring device for a projection lens Grant 8,330,935 - Ehrmann , et al. December 11, 2	2012-12-11
Optical Arrangement In A Microlithographic Projection Exposure Apparatus App 20120300183 - Schaffer; Dirk ; et al.	2012-11-29
Optical projection system Grant 8,300,210 - Rau , et al. October 30, 2	2012-10-30
Support Elements For An Optical Element App 20120067833 - Kugler; Jens ; et al.	2012-03-22
Optical Imaging Device And Method For Reducing Dynamic Fluctuations In Pressure Difference App 20120026479 - Hembacher; Stefan ; et al.	2012-02-02
Positioning Unit And Alignment Device For An Optical Element App 20120019798 - Weber; Ulrich ; et al.	2012-01-26
Replacement Apparatus For An Optical Element App 20110255181 - Kugler; Jens ; et al.	2011-10-20
Positioning unit and alignment device for an optical element Grant 8,035,903 - Weber , et al. October 11, 2	2011-10-11
Optical imaging device and method for reducing dynamic fluctuations in pressure difference Grant 8,027,023 - Hembacher , et al. September 27, 2	2011-09-27
Protection Module For Euv Lithography Apparatus, And Euv Lithography Apparatus App 20110216298 - EHM; Dirk Heinrich ; et al.	2011-09-08
Replacement apparatus for an optical element Grant 7,995,296 - Kugler , et al. August 9, 2	2011-08-09
Optical element module Grant 7,986,472 - Kugler , et al. July 26, 2	2011-07-26
Replacement Apparatus For An Optical Element App 20100271716 - Kugler; Jens ; et al.	2010-10-28
Positioning Unit And Alignment Device For An Optical Element App 20100245847 - Weber; Ulrich ; et al.	2010-09-30
Optical Element Module With Minimized Parasitic Loads App 20100214675 - Kugler; Jens ; et al.	2010-08-26
Projection Objective For Microlithography App 20100201964 - Kugler; Jens ; et al.	2010-08-12
Replacement apparatus for an optical element Grant 7,768,723 - Kugler , et al. August 3, 2	2010-08-03
Reflecting optical element with eccentric optical passageway Grant 7,760,327 - Scherle , et al. July 20, 2	2010-07-20
Positioning unit and alignment device for an optical element Grant 7,738,193 - Weber , et al. June 15, 2	2010-06-15
Exposure Apparatus And Measuring Device For A Projection Lens App 20100141912 - Ehrmann; Albrecht ; et al.	2010-06-10
Optical System With An Exchangeable, Manipulable Correction Arrangement For Reducing Image Aberrations App 20090244509 - Limbach; Guido ; et al.	2009-10-01
Optical Device With Stiff Housing App 20090219497 - Schoeppach; Armin ; et al.	2009-09-03
Method of manufacturing an optical component Grant 7,581,305 - Geuppert , et al. September 1, 2	2009-09-01
Optical Projection System App 20090174874 - Rau; Johannes ; et al.	2009-07-09
Replacement Apparatus for an Optical Element App 20090168207 - Kugler; Jens ; et al.	2009-07-02
Optical element unit for exposure processes Grant 7,545,483 - Gellrich , et al. June 9, 2	2009-06-09
Optical Imaging Device With Thermal Attenuation App 20090135385 - Gellrich; Bernhard ; et al.	2009-05-28
Replacement apparatus for an optical element Grant 7,515,363 - Kugler , et al. April 7, 2	2009-04-07
Support device for positioning an optical element Grant 7,515,359 - Kugler , et al. April 7, 2	2009-04-07
Microlithographic Projection Exposure Apparatus And Measuring Device For A Projection Lens App 20080309894 - Ehrmann; Albrecht ; et al.	2008-12-18
Optical Element Unit For Exposure Processes App 20080225247 - Schwertner; Tilman ; et al.	2008-09-18
Optical Module for an Objective App 20080198352 - Kugler; Jens ; et al.	2008-08-21
Optical element unit for exposure processes App 20080192215 - Gellrich; Bernhard ; et al.	2008-08-14
Optical imaging device App 20080186467 - Hembacher; Stefan ; et al.	2008-08-07
Optical imaging device App 20080013063 - Hembacher; Stefan ; et al.	2008-01-17
Holding Device for an Optical Element in an Objective App 20080002170 - Gellrich; Bernhard ; et al.	2008-01-03
Replacement apparatus for an optical element App 20070297074 - Kugler; Jens ; et al.	2007-12-27
Support Device for Positioning an Optical Element App 20070216888 - Kugler; Jens ; et al.	2007-09-20
Replacement apparatus for an optical element Grant 7,265,917 - Kugler , et al. September 4, 2	2007-09-04
Optical element module App 20070146906 - Kugler; Jens ; et al.	2007-06-28
Microlithographic projection exposure apparatus and method for introducing an immersion liquid into an immersion space App 20070132969 - Gellrich; Bernhard ; et al.	2007-06-14
Microlithographic Projection Exposure Apparatus And Measuring Device For A Projection Lens App 20070070316 - Ehrmann; Albrecht ; et al.	2007-03-29
Reflecting optical element with eccentric optical passageway App 20060262704 - Scherle; Hans-Jurgen ; et al.	2006-11-23
Lens system, in particular a projection lens system for semiconductor lithography Grant 7,061,698 - Osterried , et al. June 13, 2	2006-06-13
Projection lens and microlithographic projection exposure apparatus App 20050264786 - Brunotte, Martin ; et al.	2005-12-01
Method of manufacturing an optical component and optical system using the same App 20050223539 - Geuppert, Bernhard ; et al.	2005-10-13
Projection Lens And Microlithographic Projection Exposure Apparatus App 20050134967 - Brunotte, Martin ; et al.	2005-06-23
Replacement apparatus for an optical element App 20050134972 - Kugler, Jens ; et al.	2005-06-23
Projection lens and microlithographic projection exposure apparatus Grant 6,879,379 - Brunotte , et al. April 12, 2	2005-04-12
Projection lens and microlithographic projection exposure apparatus App 20040150806 - Brunotte, Martin ; et al.	2004-08-05
Mount for an optical element in an optical imaging device Grant 6,744,574 - Weber , et al. June 1, 2	2004-06-01
Mount for an optical element in an optical imaging device App 20030058551 - Weber, Ulrich ; et al.	2003-03-27
Lens system, in particular a projection lens system for semiconductor lithography App 20020167740 - Osterried, Karlfrid ; et al.	2002-11-14