Kwan; Yim-Bun Patrick

Patent Applications and Registrations

Patent applications and USPTO patent grants for Kwan; Yim-Bun Patrick.The latest application filed is for "compensation of creep effects in an imaging device".

Company Profile

6.83.86

Kwan; Yim-Bun Patrick - Oberkochen DE
Kwan; Yim-Bun-Patrick - Aalen DE
Kwan; Yim Bun Patrick - Munich DE
Kwan, Yim Bun Patrick - Eindhoven NL

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Compensation Of Creep Effects In An Imaging Device App 20210405359 - Knauf; Eylem Bektas ; et al.	2021-12-30
Optical Imaging Arrangement With A Piezoelectric Device App 20200363628 - Kwan; Yim-Bun Patrick ; et al.	2020-11-19
Optical imaging arrangement with a piezoelectric device Grant 10,732,402 - Kwan , et al.	2020-08-04
EUV exposure apparatus with reflective elements having reduced influence of temperature variation Grant 10,684,551 - Baer , et al.	2020-06-16
Euv Exposure Apparatus With Reflective Elements Having Reduced Influence Of Temperature Variation App 20190310555 - Baer; Norman ; et al.	2019-10-10
EUV exposure apparatus with reflective elements having reduced influence of temperature variation Grant 10,317,802 - Baer , et al.	2019-06-11
Optical module for a microlithography objective holding optical elements with supporting devices located in a non-equidistant manner Grant 10,197,925 - Kugler , et al. Fe	2019-02-05
Optical apparatus with adjustable action of force on an optical module Grant 10,175,581 - Kwan J	2019-01-08
Optical Module For A Microlithography Objective Holding Optical Elements With Supporting Device Located In Non-equidistant Manner App 20180373007 - Kugler; Jens ; et al.	2018-12-27
Diaphragm changing device Grant 10,139,733 - Bieg , et al. Nov	2018-11-27
Projection exposure apparatus with near-field manipulator Grant 10,108,094 - Deufel , et al. October 23, 2	2018-10-23
Euv Exposure Apparatus With Reflective Elements Having Reduced Influence Of Temperature Variation App 20180299784 - Baer; Norman ; et al.	2018-10-18
Vibration-compensated optical system, lithography apparatus and method Grant 10,095,120 - Kwan , et al. October 9, 2	2018-10-09
Optical Apparatus For Use In Photolithography App 20180275526 - Kwan; Yim-Bun Patrick ; et al.	2018-09-27
Method And Device For Monitoring Multiple Mirror Arrays In An Illumination System Of A Microlithographic Projection Exposure Apparatus App 20180246415 - Xalter; Stefan ; et al.	2018-08-30
EUV exposure apparatus with reflective elements having reduced influence of temperature variation Grant 10,031,423 - Baer , et al. July 24, 2	2018-07-24
Optical Imaging Arrangement With A Piezoelectric Device App 20180196253 - Kwan; Yim-Bun Patrick ; et al.	2018-07-12
Optical module for a microlithography objective holding optical elements with supporting device located in non-equidistant manner Grant 9,977,228 - Kugler , et al. May 22, 2	2018-05-22
Optical imaging arrangement with multiple metrology support units Grant 9,976,931 - Kwan , et al. May 22, 2	2018-05-22
Optical Apparatus With Adjustable Action Of Force On An Optical Module App 20180129138 - Kwan; Yim-Bun Patrick	2018-05-10
Optical apparatus for use in photolithography Grant 9,933,707 - Kwan , et al. April 3, 2	2018-04-03
Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus Grant 9,897,925 - Xalter , et al. February 20, 2	2018-02-20
Optical imaging arrangement with multiple metrology support units Grant 9,891,534 - Kwan February 13, 2	2018-02-13
Method for controlling a motion of optical elements in lithography systems Grant 9,829,808 - Kwan , et al. November 28, 2	2017-11-28
Euv Exposure Apparatus With Reflective Elements Having Reduced Influence Of Temperature Variation App 20170315449 - Baer; Norman ; et al.	2017-11-02
Optical apparatus with adjustable action of force on an optical module Grant 9,766,549 - Kwan September 19, 2	2017-09-19
EUV exposure apparatus with reflective elements having reduced influence of temperature variation Grant 9,746,778 - Baer , et al. August 29, 2	2017-08-29
Lens Comprising A Plurality Of Optical Element Disposed In A Housing App 20170199465 - Kwan; Yim-Bun Patrick	2017-07-13
Lithographic apparatus and device manufacturing method Grant 9,696,630 - Van Der Wijst , et al. July 4, 2	2017-07-04
Projection Exposure Apparatus With Near-field Manipulator App 20170052453 - Deufel; Peter ; et al.	2017-02-23
Lens comprising a plurality of optical element disposed in a housing Grant 9,551,940 - Kwan January 24, 2	2017-01-24
Optical Imaging Arrangement With Multiple Metrology Support Units App 20170017164 - Kwan; Yim-Bun Patrick	2017-01-19
Microlithographic projection exposure apparatus Grant 9,535,336 - Bleidistel , et al. January 3, 2	2017-01-03
Vibration-compensated Optical System, Lithography Apparatus And Method App 20160349623 - Kwan; Yim-Bun Patrick ; et al.	2016-12-01
Optical imaging arrangement with individually actively supported components Grant 9,477,092 - Kwan October 25, 2	2016-10-25
Diaphragm Changing Device App 20160282724 - Bieg; Hermann ; et al.	2016-09-29
Method And Device For Monitoring Multiple Mirror Arrays In An Illumination System Of A Microlithographic Projection Exposure Apparatus App 20160266502 - Xalter; Stefan ; et al.	2016-09-15
Optical arrangement and microlithographic projection exposure apparatus including same Grant 9,436,101 - Schoeppach , et al. September 6, 2	2016-09-06
Euv Exposure Apparatus With Reflective Elements Having Reduced Influence Of Temperature Variation App 20160195818 - Baer; Norman ; et al.	2016-07-07
Optical system for semiconductor lithography Grant 9,383,544 - Melzer , et al. July 5, 2	2016-07-05
Optical element with low surface figure deformation Grant 9,366,976 - Kwan June 14, 2	2016-06-14
EUV exposure apparatus with reflective elements having reduced influence of temperature variation Grant 9,316,929 - Baer , et al. April 19, 2	2016-04-19
Low-contamination optical arrangement Grant 9,316,930 - Kwan , et al. April 19, 2	2016-04-19
Optical arrangement in a projection exposure apparatus for EUV lithography Grant 9,298,111 - Kulitzki , et al. March 29, 2	2016-03-29
Lens Comprising A Plurality Of Optical Element Disposed In A Housing App 20160041473 - Kwan; Yim-Bun Patrick	2016-02-11
Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus Grant 9,239,229 - Xalter , et al. January 19, 2	2016-01-19
Lithographic Apparatus and Device Manufacturing Method App 20160004170 - VAN DER WIJST; Marc Wilhelmus Maria ; et al.	2016-01-07
Method And Device For Monitoring Multiple Mirror Arrays In An Illumination System Of A Microlithographic Projection Exposure Apparatus App 20150300807 - Xalter; Stefan ; et al.	2015-10-22
Lithographic apparatus and device manufacturing method Grant 9,134,632 - Van Der Wijst , et al. September 15, 2	2015-09-15
Optical Apparatus With Adjustable Action Of Force On An Optical Module App 20150227055 - Kwan; Yim-Bun Patrick	2015-08-13
Lens comprising a plurality of optical element disposed in a housing Grant 9,097,985 - Kwan August 4, 2	2015-08-04
Optical imaging arrangement with vibration decoupled support units Grant 9,030,647 - Kwan , et al. May 12, 2	2015-05-12
Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus Grant 9,019,475 - Xalter , et al. April 28, 2	2015-04-28
Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus Grant 9,013,684 - Xalter , et al. April 21, 2	2015-04-21
Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus Grant 9,001,309 - Xalter , et al. April 7, 2	2015-04-07
Optical Imaging Arrangement With Multiple Metrology Support Units App 20150062596 - Kwan; Yim-Bun Patrick ; et al.	2015-03-05
Optical apparatus with adjustable action of force on an optical module Grant 8,964,165 - Kwan February 24, 2	2015-02-24
Microlithographic Projection Exposure Apparatus App 20140333912 - Bleidistel; Sascha ; et al.	2014-11-13
EUV lithography device and method for processing an optical element Grant 8,885,141 - Singer , et al. November 11, 2	2014-11-11
Lens Comprising A Plurality Of Optical Element Disposed In A Housing App 20140293253 - Kwan; Yim-Bun Patrick	2014-10-02
Optical Module For A Microlithography Objective Holding And Supporting Devices App 20140268381 - Kugler; Jens ; et al.	2014-09-18
Optical Module For An Objective App 20140254036 - Kugler; Jens ; et al.	2014-09-11
Method And Device For Monitoring Multiple Mirror Arrays In An Illumination System Of A Microlithographic Projection Exposure Apparatus App 20140233006 - Xalter; Stefan ; et al.	2014-08-21
Method And Device For Monitoring Multiple Mirror Arrays In An Illumination System Of A Microlithographic Projection Exposure Apparatus App 20140226141 - Xalter; Stefan ; et al.	2014-08-14
Method For Controlling A Motion Of Optical Elements In Lithography Systems App 20140204354 - Kwan; Yim-Bun Patrick ; et al.	2014-07-24
Optical Imaging Arrangement With Vibration Decoupled Support Units App 20140185029 - Kwan; Yim-Bun Patrick ; et al.	2014-07-03
Microlithographic projection exposure apparatus Grant 8,767,176 - Bleidistel , et al. July 1, 2	2014-07-01
Optical Imaging Arrangement With Individually Actively Supported Components App 20140176927 - Kwan; Yim-Bun Patrick	2014-06-26
Lens comprising a plurality of optical element disposed in a housing Grant 8,717,534 - Kwan May 6, 2	2014-05-06
Optical module for a microlithography objective including holding and supporting devices Grant 8,711,331 - Kugler , et al. April 29, 2	2014-04-29
Optical imaging device with determination of imaging errors Grant 8,587,765 - Kwan November 19, 2	2013-11-19
Optical assembly Grant 8,570,676 - Bieg , et al. October 29, 2	2013-10-29
EUV Exposure Apparatus App 20130141707 - Baer; Norman ; et al.	2013-06-06
Optical imaging arrangement Grant 8,416,392 - Kwan April 9, 2	2013-04-09
Optical System For Semiconductor Lithography App 20120327385 - Melzer; Frank ; et al.	2012-12-27
Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus Grant 8,339,577 - Xalter , et al. December 25, 2	2012-12-25
Method And Device For Monitoring Multiple Mirror Arrays In An Illumination System Of A Microlithographic Projection Exposure Apparatus App 20120293784 - Xalter; Stefan ; et al.	2012-11-22
Arrangement For The Vibration Isolation Of A Pay Load App 20120241268 - Laro; Dick Antonius Hendrikus ; et al.	2012-09-27
Optical system for semiconductor lithography Grant 8,269,947 - Melzer , et al. September 18, 2	2012-09-18
Optical Apparatus For Use In Photolithography App 20120194793 - Kwan; Yim-Bun Patrick ; et al.	2012-08-02
Optical Arrangement In A Projection Exposure Apparatus For Euv Lithography App 20120188523 - Kulitsky; Viktor ; et al.	2012-07-26
Optical Arrangement And Microlithographic Projection Exposure Apparatus Including Same App 20120182533 - Schoeppach; Armin ; et al.	2012-07-19
Lithographic Apparatus and Device Manufacturing Method App 20120154774 - VAN DER WIJST; Marc Wilhelmus Maria ; et al.	2012-06-21
Optical Element With Low Surface Figure Deformation App 20120140328 - Kwan; Yim-Bun Patrick	2012-06-07
Diaphragm Changing Device App 20120075611 - Bieg; Hermann ; et al.	2012-03-29
Diaphragm changing device Grant 8,089,707 - Bieg , et al. January 3, 2	2012-01-03
Optical apparatus for use in photolithography Grant 8,072,700 - Kwan , et al. December 6, 2	2011-12-06
Calibration of a position measuring device of an optical device Grant 8,065,103 - Kwan November 22, 2	2011-11-22
EUV Lithography Device and Method For Processing An Optical Element App 20110279799 - Singer; Wolfgang ; et al.	2011-11-17
Housing structure Grant 8,018,664 - Xalter , et al. September 13, 2	2011-09-13
Housing Structure App 20110216428 - Xalter; Stefan ; et al.	2011-09-08
Low-contamination Optical Arrangement App 20110194091 - Kwan; Yim-Bun Patrick ; et al.	2011-08-11
Device consisting of at least one optical element Grant 7,995,884 - Kwan , et al. August 9, 2	2011-08-09
Optical Assembly App 20110181857 - Bieg; Hermann ; et al.	2011-07-28
Microlithographic Projection Exposure Apparatus App 20110181852 - Bleidistel; Sascha ; et al.	2011-07-28
Optical element module Grant 7,986,472 - Kugler , et al. July 26, 2	2011-07-26
Lithographic apparatus, device manufacturing method and device manufactured thereby Grant 7,940,392 - Kwan May 10, 2	2011-05-10
Optical assembly Grant 7,929,227 - Bieg , et al. April 19, 2	2011-04-19
Optical Apparatus With Adjustable Action Of Force On An Optical Module App 20110085239 - Kwan; Yim-Bun Patrick	2011-04-14
Lens Comprising A Plurality Of Optical Element Disposed In A Housing App 20110051110 - Kwan; Yim-Bun Patrick	2011-03-03
Optical Imaging Arrangement App 20110001949 - Kwan; Yim-Bun Patrick	2011-01-06
Composite Body App 20100284652 - Morrison; Fraser ; et al.	2010-11-11
Optical Assembly App 20100271607 - Bieg; Hermann ; et al.	2010-10-28
Optical imaging arrangement Grant 7,817,248 - Kwan October 19, 2	2010-10-19
Calibration Of A Position Measuring Device Of An Optical Device App 20100235127 - Kwan; Yim-Bun Patrick	2010-09-16
Optical assembly Grant 7,791,826 - Bieg , et al. September 7, 2	2010-09-07
Reflecting optical element with eccentric optical passageway Grant 7,760,327 - Scherle , et al. July 20, 2	2010-07-20
Diaphragm Changing Device App 20100134777 - Bieg; Hermann ; et al.	2010-06-03
Structure for use in a projection exposure system for manufacturing semiconductors Grant 7,692,881 - Kwan , et al. April 6, 2	2010-04-06
Imaging Device With Exchangeable Diaphragms And Method Therefor App 20100066990 - Bieg; Hermann ; et al.	2010-03-18
Method And Device For Monitoring Multiple Mirror Arrays In An Illumination System Of A Microlithographic Projection Exposure Apparatus App 20100039629 - Xalter; Stefan ; et al.	2010-02-18
Method For Improving Imaging Properties Of An Optical System, And Such An Optical System App 20100014065 - Gruner; Toralf ; et al.	2010-01-21
Device Consisting Of At Least One Optical Element App 20090324174 - Kwan; Yim-Bun Patrick ; et al.	2009-12-31
Lithographic Apparatus, Device Manufacturing Method and Device Manufactured Thereby App 20090316124 - Kwan; Yim Bun Patrick	2009-12-24
Calibrating a lithographic apparatus Grant 7,633,619 - Kwan December 15, 2	2009-12-15
Housing Structure App 20090303626 - Xalter; Stefan ; et al.	2009-12-10
Device consisting of at least one optical element Grant 7,603,010 - Kwan , et al. October 13, 2	2009-10-13
Actuator device Grant 7,589,921 - Kwan , et al. September 15, 2	2009-09-15
Optical System For Semiconductor Lithography App 20090207396 - Melzer; Frank ; et al.	2009-08-20
Support For An Optical Element App 20090185148 - Kwan; Yim-Bun Patrick ; et al.	2009-07-23
Lithographic apparatus, device manufacturing method and device manufactured thereby Grant 7,561,270 - Kwan July 14, 2	2009-07-14
Optical System For Semiconductor Lithography App 20090135395 - Melzer; Frank ; et al.	2009-05-28
Optical Imaging Device With Determination Of Imaging Errors App 20090091727 - Kwan; Yim-Bun Patrick	2009-04-09
Actuator Device App 20090052066 - Kwan; Yim-Bun Patrick ; et al.	2009-02-26
Calibrating A Lithographic Apparatus App 20080309950 - KWAN; Yim Bun Patrick	2008-12-18
Optical subassembly and projection objective in semiconductor lithography Grant 7,448,763 - Frommeyer , et al. November 11, 2	2008-11-11
Optical Imaging Arrangement App 20080212083 - Kwan; Yim-Bun Patrick	2008-09-04
Optical Module for an Objective App 20080198352 - Kugler; Jens ; et al.	2008-08-21
Optical Assembly Structure Comprising a Connecting Body with Thermal Expansion Compensations Means App 20080193201 - Kwan; Yim-Bun Patrick ; et al.	2008-08-14
Optical Assembly App 20080170303 - Bieg; Hermann ; et al.	2008-07-17
Positioning device having two object holders Grant RE40,043 - Kwan , et al. February 5, 2	2008-02-05
Support structure for temporarily supporting a substrate App 20070285647 - Kwan; Yim-Bun Patrick ; et al.	2007-12-13
Lithographic apparatus, device manufacturing method and device manufacturing thereby Grant 7,289,212 - Kwan October 30, 2	2007-10-30
Housing structure for mounting optical elements App 20070165311 - Kwan; Yim-Bun Patrick ; et al.	2007-07-19
Optical element module App 20070146906 - Kugler; Jens ; et al.	2007-06-28
Optical assembly for photolithography App 20070076184 - Kwan; Yim-Bun Patrick ; et al.	2007-04-05
Diaphragm changing device App 20070053076 - Bieg; Hermann ; et al.	2007-03-08
Device consisting of at least one optical element App 20070047876 - Kwan; Yim-Bun Patrick ; et al.	2007-03-01
Optical subassembly and projection objective in semiconductor lithography App 20070014037 - Frommeyer; Andreas ; et al.	2007-01-18
Reflecting optical element with eccentric optical passageway App 20060262704 - Scherle; Hans-Jurgen ; et al.	2006-11-23
Composite body App 20060192328 - Morrison; Fraser ; et al.	2006-08-31
Device manufacturing method, device manufactured thereby and lithographic apparatus therefor Grant 7,081,945 - Kwan July 25, 2	2006-07-25
Balanced positioning system for use in lithographic apparatus App 20050206865 - Kwan, Yim Bun Patrick ; et al.	2005-09-22
Lithographic apparatus, device manufacturing method and device manufacturing thereby App 20040263846 - Kwan, Yim Bun Patrick	2004-12-30
Lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 6,819,425 - Kwan November 16, 2	2004-11-16
Method for calibrating a lithographic projection apparatus and apparatus capable of applying such a method Grant 6,710,849 - Kwan , et al. March 23, 2	2004-03-23
Device manufacturing method, device manufactured thereby and lithographic apparatus therefor App 20030198787 - Kwan, Yim Bun Patrick	2003-10-23
Chip removal apparatus, chip removal system, fitting system and method of removing chips from a wafer App 20030161711 - Kwan, Yim Bun Patrick	2003-08-28
Lithographic apparatus, device manufacturing method, and device manufactured thereby App 20020041380 - Kwan, Yim Bun Patrick	2002-04-11
Method for calibrating a lithographic projection apparatus and apparatus capable of applying such a method App 20020026878 - Kwan, Yim Bun Patrick ; et al.	2002-03-07
Gas bearing and lithographic apparatus including such a bearing Grant 6,296,990 - Kwan October 2, 2	2001-10-02

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