U.S. patent application number 13/108549 was filed with the patent office on 2011-09-08 for housing structure.
This patent application is currently assigned to CARL ZEISS SMT GMBH. Invention is credited to Paul Peter Anne Brom, Peter Deufel, Yim Bun Patrick Kwan, Herman Soemers, Bernard Stommen, Franz Van Deuren, Stefan Xalter.
Application Number | 20110216428 13/108549 |
Document ID | / |
Family ID | 34894865 |
Filed Date | 2011-09-08 |
United States Patent
Application |
20110216428 |
Kind Code |
A1 |
Xalter; Stefan ; et
al. |
September 8, 2011 |
HOUSING STRUCTURE
Abstract
A housing structure has a frame structure 1 on which there are
arranged via connecting elements 7 several optical elements 5 which
are held in mounts 6 or structural modules 6'. The optical elements
5 are detachably connected to the frame structure 1 with their
mounts 6 or structural modules 6' and connecting elements 7 in such
a way that in the installed state they are integrated as bearing
units in the frame structure 1.
Inventors: |
Xalter; Stefan; (Oberkochen,
DE) ; Deufel; Peter; (Koenigsbronn, DE) ;
Kwan; Yim Bun Patrick; (Aalen, DE) ; Stommen;
Bernard; (HK Geldrop, NL) ; Soemers; Herman;
(NP Mierlo, NL) ; Van Deuren; Franz; (AH
Valkenswaard, NL) ; Brom; Paul Peter Anne; (RG
Eindhoven, NL) |
Assignee: |
CARL ZEISS SMT GMBH
Oberkochen
DE
|
Family ID: |
34894865 |
Appl. No.: |
13/108549 |
Filed: |
May 16, 2011 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
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10598014 |
May 5, 2009 |
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PCT/EP2004/004235 |
Apr 20, 2004 |
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13108549 |
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Current U.S.
Class: |
359/871 |
Current CPC
Class: |
G02B 7/182 20130101;
G02B 7/00 20130101; G03F 7/70825 20130101; G01M 11/04 20130101;
G03F 7/70808 20130101 |
Class at
Publication: |
359/871 |
International
Class: |
G02B 7/182 20060101
G02B007/182 |
Foreign Application Data
Date |
Code |
Application Number |
Feb 26, 2004 |
DE |
10 2004 009 243.5 |
Claims
1.-14. (canceled)
15. A housing, comprising: a frame structure comprising a plurality
of frame parts including a first frame part and a second frame part
that is laterally opposite the first frame part; a structural
module connecting the first and second frame parts; and a first
optical element carried by the structural module, wherein the
housing is an EUV microlithography projection objective housing
16. The housing of claim 15, wherein the structural module is
partially disposed in openings between frame parts, or the
structural module disposed is in an opening in one of the frame
parts.
17. The housing of claim 15, further comprising a mount, wherein
the mount is disposed in an opening between frame parts, or the
mount is disposed in an opening in one of the frame parts.
18. The housing of claim 17, further comprising a second optical
element, wherein the second optical element is carried by the
mount.
19. The housing of claim 18, wherein the frame parts, the
structural module and the mount have at least approximately the
same coefficient of thermal expansion.
20. The housing of claim 18, wherein the frame parts, the
structural module and the mount comprise a glass ceramic.
21. The housing of claim 18, further comprising an actuator between
the mount and the second optical element.
22. The housing of claim 18, further comprising a plurality of
actuators between the mount and the second optical element, the
plurality of actuators being configured to adjust a position of the
second optical element in six degrees of freedom.
23. The housing of claim 21, further comprising a gravity
compensator between the mount and the second optical element.
24. The housing of claim 15, wherein the structural element is
rigidly connected to the first and second frame parts in six
degrees of freedom.
25. The housing of claim 15, wherein the first frame part, the
second frame part and the structural module have at least
approximately the same coefficient of thermal expansion.
26. The housing of claim 15, wherein the first frame part, the
second frame part and the structural module comprise a glass
ceramic.
27. The housing of claim 15, wherein the structural module is
connected to the frame structure via a connecting point which is
inflexible in one degree of freedom and flexible in other degrees
of freedom.
28. A housing, comprising: a frame structure; a member selected
from the group consisting of a mount and a structural module, the
member being connected to the frame structure via a first
connecting point, the first connection point being inflexible in
one degree of freedom and flexible in all other degrees of freedom;
and an optical element carried by the member, wherein the housing
is an EUV microlithography projection objective housing.
29. The housing of claim 28, wherein the member is connected to the
frame structure by multiple connecting points including the first
connecting point.
30. The housing of claim 29, wherein, for each connecting point,
the connecting point is inflexible in one degree of freedom and
flexible in other degrees of freedom.
31. The housing of claim 28, wherein the frame structure and the
member have at least approximately the same coefficient of thermal
expansion.
32. The housing of claim 28, wherein the frame structure and the
member comprise a glass ceramic.
33. The housing of claim 28, further comprising an actuator between
the member and the optical element.
34. The housing of claim 28, further comprising a plurality of
actuators between the mount and the optical element, the plurality
of actuators being configured to adjust a position the optical
element in six degrees of freedom.
35. The housing of claim 34, further comprising a gravity
compensator between the member and the optical element.
36. The housing of claim 28, wherein the member comprises a second
mount.
37. The housing of claim 36, wherein the frame structure comprises
a plurality of frame parts, the second mount is disposed in an
opening between frame parts, or the second mount is disposed in an
opening in one of the frame parts.
38. The housing of claim 28, wherein the frame structure comprises
a plurality of frame parts, and the structural module is disposed
in openings between frame parts.
39. The housing of claim 28, wherein the frame structure comprises
a first frame part and a second frame part laterally opposed to the
first frame part, and the member connects laterally opposed frame
parts.
40. The housing of claim 28, wherein the frame structure comprises
a plurality of frame parts.
41. A housing, comprising: a frame structure comprising two frame
parts; a first member connected to the two frame parts; a second
member connected to one of the two frame parts; and an optical
element carried by at least one member selected from the group
consisting of the first member and the second member, wherein: the
first and second members are selected from the group consisting of
a mount and a structural module, and the housing is an EUV
microlithography projection objective housing.
42. The housing of claim 41, wherein one of the first and second
members is connected to the frame structure via a first connecting
point, the first connection point is inflexible in one degree of
freedom, and the first connection point is flexible in all other
degrees of freedom.
43. The housing of claim 42, wherein the member that is connected
to the frame structure via the first connecting point is connected
to the frame structure by multiple connecting points including the
first connecting point.
44. The housing of claim 43, wherein, for each connecting point,
the connecting point is inflexible in one degree of freedom and
flexible in other degrees of freedom.
45. The housing of claim 41, wherein the frame structure, the first
member and the second member have at least approximately the same
coefficient of thermal expansion.
46. The housing of claim 41, wherein the frame structure, the first
member and the second member comprise a glass ceramic.
47. The housing of claim 41, further comprising an actuator between
the optical element and one of the members.
48. The housing of claim 47, further comprising a plurality of
actuators between the mount and the optical element, the plurality
of actuators being configured to adjust a position the optical
element in six degrees of freedom.
49. The housing of claim 48, further comprising a gravity
compensator between the optical element and one of the members.
50. The housing of claim 41, wherein the first frame part and the
second frame part are arranged laterally opposed to each other, and
one of the members connects the laterally opposed frame parts.
51. The housing of claim 41, wherein the first member is disposed
in an opening between frame parts, or the first member is disposed
in an opening of the two frame parts.
Description
BACKGROUND OF THE INVENTION
[0001] 1. Field of the Invention
[0002] The invention relates to a housing structure which has a
frame structure on which there are arranged via connecting elements
several optical elements which are held in mounts or structural
modules.
[0003] 2. Description of the Prior Mt
[0004] A housing structure of this type is described, for example,
in EP 1 278 089 A2. It has frame parts and connecting plates on
which several optical elements are fastened, bores or openings
being provided in part for this purpose. The housing structure
forms a stable self-supporting unit. Appropriate auxiliary
constructions with fastening elements are required for fastening
the optical elements with their mounts or structural modules. The
mounting is relatively complicated, and an additional installation
space is required for the connection. The optical elements
connected to the frame structure constitute virtually separate
parts on the housing structure and have little dynamic influence on
the housing structure. Moreover, thermal influences and influences
of internal stress are difficult to calculate.
SUMMARY OF THE INVENTION
[0005] The object of the present invention is to avoid the
above-named disadvantages of the prior art, in particular to create
a housing structure, there being a simpler and reproducible
connection between the housing structure and the optical elements
arranged therein.
[0006] This object is achieved according to the invention when the
optical elements are detachably connected to the frame structure
with their mounts or structural modules and connecting elements in
such a way that in the installed state they are integrated as
bearing units in the frame structure.
[0007] The inventive design results in a uniform mechanical support
structure both for the housing structure with its frame structure,
and for the optical elements with their mounts and structural
modules in addition to connecting elements. The optical elements
therefore make a kinematic contribution to the stability or
stiffness of the housing structure. This means that without the
optical elements inserted the housing structure alone is not
self-supporting or sufficiently stable, but that an integral
load-bearing unit results after installation of the optical
elements.
[0008] In addition to a saving of material and weight and of
installation space, a clearer and reproducible connection is
created in this way between the frame structure and the optical
elements. The individual optical elements, which are arranged
either individually in a mount, or else in subgroups or in
structural modules, can be separately constructed, preadjusted and
tested and be installed in the frame structure as appropriately
prefabricated units only after this, and be appropriately adjusted
in the process.
[0009] The optical elements are preferably supported in
kinematically determined fashion. This can be performed, for
example, by setting members which can be adjusted in six degrees of
freedom. A hexapod, for example, is suitable for this purpose.
BRIEF DESCRIPTION OF THE DRAWINGS
[0010] Further advantageous refinements and developments emerge
from the subclaims and from the following exemplary embodiments
described in principle with the aid of the drawings, in which:
[0011] FIG. 1 shows an illustration of the principle of a housing
structure with an inserted optical element;
[0012] FIG. 2 shows a further configuration of a frame structure
with a multiplicity of optical elements;
[0013] FIG. 3 shows a detail of the housing structure with an
optical element supported in a mount;
[0014] FIG. 4 shows a frame structure in an exploded fashion;
and
[0015] FIGS. 5-8 show various mounts/structural modules with
fastening points.
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
[0016] The housing structure illustrated in FIGS. 1 and 2 has a
frame structure 1 which is assembled from several frame parts 2 and
reinforcing plates 3. The frame structure 1 is provided with a
multiplicity of cutouts or openings 4. Optical elements 5 with
their mounts 6 are inserted into the openings 4. Connecting
elements 7 (not illustrated in more detail) are provided for this
purpose. Setting members or actuators 8 are arranged between the
mount 6, which can be constructed as a base element, and the
optical element 5, for example, a mirror 5. The arrangement and
configuration of the setting members 8 are not described in more
detail below, since they are known in principle. The setting
members 8 should as far as possible permit adjustments of the
optical element 5 in six degrees of freedom, and can be constructed
for this purpose as hexapods, for example.
[0017] FIG. 2 shows a housing structure which can be, for example,
an objective housing 9 of a projection objective in
microlithography, as is described, for example, in more detail in
EP 1 278 089 A2. The projection objective 9 can be provided, for
example, for EUV lithography for which extremely high demands are
placed on accuracy. In this case, the optical elements constitute
mirrors 5, for example, "5'" indicating a stop. As may be seen from
FIG. 1 in the upper area, and from FIG. 2, a multiplicity of
optical elements 5 with their mounts 6 are inserted into the
openings 4 in the frame structure 1. The connecting elements 7 and
the mounts 6 are configured in such a way that in the illustrated
installed state of the optical elements 5 with their mounts 6 these
form a bearing unit with the frame structure 1 or are integrated in
the latter in such a way that a stable unit of great rigidity is
created in this way.
[0018] FIG. 3 shows in an enlarged illustration a detail of the
frame structure 1 with a frame part 2 to which the mount 6 of the
optical element, constructed as a mirror 5, for example, is
connected via adapting elements (spacer) 10. A gravity compensator
11 can be arranged between the optical element 5 and the mount 6.
The gravity compensator 11 serves the purpose of reducing the
weight of the optical element 5 so that the setting members or
actuators 8 need to apply smaller forces in order to adjust the
optical element 5. Lorenz actuators or piezoelectric elements, for
example, can be provided as actuators 8. One or more actuators are
provided in each case as setting members 8 for the purpose of
adjusting an optical element 5. Furthermore, the mount 6 is
provided with sensors 12 for determining the position of the
optical element 5. The application U.S. 60/502,334 contains further
information on this. It is a part of this application in its
entirety.
[0019] Instead of simple mounts 6 for each optical element 5, it is
also possible, of course, to provide structural modules 6' as
so-called subgroups, if required, several optical elements 5 being
held in a structural module, as is indicated, for example, in FIG.
2 by the structural module 6'. As may be seen, in this case the
structural module 6' provides a transverse connection between the
laterally opposite frame parts 2, and lends the frame structure 9 a
high degree of stability in this way.
[0020] The frame parts 2 of the frame structure 1, the mounts 6 and
the structural modules 6' should consist of a material with at
least approximately the same coefficients of thermal expansion so
that no internal stresses are introduced, particularly in the case
of the occurences of heating that occur in EUV lithography. For the
same reason, materials with very low coefficients of thermal
expansion should also be used such as, for example, glass ceramics
(Zerodur.RTM. from Schott Glas).
[0021] FIG. 4 shows a frame structure 9 in a modification of FIG.
2. As may be seen, the frame structure 9 is split into several
parts, the optical elements with their mounts 6 or structural
modules 6' being integrated in the individual components. After
appropriate preadjustment, the individual components 9 are then
combined in relation to the frame structure 9 so as to form an
integral bearing unit.
[0022] Various examples of mounts 6 and/or structural modules are
illustrated in FIGS. 5 to 8, with in each case six fastening points
for connecting to the frame structure 1. The optical elements 5,
which are respectively connected to the mount 6 via actuators 8,
are not illustrated here.
[0023] The arrows indicate the degree of freedom with which a
connecting point is respectively rigidly connected to the frame
structure 1. The connecting point is formed to be "softly" in the
respective other directions or degrees of freedom. This
configuration leads to a so-called kinematic bearing with six
degrees of freedom and six supported directions.
[0024] As illustrated by the arrows 13, the support directions will
advantageously be selected in this case in such a way that they lie
respectively in the plane of an associated plate or strut of the
frame structure 1.
[0025] The course of the arrows 13, and thus of the force
direction, is therefore determined in each case by the position
and/or site of installation on the frame structure 1, and by the
course of the frame structure or frame strut or frame plate at this
point.
[0026] The six degrees of freedom relate to translations in three
coordinate directions, and to rotations about each of the three
axes of rotation laid through their centroid. This means that in
total six movements are possible, specifically linear movements in
terms of the three components in the axial direction of the spatial
coordinate system, and rotary movements in terms of the three
components of the rotation about the three axes of rotation.
[0027] FIGS. 5 to 8 respectively show the same principle of
connection with the force directions. The directions of the arrows
13 for the six degrees of freedom are a function only of the
position of installation, which is shown in FIGS. 5 to 8 only by
way of example for different positions.
* * * * *