Deufel; Peter
Patent Applications and Registrations
Patent applications and USPTO patent grants for Deufel; Peter.The latest application filed is for "method and device for the correction of imaging defects".
- Deufel; Peter - Koenigsbronn DE
- Deufel; Peter - Aalen DE
- Deufel; Peter - Konigsbronn DE
- Deufel; Peter - Aallen DE
| Patent | Date |
|---|---|
| Method and device for the correction of imaging defects Grant 11,003,088 - Sorg , et al. May 11, 2 | 2021-05-11 |
| Method And Device For The Correction Of Imaging Defects App 20200233314 - Sorg; Franz ; et al. | 2020-07-23 |
| Method and device for the correction of imaging defects Grant 10,620,543 - Sorg , et al. | 2020-04-14 |
| Connection arrangement for a force-fit connection between ceramic components Grant 10,571,813 - Siegmanski , et al. Feb | 2020-02-25 |
| Method And Device For The Correction Of Imaging Defects App 20190302627 - Sorg; Franz ; et al. | 2019-10-03 |
| Projection exposure apparatus with near-field manipulator Grant 10,108,094 - Deufel , et al. October 23, 2 | 2018-10-23 |
| Connection Arrangement For A Force-fit Connection Between Ceramic Components App 20170184982 - Siegmanski; Karsten ; et al. | 2017-06-29 |
| Projection Exposure Apparatus With Near-field Manipulator App 20170052453 - Deufel; Peter ; et al. | 2017-02-23 |
| Method for replacing objective parts Grant 9,551,944 - Geuppert , et al. January 24, 2 | 2017-01-24 |
| Optical arrangement in a projection exposure apparatus for EUV lithography Grant 9,298,111 - Kulitzki , et al. March 29, 2 | 2016-03-29 |
| Method And Device For The Correction Of Imaging Defects App 20160026094 - Sorg; Franz ; et al. | 2016-01-28 |
| Method and Device for Replacing Objective Parts App 20140359990 - Geuppert; Bernhard ; et al. | 2014-12-11 |
| Optical Arrangement In A Projection Exposure Apparatus For Euv Lithography App 20120188523 - Kulitsky; Viktor ; et al. | 2012-07-26 |
| Method And Device For The Correction Of Imaging Defects App 20120176591 - Sorg; Franz ; et al. | 2012-07-12 |
| Method and device for the correction of imaging defects Grant 8,159,648 - Sorg , et al. April 17, 2 | 2012-04-17 |
| Housing structure Grant 8,018,664 - Xalter , et al. September 13, 2 | 2011-09-13 |
| Housing Structure App 20110216428 - Xalter; Stefan ; et al. | 2011-09-08 |
| Optical element module Grant 7,986,472 - Kugler , et al. July 26, 2 | 2011-07-26 |
| Lithographic apparatus, device manufacturing method and exchangeable optical element Grant 7,724,351 - Loopstra , et al. May 25, 2 | 2010-05-25 |
| Housing Structure App 20090303626 - Xalter; Stefan ; et al. | 2009-12-10 |
| Method And Device For Replacing Objective Parts App 20090260654 - Geuppert; Bernhard ; et al. | 2009-10-22 |
| Method And Device For The Correction Of Imaging Defects App 20080316444 - Sorg; Franz ; et al. | 2008-12-25 |
| Lithographic apparatus and method App 20080073596 - Derksen; Antonius Theodorus Anna Maria ; et al. | 2008-03-27 |
| Lithographic apparatus, device manufacturing method and exchangeable optical element App 20070177122 - Loopstra; Erik Roelof ; et al. | 2007-08-02 |
| Optical element module App 20070146906 - Kugler; Jens ; et al. | 2007-06-28 |
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